JP2006191121A5 - - Google Patents
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- Publication number
- JP2006191121A5 JP2006191121A5 JP2006003008A JP2006003008A JP2006191121A5 JP 2006191121 A5 JP2006191121 A5 JP 2006191121A5 JP 2006003008 A JP2006003008 A JP 2006003008A JP 2006003008 A JP2006003008 A JP 2006003008A JP 2006191121 A5 JP2006191121 A5 JP 2006191121A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- carrier
- holder
- alignment
- clamping plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 189
- 238000000034 method Methods 0.000 claims description 52
- 239000000463 material Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims 1
- 238000003825 pressing Methods 0.000 description 18
- 238000012545 processing Methods 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 8
- 238000013459 approach Methods 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/031,024 US7258703B2 (en) | 2005-01-07 | 2005-01-07 | Apparatus and method for aligning devices on carriers |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006191121A JP2006191121A (ja) | 2006-07-20 |
| JP2006191121A5 true JP2006191121A5 (enExample) | 2009-09-03 |
| JP4440219B2 JP4440219B2 (ja) | 2010-03-24 |
Family
ID=36653765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006003008A Active JP4440219B2 (ja) | 2005-01-07 | 2006-01-10 | 担持体上に半導体デバイスを位置合わせするための装置及び方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7258703B2 (enExample) |
| JP (1) | JP4440219B2 (enExample) |
| KR (1) | KR100799896B1 (enExample) |
| CN (1) | CN100403510C (enExample) |
| MY (1) | MY136858A (enExample) |
| SG (1) | SG123786A1 (enExample) |
| TW (1) | TWI286813B (enExample) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7258703B2 (en) * | 2005-01-07 | 2007-08-21 | Asm Assembly Automation Ltd. | Apparatus and method for aligning devices on carriers |
| US7726540B2 (en) * | 2005-12-12 | 2010-06-01 | Asm Assembly Automation Ltd. | Apparatus and method for arranging devices for processing |
| JP2008003049A (ja) * | 2006-06-26 | 2008-01-10 | Micronics Japan Co Ltd | プローブ組立体 |
| US8011058B2 (en) * | 2006-10-31 | 2011-09-06 | Asm Assembly Automation Ltd | Singulation handler system for electronic packages |
| US7965091B2 (en) * | 2007-04-30 | 2011-06-21 | Electro Scientific Industries, Inc. | Test plate for electronic handler |
| KR100885492B1 (ko) * | 2007-06-04 | 2009-02-24 | (주)케이엔씨 | 반도체 소자 영상 검사용 클램핑 장치 |
| KR100901523B1 (ko) * | 2007-07-16 | 2009-06-08 | (주)테크윙 | 테스트핸들러용 개방기 및 버퍼테이블 |
| DE202009018726U1 (de) * | 2008-02-15 | 2012-11-27 | Multitest Elektronische Systeme Gmbh | Vorrichtung zum Ausrichten und Halten einer Mehrzahl singulierter Halbleiterbauelemente in Aufnahmetaschen eines Klemmträgers |
| KR100981130B1 (ko) | 2008-09-10 | 2010-09-14 | 주식회사 하나엔-텍 | 케리어소켓의 포켓교체장치 |
| KR101029369B1 (ko) * | 2009-01-23 | 2011-04-13 | (주) 에스에스피 | 자동화 장비의 자재 정렬장치 |
| DE102009018393B4 (de) * | 2009-04-22 | 2017-05-24 | Atotech Deutschland Gmbh | Verfahren, Haltemittel, Vorrichtung und System zum Transportieren eines flächigen Behandlungsgutes und Be- oder Entladeeinrichtung |
| US8522754B2 (en) * | 2009-07-01 | 2013-09-03 | International Engine Intellectual Property Company, Llc. | Fuel injector clamp |
| MY152834A (en) | 2009-08-18 | 2014-11-28 | Multitest Elektronische Syst | An elastic unit for clamping an electronic component and extending below an electronic component receiving volume of an align fixture |
| MY154258A (en) * | 2009-08-18 | 2015-05-29 | Multitest Elektronische Syst | Elastic unit exerting two angled force components on an abutting section of an align fixture |
| MY152429A (en) * | 2009-08-18 | 2014-09-30 | Multitest Elektronische Syst | Carrier for aligning electronic components with slidably arranged plates |
| MY160276A (en) * | 2009-08-18 | 2017-02-28 | Multitest Elektronische Systeme Gmbh | An elastic unit as a separate elastic member to be mounted at an elastic unit receiving section of an align fixture |
| MY151553A (en) | 2009-08-18 | 2014-06-13 | Multitest Elektronische Syst | Two abutting sections of an align fixture together floatingly engaging an electronic component |
| MY152434A (en) * | 2009-08-18 | 2014-09-30 | Multitest Elektronische Syst | System for post-processing of electronic components |
| US8683674B2 (en) * | 2010-12-07 | 2014-04-01 | Centipede Systems, Inc. | Method for stacking microelectronic devices |
| US20120249172A1 (en) * | 2011-03-31 | 2012-10-04 | Electro Scientific Industries, Inc. | Alignment system for electronic device testing |
| CN102914951B (zh) * | 2011-08-04 | 2014-11-12 | 上海微电子装备有限公司 | 用于光刻设备的预对准装置 |
| CN102335972A (zh) * | 2011-10-24 | 2012-02-01 | 无锡绿波新能源设备有限公司 | 真空吸盘 |
| ITTO20120321A1 (it) * | 2012-04-12 | 2013-10-13 | Spea Spa | Unita' di supporto e posizionamento di componenti a semiconduttore |
| KR101404979B1 (ko) * | 2012-07-24 | 2014-06-10 | (주)에이젯 | 반도체 디바이스 정렬 장치 및 정렬 방법 |
| JP5986447B2 (ja) * | 2012-07-25 | 2016-09-06 | 株式会社アルバック | トレイ、基板の位置調整システム、及び露光装置 |
| EP2765431B1 (en) * | 2013-02-11 | 2016-05-25 | Rasco GmbH | Carrier for electronic components |
| ITTO20130324A1 (it) * | 2013-04-22 | 2014-10-23 | St Microelectronics Srl | Dispositivo vibrante per il posizionamento di un pezzo miniaturizzato in una sede di test, e metodo di posizionamento |
| US9857419B2 (en) * | 2013-07-12 | 2018-01-02 | Delta Design, Inc. | Micro-vision alignment system with guiding rings for IC testing |
| US10041973B2 (en) * | 2013-09-04 | 2018-08-07 | Infineon Technologies Ag | Method and apparatus for dynamic alignment of semiconductor devices |
| EP2884293A1 (en) | 2013-12-12 | 2015-06-17 | Rasco GmbH | Semiconductor device carrier |
| KR101748248B1 (ko) * | 2014-03-25 | 2017-06-16 | 가부시키가이샤 어드밴티스트 | 핸들러 장치 및 시험 장치 |
| US9772373B2 (en) * | 2014-03-25 | 2017-09-26 | Advantest Corporation | Handler apparatus, device holder, and test apparatus |
| CN104605599B (zh) * | 2015-02-12 | 2016-04-13 | 京东方科技集团股份有限公司 | 一种ic盘盒 |
| DE102016004592B4 (de) | 2016-04-14 | 2017-11-02 | Mühlbauer Gmbh & Co. Kg | System und Verfahren zum Ausrichten elektronischer Bauteile |
| US10473714B2 (en) * | 2017-03-06 | 2019-11-12 | Asm Technology Singapore Pte Ltd | Method and apparatus for aligning electronic components |
| CN111742232A (zh) | 2017-12-19 | 2020-10-02 | 波士顿半导体设备有限公司 | 无套件取放处理机 |
| CN108922860B (zh) * | 2018-08-27 | 2023-12-12 | 无锡中微高科电子有限公司 | 一种全阵列引脚陶瓷外壳的自动装片夹具 |
| DE102020200817B3 (de) * | 2020-01-23 | 2021-06-17 | Lpkf Laser & Electronics Aktiengesellschaft | Montageverfahren für eine integrierte Halbleiter-Waver-Vorrichtung und dafür verwendbare Montagevorrichtung |
| KR102291194B1 (ko) * | 2020-03-09 | 2021-08-20 | 에이엠티 주식회사 | 미세 피치를 갖는 디바이스의 얼라인장치 및 그 방법 |
| KR102295435B1 (ko) * | 2020-03-12 | 2021-08-31 | 에이엠티 주식회사 | 미세 피치를 갖는 디바이스의 얼라인 및 테스트장치 그리고 디바이스의 얼라인방법 |
| WO2022038700A1 (ja) * | 2020-08-19 | 2022-02-24 | 株式会社新川 | 基板保持具、並びに、ボンディングシステム及びボンディング方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3870416A (en) * | 1974-01-09 | 1975-03-11 | Bell Telephone Labor Inc | Wafer alignment apparatus |
| JPH088293B2 (ja) * | 1987-09-01 | 1996-01-29 | 住友電気工業株式会社 | チップ実装装置 |
| JPH03133784A (ja) * | 1989-10-16 | 1991-06-06 | Nec Kyushu Ltd | 半導体装置用トレー |
| JPH0831544B2 (ja) * | 1993-06-29 | 1996-03-27 | 山一電機株式会社 | Icキャリア |
| US5697748A (en) * | 1993-07-15 | 1997-12-16 | Applied Materials, Inc. | Wafer tray and ceramic blade for semiconductor processing apparatus |
| DE19509999C2 (de) * | 1995-03-22 | 1998-04-16 | David Finn | Verfahren und Vorrichtung zur Herstellung einer Transpondereinheit sowie Transpondereinheit |
| US5688127A (en) * | 1995-07-24 | 1997-11-18 | Vlsi Technology, Inc. | Universal contactor system for testing ball grid array (BGA) devices on multiple handlers and method therefor |
| JP3314663B2 (ja) * | 1997-05-22 | 2002-08-12 | 松下電器産業株式会社 | チップのボンディング装置 |
| US6082547A (en) * | 1998-03-27 | 2000-07-04 | Fluoroware, Inc. | Adapter jig |
| KR200169340Y1 (ko) * | 1999-08-28 | 2000-02-15 | 아남반도체주식회사 | 반도체패키지 제조용 범용 보트 캐리어 |
| US6375791B1 (en) * | 1999-12-20 | 2002-04-23 | Lsi Logic Corporation | Method and apparatus for detecting presence of residual polishing slurry subsequent to polishing of a semiconductor wafer |
| US6338297B1 (en) * | 2000-05-26 | 2002-01-15 | Industrial Technology Research Institute | Precise and rapid positioning mechanism for stencil printing |
| US6709877B2 (en) * | 2001-07-23 | 2004-03-23 | Asm Assembly Automation Limited | Apparatus and method for testing semiconductor devices |
| US6991960B2 (en) * | 2001-08-30 | 2006-01-31 | Micron Technology, Inc. | Method of semiconductor device package alignment and method of testing |
| JP3565201B2 (ja) * | 2001-11-20 | 2004-09-15 | 松下電器産業株式会社 | チップの実装方法 |
| US20050072714A1 (en) * | 2003-10-06 | 2005-04-07 | Eleveld Martin J. | Standard tray carrier for aligning trays |
| US7258703B2 (en) * | 2005-01-07 | 2007-08-21 | Asm Assembly Automation Ltd. | Apparatus and method for aligning devices on carriers |
-
2005
- 2005-01-07 US US11/031,024 patent/US7258703B2/en not_active Expired - Lifetime
- 2005-12-29 SG SG200508572A patent/SG123786A1/en unknown
-
2006
- 2006-01-02 TW TW095100001A patent/TWI286813B/zh active
- 2006-01-06 MY MYPI20060058A patent/MY136858A/en unknown
- 2006-01-06 CN CNB2006100002356A patent/CN100403510C/zh active Active
- 2006-01-06 KR KR1020060001600A patent/KR100799896B1/ko active Active
- 2006-01-10 JP JP2006003008A patent/JP4440219B2/ja active Active
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