JP2006221180A - 光ビームの発散および／または収束を調整するための装置 - Google Patents

光ビームの発散および／または収束を調整するための装置 Download PDF

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Publication number
JP2006221180A
JP2006221180A JP2006033663A JP2006033663A JP2006221180A JP 2006221180 A JP2006221180 A JP 2006221180A JP 2006033663 A JP2006033663 A JP 2006033663A JP 2006033663 A JP2006033663 A JP 2006033663A JP 2006221180 A JP2006221180 A JP 2006221180A
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JP
Japan
Prior art keywords
adjusting device
optical component
light beam
convergence
divergence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006033663A
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English (en)
Japanese (ja)
Inventor
Juergen Riedmann
リートマン ユルゲン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems CMS GmbH
Original Assignee
Leica Microsystems CMS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leica Microsystems CMS GmbH filed Critical Leica Microsystems CMS GmbH
Publication of JP2006221180A publication Critical patent/JP2006221180A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP2006033663A 2005-02-10 2006-02-10 光ビームの発散および／または収束を調整するための装置 Pending JP2006221180A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200510006239 DE102005006239A1 (de) 2005-02-10 2005-02-10 Vorrichtung zur Einstellung der Divergenz und/oder Konvergenz eines Lichtstrahls

Publications (1)

Publication Number Publication Date
JP2006221180A true JP2006221180A (ja) 2006-08-24

Family

ID=36746017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006033663A Pending JP2006221180A (ja) 2005-02-10 2006-02-10 光ビームの発散および／または収束を調整するための装置

Country Status (2)

Country Link
JP (1) JP2006221180A (de)
DE (1) DE102005006239A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008225095A (ja) * 2007-03-13 2008-09-25 Olympus Corp 光走査型観察装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012217520A1 (de) * 2012-09-27 2014-03-27 Trumpf Laser- Und Systemtechnik Gmbh Strahlführungseinrichtung und Verfahren zum Einstellen des Öffnungswinkels eines Laserstrahls

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08510567A (ja) * 1993-12-24 1996-11-05 カール ツアイス イエーナ ゲゼルシャフト ミット ベシュレンクテル ハフツング 可変イメージスケール付き光学系
JPH10133118A (ja) * 1996-11-01 1998-05-22 Nikon Corp 顕微鏡用対物レンズ
JP2001356256A (ja) * 2000-06-12 2001-12-26 Nikon Corp レンズ駆動装置およびそれを備えた対物レンズ
JP2002341234A (ja) * 2001-05-17 2002-11-27 Olympus Optical Co Ltd 顕微鏡用オートフォーカス装置
JP2004265957A (ja) * 2003-02-26 2004-09-24 Nikon Corp 最適位置検出式の検出方法、位置合わせ方法、露光方法、デバイス製造方法及びデバイス
JP2004317676A (ja) * 2003-04-14 2004-11-11 Nano Photon Kk レーザ顕微鏡、レーザ光走査装置、レーザ光走査方法、画像データ生成方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08510567A (ja) * 1993-12-24 1996-11-05 カール ツアイス イエーナ ゲゼルシャフト ミット ベシュレンクテル ハフツング 可変イメージスケール付き光学系
JPH10133118A (ja) * 1996-11-01 1998-05-22 Nikon Corp 顕微鏡用対物レンズ
JP2001356256A (ja) * 2000-06-12 2001-12-26 Nikon Corp レンズ駆動装置およびそれを備えた対物レンズ
JP2002341234A (ja) * 2001-05-17 2002-11-27 Olympus Optical Co Ltd 顕微鏡用オートフォーカス装置
JP2004265957A (ja) * 2003-02-26 2004-09-24 Nikon Corp 最適位置検出式の検出方法、位置合わせ方法、露光方法、デバイス製造方法及びデバイス
JP2004317676A (ja) * 2003-04-14 2004-11-11 Nano Photon Kk レーザ顕微鏡、レーザ光走査装置、レーザ光走査方法、画像データ生成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008225095A (ja) * 2007-03-13 2008-09-25 Olympus Corp 光走査型観察装置

Also Published As

Publication number Publication date
DE102005006239A1 (de) 2006-08-17

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