JP2006202928A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2006202928A JP2006202928A JP2005012163A JP2005012163A JP2006202928A JP 2006202928 A JP2006202928 A JP 2006202928A JP 2005012163 A JP2005012163 A JP 2005012163A JP 2005012163 A JP2005012163 A JP 2005012163A JP 2006202928 A JP2006202928 A JP 2006202928A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76819—Smoothing of the dielectric
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76837—Filling up the space between adjacent conductive structures; Gap-filling properties of dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823418—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
- H01L21/823425—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures manufacturing common source or drain regions between a plurality of conductor-insulator-semiconductor structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823475—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type interconnection or wiring or contact manufacturing related aspects
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
【解決手段】はじめにシリコン基板1上に隣り合って複数の拡散層4、ゲート2およびサイドウォール3を形成する。次いで拡散層4、ゲート2およびサイドウォール3上に、表面がゲート2の上端よりも高い位置にあり、かつ、狭ゲートピッチP間の間隙の全体に充填されるように窒化膜5を積層する。つづいて窒化膜5上の表面を平坦化した後、窒化膜6上に酸化絶縁膜6を積層する。その後、コンタクト孔7を形成し、その内部に接続プラグ8を形成する。
【選択図】図1
Description
半導体基板の一表面に、拡散層、ゲート電極および側壁絶縁膜からなるMOSFETを複数、形成する工程と、
前記MOSFETのゲートピッチ間の間隙全体を埋め込むこむとともに、その表面が前記ゲート電極の上面よりも高い位置となるように、シリコンおよび窒素を含む第1絶縁膜を形成する工程と、
前記第1絶縁膜の表面を平坦化する工程と、
前記第1絶縁膜上に第2絶縁膜を積層する工程と、
前記第2絶縁膜および前記第1絶縁膜を選択的にエッチングし、前記拡散層に達するコンタクト孔を形成する工程と、
前記コンタクト孔に導電膜を埋設し接続プラグを形成する工程と、
前記第2絶縁膜上に前記接続プラグと接続される配線層を形成する工程と、
を含むことを特徴とする半導体装置の製造方法、
が提供される。
はじめに、図1(a)に示すように、半導体基板の一表面に複数のMOSFETを形成する。すなわち、シリコンからなる半導体基板1上にゲート2およびサイドウォール3を形成した後、イオン注入を行い拡散層4(ソース・ドレイン領域)を形成する。次いでゲート2および拡散層4の表面にシリサイド膜を形成する。
図中各部の概略寸法は以下のとおりである。
ゲート長:65nm
狭ゲートピッチP:300nm
サイドウォール3の端から端までの距離:80nm
次に、図1(d)に示すように、ダイレクト窒化膜5上にシリコン酸化膜6を積層する。その後、シリコン酸化膜6およびダイレクト窒化膜5をこの順で選択的にエッチングし、拡散層4(ソース・ドレイン領域)に達するコンタクト孔7を形成する。
最後に、図1(e)に示すように、シリコン酸化膜6上に銅配線層9を積層する。
2 ゲート
3 サイドウォール
4 拡散層
5 窒化膜
5a 埋った窒化膜
5b 突出部
6 酸化絶縁膜
7 コンタクト孔
8 接続プラグ
9 銅配線層
10 充填部
P 狭ゲートピッチ
P1 広ゲートピッチ
Claims (2)
- 半導体基板の一表面に、拡散層、ゲート電極および側壁絶縁膜からなるMOSFETを複数、形成する工程と、
前記MOSFETのゲートピッチ間の間隙全体を埋め込むこむとともに、その表面が前記ゲート電極の上面よりも高い位置となるように、シリコンおよび窒素を含む第1絶縁膜を形成する工程と、
前記第1絶縁膜の表面を平坦化する工程と、
前記第1絶縁膜上に第2絶縁膜を積層する工程と、
前記第2絶縁膜および前記第1絶縁膜を選択的にエッチングし、前記拡散層に達するコンタクト孔を形成する工程と、
前記コンタクト孔に導電膜を埋設し接続プラグを形成する工程と、
前記第2絶縁膜上に前記接続プラグと接続される配線層を形成する工程と、
を含むことを特徴とする半導体装置の製造方法。 - ゲートピッチ間の最小寸法が100nm以下である請求項1に記載の半導体装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005012163A JP2006202928A (ja) | 2005-01-19 | 2005-01-19 | 半導体装置の製造方法 |
US11/333,329 US20060160287A1 (en) | 2005-01-19 | 2006-01-18 | Method of fabricating semiconductor device |
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JP2005012163A JP2006202928A (ja) | 2005-01-19 | 2005-01-19 | 半導体装置の製造方法 |
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JP2006202928A true JP2006202928A (ja) | 2006-08-03 |
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JP2005012163A Pending JP2006202928A (ja) | 2005-01-19 | 2005-01-19 | 半導体装置の製造方法 |
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US (1) | US20060160287A1 (ja) |
JP (1) | JP2006202928A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012514318A (ja) * | 2008-12-31 | 2012-06-21 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | チャネル半導体合金を備えたトランジスタにおける堆積不均一性の低減によるスレッショルド電圧ばらつきの低減 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070013012A1 (en) * | 2005-07-13 | 2007-01-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Etch-stop layer structure |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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TW396585B (en) * | 1998-06-06 | 2000-07-01 | United Microelectronics Corp | Electric static discharge protection circuit structure in dynamic random access memory and its manufacturing methods |
JP2001094094A (ja) * | 1999-09-21 | 2001-04-06 | Hitachi Ltd | 半導体装置およびその製造方法 |
KR100443082B1 (ko) * | 2002-10-18 | 2004-08-04 | 삼성전자주식회사 | 반도체 장치의 트랜지스터 제조 방법 |
US20050227382A1 (en) * | 2004-04-02 | 2005-10-13 | Hui Angela T | In-situ surface treatment for memory cell formation |
-
2005
- 2005-01-19 JP JP2005012163A patent/JP2006202928A/ja active Pending
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2006
- 2006-01-18 US US11/333,329 patent/US20060160287A1/en not_active Abandoned
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012514318A (ja) * | 2008-12-31 | 2012-06-21 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | チャネル半導体合金を備えたトランジスタにおける堆積不均一性の低減によるスレッショルド電圧ばらつきの低減 |
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