JP2006159883A - 導光板製造用スタンパの製造方法 - Google Patents
導光板製造用スタンパの製造方法 Download PDFInfo
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- JP2006159883A JP2006159883A JP2005001694A JP2005001694A JP2006159883A JP 2006159883 A JP2006159883 A JP 2006159883A JP 2005001694 A JP2005001694 A JP 2005001694A JP 2005001694 A JP2005001694 A JP 2005001694A JP 2006159883 A JP2006159883 A JP 2006159883A
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- manufacturing
- guide plate
- stamper
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0065—Manufacturing aspects; Material aspects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0017—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor for the production of embossing, cutting or similar devices; for the production of casting means
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/10—Moulds; Masks; Masterforms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Light Guides In General And Applications Therefor (AREA)
- Planar Illumination Modules (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
【解決手段】本発明は、以下の製作段階を含むことを特徴とする。
(1)電導膜が蒸着されたガラスを洗浄するステップ、
(2)前記電導膜上を電導性材料で鍍金するステップ、
(3)前記鍍金層上にフォトレジストをスピンコーティングするステップ、
(4)所望のパターンマスクを載せてから露光し、次いで現像するステップ、
(5)フォトレジストが部分的に除去された鍍金層を湿式蝕刻方法によりエッチングするステップ、
(6)残余フォトレジストを除去するステップ、
(7)完成されたパターン面をニッケル鍍金を介してマスターを製作するステップ及び
(8)前記マスターを離型させ、再鍍金することによってスタンパを製作するステップ。
【選択図】 図1
Description
(1)電導膜が蒸着されたガラスを洗浄するステップ、
(2)前記電導膜上を電導性材料で鍍金するステップ、
(3)前記鍍金層上にフォトレジストをスピンコーティングするステップ、
(4)所望のパターンマスクをのせてから露光し、次いで現像するステップ、
(5)フォトレジストが部分的に除去された鍍金層を湿式蝕刻方法でエッチングするステップ、
(6)残余フォトレジストを除去するステップ、
(7)完成されたパターン面をニッケル鍍金を介してマスターを製作するステップ及び
(8)前記マスターを離型させ、再び鍍金することによってスタンパを製作するステップ。
2 電導膜
3 電導性材料鍍金層
4 フォトレジスト(photoresist)
Claims (4)
- 以下のステップを含む導光板製造用スタンパの製造方法。
(1)電導膜が蒸着されたガラスを洗浄するステップ、
(2)前記電導膜上を電導性材料で鍍金するステップ、
(3)前記鍍金層上にフォトレジストをスピンコーティングするステップ、
(4)所望のパターンマスクを載せてから露光し、次いで現像するステップ、
(5)フォトレジストが部分的に除去された鍍金層を湿式蝕刻方法でエッチングするステップ、
(6)残余フォトレジストを除去するステップ、
(7)完成されたパターン面をニッケル鍍金を介してマスターを製作するステップ及び
(8)前記マスターを離型させ、再鍍金することによってスタンパを製作するステップ。 - 前記(2)ステップにおける電導性材料は、銅、ニッケル、又はクロムであることを特徴とする請求項1に記載の導光板製造用スタンパの製造方法。
- 前記(5)ステップにおけるエッチングの深さは、鍍金層の厚さと同一であることを特徴とする請求項1に記載の導光板製造用スタンパの製造方法。
- 前記(5)ステップにおけるエッチングに用いられるエッチング液は、窒酸(nitric acid)と超純水との混合物、又は、硫酸と過酸化水素と超純水との混合物であることを特徴とする請求項1に記載の導光板製造用スタンパの製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040102225A KR100676073B1 (ko) | 2004-12-07 | 2004-12-07 | 도광판 제조용 스탬퍼의 제작방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006159883A true JP2006159883A (ja) | 2006-06-22 |
JP4248501B2 JP4248501B2 (ja) | 2009-04-02 |
Family
ID=35911322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005001694A Expired - Fee Related JP4248501B2 (ja) | 2004-12-07 | 2005-01-06 | 導光板製造用スタンパの製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20060118426A1 (ja) |
EP (1) | EP1669782A3 (ja) |
JP (1) | JP4248501B2 (ja) |
KR (1) | KR100676073B1 (ja) |
CN (1) | CN1786746A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010274650A (ja) * | 2009-05-29 | 2010-12-09 | Obducat Ab | 複製技術のための金属製スタンプの製造 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005059604A1 (ja) * | 2003-12-17 | 2005-06-30 | Mitsubishi Denki Kabushiki Kaisha | フレネル光学素子及び投写型表示装置 |
US8259688B2 (en) | 2006-09-01 | 2012-09-04 | Wi-Lan Inc. | Pre-allocated random access identifiers |
TWI345656B (en) * | 2006-09-20 | 2011-07-21 | Coretronic Corp | Method of manufacturing master of light-guide plates |
TW200833871A (en) * | 2006-11-17 | 2008-08-16 | Sachem Inc | Selective metal wet etch composition and process |
US20080191904A1 (en) * | 2007-02-12 | 2008-08-14 | Kai-Jie Tsao | Method For Manufacturing Thin Keypad Assembly And Such Assembly |
US7976741B2 (en) * | 2007-02-12 | 2011-07-12 | Ichia Technologies, Inc. | Method of manufacturing light guide plate of keypad |
KR100898740B1 (ko) * | 2007-11-22 | 2009-05-20 | 주식회사 코아옵틱스 | 액정표시장치 백라이트용 도광부재의 패턴 가공을 위한마스터롤 및 그 제조방법 |
CN101256354B (zh) * | 2008-04-14 | 2012-05-23 | 友达光电股份有限公司 | 压模及其制造方法 |
EP2399151B1 (en) | 2009-02-18 | 2019-11-27 | ROLIC Technologies AG | Surface relief microstructures, related devices and method of making them |
KR101302402B1 (ko) * | 2011-02-01 | 2013-09-02 | 레이젠 주식회사 | 도광판 제조용 스탬퍼 및 이의 제조 방법 |
KR101328445B1 (ko) * | 2012-06-08 | 2013-11-14 | 레이젠 주식회사 | 대면적 도광판 스탬퍼 제조 방법 |
CN102692673B (zh) * | 2012-06-20 | 2014-09-03 | 丹阳博昱科技有限公司 | 一种用掩模板制作大版导光片的方法 |
CN102880370B (zh) * | 2012-10-26 | 2016-04-06 | 信利光电股份有限公司 | 一种菲林结构电容式触摸屏的触控感应器及其制作方法 |
TWI568117B (zh) * | 2015-04-20 | 2017-01-21 | 友嘉科技股份有限公司 | 雷射的封裝結構及其相關元件 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE657708A (ja) * | 1963-12-30 | |||
US3407126A (en) * | 1965-12-23 | 1968-10-22 | Ibm | Electrodeposition of magnetic thin films |
US5326454A (en) * | 1987-08-26 | 1994-07-05 | Martin Marietta Corporation | Method of forming electrodeposited anti-reflective surface coatings |
JPH05131457A (ja) * | 1991-11-08 | 1993-05-28 | Olympus Optical Co Ltd | スタンパの製造方法 |
JP2003066613A (ja) * | 2001-08-22 | 2003-03-05 | Columbia Music Entertainment Inc | スタンパの製造方法 |
JP2003245925A (ja) * | 2002-02-26 | 2003-09-02 | Towa Corp | 導光板成形用金型の加工方法及び金型と導光板 |
KR100486459B1 (ko) * | 2002-09-24 | 2005-05-03 | 제이엠아이 주식회사 | 도광판 제조용 스탬퍼의 제작방법 |
JP4274350B2 (ja) * | 2002-09-24 | 2009-06-03 | コニカミノルタホールディングス株式会社 | 金型の製造方法 |
-
2004
- 2004-12-07 KR KR1020040102225A patent/KR100676073B1/ko not_active IP Right Cessation
- 2004-12-27 US US11/022,912 patent/US20060118426A1/en not_active Abandoned
- 2004-12-29 CN CNA2004101036168A patent/CN1786746A/zh active Pending
-
2005
- 2005-01-06 JP JP2005001694A patent/JP4248501B2/ja not_active Expired - Fee Related
- 2005-01-20 EP EP05001077A patent/EP1669782A3/en not_active Withdrawn
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010274650A (ja) * | 2009-05-29 | 2010-12-09 | Obducat Ab | 複製技術のための金属製スタンプの製造 |
Also Published As
Publication number | Publication date |
---|---|
US20060118426A1 (en) | 2006-06-08 |
KR100676073B1 (ko) | 2007-01-30 |
EP1669782A3 (en) | 2006-12-13 |
EP1669782A2 (en) | 2006-06-14 |
KR20060063135A (ko) | 2006-06-12 |
CN1786746A (zh) | 2006-06-14 |
JP4248501B2 (ja) | 2009-04-02 |
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