JP2006250636A - Transfer device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mechanical transfer device capable of high speed precise and smooth scan, and transferring and scanning also eliminating generation of creeping phenomena at the stopping time, and capable of compatibility of high-speed scanning and high precision positioning for securing precision of dynamic positioning. <P>SOLUTION: The transfer device is composed of: 2 pairs of driving shaft mechanisms (205A, 206A-1, 205B and 206B-1 etc. ) provided parallel in a direction transferring the scanning stage 211; 2 pairs of position detecting mechanisms (213A and 213B), provided with each of the 2 pairs of driving shaft mechanisms respectively; and the controller 33 etc. , for controlling the action of the 2 pair driving shaft mechanisms. The controller etc. are constituted, such that the deviation d of each driving position between 2 pairs of driving shaft mechanisms is maintained, by driving and controlling at least at the time of the stationary time of the scanning stage. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a moving apparatus, and more particularly, to a mechanical moving apparatus suitable for moving a sample or an apparatus at high speed and with high accuracy according to a situation.

  A sample stage such as a scanning probe microscope is known as an example of the moving device. In a scanning probe microscope, a sample such as a semiconductor device manufacturing substrate is placed on a sample stage, and a measurement system including a cantilever equipped with a probe is provided above the sample. In general, the sample is moved by the sample stage, while the probe is moved by a fine movement mechanism included in the measurement system. When a specific area on the surface of the sample is measured by the probe, the positional relationship between the sample and the probe is relatively changed based on the sample stage or the fine movement mechanism, thereby scanning the surface of the sample with the probe. The probe measures at each measurement point (sampling point) on the surface of the sample, and the physical quantity obtained by the measurement at each measurement point is stored and recorded in association with the position information of each measurement point.

  Various driving means such as a piezoelectric element, a voice coil, and a mechanical scanning mechanism are used for driving the sample stage of the scanning probe microscope. In general, a mechanical scanning mechanism is often used in a relatively wide range where the scanning range is on the order of millimeters (mm) or more.

  Next, the mechanical scanning mechanism will be described in detail as a scanning mechanism for movement. Here, as a typical example, the configuration and problems of the mechanical scanning mechanism of the sample stage described above, and a single-axis mechanical scanning mechanism for moving in a specific single-axis direction for the purpose of simplifying the explanation. Explain the point.

  In the single-axis mechanical scanning mechanism, a driving shaft and a driven shaft are arranged in parallel with a predetermined distance on a table serving as a base, and a moving direction with respect to these driving shaft and driven shaft. A moving stage is attached so that it may be guided to. The drive shaft is connected to the motor, and when the rotational driving force of the motor is received, the moving stage is moved by the rotational driving force and the screw mechanism. When the moving stage moves with the driving force of the driving shaft, the driven shaft only guides the moving stage in a free state in the moving direction as the moving stage moves.

  According to the mechanical scanning mechanism having the above-described configuration, when the operation of the drive shaft is stopped after moving the movable stage by an arbitrary distance, a thrust force is applied to the driven shaft side. For this reason, even after the drive shaft stops, a phenomenon occurs in which the position of the moving stage changes due to the thrust force applied to the driven shaft when the drive shaft is stationary. This phenomenon is called “creep phenomenon at rest” and adversely affects the positioning accuracy in the mechanical scanning mechanism.

  Regarding the arrangement relationship between the drive shaft and the driven shaft on the above table, even when the drive shaft is located at the center and the driven shaft is arranged on both sides of the drive shaft, Although it is smaller than the above configuration, a similar thrust force is generated, and a creep phenomenon occurs at rest.

  Regarding the mechanical scanning mechanism described above, the specifications of each component generally have a trade-off relationship between a scanning mechanism for performing high-speed scanning and a scanning mechanism for performing high-precision positioning. It is. An example of the specification of each component is, for example, the resolution of an encoder that measures the lead and movement distance of a ball screw. Therefore, it is generally very difficult to achieve both high-speed scanning and high-precision positioning.

  Furthermore, in the parallel guide mechanism in which the drive shaft and the driven shaft are arranged in parallel on the table as described above, friction force in the direction opposite to the driven direction and other effects are generated at the driven shaft side portion of the moving stage. To do. This frictional force or the like is not actually constant during the scanning movement, and as a result, it causes a slight vibration, resulting in poor dynamic positioning accuracy. Even if the drive shaft is located at the center of the table, yawing occurs when the actual measurement point is off the drive shaft axis, and the dynamic positioning accuracy is the same. Make it worse.

As described above, the single-axis mechanical scanning mechanism essentially has three problems in its configuration. For solving the third problem, for example, a configuration shown in Patent Document 1 has been proposed. The stage shown in Patent Document 1 is provided with position detection mechanisms at both side positions of the moving stage, so that the moving component in the θ direction due to yawing in addition to the X direction and the Y direction is measured, and the generated error is corrected. It is composed. According to this, it can be expected that the dynamic positioning accuracy is improved to some extent.
JP 60-201412 A

  The conventional scanning mechanism described in Patent Document 1 can improve the dynamic positioning accuracy by correction, but cannot provide a sufficient solution with respect to the first and second problems described above. It is an object of the present invention to solve the first to third problems described above.

  In view of the above problems, the object of the present invention is to eliminate the occurrence of a creep phenomenon at rest, enable both high-speed scanning and high-accuracy positioning, can ensure dynamic positioning accuracy, low creep, An object of the present invention is to provide a mechanical moving device that can perform a smooth scanning movement and the like at high speed and high accuracy.

  In order to achieve the above object, a mobile device according to the present invention is configured as follows.

  The first moving device (corresponding to claim 1) is provided in each of two sets of drive shaft mechanisms provided in parallel to the direction in which the object is moved, and each of these two sets of drive shaft mechanisms. The position detection mechanism and a control unit (such as a controller) that controls the operation of the two sets of drive shaft mechanisms. The control unit is configured to drive each drive position of the two sets of drive shaft mechanisms at least when the moving object is stationary. The two drive shaft mechanisms are configured to drive and control so as to maintain the above deviation.

  The above moving device is used for, for example, an XY stage as a sample stage of a scanning probe microscope. Two motors are used to form two drive shaft mechanisms, and the rotational drive operation of the two motors causes a deviation (d) between each of the two drive shafts of the scanning stage (driven object). In this way, it is possible to eliminate the occurrence of the creep phenomenon at rest. In addition, by positively generating the deviation even during movement, both high-speed scanning and high-precision positioning can be achieved, and dynamic positioning accuracy can be ensured.

  The second moving device (corresponding to claim 2) is preferably characterized in that, in the first device configuration described above, the two sets of drive shaft mechanisms are independently driven and controlled. By independently driving and controlling the two sets of drive shaft mechanisms, the above-described deviation (d) is positively generated, and the effects such as the elimination of the occurrence of the creep phenomenon at rest are exhibited.

  The third moving device (corresponding to claim 3) is preferably characterized in that, in the first device configuration described above, the two drive shaft mechanisms are driven and controlled in synchronization.

  In the fourth moving device (corresponding to claim 4), in each of the above-described device configurations, preferably, the drive position deviation is maintained even when the object to be moved is moved by the drive control of the two sets of drive shaft mechanisms. It is characterized by that. With this configuration, it is possible to perform a high-speed and smooth scanning movement.

  The fifth moving device (corresponding to claim 5) is preferably characterized in that, in the above device configuration, the deviation of the drive positions of the two sets of drive shaft mechanisms is changed according to the operating state.

  According to the present invention, for example, in the scanning movement of the scanning stage of the sample stage of the scanning probe microscope, two sets of driving shaft mechanisms parallel to the scanning direction are provided in advance, and the drive amount by the two sets of driving shaft mechanisms is deviated ( d) can be generated, the creep phenomenon at rest can be suppressed, and the device can be configured by using mechanical parts corresponding to relatively high-speed scanning, and at the time of stationary positioning, stable positioning at a resolution lower than the resolution of the encoder or the like is performed. be able to. Furthermore, by performing synchronous driving while maintaining a certain deviation during the movement of the object to be moved, it is possible to maintain a constant thrust force during the operation, thereby suppressing a small vibration and improving the dynamic positioning accuracy.

  DESCRIPTION OF EMBODIMENTS Preferred embodiments (examples) of the present invention will be described below with reference to the accompanying drawings.

  Based on FIG. 1, a configuration of a main part of a scanning probe microscope (SPM) will be described as an example of an apparatus to which a moving apparatus according to the present invention is applied. This moving device is a scanning mechanism. This scanning probe microscope assumes an atomic force microscope (AFM) as a typical example.

  A sample stage 11 is provided in the lower part of the scanning probe microscope. A sample 12 is placed on the sample stage 11. The sample stage 11 is a mechanism for changing the position of the sample 12 in a three-dimensional coordinate system 13 composed of orthogonal X, Y, and Z axes. The sample stage 11 includes an XY stage 14, a Z stage 15, and a sample holder 16. The sample stage 11 is a sample moving scanning mechanism, and is configured as a coarse movement mechanism that causes displacement (position change) on the sample side.

  On the upper surface of the sample holder 16 of the sample stage 11, the sample 12 having a relatively large area and a thin plate shape is placed and held. The sample 12 is, for example, a substrate or a wafer on which an integrated circuit pattern of a semiconductor device is manufactured on the surface. The sample 12 is fixed on the sample holder 16. The sample holder 16 includes a sample fixing chuck mechanism.

  Specifically, in the sample stage 11, the XY stage 14 is a mechanism for moving the sample on a horizontal plane (XY plane), and the Z stage 15 is a mechanism for moving the sample 12 in the vertical direction. The Z stage 15 is provided on the XY stage 14. The movement distance of the sample stage 11 is, for example, several hundred mm in the XY direction and several tens mm in the Z direction, for example.

  In FIG. 1, on the upper side of the sample 12, as a normal configuration of a scanning probe microscope, an optical microscope and a TV camera (imaging device) (not shown), a cantilever 21 provided with a probe 20 at the tip, and bending and twisting of the cantilever 21 are performed. For example, an optical cantilever displacement detector, a probe, a fine movement mechanism for finely moving the cantilever, and the like are provided.

  The cantilever 21 provided with the probe 20 at the tip is disposed in a state of being close to the sample 12. The cantilever 21 is fixed to the attachment portion 22. The attachment portion 22 is attached to a Z fine movement mechanism 23 that causes a fine movement operation in the Z direction. Further, the Z fine movement mechanism 23 is attached to the lower surface of the support frame 25 of the cantilever displacement detection unit 24.

  The cantilever displacement detector 24 has a configuration in which a laser light source 26 and a light detector 27 are attached to a support frame 25 in a predetermined arrangement relationship. The cantilever displacement detector 24 and the cantilever 21 are held in a certain positional relationship, and the laser light 28 emitted from the laser light source 26 is reflected by the back surface of the cantilever 21 and enters the photodetector 27. The cantilever displacement detector constitutes an optical lever type optical detector. When the cantilever 21 is deformed such as torsion or bending by the optical lever type optical detection device, the displacement due to the deformation can be detected.

  The cantilever displacement detector 24 is attached to the XY fine movement mechanism 29. The XY fine movement mechanism 29 moves the cantilever 21, the probe 20 and the like at a minute distance in the XY axial directions. At this time, the cantilever displacement detector 24 is moved simultaneously, and the positional relationship between the cantilever 21 and the cantilever displacement detector 24 is unchanged.

  As a configuration of the control system, a controller (first control device) 33 and a host control device (second control device) 34 are provided. The controller 33 and the host controller 34 are constructed by a computer system.

  In the controller 33, as a functional unit, a comparison unit 31, a control unit 32, a first drive control unit 41, a second drive control unit 42, an image processing unit 43, a data processing unit 44, an XY scanning control unit 45, and an X drive. A control unit 46, a Y drive control unit 47, and a Z drive control unit 48 are provided. The controller 33 is a control device for driving each part of the scanning probe microscope.

  The control unit 32 forms a feedback loop and has a Z-axis direction feedback control function for realizing, in principle, a measurement mechanism using an atomic force microscope (AFM), for example.

  The comparison unit 31 compares the voltage signal Vd output from the photodetector 27 with a preset reference voltage (Vref), and outputs the deviation signal s1. The control unit 32 generates a control signal s2 so that the deviation signal s1 becomes 0, and gives this control signal s2 to the Z fine movement mechanism 23. Upon receiving the control signal s2, the Z fine movement mechanism 23 adjusts the height position of the cantilever 21, and keeps the distance between the probe 20 and the surface of the sample 12 at a constant distance. The control loop from the photodetector 27 to the Z fine movement mechanism 23 detects the deformation state of the cantilever 21 with the optical lever type optical detection device while scanning the sample surface with the probe 20. This is a feedback servo control loop for maintaining the distance to the sample 12 at a predetermined constant distance determined based on the reference voltage (Vref). By this control loop, the probe 20 is kept at a constant distance from the surface of the sample 12, and when the surface of the sample 12 is scanned in this state, the uneven shape of the sample surface can be measured.

  The first drive control unit 41 and the second drive control unit 42 control the operations of the focusing Z direction moving mechanism unit and the XY direction moving mechanism unit of the optical microscope (not shown).

  The sample surface and the image of the cantilever 21 obtained by the optical microscope are picked up by a TV camera, taken out as image data, and further processed by the image processing unit 43 in the controller 33.

  In the feedback servo control loop including the control unit 32 and the like, the control signal s2 output from the control unit 32 means a height signal of the probe 20 in the scanning probe microscope (atomic force microscope). . Information related to the change in the height position of the probe 20 can be obtained by the height signal of the probe 20, that is, the control signal s2. The control signal s2 including the height position information of the probe 20 is given to the Z fine movement mechanism 23 for driving control as described above, and is taken into the data processing unit 44 in the controller 33.

  The scanning of the sample surface with the probe 20 in the measurement region on the surface of the sample 12 is performed by driving the XY fine movement mechanism 29. The drive control of the XY fine movement mechanism 29 is performed by an XY scanning control unit 45 that provides the XY fine movement mechanism 29 with an XY scanning signal s3.

  The XY stage 14 and the Z stage 15 of the sample stage 11 that is a coarse movement mechanism are driven by an X drive control unit 46 that outputs an X direction drive signal, a Y drive control unit 47 that outputs a Y direction drive signal, and a Z direction. Control is performed based on a Z drive control unit 48 that outputs a drive signal.

  The controller 33 includes a storage unit (not shown) that stores and saves the set control data, the input optical microscope image data, the data related to the height position of the probe, and the like as necessary. .

  For the controller 33, the host controller 34 stores and executes a measurement program, sets and stores normal measurement conditions, stores measurement data, performs image processing of measurement results, and displays on a display device (monitor) 35. Process.

  Since the host controller 34 has the above functions, the host controller 34 includes a CPU 51 that is a processing device and a storage unit 52. The storage unit 52 stores and stores the above-described program, condition data, and the like. The host control device 34 includes an image display control unit 53 and a communication unit. In addition, an input device 36 is connected to the second control device 34 via an interface 54, and a measurement program, measurement conditions, data, and the like stored in the storage unit 52 can be set / changed by the input device 36. It is like that.

  The CPU 51 of the host controller 34 provides upper control commands and the like to each functional unit of the controller 33 via the bus 55, and image data and search from the image processing unit and data processing unit in the controller 33. Data on the needle height position is provided.

  In the above apparatus configuration, the XY scanning of the surface of the sample 12 by the probe 20 is performed by moving (finely moving) the probe 20 side with the XY fine movement mechanism, or moving the sample 12 side with the XY stage 14 (coarse). This is done by creating a relative movement relationship in the XY plane between the sample 12 and the probe 20.

  Next, a specific configuration example of the sample stage 11 will be described with reference to FIG. In FIG. 2, 14 is an XY stage, and 15 is a Z stage. The XY stage 14 is a mechanism for moving the sample on the horizontal plane (XY plane), and the Z stage 15 is a mechanism for moving the sample 12 in the vertical direction. The Z stage 15 is mounted and mounted on the XY stage 14, for example.

  The XY stage 14 includes a Y-axis mechanism unit 100Y located on the lower side, and an X-axis mechanism unit 100X disposed on the Y-axis mechanism unit 100Y.

  The Y-axis mechanism unit 100Y includes two parallel Y-axis rails 201A and 201B arranged in the Y-axis direction, Y-axis motors 202A and 202B, and a Y-axis drive force transmission mechanism (Y-axis drive shaft). 203A and 203B. A pair of Y-axis motor 202A and Y-axis driving force transmission mechanism 203A is provided corresponding to Y-axis rail 201A, and a pair of Y-axis motor 202B and Y-axis driving force transmission mechanism 203B is provided corresponding to Y-axis rail 201B. It has been. That is, two sets of drive shaft mechanisms, Y-axis motor 202A and Y-axis drive force transmission mechanism 203A, and Y-axis motor 202B and Y-axis drive force transmission mechanism 203B, are provided on both sides. The two Y-axis motors 202A and 202B are preferably independently driven and controlled so as to satisfy the conditions described later. Further, each of the Y-axis driving force transmission mechanisms 203A and 203B incorporates a position detection mechanism such as a linear scale.

  The X-axis mechanism unit 100X includes two parallel X-axis rails 204A and 204B arranged in the X-axis direction, X-axis motors 205A and 205B, and an X-axis drive force transmission mechanism (X-axis drive shaft). 206A and 206B. A pair of X-axis motor 205A and X-axis driving force transmission mechanism 206A is provided corresponding to X-axis rail 204A, and a pair of X-axis motor 205B and X-axis driving force transmission mechanism 206B is provided corresponding to X-axis rail 204B. It has been. That is, two sets of drive shaft mechanisms, that is, an X-axis motor 205A and an X-axis drive force transmission mechanism 206A, and an X-axis motor 205B and an X-axis drive force transmission mechanism 206B are provided on both sides. The two X-axis motors 205A and 205B are preferably driven and controlled independently so as to satisfy the conditions described later. Further, each of the X-axis driving force transmission mechanisms 206A and 206B incorporates a position detection mechanism such as a linear scale.

  By the XY stage 14, the Z stage 15 is arbitrarily moved in the X-axis direction or the Y-axis direction. The Z stage 15 is provided with a drive mechanism for raising and lowering the sample holder 16 in the Z-axis direction. In FIG. 2, the drive mechanism is hidden and not shown. A chuck mechanism 207 for fixing the sample 12 is provided on the sample holder 16.

  In the XY stage 14 described above, the configurations and operation control methods of the Y-axis mechanism unit 100Y and the X-axis mechanism unit 100X are the same. Therefore, with reference to FIG. 3, the X-axis mechanism unit 100X will be described in detail as a scanning mechanism according to the present embodiment. In FIG. 3, in order to explain the principle of the scanning mechanism, the figure itself is shown in a simplified manner.

  In FIG. 3, the horizontal direction is defined as the X-axis direction, and the vertical direction is defined as the Y-axis direction. In the case of the X-axis fine movement mechanism unit 100X, the X-axis direction is the scanning direction. Further, FIG. 3 shows two X-axis motors 205A (M1) and 205B (M2) and two ball screws 206A-1 and 206B-1 arranged in parallel. The ball screws 206A-1 and 206B-1 are provided inside the X-axis driving force transmission mechanisms (X-axis driving shafts) 206A and 206B, respectively. Ball screws 206A-1 and 206B-1 are driven by X-axis motors 205A and 205B, respectively, transmit the rotational force of X-axis motors 205A and 205B, and move scanning stage 211. The scanning stage 211 includes ball screw nuts 212A and 212B on the lower surface. The ball screw nuts 212A and 212B are screwed into the ball screws 206A-1 and 206B-1, respectively. Here, a description will be made by generalizing as a scanning stage (movable object) 211 instead of the sample holder 16 described above. In FIG. 3, the illustration of the X-axis rails 204A and 204B is omitted for convenience of explanation.

  Position detection mechanisms 213A and 213B are provided on the ball screws 206A-1 and 206B-1, respectively. Two points 214A and 214B located on both sides of the scanning stage 211 are position detection points detected by the position detection mechanisms 213A and 213B, respectively. Specifically, for example, a linear encoder, a rotary encoder, a displacement meter or the like is used as the position detection mechanisms 213A and 213B. A line 215 connecting the two points 214A and 214B is a center line of the scanning stage 211. Further, an intermediate point 216 between the two points 214 A and 214 B on the center line 215 is the center position of the scanning stage 211.

  In the configuration of the X-axis mechanism unit 100X shown in FIG. 3, the scanning stage 211 suspended between two parallel ball screws 206A-1 and 206B-1 is inclined at least during measurement (at rest). Kept in the same posture. That is, the scanning stage 211 is moved so that the center line 215 is inclined with respect to a line 217 perpendicular to the two parallel ball screws 206A-1 and 206B-1, and the measurement is performed so that the measurement is performed. The scanning movement in the X-axis direction is controlled. As a result, the upper ends of the line 217 and the center line 215 coincide with each other, and a positional deviation “d” occurs at their lower ends. This deviation d is normally d> 0, but includes a case where d = 0. In particular, the deviation d is not necessary during simple movement, but is essential during measurement. Such scanning movement control of the scanning stage 211 is realized by driving control of the two motors 205A and 205B. The two motors 205A and 205B are driven independently by the controller 33 and the like, and the drive control is performed so that the deviation d is generated. When the deviation d is generated by independent drive control, for example, control is performed so that the rotational speeds of the two motors 205A and 205B are set to different constant speeds. More specifically, the position of the point 214A of the scanning stage 211 based on the motor 205A or the like detected by the position detection mechanism 213A and the position of the point 214B of the scanning stage 211 based on the motor 205B or the like detected by the position detection mechanism 213B. Control is performed so that the rotation speeds of the two motors 205A and 205B are set to different constant speeds so that the difference between the two motors becomes a constant value “d”. Note that the tilting posture of the scanning stage 211 in FIG. 3 is exaggerated.

  The two motors 205A and 205B can also be configured to drive and control in synchronism so that the deviation d always occurs. In this synchronous drive control, the drive is performed at the same speed so that the deviation d is maintained.

  Next, in the X-axis mechanism unit 100X having the motor control mechanism as described above regarding the scanning movement of the scanning stage 211, the following action occurs.

  The calculation of the position of the measurement point and the contents of high-precision positioning below the resolution of the position detection mechanisms 213A and 213B are as follows.

Based on the two sets of position detection information obtained by the position detection mechanisms 213A and 213B, the position information of the measurement point is obtained by the following method. Here, the position of the measurement point corresponds to the point 216. When the coordinates of the points 216, 214A, and 214B in FIG. 3 are (x, y), (x ₁ , y ₁ ), and (x ₂ , y ₂ ), x ₁ and x ₂ obtained directly by measurement, From the y-coordinate value (y) of the point 216, the x-coordinate value (x) of the point 216 is obtained by the following equation.

  Here, m and n are as follows.

The deviation d is given by d = x ₁ −x ₂ . This deviation d is variable within a certain range. In other words, the settable range varies depending on the mechanical component, but in the case of an atomic force microscope or the like, it is a positioning problem on the order of μm (micron meter) to sub-μm, and usually a sufficient variable range can be obtained. By performing drive control of the two motors 205A and 205B so that the deviation d is generated, the center position point 216 can be positioned with a resolution smaller than the resolution of the position detection mechanisms 213A and 213B.

In the X-axis mechanism unit 100X having the above-described configuration and motor control method, the pressing force on the ball screw 206A-1 side of the motor 205A and the ball screw 206B of the motor 205B in the scanning stage 211 when the scanning stage 211 is stationary at the time of measurement. Since the deviation d _s is maintained so that the pressing force on the −1 side is in the opposite direction, the creep phenomenon can be suppressed.

  Further, on the premise that a mechanism component corresponding to relatively high-speed scanning is used, as described above, stable positioning can be performed at a resolution lower than the resolution of the position detection mechanism during stationary positioning. Further, by performing synchronous driving by two-axis driving by two motors 205A and 205B during high-speed scanning, it is possible to suppress bending of mechanical parts during acceleration / deceleration, and higher acceleration is possible compared to single-axis driving. .

Since the two motors 205A and 205B are driven synchronously while maintaining a constant deviation d _d during the two-axis drive scanning movement, a constant thrust force can be maintained during operation, and the dynamic positioning accuracy is improved by suppressing small vibrations. be able to.

The dynamically maintained deviation d _d and the stationary deviation d _s may be different. Basically, the smoothness of movement is important during scanning, and conversely the stationary rigidity is important when stationary, so the deviation d _s during stationary is set larger.

In the following Table 1 (deviation setting table), an example of setting the deviation d (d _d1 , d _d2 ) according to the scene related to the scanning stage 211 (“Stage constant speed operation”, “Acceleration / deceleration”, “Stage stationary”). , D _d3 , d _s1 , d _s2 ). The deviation d may be “plus (+)” or “minus (−)”. Here, regarding the scanning operation of the scanning stage 211 in the X-axis direction, d = x ₁ −x ₂ (≧ 0) is defined as the movement in the X increasing direction. The total amount of backlash (δ ₁ ) on the motor 205A side and backlash (δ ₂ ) on the motor 205B side is defined as δ (= δ ₁ + δ ₂ ). In Table C1, the motor 205A is described as “M1”, and the motor 205B is described as “M2”.

Further, when the maximum amount of deviation that can be set determined by the structure of the stage is d _max and the relationship among the above-described deviations is summarized, it is as shown in FIG. In FIG. 4, the length of each arrow does not quantitatively represent the size of the set range.

Next, FIG. 5 is a block diagram showing a configuration example of a control system that controls the operations of the two motors 205A (M1) and 205B (M2). A control signal x ₁ is supplied to the motor 205A side. The control signal x ₁ is converted into a drive signal via the subtractor 311 and the drive unit 312 and supplied to the motor 205A. In the subtractor 311, actual position data detected by the position detection mechanism 213 </ b> A attached to the motor 205 </ b> A is fed back, and a difference between the control signal x ₁ and the actual detection position is obtained. On the other hand, on the side of the motor 205b, the difference a control signal x ₁ and the deviation signal d in the subtracter 313 is determined. This difference signal (x ₁ −d) is supplied as a control signal, converted into a drive signal via a subtractor 314 and a drive unit 315, and supplied to the motor 205B. In the subtractor 314, actual position data detected by the position detection mechanism 213B attached to the motor 205B is fed back, and a difference between the control signal (x ₁ -d) and the actual detection position is obtained.

  The calculation unit 316 calculates and outputs a measurement value related to the position data of the center position of the scanning stage 211 by the above-described calculation based on the position data detected by the position detection mechanisms 213A and 213B.

  In the above description of the embodiment, the X-axis mechanism unit 100X has been described, but the Y-axis mechanism unit 100Y is similarly configured with respect to movement in the scanning direction (feed direction).

  The configurations, shapes, sizes, and arrangement relationships described in the above embodiments are merely shown to the extent that the present invention can be understood and implemented, and the numerical values and the compositions (materials) of the respective configurations are as follows. It is only an example. Therefore, the present invention is not limited to the described embodiments, and can be variously modified without departing from the scope of the technical idea shown in the claims.

  For example, a linear motor can be used instead of a drive mechanism including a motor and a ball screw. Furthermore, according to the above-described embodiment, the XY stage 14 of the sample stage 11 in the scanning probe microscope has been described. However, the moving device according to the present invention is not limited to this, and may be used as a scanning mechanism on the probe side, for example. In addition, it can be generally used as a moving device for moving a moving object.

  The present invention is used as a moving device on the sample side or the probe side of a scanning probe microscope.

It is a figure which shows the principal part structure of the scanning probe microscope as an application example of the moving apparatus which concerns on this invention. It is a perspective view which shows the specific structure of a sample stage. It is a schematic top view of the X-axis mechanism part for demonstrating the principle of the moving apparatus which concerns on this invention. It is a figure which shows the magnitude relationship of the various deviation according to a scene. It is a block diagram which shows the structure of the control system of two motors (drive shaft mechanism).

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Sample stage 12 Sample 14 XY stage 15 Z stage 16 Sample holder 20 Probe 21 Cantilever 22 Mounting part 23 Z fine movement mechanism 29 XY fine movement mechanism 33 Controller 34 High-order control apparatus 100X X-axis mechanism part 100Y Y-axis mechanism part 205A Motor 205B Motor 211 Scanning stage 213A Position detection mechanism 213B Position detection mechanism

Claims (5)

  Two sets of drive shaft mechanisms provided parallel to the direction in which the object is moved, a position detection mechanism provided in each of these two sets of drive shaft mechanisms, and the two sets of drive shaft mechanisms Control means for controlling the operation, wherein the control means is configured to maintain the deviation of the drive positions of the two sets of drive shaft mechanisms at least when the object to be moved is stationary. A moving device characterized by controlling the drive of the motor.   The moving device according to claim 1, wherein the two sets of drive shaft mechanisms are independently driven and controlled.   The moving device according to claim 1, wherein the two sets of drive shaft mechanisms are driven and controlled in synchronization.   4. The moving device according to claim 1, wherein the deviation of the driving position is maintained even when the object to be moved is moved by driving control of the two sets of driving shaft mechanisms. 5. The moving device according to claim 4, wherein the deviation of the drive positions of the two sets of drive shaft mechanisms is changed according to an operation state.

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