JP2006185921A - プラズマ装置 - Google Patents
プラズマ装置 Download PDFInfo
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- JP2006185921A JP2006185921A JP2005372806A JP2005372806A JP2006185921A JP 2006185921 A JP2006185921 A JP 2006185921A JP 2005372806 A JP2005372806 A JP 2005372806A JP 2005372806 A JP2005372806 A JP 2005372806A JP 2006185921 A JP2006185921 A JP 2006185921A
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- 239000004020 conductor Substances 0.000 claims abstract description 86
- 239000000758 substrate Substances 0.000 claims abstract description 23
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 238000009413 insulation Methods 0.000 abstract description 2
- 230000005684 electric field Effects 0.000 description 13
- 239000007789 gas Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 238000005530 etching Methods 0.000 description 8
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 3
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- -1 CF 4 Chemical compound 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【解決手段】底面が閉じられた筒状のチャンバ11の上部を、適度に薄い導体板31で密閉する。導体板31は絶縁部41によりチャンバ11の側壁から電気的に分離される。導体板31の上方にはコイル21がチャンバ11と同軸に設置される。チャンバ11の底面には処理対象の基板61が設置される。電源部22がコイル21に高周波電流を流すとき、十分な強度の変動磁場が導体板31を通してチャンバ11内の反応空間を貫く。それにより、反応空間内にはプラズマが生成される。一方、プラズマが生成される間、導体板31、特に反応空間に面した内表面全体が等電位に維持される。
【選択図】図1
Description
丹呉浩侑著、「半導体工学シリーズ9 半導体プロセス技術」、初版、株式会社培風館、1998年11月30日、p.113−116
第一と第二との端部を含む筒状部材であり、その第一の端部の内側に処理対象の基板が設置可能であるチャンバ、
チャンバの第二の端部の外側に設置されたコイル、
コイルに高周波電流を流す電源部、及び、
チャンバの第二の端部を密閉し、コイルに上記の高周波電流が流れるとき、内部に誘導電流が流れる導体板、
を有する。ここで、上記の高周波電流の周波数は好ましくは1MHz以下であり、更に好ましくは500KHz以下である。導体板は好ましくはチャンバ内の空間、すなわち反応空間の全体を覆う。導体板の大きさは1m×1mより大きいことが望ましく、導体板の厚さは3cm以下であることが望ましい。更に、導体板が好ましくは、アルミ、鉄、銅、銀、ニッケルのうち、少なくとも一つを含む。一方、コイルが好ましくは、導体板の全面に配置される。
≪実施例1≫
図1と図2とはそれぞれ、本発明の第1実施例によるプラズマ装置の斜視図と断面図とである。このプラズマ装置1は好ましくは、プラズマエッチング、PVD、CVD、及びフォトレジスト剥離等、プラズマを用いた表面処理工程でプラズマ源として利用される。ここで、その処理対象の基板は好ましくは、半導体ウェハ、または液晶表示装置の薄膜トランジスタ基板やカラーフィルタ基板である。プラズマ装置1は、チャンバ11、コイル21、電源部22、インピーダンス整合回路(IMU:Impedance Matching Unit)23、導体板31、絶縁部41、下部電極51、下部電源部52、及び下部インピーダンス整合回路53を含む。
図5は本発明の実施例2によるプラズマ装置の斜視図である。図6は、図5に示されている破線Aで囲まれた部分の拡大断面図である。図5、6では、上記の実施例1の構成要素と同様な構成要素に対し、実施例1の構成要素に付されている符号と同じ符号を付す。更に、それら同様な構成要素についての説明は、実施例1についての説明を援用する。
11 チャンバ
12 反応空間
13 流入口
14 流出口
21 コイル
22 電源部
23 インピーダンス整合回路
31 導体板
31A 導体板31の外表面
31B 導体板31の内表面
32 フック
41 絶縁部
51 下部電極
52 下部電源部
53 下部インピーダンス整合回路
61 処理対象の基板
70 支持部材
71 固定部
72 支持バー
73 固定リング
74 接続リング
75 ネジ
Claims (13)
- 第一と第二との端部を含む筒状部材であり、前記第一の端部の内側に処理対象の基板が設置可能であるチャンバ;
前記チャンバの第二の端部の外側に設置されたコイル;
前記コイルに高周波電流を流す電源部;及び、
前記チャンバの第二の端部を密閉し、前記コイルに前記高周波電流が流れるとき、内部に誘導電流が流れる導体板、
を有するプラズマ装置。 - 前記高周波電流の周波数が1MHz以下である、請求項1に記載のプラズマ装置。
- 前記高周波電流の周波数が500KHz以下である、請求項2に記載のプラズマ装置。
- 前記導体板が前記チャンバ内の空間全体を覆う、請求項1に記載のプラズマ装置。
- 前記導体板の大きさが1m×1mより大きい、請求項1に記載のプラズマ装置。
- 前記導体板の厚さが3cm以下である、請求項1に記載のプラズマ装置。
- 前記導体板が、アルミ、鉄、銅、銀、ニッケルのうち、少なくとも一つを含む、請求項1に記載のプラズマ装置。
- 前記コイルが前記導体板の全面に配置されている、請求項1に記載のプラズマ装置。
- 前記導体板の周囲と前記チャンバの第二の端部との間に設置された絶縁部、を更に有する、請求項1に記載のプラズマ装置。
- 前記絶縁部がセラミック物質で形成される、請求項9に記載のプラズマ装置。
- 前記チャンバの第一の端部の内側に設けられた板状の下部電極、及び、前記下部電極に対して高周波電圧を印加する下部電源部、をさらに有する、請求項1に記載のプラズマ装置。
- 前記下部電極が前記導体板と平行である、請求項11に記載のプラズマ装置。
- 前記下部電極が前記処理対象の基板を固定可能である、請求項11に記載のプラズマ装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040112123A KR20060073737A (ko) | 2004-12-24 | 2004-12-24 | 플라즈마 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006185921A true JP2006185921A (ja) | 2006-07-13 |
JP4587951B2 JP4587951B2 (ja) | 2010-11-24 |
Family
ID=36609942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005372806A Expired - Fee Related JP4587951B2 (ja) | 2004-12-24 | 2005-12-26 | プラズマ装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20060137611A1 (ja) |
JP (1) | JP4587951B2 (ja) |
KR (1) | KR20060073737A (ja) |
CN (1) | CN100414673C (ja) |
TW (1) | TWI298005B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008109155A (ja) * | 2007-12-19 | 2008-05-08 | Applied Materials Inc | プラズマ装置 |
WO2008120459A1 (ja) * | 2007-03-22 | 2008-10-09 | Panasonic Corporation | プラズマ処理装置及びプラズマ処理方法 |
JP2011029584A (ja) * | 2009-01-14 | 2011-02-10 | Tokyo Electron Ltd | 誘導結合プラズマ処理装置 |
US8917022B2 (en) | 2008-05-22 | 2014-12-23 | Emd Corporation | Plasma generation device and plasma processing device |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI424795B (zh) * | 2009-12-21 | 2014-01-21 | Ind Tech Res Inst | 電漿激發裝置 |
JP6010305B2 (ja) * | 2012-02-07 | 2016-10-19 | 東京エレクトロン株式会社 | 誘導結合プラズマ用アンテナユニット、誘導結合プラズマ処理装置および誘導結合プラズマ処理方法 |
RU2503079C1 (ru) | 2012-04-24 | 2013-12-27 | Евгений Владимирович Берлин | Генератор плазмы (варианты) |
JP6084784B2 (ja) * | 2012-06-14 | 2017-02-22 | 東京エレクトロン株式会社 | プラズマ処理装置、プラズマ生成装置、アンテナ構造体、及びプラズマ生成方法 |
JP6228400B2 (ja) * | 2013-07-16 | 2017-11-08 | 東京エレクトロン株式会社 | 誘導結合プラズマ処理装置 |
KR102460503B1 (ko) * | 2020-03-18 | 2022-10-31 | (주)아이작리서치 | 플라즈마 원자층 증착 장치 및 수평 유도형 전극체 |
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JP3903730B2 (ja) * | 2001-04-04 | 2007-04-11 | 松下電器産業株式会社 | エッチング方法 |
KR100458328B1 (ko) * | 2002-03-27 | 2004-11-26 | 주성엔지니어링(주) | 플라즈마 감지장치 |
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2004
- 2004-12-24 KR KR1020040112123A patent/KR20060073737A/ko not_active Application Discontinuation
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2005
- 2005-11-16 TW TW094140315A patent/TWI298005B/zh not_active IP Right Cessation
- 2005-12-08 CN CNB2005101294287A patent/CN100414673C/zh not_active Expired - Fee Related
- 2005-12-09 US US11/298,107 patent/US20060137611A1/en not_active Abandoned
- 2005-12-26 JP JP2005372806A patent/JP4587951B2/ja not_active Expired - Fee Related
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Cited By (8)
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WO2008120459A1 (ja) * | 2007-03-22 | 2008-10-09 | Panasonic Corporation | プラズマ処理装置及びプラズマ処理方法 |
JP5188496B2 (ja) * | 2007-03-22 | 2013-04-24 | パナソニック株式会社 | プラズマ処理装置及びプラズマ処理方法 |
US8906249B2 (en) | 2007-03-22 | 2014-12-09 | Panasonic Corporation | Plasma processing apparatus and plasma processing method |
JP2008109155A (ja) * | 2007-12-19 | 2008-05-08 | Applied Materials Inc | プラズマ装置 |
US8917022B2 (en) | 2008-05-22 | 2014-12-23 | Emd Corporation | Plasma generation device and plasma processing device |
JP5747231B2 (ja) * | 2008-05-22 | 2015-07-08 | 株式会社イー・エム・ディー | プラズマ生成装置およびプラズマ処理装置 |
JP2011029584A (ja) * | 2009-01-14 | 2011-02-10 | Tokyo Electron Ltd | 誘導結合プラズマ処理装置 |
US8597463B2 (en) | 2009-01-14 | 2013-12-03 | Tokyo Electron Limited | Inductively coupled plasma processing apparatus |
Also Published As
Publication number | Publication date |
---|---|
CN1794431A (zh) | 2006-06-28 |
TW200626021A (en) | 2006-07-16 |
US20060137611A1 (en) | 2006-06-29 |
KR20060073737A (ko) | 2006-06-29 |
JP4587951B2 (ja) | 2010-11-24 |
CN100414673C (zh) | 2008-08-27 |
TWI298005B (en) | 2008-06-11 |
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