JP2006186330A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006186330A5 JP2006186330A5 JP2005338529A JP2005338529A JP2006186330A5 JP 2006186330 A5 JP2006186330 A5 JP 2006186330A5 JP 2005338529 A JP2005338529 A JP 2005338529A JP 2005338529 A JP2005338529 A JP 2005338529A JP 2006186330 A5 JP2006186330 A5 JP 2006186330A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- manufacturing
- film
- forming
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 12
- 238000000034 method Methods 0.000 claims 12
- 239000004065 semiconductor Substances 0.000 claims 8
- 239000002245 particle Substances 0.000 claims 7
- 239000011344 liquid material Substances 0.000 claims 4
- 230000001678 irradiating effect Effects 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 230000004888 barrier function Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005338529A JP4749133B2 (ja) | 2004-11-30 | 2005-11-24 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004347738 | 2004-11-30 | ||
| JP2004347738 | 2004-11-30 | ||
| JP2005338529A JP4749133B2 (ja) | 2004-11-30 | 2005-11-24 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006186330A JP2006186330A (ja) | 2006-07-13 |
| JP2006186330A5 true JP2006186330A5 (enExample) | 2009-01-08 |
| JP4749133B2 JP4749133B2 (ja) | 2011-08-17 |
Family
ID=36739170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005338529A Expired - Fee Related JP4749133B2 (ja) | 2004-11-30 | 2005-11-24 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4749133B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10231344B2 (en) | 2007-05-18 | 2019-03-12 | Applied Nanotech Holdings, Inc. | Metallic ink |
| US9730333B2 (en) | 2008-05-15 | 2017-08-08 | Applied Nanotech Holdings, Inc. | Photo-curing process for metallic inks |
| JP5136431B2 (ja) * | 2009-01-15 | 2013-02-06 | 株式会社デンソー | 半導体装置の製造方法 |
| JP5173863B2 (ja) * | 2009-01-20 | 2013-04-03 | パナソニック株式会社 | 半導体装置およびその製造方法 |
| JP5740389B2 (ja) * | 2009-03-27 | 2015-06-24 | アプライド・ナノテック・ホールディングス・インコーポレーテッド | 光焼結及び/またはレーザー焼結を強化するためのバッファ層 |
| JP5212506B2 (ja) * | 2011-02-28 | 2013-06-19 | 株式会社デンソー | 半導体装置の製造方法 |
| TW201419315A (zh) | 2012-07-09 | 2014-05-16 | Applied Nanotech Holdings Inc | 微米尺寸銅粒子的光燒結法 |
| US11258078B2 (en) | 2019-08-09 | 2022-02-22 | Hamilton Sundstrand Corporation | Conductor assembly |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6441204A (en) * | 1987-08-07 | 1989-02-13 | Canon Kk | Energy storage device |
| JPH07130734A (ja) * | 1993-10-29 | 1995-05-19 | Hoya Corp | レーザ成膜配線法 |
| JPH10233446A (ja) * | 1997-02-19 | 1998-09-02 | Sony Corp | 配線形成方法 |
| JP4653867B2 (ja) * | 1999-06-30 | 2011-03-16 | エーユー オプトロニクス コーポレイション | 電子部品の欠陥修復方法 |
| JP3840886B2 (ja) * | 2000-09-07 | 2006-11-01 | 日立電線株式会社 | 層間絶縁膜の製造方法 |
| JP2003100757A (ja) * | 2001-09-27 | 2003-04-04 | Toshiba Corp | 半導体装置およびその製造方法 |
| JP4042460B2 (ja) * | 2002-04-22 | 2008-02-06 | セイコーエプソン株式会社 | 製膜方法及びデバイス及び電子機器並びにデバイスの製造方法 |
| JP4741192B2 (ja) * | 2003-01-17 | 2011-08-03 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP2004281657A (ja) * | 2003-03-14 | 2004-10-07 | Seiko Epson Corp | 導電層の形成方法 |
-
2005
- 2005-11-24 JP JP2005338529A patent/JP4749133B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7892966B2 (en) | Semiconductor device having thermally formed air gap in wiring layer and method of fabricating same | |
| US20180182630A1 (en) | Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Semiconductor Substrate | |
| JP2013528326A5 (ja) | 太陽電池の製造方法 | |
| US8563359B2 (en) | Method for manufacturing semiconductor device, and semiconductor substrate | |
| JP2011238767A5 (enExample) | ||
| JP2006186330A5 (enExample) | ||
| JP2008270759A5 (enExample) | ||
| WO2008093579A1 (ja) | 積層体、基板の製造方法、基板および半導体装置 | |
| JP2009164481A5 (enExample) | ||
| TW200735188A (en) | Method for forming storage node contact plug in semiconductor device | |
| JP2008270758A5 (enExample) | ||
| TW200705616A (en) | Method of manufacturing a variable resistance structure and method of manufacturing a phase-change memory device using the same | |
| TW200802900A (en) | Method for fabricating a cylindrical capacitor using amorphous carbon-based layer | |
| JP2009158575A5 (enExample) | ||
| JP2008073768A5 (enExample) | ||
| JP2018521507A (ja) | 第1の電極/活性層/第2の電極スタックの製造方法 | |
| JP2007214567A5 (enExample) | ||
| TW200515478A (en) | Method for fabricating semiconductor device with fine patterns | |
| JP2015021179A (ja) | メタルマスクの製造方法及びメタルマスク | |
| JP2006128673A5 (enExample) | ||
| TW200623338A (en) | Method for fabricating capacitor of semiconductor device | |
| JP4466547B2 (ja) | トランジスタの製造方法 | |
| JP2007173579A (ja) | 半導体発光素子およびその製造方法 | |
| WO2008099700A1 (ja) | ダブルゲートトランジスタおよびその製造方法ならびにダブルゲートトランジスタを備えるアクティブマトリクス基板 | |
| JP2007142382A5 (enExample) |