JP2006184031A - Package for pressure detection system, and the pressure detection system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reliable package for a pressure detection system and a pressure detection system that allows improve pressure detection accuracy to increase, while realizing size reduction. <P>SOLUTION: The package for a pressure detection system comprise a first metal layer 8, which is formed on the surface of an insulating substrate 1 and is electrically connected to an electrode of a semiconductor device 3, a second metal layer 10 which is formed on the surface of a diaphragm 2, is electrically connected to a second electrode 7, and is electrically connected to the first metal layer 8 via a joint member 11, and a frame-shaped protrusion part 12 which is formed around a first electrode 7 on the surface of the insulating substrate 1 and defines a region on which the diaphragm 2 is arranged. An empty space 14 is partially formed between the diaphragm 2 and the frame-shaped protrusion part 12. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a pressure detection device package and a pressure detection device used in a pressure detection device for detecting pressure.

  Conventionally, a capacitance type pressure detection device is known as a pressure detection device for detecting pressure. As described in Patent Document 1 below, a package used in this capacitance type pressure detection device includes an insulating base having a mounting portion on which a semiconductor element is mounted, and a static electricity formed on the surface of the insulating base. A first electrode for forming a capacitance, a diaphragm joined in a flexible state to the surface of an insulating substrate, and a capacitor for forming a capacitance deposited on the surface of the diaphragm so as to face the first electrode The second electrode. In order to form a capacitance by the first electrode and the second electrode, it is necessary to provide a predetermined interval between these electrodes, and a spacer is provided between the diaphragm and the insulating base.

In such a pressure detection device package, the insulating base and the diaphragm are provided on the outer periphery of the first metal layer provided on the upper surface of the spacer formed so as to surround the first electrode, and on the diaphragm surface. The second metal layer thus formed is bonded by a conductive bonding material such as a silver (Ag) -copper (Cu) alloy or a gold (Au) -tin (Sn) alloy.
JP 2001-356064 A

  However, in such a conventional package, for example, one of the first electrode and the second electrode for forming capacitance is smaller than the other electrode in order to improve the sensitivity of pressure detection. When adopting the formed structure and reducing the size, it is necessary to further improve the accuracy of alignment between the first electrode and the second electrode. That is, when downsizing is attempted while improving the sensitivity of the pressure detection device, the first electrode is formed because the detection accuracy is significantly reduced due to the displacement between the first electrode and the second electrode. In addition, it is necessary to further improve the accuracy of alignment between the insulating base and the diaphragm on which the second electrode is formed.

  Further, when miniaturization is attempted in the conventional package, an excess bonding material interposed between the first metal layer and the second metal layer flows out to the insulating base or the like, and the excess bonding material is added to the insulating base. Lumps could be formed. And when this excess joining material hardened, there was a possibility that the excess joining material might peel off the 1st metal layer and the 2nd metal layer. If the first metal layer and the second metal layer are peeled off, it becomes difficult to join the diaphragm to the insulating substrate.

  The present invention has been devised in view of such conventional problems, and an object of the present invention is to provide a highly reliable package for a pressure detection device and a pressure detection device that achieves downsizing while improving pressure detection accuracy. It is to provide.

  The package for a pressure detection device of the present invention includes an insulating base having a mounting portion on which a semiconductor element is mounted, a first electrode for forming a capacitance formed on the surface of the insulating base, and a surface of the insulating base. A first metal layer that is formed and electrically connected to the electrode of the semiconductor element, a diaphragm disposed to face the surface of the insulating base, and a surface of the diaphragm so as to face the first electrode The formed second electrode for forming capacitance and the surface of the diaphragm are electrically connected to the second electrode and electrically connected to the first metal layer through a bonding material. A second metal layer, and a frame-shaped projection that is formed around the first electrode on the surface of the insulating base and defines a region in which the diaphragm is disposed, and the diaphragm and the frame-shaped projection A blank area is partially formed between them. The one in which the features.

  The package for a pressure detection device of the present invention is characterized in that a plurality of blank regions are formed around the diaphragm.

  The package for a pressure detection device of the present invention is characterized in that a plurality of blank regions are evenly arranged around the diaphragm.

  The package for a pressure detection device according to the present invention includes a spacer that is provided between a surface of an insulating base and the surface of the diaphragm, and that defines a distance between the first electrode and the second electrode. It is a feature.

  The package for a pressure detection device according to the present invention is characterized in that the insulating base, the diaphragm, the frame-shaped protrusion, and the spacer are made of the same material.

  The package for a pressure detection device of the present invention is characterized in that a part of the first metal layer is sandwiched between an insulating base and a frame-like projection.

  The pressure detection device of the present invention includes the pressure detection device package of the present invention, and a semiconductor element that is mounted on the mounting portion of the pressure detection device package and detects the pressure applied to the diaphragm. Is.

  The package for a pressure detection device according to the present invention includes a frame-shaped protrusion that is formed around the first electrode on the surface of an insulating base having a mounting portion on which a semiconductor element is mounted, and defines a region where a diaphragm is disposed. In addition, since the blank region is partially formed between the diaphragm and the frame-shaped protrusion, it is possible to reduce the size and improve the reliability while improving the pressure detection accuracy.

  That is, the package for a pressure detection device of the present invention includes a frame-shaped protrusion that is formed around the first electrode on the surface of the insulating base and defines a region in which the diaphragm is disposed, so that the diaphragm is insulated. When the frame is disposed at a position facing the surface, the frame-shaped protrusion is used for alignment between the diaphragm and the insulating base to suppress misalignment over the entire circumference of the diaphragm, and the diaphragm is placed at a predetermined position on the surface of the insulating base. And the positional accuracy between the first electrode and the second electrode can be increased. Therefore, it is possible to reduce the variation in detection accuracy and to reduce the size while improving the detection accuracy of the external pressure.

  In addition, since a blank region is partially formed between the diaphragm and the frame-shaped protrusion, an extra bonding material generated when the diaphragm is bonded to the insulating base is partially formed. Since it is dispersed in the blank area and escapes, no lump of bonding material is formed, and the formation of the lump of bonding material can effectively prevent the first metal layer from being peeled from the insulating substrate. become. Accordingly, the diaphragm can be accurately joined to a predetermined position of the insulating base.

  In the pressure detection device package according to the present invention, since a plurality of blank regions are formed around the diaphragm, a plurality of unnecessary bonding materials generated when the diaphragm is bonded to the insulating base are formed in the blank. Since it is dispersed in the region and escapes, the amount of excess bonding material in each blank region is reduced and the formation of a lump of bonding material can be suppressed, so that the first metal layer is effectively prevented from being peeled off from the insulating substrate. Will be able to. Accordingly, the diaphragm can be accurately joined to a predetermined position of the insulating base.

  In the pressure sensing device package according to the present invention, the plurality of blank regions are evenly arranged around the diaphragm, so that the excess bonding material generated when the diaphragm is bonded to the insulating base is a plurality of bonding materials. The first metal layer is peeled off from the insulating substrate because each of the blank regions is evenly dispersed and escapes, and the amount of excess bonding material in each blank region is reduced and the formation of a lump of bonding material can be suppressed. Can be effectively suppressed. Accordingly, the diaphragm can be accurately joined to a predetermined position of the insulating base. In addition, since the thickness of the bonding material interposed between the first metal layer and the second metal layer can be kept uniform, the distance between the first electrode and the second electrode can be made uniform. it can. Therefore, it is possible to improve the detection accuracy by reducing the variation in the detection accuracy of the external pressure.

  In addition, the pressure detection device package of the present invention includes a spacer that is provided between the surface of the insulating base and the surface of the diaphragm and that defines a distance between the first electrode and the second electrode. By forming the spacer thin, the distance between the first electrode and the second electrode forming the capacitance can be made small. That is, by reducing the distance between the first electrode and the second electrode, the opposing area between the first electrode and the second electrode that forms a desired capacitance is reduced, and the diaphragm is formed smaller. be able to. Therefore, the pressure detection device package of the present invention can be further downsized.

  In addition, since the distance between the first electrode and the second electrode is defined by the spacer, it is possible to detect the electrostatic capacitance with high accuracy. That is, the spacer can support and fix the diaphragm so that when the external pressure is repeatedly applied to the diaphragm, the deflection of the diaphragm is always proportional to the external pressure. Can be suppressed. Therefore, it is possible to improve the accuracy and accuracy of the external pressure and reduce the variation in detection accuracy.

  In the pressure detection device package of the present invention, the insulating base, the diaphragm, the frame-shaped protrusion, and the spacer are made of the same material, so that the external pressure can be detected with high accuracy. That is, when the diaphragm is disposed at a position facing the surface of the insulating base, the diaphragm and the projection are rubbed and the diaphragm or the projection is chipped, or the scrap is generated when rubbed. The possibility of interposing between the insulating base and the diaphragm can be reduced. Therefore, the external pressure can be detected with high accuracy.

  In addition, the insulating base and diaphragm for detecting the capacitance, the frame-shaped protrusions that define the area where the diaphragm is disposed, and the spacers that define the distance between the insulating base and the diaphragm are made of the same material, respectively. Since the mechanical strength of each is the same, plastic deformation is unlikely to occur at each abutment against external pressure, and there is no difference in thermal expansion. Distortion is less likely to occur, and each can be accurately placed at a predetermined position. Therefore, the external pressure can be detected with high accuracy and can be used under a wide range of temperature environments, so that a highly versatile pressure detecting device package can be obtained.

  In the pressure detection device package of the present invention, the diaphragm is placed at a predetermined position on the insulating substrate by forming a part of the first metal layer between the insulating substrate and the frame-shaped protrusion. It can be joined with high accuracy. That is, when the diaphragm is bonded to the insulating substrate, a part of the first metal layer is formed even if an excessive lump of bonding material generated is formed and the first metal layer is peeled off from the insulating substrate. Since the first metal layer is peeled off from the insulating base, the first metal layer can be effectively suppressed. Accordingly, the diaphragm can be accurately joined to a predetermined position of the insulating base.

  The pressure detection device of the present invention includes the package for the pressure detection device of the present invention, and a semiconductor element mounted on the mounting portion of the pressure detection device package for detecting the pressure applied to the diaphragm. It is possible to reduce the size while improving the pressure detection accuracy.

  A package for a pressure detection device according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a plan view showing a structure of an embodiment of a pressure detection device package according to the present invention, and FIG. 2 is a cross-sectional view taken along line XX ′ of the pressure detection device package shown in FIG. . The package for a pressure detection device according to the present invention is formed between an insulating base 1 having a first electrode 7 formed on the surface, a diaphragm 2 having a second electrode 9, and the insulating base 1 and the diaphragm 2. A spacer 13 and a protrusion 12 formed around the first electrode 7 on the surface of the insulating base 1 are provided.

  The insulating substrate 1 is a laminated layer made of an electrically insulating material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon carbide sintered body, a silicon nitride sintered body, or a glass-ceramic. Is the body. If the insulating substrate 1 is made of, for example, an aluminum oxide sintered body, it is manufactured as follows. First, a ceramic raw material powder such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide is mixed with an appropriate organic binder, solvent, plasticizer, and dispersant to form a slurry, which is then used by the doctor blade method. Are formed into a sheet shape to obtain a plurality of ceramic green sheets. Thereafter, a green ceramic molded body for the insulating substrate 1 is obtained by subjecting these ceramic green sheets to appropriate punching, laminating, and cutting. Then, the green substrate is fired at a temperature of about 1600 ° C., whereby the insulating substrate 1 is manufactured.

  The insulating base 1 has a concave portion 1a for accommodating the semiconductor element 3 formed on one surface (the lower surface in FIG. 2), and functions as a container for accommodating the semiconductor element 3. And the mounting part 1b in which the semiconductor element 3 is mounted is formed in the center part of the bottom face of this recessed part 1a. The semiconductor element 3 is mounted on the mounting portion 1b, and the semiconductor element 3 is covered with a resin sealing material 4 such as an epoxy resin in the recess 1a, whereby the semiconductor element 3 is sealed.

  In this example, the semiconductor element 3 is sealed by being covered with the resin sealing material 4, but a lid made of metal or ceramic is closed on one surface of the insulating base 1 so as to close the recess 1 a. It may be sealed by bonding.

  A plurality of wiring conductors 5 electrically connected to the respective electrodes of the semiconductor element 3 are led out to the mounting portion 1b. The wiring conductor 5 and the respective electrodes of the semiconductor element 3 are connected to a conductive material such as a solder bump. By bonding through the conductive bonding material 6 made of, each electrode of the semiconductor element 3 and each wiring conductor 5 are electrically connected, and the semiconductor element 3 is fixed to the mounting portion 1b. In the example shown in FIG. 2, the electrode of the semiconductor element 3 and the wiring conductor 5 are connected via solder bumps. However, the electrode of the semiconductor element 3 and the wiring conductor 5 are other than bonding wires or the like. The electrical connection means may be used.

  The wiring conductor 5 functions as a conductive path for electrically connecting each electrode of the semiconductor element 3 to the external electric circuit and the first electrode 7 and the second electrode 9, and a part of the wiring conductor 5 is one side of the insulating substrate 1. The other part is electrically connected to the first electrode 7 and the second electrode 9. The other part is electrically connected to the first electrode 7 and the second electrode 9. Then, after each electrode of the semiconductor element 3 is electrically connected to the wiring conductor 5 via a conductive bonding material 6 such as a solder bump and the semiconductor element 3 is sealed with the resin sealing material 4, A portion led out to the outer peripheral portion of one surface (the lower surface in FIG. 2) of the insulating base 1 of the wiring conductor 5 is bonded to the wiring conductor (not shown) of the external electric circuit board through a conductive bonding material such as solder. As a result, the semiconductor element 3 housed therein is electrically connected to the external electric circuit.

  Such a wiring conductor 5 is made of metal powder metallization such as W, Mo, Cu, and Ag, and is obtained by adding and mixing an appropriate organic binder, solvent, plasticizer, dispersant, etc. to metal powder such as W. The paste is applied in a predetermined pattern to a ceramic green sheet for the insulating substrate 1 by using a conventionally known screen printing method, and this is fired together with a green ceramic molded body for the insulating substrate 1 to synthesize the inside of the insulating substrate 1. In addition, a predetermined pattern is formed on the surface. The exposed surface of the wiring conductor 5 has a thickness so as to prevent the wiring conductor 5 from being oxidatively corroded and to improve the bonding between the wiring conductor 5 and the conductive bonding material 6 such as solder. It is preferable that a nickel (Ni) plating layer having a thickness of about 1 to 10 μm and a gold (Au) plating layer having a thickness of about 0.1 to 3 μm are sequentially deposited.

  The diaphragm 2 is disposed at a position facing the surface of the insulating substrate 1 (in FIG. 2, the upper surface of the insulating substrate 1). The diaphragm 2 is attached so as to form a sealed space with the insulating substrate 1. The diaphragm 2 has a thickness of 0 made of an electrically insulating material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon nitride sintered body, a silicon carbide sintered body, or a glass ceramic. .01 to 5 mm octagonal flat plate, and bends toward the insulating substrate 1 in response to external pressure.

  At this time, since the diaphragm 2 has an octagonal flat plate shape, the difference in the width of the bonding material 11 is small between the central portion and the corner portion of each side of the diaphragm 2, and therefore, the second metal is formed on the upper surface of the first metal layer 8. When the metal layer 10 is bonded, the bonding material 11 is not concentrated on a part, and the thickness of the bonding material 11 becomes uniform. Therefore, according to the pressure sensor element storage package of the present invention, the capacitance formed between the first electrode 7 and the second electrode 9 does not vary greatly.

  In addition, as the bonding material 11, a conductive brazing material such as an Ag—Cu alloy or an Au—Sn alloy is used, and it is preferable that the thickness is usually 10 to 150 μm. If the thickness is less than 10 μm, sufficient bonding strength cannot be obtained, and meniscus formation becomes difficult. If it exceeds 150 μm, the bonding material 11 may be removed from the surfaces of the first metal layer 8 and the second metal layer 10, which is inappropriate.

  In addition, the capacitance type pressure detection device is generally used under a pressure of 80 kPa (low pressure detection device) to 2000 kPa (high pressure detection device), and the diaphragm 2 has a thickness thereof. If it is less than 0.01 mm, its mechanical strength becomes small, and when it is applied with a large external pressure of, for example, about 80 kPa, it tends to break. On the other hand, if it exceeds 5 mm, it is difficult to bend at a pressure of, for example, about 2000 kPa. The diaphragm 2 for detecting pressure tends to be unsuitable. Therefore, the thickness of the diaphragm 2 is preferably in the range of 0.01 to 5 mm.

  If such a diaphragm 2 is made of, for example, an aluminum oxide sintered body, it is manufactured as follows. First, a ceramic raw material powder such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide is mixed with a suitable organic binder, solvent, plasticizer, and dispersant to form a slurry, and this is made using a doctor blade method. A ceramic green sheet is obtained by forming into a sheet. Thereafter, the ceramic green sheet is appropriately punched or cut to obtain a green ceramic molded body for the diaphragm 2. And the diaphragm 2 is manufactured by baking this raw ceramic molded object at the temperature of about 1600 degreeC.

  In addition, a second electrode 9 for forming a capacitance is attached to the central portion of the surface (the lower surface in FIG. 2) which is the inside of the sealed space of the diaphragm 2. The second electrode 9 functions as an electrode for forming a capacitance for the pressure-sensitive element by being disposed so as to face the first electrode 7.

  The first electrode 7 is formed at the center of the other surface (the upper surface in FIG. 2) of the insulating substrate 1. The first electrode 7 is for forming a capacitance for a pressure sensitive element together with the second electrode 9, and is formed in, for example, a circular pattern. Then, the wiring conductor 5a is electrically connected to the first electrode 7, and the electrode of the semiconductor element 3 is connected to the wiring conductor 5a via a conductive bonding material 6 such as a solder bump. The electrode of the semiconductor element 3 and the first electrode 7 are electrically connected.

  The first electrode 7 is made of metal powder metallization such as W, Mo, Cu, and Ag, and is obtained by adding and mixing an appropriate organic binder, solvent, plasticizer, and dispersant to the metal powder such as W. A metallized paste is printed and applied to a ceramic green sheet for the insulating substrate 1 using a conventionally known screen printing method, and is baked to form a predetermined pattern at the center of the upper surface of the insulating substrate 1. In order to prevent the first electrode 7 from being oxidized and corroded on the exposed surface of the first electrode 7, a Ni plating layer having a thickness of about 1 to 10 μm is preferably applied.

  The second electrode 9 is formed on the surface of the surface (the lower surface in FIG. 2) of the diaphragm 2 facing the insulating substrate 1. It consists of a metal powder metallization such as W, Mo, Cu, Ag, etc., and a metallized paste obtained by adding and mixing an appropriate organic binder, solvent, plasticizer, and dispersing agent to a metal powder such as W is subjected to a conventionally known screen printing method The ceramic green sheet for the diaphragm 2 is printed and applied and baked to form a predetermined pattern at the center of the lower surface of the diaphragm 2. In order to prevent the second electrode 9 from being oxidized and corroded on the exposed surface of the second electrode 9, a Ni plating layer having a thickness of about 1 to 10 μm is preferably applied.

  The protrusion 12 is formed in a frame shape around the first electrode 7 on the surface of the insulating substrate 1 (upper surface in FIG. 2). The protrusion 12 defines a region where the diaphragm 2 is disposed. That is, the protrusion 12 is used for alignment when the diaphragm 2 is disposed at a position opposed to the surface of the insulating base 1, so that the diaphragm 2 can be accurately disposed at a predetermined position on the surface of the insulating base 1. In addition, the positional accuracy between the first electrode 7 and the second electrode 9 can be increased.

  The protrusion 12 is formed in a square frame shape and protrudes from the diaphragm 2. With this configuration, when the package for the pressure detection device is handled, the possibility that the device or the like contacts the outer side or corner of the diaphragm 2 can be reduced, and the diaphragm 2 can be prevented from cracking.

  Such protrusions 12 are made of an electrically insulating material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon carbide sintered body, a silicon nitride sintered body, and a glass-ceramic. Consists of. For example, in the case of an aluminum oxide sintered body, it is formed as follows. First, a ceramic raw material powder such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide is mixed with a suitable organic binder, solvent, plasticizer, and dispersant to form a slurry, and this is made using a doctor blade method. A ceramic green sheet is obtained by forming into a sheet. Thereafter, the ceramic green sheet is appropriately punched or cut to obtain a green ceramic molded body for the diaphragm 2. Then, the raw ceramic molded body is fired at a temperature of about 1600 ° C. together with the raw ceramic molded body serving as the insulating base 1 to form a frame around the first electrode 7 on the surface of the insulating base 1.

  The first metal layer 8 is deposited around the first electrode 7 on the other surface (the upper surface in FIG. 2) of the insulating substrate 1. The first metal layer 8 is electrically connected to the second electrode 9 of the diaphragm 2 by being bonded to the second metal layer 10 with a conductive bonding material 11 such as an Ag—Cu alloy or an Au—Sn alloy. To be joined. A wiring conductor 5b, which is one of the wiring conductors 5, is electrically connected to the first metal layer 8, and an electrode of the semiconductor element 3 is connected to the wiring conductor 5b with a conductive bonding material 6 such as a solder bump. As a result, the second electrode 9 electrically connected to the first metal layer 8 and the electrode of the semiconductor element 3 are electrically connected.

  The first metal layer 8 is made of metal powder metallization such as W, Mo, Cu, and Ag, and an appropriate organic binder, solvent, plasticizer, and dispersant are added to and mixed with the metal powder such as W. The obtained metallized paste is printed on a ceramic green sheet for the insulating substrate 1 by screen printing and baked to form a predetermined frame-shaped pattern around the first electrode 7 on the other surface of the insulating substrate 1. It is formed.

  It should be noted that the exposed surface of the first metal layer 8 has a thickness to prevent the first metal layer 8 from being oxidatively corroded and to strengthen the bonding with the second metal layer 10 described later. Is preferably deposited with a Ni plating layer of about 1 to 10 μm.

  The second metal layer 10 is formed around the second electrode 9 of the diaphragm 2 (the lower surface of the diaphragm 2 in FIG. 2). The second metal layer 10 is connected to the second electrode 9 and the first metal layer 8, and the electrode of the semiconductor element 3 is connected to the wiring conductor 5b via a conductive bonding material 6 such as a solder bump. As a result, the electrode of the semiconductor element 3 and the second electrode 9 are electrically connected.

  The second metal layer 10 is made of metal powder metallization such as W, Mo, Cu, and Ag, and is obtained by adding and mixing an appropriate organic binder, solvent, plasticizer, and dispersant to the metal powder such as W. The paste is printed on a ceramic green sheet for the diaphragm 2 by screen printing and baked to form a frame-shaped pattern around the second electrode 9 of the diaphragm 2. The exposed surface of the second metal layer 10 has a thickness of 1 in order to prevent the second metal layer 10 from being oxidatively corroded and to strengthen the bonding with the first metal layer 8. A nickel plating layer of about 10 μm is applied.

  In the example of the embodiment of the present invention shown in FIG. 2, the second electrode 9 is attached to the central portion of the surface (the lower surface in FIG. 2) facing the insulating base 1 of the diaphragm 2. In addition, a second metal layer 10 electrically connected to the second electrode 9 is separately formed on the main surface of the diaphragm 2 around the second electrode 9, but the insulating base 1 of the diaphragm 2 and The outer surface of the second electrode 9 may be used as the second metal layer 10 on the opposite surface (the lower surface in FIG. 2) except for the entire surface excluding the portion in contact with the spacer 13.

  The first metal layer 8 and the second metal layer 10 are joined in such a manner that a space is formed between the first electrode 7 and the second electrode 9. A predetermined capacitance is formed according to the opposing area of the first electrode 7 and the second electrode 9 and the distance between the first electrode 7 and the second electrode 9. When an external pressure is applied to the upper surface of the diaphragm 2, the diaphragm 2 is bent toward the insulating base 1 in accordance with the pressure, and the distance between the first electrode 7 and the second electrode 9 is changed. Since the capacitance between the first electrode 7 and the second electrode 9 changes, it functions as a pressure-sensitive element that senses a change in external pressure as a change in capacitance. Then, this change in capacitance is transmitted to the semiconductor element 3 accommodated in the recess 1a via the wiring conductors 5a and 5b, and this is subjected to arithmetic processing by the semiconductor element 3, whereby the magnitude of the external pressure. Can be detected. That is, the semiconductor element 3 detects the pressure applied to the diaphragm 2 based on the change in capacitance between the first electrode 7 and the second electrode 9.

  The package for a pressure detection device according to the present invention is a frame that is formed around the first electrode 7 on the surface of the insulating base 1 having the mounting portion 1b on which the semiconductor element 3 is mounted, and that defines a region where the diaphragm 2 is disposed. By providing the protrusion 12 in the shape of a shape, it is possible to reduce the size while improving the pressure detection accuracy. That is, the package for a pressure detection device of the present invention includes a frame-shaped protrusion 12 that is formed around the first electrode 7 on the surface of the insulating base 1 and defines a region where the diaphragm 2 is disposed. When the diaphragm 2 is disposed at a position facing the surface of the insulating base 1, the frame-like protrusion 12 is used for positioning the diaphragm 2 and the insulating base 1 to suppress positional deviation over the entire circumference of the diaphragm 2, The diaphragm 2 can be accurately arranged at a predetermined position on the surface of the insulating base 1, and the positional accuracy between the first electrode 7 and the second electrode 9 can be made high. Therefore, it is possible to reduce the variation in detection accuracy and to reduce the size while improving the detection accuracy of the external pressure.

  The diaphragm 2 and the insulating base 1 are aligned with each other so that the outer side of the diaphragm 2 is aligned with the inner wall of the frame-shaped protrusion 12, so that the outer side of the diaphragm 2 and the inner wall of the frame-shaped protrusion 12 are aligned. By making the contact at least at two places, the accuracy of alignment can be increased.

  In addition, since the blank region 14 is partially formed between the diaphragm 2 and the frame-shaped protrusion 12, the extra bonding material 11 generated when the diaphragm 2 is bonded to the insulating base 1 is Since it is dispersed and escapes to the partially formed blank region 14, the lump of the bonding material 11 is not formed, and the first metal layer 8 is peeled off from the insulating substrate 1 by the formation of the lump of the bonding material 11. Can be effectively suppressed. Therefore, the diaphragm 2 can be accurately joined to a predetermined position of the insulating base 1.

  In the pressure detection device package of the present invention, a plurality of blank regions 14 are preferably formed around the diaphragm 2. With this configuration, the excess bonding material 11 generated when the diaphragm 2 is bonded to the insulating substrate 1 is dispersed in the plurality of blank regions 14 and escapes. Therefore, the excess bonding material 11 in each blank region 14 is removed. Since the amount is reduced and the formation of the bonding material 11 lump can be suppressed, it is possible to effectively suppress the first metal layer 8 from being peeled off from the insulating substrate 1. Therefore, the diaphragm 2 can be accurately joined to a predetermined position of the insulating base 1.

  Further, in the pressure detection device package of the present invention, it is preferable that the plurality of blank regions 14 are evenly arranged around the diaphragm 2. With this configuration, the excessive bonding material 11 generated when the diaphragm 2 is bonded to the insulating base 1 is dispersed evenly in the plurality of blank regions 14 and escapes, and the excessive bonding material 11 in each blank region 14 is escaped. Therefore, the formation of the lump of the bonding material 11 can be suppressed, so that the first metal layer 8 can be effectively suppressed from being peeled off from the insulating substrate 1. Therefore, the diaphragm 2 can be accurately joined to a predetermined position of the insulating base 1. Further, since the thickness of the bonding material 11 interposed between the first metal layer 8 and the second metal layer 10 can be kept uniform, the distance between the first electrode 7 and the second electrode 9 is also set. It can be made uniform. Therefore, it is possible to improve the detection accuracy by reducing the variation in the detection accuracy of the external pressure.

  Further, the package for a pressure detection device of the present invention includes a spacer 13 provided between the surface of the insulating base 1 and the surface of the diaphragm 2 and defining a distance between the first electrode 7 and the second electrode 9. It is preferable. With this configuration, the spacer 13 can be formed thin, and the distance between the first electrode 7 and the second electrode 9 forming the capacitance can be reduced. That is, by reducing the distance between the first electrode 7 and the second electrode 9, the opposing area between the first electrode 7 and the second electrode 9 forming a desired capacitance is reduced, thereby reducing the diaphragm. 2 can be formed small. Therefore, the pressure detection device package of the present invention can be further downsized.

  In addition, since the distance between the first electrode 7 and the second electrode 9 is defined by the spacer 13, it is possible to detect a highly accurate capacitance. That is, the spacer 13 can support and fix the diaphragm 2 so that when the external pressure is repeatedly applied to the diaphragm 2, the deflection of the diaphragm 2 is always proportional to the external pressure. The variation of the bending with respect to can be suppressed. Therefore, it is possible to improve the detection accuracy by reducing the variation in the detection accuracy of the external pressure.

  The spacer 13 is formed between the surface of the insulating base 1 and the diaphragm 2, and defines the distance between the first electrode 7 and the second electrode 9. When the external pressure is repeatedly applied to the diaphragm 2, the diaphragm 2 can be supported and fixed so that the deflection of the diaphragm 2 is always proportional to the external pressure. Is suppressed.

  The spacer 13 may be provided in a frame shape so as to surround the outer periphery of the first electrode 7 and the second electrode 9 in order to keep the distance between the insulating base 1 and the diaphragm 2 by the spacer 13 with high accuracy. The outer periphery of the first electrode 7 and the second electrode 9 may have a cylindrical shape, a quadrangular prism, or the like formed at equal intervals in at least three locations. Further, it may be formed on the surface of the insulating substrate 1 (the upper surface in FIG. 2) so as to be in contact with the diaphragm 2, or may be formed on the surface of the diaphragm 2 so as to be in contact with the insulating substrate 1.

  Such a spacer 13 is preferably formed of a material that is small in plastic deformation due to stress when an external pressure is applied. For example, the aluminum oxide sintered body, the aluminum nitride sintered body, and the mullite sintered body are used. There are high-hardness ceramics such as sintered bodies and sintered glass-ceramics. For example, when the spacer 13 is formed on the surface of the insulating base 1 and is made of an aluminum oxide sintered body, the spacer 13 is formed as follows. First, a suitable organic binder, solvent, plasticizer, and dispersant are added to and mixed with ceramic raw material powder such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide to form a mud-like insulating paste. The paste is formed at a predetermined position of the ceramic green sheet for the insulating substrate 1 by using a screen printing method or the like, and is fired at a temperature of about 1600 ° C. together with the green ceramic molded body for the insulating substrate 1. It is formed at the position.

  In the pressure detecting device package according to the present invention, the insulating base 1, the diaphragm 2, the frame-like protrusion 12, and the spacer 13 are made of the same material, so that the external pressure can be detected with high accuracy. That is, when the diaphragm 2 is disposed at a position facing the surface of the insulating substrate 1, the diaphragm 2 and the protrusion 12 are rubbed, and the diaphragm 2 and the protrusion 12 are chipped or debris is generated when rubbed. In other words, the scrap is interposed between the insulating base 1 and the diaphragm 2 and causes an electrical short circuit between the first electrode 7 and the second electrode 9, and the capacitance cannot be detected. The possibility can be reduced. Therefore, the external pressure can be detected with high accuracy.

  Further, the insulating base 1 and the diaphragm 2 for detecting the capacitance, the frame-shaped protrusion 12 that defines the area where the diaphragm 2 is disposed, and the spacer 13 that defines the distance between the insulating base 1 and the diaphragm 2 are the same. Since each material has the same mechanical strength, it is difficult for plastic deformation to occur at each abutting portion with respect to external pressure, and there is no difference in thermal expansion. Due to this temperature change, distortion is less likely to occur between them, and each can be accurately placed at a predetermined position. Therefore, the external pressure can be detected with high accuracy and can be used under a wide range of temperature environments, so that a highly versatile pressure detecting device package can be obtained.

  In the pressure detection device package of the present invention, the first metal layer 8 is preferably formed such that a part thereof is sandwiched between the insulating base 1 and the frame-shaped protrusion 12. With this configuration, the diaphragm 2 can be accurately joined to a predetermined position of the insulating base 1. That is, even if the excess lump of the bonding material 11 generated when the diaphragm 2 is bonded to the insulating base 1 is formed and the first metal layer 8 is about to be peeled off from the insulating base 1, the first metal layer Since a part of 8 is sandwiched between the insulating base 1 and the frame-like protrusion 12, the first metal layer 8 can be effectively prevented from being peeled off from the insulating base 1. . Therefore, the diaphragm 2 can be accurately joined to a predetermined position of the insulating base 1.

  The pressure detection device of the present invention includes the pressure detection device package of the present invention and a semiconductor element 3 that is mounted on the mounting portion of the pressure detection device package and detects the pressure applied to the diaphragm 2. It is possible to reduce the size while improving the accuracy of detecting the external pressure.

  Note that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention. For example, in FIG. 2, the diaphragm 2 has an octagonal shape and the protrusion 12 has a rectangular frame shape. However, the diaphragm 2 has a quadrangular or circular shape so that a blank area can be efficiently formed. The protrusion 2 may have a frame shape such as a circle.

It is a top view which shows the structure of embodiment of the package for pressure detection apparatuses of this invention. It is sectional drawing in the X-X 'line | wire of the package for pressure detection apparatuses shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Insulation base | substrate 1a ... Recessed part 1b ... Mounting part 2 ... Diaphragm 3 ... Semiconductor element 4 ... Resin sealing material 5, 5a, 5b ... Wiring conductor 6. .... Conductive bonding material 7 ... 1st electrode 8 ... 1st metal layer 9 ... 2nd electrode 10 ... 2nd metal layer 12 ... Frame-shaped projection part 13 ... Spacer 14 ... Blank area

Claims (7)

An insulating substrate having a mounting portion on which a semiconductor element is mounted; a first electrode for forming a capacitance formed on the surface of the insulating substrate; and a surface formed on the surface of the insulating substrate. A first metal layer that is electrically connected; a diaphragm disposed opposite to the surface of the insulating substrate; and an electrostatic surface formed on the surface of the diaphragm so as to face the first electrode. A second electrode for forming a capacitor, formed on the surface of the diaphragm, electrically connected to the second electrode and electrically connected to the first metal layer through a bonding material. A second metal layer, and a frame-shaped protrusion that is formed around the first electrode on the surface of the insulating base and defines a region in which the diaphragm is disposed, and the diaphragm and the frame There is a blank area between the protrusions Package for pressure detection apparatus characterized by being divided formed. The pressure detecting device package according to claim 1, wherein a plurality of the blank regions are formed around the diaphragm. The package for a pressure detection device according to claim 2, wherein the plurality of blank areas are evenly arranged around the diaphragm. 2. A spacer provided between the surface of the insulating base and the surface of the diaphragm, the spacer defining a distance between the first electrode and the second electrode. The package for pressure detection apparatuses in any one of Claim 3. 5. The package for a pressure detection device according to claim 4, wherein the insulating base, the diaphragm, the frame-shaped protrusion, and the spacer are made of the same material. The pressure according to any one of claims 1 to 5, wherein a part of the first metal layer is sandwiched between the insulating base and the frame-shaped protrusion. Package for detection device. A pressure detection device package according to any one of claims 1 to 6, and a semiconductor element mounted on the mounting portion of the pressure detection device package and detecting pressure applied to the diaphragm. A pressure detection device characterized by that.

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