JP2006150454A - Cooling plate, manufacturing method thereof, sputtering target and manufacturing method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin cooling plate which has high cooling efficiency and a large area shape, a manufacturing method therefor, a sputtering target and a manufacturing method therefor. <P>SOLUTION: The cooling plate is formed with a groove which becomes a passage of a coolant and is provided inside a main body, and the groove is covered with a cover having a width larger than that of the groove. The cover is joined to the main body by friction stir welding, and a joining bead formed by the friction stir welding is located outside the passage. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a novel cooling plate, a manufacturing method thereof, a sputtering target, and a manufacturing method thereof, and relates to a backing plate, a manufacturing method thereof, a sputtering target, and a manufacturing method thereof.

  Although the cooling plate is widely used industrially, an efficient cooling function is required. For example, in a sputtering apparatus, efficiently dissipating heat generated in the target material affects the performance of the obtained thin film. In particular, in the case of a sputtering apparatus for a liquid crystal manufacturing apparatus, a large-area target material is used, and the generated heat is large. For this reason, a backing plate having a water channel inside a smooth plate made of copper, copper alloy, aluminum or aluminum alloy, covered with a lid, and sealed metallically is used as a cooling plate. Conventionally, the backing plate body and the lid are joined by metal joining by electron beam welding, diffusion joining, brazing, or the like. In addition to the backing plate, various water-cooled jackets, water-cooled chills, and the like are used as the heat radiating plates, and each has a structure having a water channel in the same manner as the backing plate.

  Moreover, the backing plate used for the liquid crystal manufacturing apparatus needs to hold the target material in the sputtering process and have an efficient cooling function. For this reason, a cooling water channel is provided inside a smooth plate made of copper, copper alloy, aluminum, or aluminum alloy, and this is covered with a lid, and is sealed by metallic bonding. Conventionally, the main body of the backing plate and the lid are joined by metal joining by electron beam welding, diffusion joining, brazing, or the like.

Regarding the production of this backing plate, there is Patent Document 1, which discloses a backing plate in which a plate-like cooling part having a refrigerant passage inside is integrally joined to a plate-like base part by friction stir welding. Has been.
JP 2000-73164 A

  The backing plate needs to increase the cooling efficiency, and the surface of the backing plate that comes into contact with the target material or the like requires high flatness and smoothness. Conventionally, the backing plate body and the lid covering the water channel are joined by electron beam welding, laser welding, diffusion joining, brazing, or the like. However, all of these welding methods have large thermal distortion after joining, and it is necessary to make the surface smooth by correction work or machine cutting after joining, which is problematic in terms of quality, accuracy, productivity, and cost. .

  Furthermore, in the above-described known example, a structure is shown in which a target is provided via a plate-like base portion provided on a plate-like cooling portion having a refrigerant passage, and direct cooling is obtained. In addition to this, a compact cooling passage cannot be formed.

  An object of the present invention is to provide a cooling plate having a high cooling efficiency and being thin and having a large area, a manufacturing method thereof, a sputtering target, and a manufacturing method thereof.

  The present invention has a groove serving as a refrigerant passage inside the main body, the groove is covered with a lid having a width wider than the groove, and the lid is joined to the main body by friction stir welding. The cooling plate is characterized in that the joining bead formed by is located outside the passage.

  Furthermore, the present invention has a plurality of independent refrigerant passages inside the main body, the grooves are covered with a lid, and the lid is joined to the main body by friction stir welding, In the cooling plate, a joining bead formed by joining is located outside the passage.

  Further, the present invention has a groove serving as a refrigerant passage inside the main body, the groove is covered with a lid, and the lid is joined to the main body by friction stir welding, and the joint formed by the joining The bead is formed in the main body at least other than the joint, and has a groove serving as a coolant passage inside the main body, and the groove is covered with a lid having a width wider than the groove, Has one or more fins, the groove is covered with a lid having a width larger than the groove, and the lid is joined to the main body by friction stir welding, and a joining bead formed by the joining is the passage. That the passage is a closed passage in the main body, an air hole is provided in a portion forming the passage, and at least the end of the joining bead of the joint is provided. Any of other than the joint, or In the cooling plate, characterized in that it consists of a combination of these.

  In particular, the present invention has a lid that closes the groove and is joined to the main body in which a groove having a path as a closed water channel is formed and joined, so that there is no mutual expansion of the butted portions, As a result, the main body itself is integrated and there is no extra joining, so that a thin and compact cooling plate can be obtained even in a large area regardless of the area.

  The water channel is at least one of an I shape, a U shape, an S shape, an M shape, a circular shape, and a spiral shape, and it is preferable that there are one or more of these. Since each water channel has a closed channel, each channel has an inlet and an outlet. In a plurality of channels, the inlet and the outlet can be connected to each other in parallel to allow uniform cooling of the entire cooling plate. . It is preferable to connect the flow paths that allow more uniform cooling.

  The main body and the lid are preferably made of any one of copper, copper alloy, aluminum, aluminum alloy, titanium, and stainless steel, but the former has higher heat conductivity.

  The present invention has a first groove serving as a refrigerant passage inside the main body and a second groove having a width larger than the groove and mounting a lid on the first groove. In the manufacturing method of the cooling plate which mounts the lid and joins to the main body, the lid and the main body are joined by friction stir welding by inserting a rotary tool having a shoulder and a pin, and a joining bead formed by the joining The bonding is performed so as to be outside the passage. The bonding method can be performed at a temperature below the melting point of copper or aluminum. Further, the joining is performed in a coolant such as water, oil, inert gas or the like while forcibly cooling by applying the coolant in the vicinity of the joint.

  According to the friction stir welding method of the present invention, the rotating tool having a shoulder and pin made of a material substantially harder than the aluminum or copper alloy is inserted while rotating the rotating tool, and is relatively relative to the material to be joined. This is a method of joining by using frictional heat and plastic flow generated between the rotary tool and the joining material by moving them. This is known in Japanese Patent Publication No. 7-505090. In other words, it utilizes the plastic flow phenomenon caused by frictional heat between the rotating tool and the material to be joined. Unlike conventional welding methods such as arc welding and electron beam welding, the materials to be joined are melted and joined (welded). It is not a thing. Furthermore, the friction stir welding method is different from the method of rotating the workpieces and joining them by frictional heat as in the conventional friction welding method, and the workpiece is continuously melted in the longitudinal direction of the joining line at a temperature below the melting point of the joining material. It is a method that can be joined.

  In the friction stir welding method, since the joining can be performed at a low temperature below the melting point of the joining material, a distortion caused by joining is small as compared with the conventional welding method, and a highly accurate cooling plate can be manufactured. Therefore, the correction work process after joining can be simplified, and the cost can be reduced by shortening the correction work time.

  Further, the joining method can be performed while applying the coolant in a coolant such as water, oil, inert gas or the like in the vicinity of the joining material. At this time, the temperature rise at a position several millimeters away from the joint can be reduced, and the thermal strain after joining can be minimized. Accordingly, the surface in contact with the silicon wafer can be smooth and highly accurate, and a highly reliable backing plate can be manufactured.

  That is, the present invention is made of copper, copper alloy, aluminum, or aluminum alloy, and includes a main body and a lid, and has a cooling water channel inside. The water channel is covered with the lid, and the lid is metallic with the main body. In the manufacturing method of the bonded backing plate, the lid and the main body are bonded by friction stir welding.

  When the rotary tool composed of a shoulder and a pin used for friction stir welding rotates counterclockwise, the water channel is preferably on the left side with respect to the traveling direction of the rotary tool. Also, if the rotating tool is rotated to the right, the water channel should be on the right side. When the rotating tool is rotated counterclockwise, a very fine defect rarely occurs on the right side with respect to the traveling direction of the rotating tool. At this time, if the water channel is on the right side, a defect is formed in the vicinity of the wall surface of the water channel. However, if the water channel is on the left side, the defect is generated inside the main body, and there is no defect near the water channel. Of course, if the rotation tool is rotated to the right, this can be reversed.

  Further, the center of the rotary tool composed of a shoulder and a pin used for friction stir welding is preferably located at a position away from the water channel by the maximum radius of the pin portion. That is, in friction stir welding, the workpiece receives a downward load of about 10 kN from the rotating tool. If there is a rotating tool on the lid on the water channel, this load will cause copper to buckle and deform, causing meat to escape into the water channel and fail to join. As a general case, the shape of the water channel is about 5 mm deep and about 50 mm wide, and the thickness of the lid is about 5 mm.

  The lid that covers the cooling water channel is slightly larger than the water channel and has a main body and an inlay structure. The lid is manufactured by machining, and a curved portion of about 3R to 10R (unit: mm) is provided at a corner portion so as to be easily fitted into the main body. When joining the main body and the lid by friction stir welding, it is necessary to join such curves. As described above, for example, when the rotating tool rotates counterclockwise, the defect rarely occurs on the right side with respect to the rotating tool traveling direction. That is, when passing through the curved portion, it is necessary to relatively reduce the right-side joining region in order to eliminate the right-side defect of the rotating tool. Therefore, when the rotary tool passes through the plane curve portion (R portion), the direction of bending is preferably opposite to the rotation direction of the rotary tool.

  In general, in friction stir welding, the rotary tool is joined while being slightly inclined rearward with respect to the traveling direction. Since the joining of the backing plate is a joining on a two-dimensional plane, it is necessary to control the receding angle of the rotary tool to be always constant with respect to the joining direction. For this reason, it is necessary for the joining apparatus to have one control axis. However, according to the present invention, the rotary tool does not necessarily have a receding angle, that is, the rotary tool can be joined with good quality even if it is always perpendicular to the joining material, thereby simplifying the apparatus. It becomes possible. Even when the rotary tool is provided with a receding angle, it is also possible to join all straight and curved joints only with straight lines. That is, a method of joining the planar curved portion (R portion) that turns back from the straight portion in the form of two straight lines is also possible.

  In the friction stir welding, a rotating tool that rotates is forcibly moved with respect to the workpiece, so that the workpiece receives a large force from the rotating tool. For this reason, it is necessary to fix the workpiece firmly. In the case of the backing plate, the main body can be fixed relatively easily, depending on the shape of the backing plate. However, fixing the lid is relatively difficult due to the complicated shape of the water channel. Therefore, it is necessary to temporarily attach the lid and the body. Unlike the main joining, the tacking has few joining portions and the heat input is not large, so that a conventional welding method may be used. However, preferably, friction stir welding is desired. This is because it leads to high costs due to multiple processes. That is, first, a rotating tool composed only of a shoulder is inserted into the joint portion while rotating. The amount of insertion at this time needs to be smaller than the amount of shoulder insertion at the time of subsequent main joining.

  After this, pull out the rotating tool and apply it to several points. Thereby, only a surface part joins a junction part. After the temporary attachment, the rotating tool is replaced and the main joining is performed.

  The present invention has a groove serving as a refrigerant passage inside the main body, and in the manufacturing method of the cooling plate for joining the lid to the groove, the joint portion between the main body and the lid has a thicker projection than the other parts, The protrusion is joined by friction stir welding by inserting and moving a rotary tool having a shoulder and a pin, the lid and the main body are joined by friction stir welding, and an air hole is provided in a portion forming the passage. The lid and the main body are joined by friction stir welding by inserting and moving a rotary tool having a shoulder and a pin, and at least the end portion of the joining is formed other than the joining portion, and After the main body and the lid are preliminarily joined partially by friction stir welding by inserting a rotary tool having only a shoulder in advance, the whole joint is then joined by friction stir welding. In the manufacturing method of the cooling plate, wherein the door.

  The projection formed thicker than the other parts at the joint between the main body and the lid is formed with a recess in the joint by inserting a rotary tool having a shoulder and a pin. In order to eliminate the cutting at the flat plate portion in the cutting process after joining by making the thickness higher than that.

  By providing air holes in the part that forms the passage, when installing the lid in the groove when joining, let the air in the groove escape to the outside when joining by inserting the rotary tool so that sound joining can be done Is. The groove in the present invention forms a closed flow path inside the cooling plate main body, and the lid is preferably the same as the planar shape of the groove, so that they closely match each other. Therefore, air must be removed.

  Since the insertion hole of the rotary tool is formed at the end of the joint, the end of the joint is guided to the inside of the cooling plate body other than the joint and the insertion hole of the rotary tool is formed at that part. It is something that can be done.

  In conventional electron beam welding or the like, since the deformation amount of the joined product after joining is large, the warp is corrected after joining, and then the front and back surfaces of the backing plate are ground. When joining by friction stir welding is used, since deformation after joining can be suppressed, the number of steps can be reduced as described above, and the cost can be reduced. However, in the joint portion joined by friction stir welding, joining is performed with the rotary tool inserted into the joint portion, so that burrs are generated in the vicinity of the joint portion, and the joint portion becomes thinner than the other portions. The surface smoothness is not perfect as it is, and surface grinding is required in either case, but if the joint between the main body and the lid is locally thick, the thickness of the joint after joining Can be made substantially equal to other parts, and the surface cutting allowance after joining can be reduced, leading to a reduction in manufacturing cost.

  In friction stir welding, the rotary tool is pressed against the joint, the frictional heat generated in the rotary tool and the joint is used to push the rotary tool into the joint, and the rotary tool is moved to cause plastic flow to cause the material to flow. Stir and solid phase bond. The problem here is that the resistance generated when the rotary tool is inserted or moved into the joint is as large as about 10 kN or more. For this reason, the structure of the joint that can withstand this force and the restraint of the joint itself are required. In the case of the backing plate, the main body can be fixed relatively easily, depending on the shape of the backing plate. However, fixing the lid is relatively difficult due to the complicated shape of the cooling holes meandering.

  Therefore, it is necessary to temporarily attach the lid and the body. Unlike the main joining, the temporary attachment may be a conventional welding method because there are few joining portions and heat input is not large. However, preferably, friction stir welding is desired. This is because the manufacturing cost is increased due to the complexity of the process. That is, the main body and the lid are inserted in advance into the joint portion while rotating a rotary tool consisting only of a shoulder by friction stir welding. The amount of insertion at this time needs to be smaller than the amount of shoulder insertion at the time of subsequent main joining.

  After this, pull out the rotating tool and apply it to several points. Thereby, only a surface part joins a junction part. After the temporary attachment, the rotating tool is replaced and the main joining is performed. Further, only the curved joint portion of the joining portion of the backing plate main body and the lid is performed by the existing welding method, so that the friction stir welding portion is only the straight portion. By doing so, the shaft configuration of the friction stir welding apparatus can be simplified, and the apparatus cost can be reduced.

  In the friction stir welding, the starting point and the ending point of the welding are different from those in the other steady state in the heat input and geometrical differences. At the starting point, the rotary tool is forcibly inserted into the joint, so the resistance force received by the rotary tool is large and the heat input is also large. In order to reduce the resistance at the starting point, one of the measures is to make a hole slightly smaller than the pin in advance in the rotary tool insertion part. At the end point, a hole having the same volume as the pin is formed as described above. Therefore, these problems can be solved by setting the joining start point or end point to a main body separated from the cooling hole or a separately prepared dummy part.

There are various sizes of backing plates depending on the application. As an example, in the case of a backing plate for a sputtering apparatus for a large flat panel liquid crystal display, the area is about 1 m ² or more. In this case, it is preferable to arrange 4 to 5 cooling holes having a height of about 5 mm and a width of about 50 mm. In such a large backing plate, the length of the joint is long, and a single rotary tool is used for joining one place at a time. It is desirable to bond with a certain distance. Further, the plurality of rotary tools are moved and joined in a direction crossing each other, whereby the shaft configuration for controlling each rotary tool is simplified, and the cost of the joining apparatus can be reduced. The target can be formed on either side of the cooling plate by press-molding the bent after manufacture, and then finished smoothly by grinding and polishing. Therefore, either side may be used, but the opposite side to the bonded surface is preferable.

  So far, products manufactured using friction stir welding include, for example, railway vehicles, ships, and rocket fuel tanks. These products are all made of aluminum. Although the backing plate is made of aluminum or copper, copper alloys having excellent thermal conductivity are mainly used from the viewpoint of thermal efficiency. In the case of copper, since the melting point is higher and the strength is higher than that of aluminum, it is necessary to raise the temperature of the stirring portion to about 700 ° C. when performing friction stir welding. Incidentally, in the case of aluminum, the melting point is low and the strength is low.

  When a copper backing plate is manufactured by friction stir welding, the joint temperature becomes high as described above, which causes several problems. This is a problem because the material is copper. The first problem is that since the joining temperature is high, the temperature of the rotary tool itself is also high, and the motor and spindle that rotate the rotary tool are also high due to heat transfer. There is also a consumption of the rotary tool itself, but rather a consumption of the device is a problem. In order to perform joining completely, the temperature of a junction cannot be lowered. Therefore, in order not to transmit the frictional heat between the rotating tool and the joint to the apparatus side, it is necessary to bond the rotating tool to the rotating tool while spraying the coolant. As a result, the heat transfer to the spindle is remarkably suppressed, and the life of the apparatus can be extended.

  In the case of a large backing plate, the joining length becomes longer and the heat generation amount also becomes larger. At this time, heat is also transmitted to the table holding the backing plate, and there is a problem that the lubricant in the portion that drives the table, particularly in the peripheral portion, is consumed. Therefore, in order to suppress heat transfer to the apparatus side such as a table, it is desirable to join the backing plate on a different heat sink. In addition, considering the life of the rotary tool described above, rather than joining long distances with one rotary tool, the lid and body that cover one water channel are joined with one rotary tool, and after the rotary tool is replaced, the next It is desirable to perform the joining. As a result, the rotary tool used at the beginning is sufficiently cooled while being joined by another rotary tool, thereby extending the life of the rotary tool.

  As described above, in the friction stir welding, burrs are generated in the vicinity of the joint. After all the joining is completed, the rotating tool can be changed from the one for joining to the one for cutting, and the burrs generated at the joint can be removed. Rather than manually changing these rotary tools, the rotary tools are at a high temperature. Instead, it is preferable to provide a rotary tool magazine and automatically make a sequence.

  Thus, by producing the backing plate for sputtering as a cooling plate using friction stir welding, the thermal distortion after joining is small, and it becomes possible to manufacture a high quality backing plate.

  The present invention is a method for manufacturing a cooling plate in which a sputtering target material is bonded onto a backing plate as a cooling plate, and is characterized by being manufactured by the method for manufacturing a cooling plate described above.

  According to the present invention, a cooling plate having sound joining by friction stir welding is obtained. As a result, the backing plate has high cooling efficiency, low thermal distortion, thin shape, large area shape, and high quality backing. A plate is obtained.

  Hereinafter, the best mode for carrying out the invention will be described by way of specific examples.

  FIG. 1 is a schematic front view of a backing plate as a cooling plate made of oxygen-free copper or made of a copper alloy containing 5% or less of Zr or Cr. The backing plate includes a main body 1 and a lid 2. The main body 1 is provided with a U-shaped water channel 4, the lid 2 covers the water channel 4, and the shape of the lid 2 and the water channel 4 is different in U-shaped size, but has the same planar shape, It is a meandering shape. In addition, I-shaped, S-shaped, and the like are preferable. The corner portion of the lid 2 is provided with an R portion 3 so that the lid 2 can be easily fitted into the main body 1. The lid 2 has a structure that is received by a step with respect to the main body 1 and can receive the force of the rotary tool 6 during friction stir welding.

  The main body 1 has a length of about 1500 mm, a width of 1200 mm, and a thickness of about 15 mm. In the case of FIG. 1, there are five cooling water channels 4. Similarly, four U-shaped water channels 4 are provided for a length of 1300 mm, a width of 900 mm, and a thickness of 15 mm. In this embodiment, there are three water channels 4 per 1 m in length. Each water channel 4 has an independent and closed channel, and an inlet and an outlet for a coolant are provided at each end after joining. Both I-shaped and S-shaped are the same as U-shaped. The lid 2 is provided with one air hole at the end (not shown). By providing an air hole, the lid 2 can be easily installed and joined.

  In particular, in the present embodiment, the lid 2 that closes the groove is fitted and joined to the main body 1 having a groove having a closed water channel 4, so that the abutting portions are connected to each other. There is no spread and good joints can be returned, and the main body itself is integral and there is no extra joint, so that a thin and compact cooling plate can be obtained even in a large area regardless of the area.

  FIG. 2 is a cross-sectional view of the vicinity of the water channel of the backing plate. A first groove that is a water channel 4 having a rectangular cross section is machined inside the main body 1. The second groove has a step space larger than the water channel 4 and has a step on the groove. And the lid 2 is fitted into the second groove portion. At this time, the main body 1 and the lid 2 have an inlay structure, and the inlay width 5 is approximately 2.5 mm. Further, the width of the water channel 3 is about 50 mm, the height is 5 mm, and the height of the lid 2 is 5 mm. These shapes or dimensions vary depending on the type of the backing plate, and the planar shape of the main body 1 is not only square but also round. Therefore, the back wave of the joining portion does not enter the water channel 6, and a sound joining can be obtained. After bonding, the backing plate was bent on the bonding side, and the tip was press-molded with a blade having an I shape to correct the bending, and then grinding and polishing were performed.

  Next, examples of friction stir welding will be described. In the friction stir welding, the rotary tool 6 including the shoulder portion 7 and the pin portion 8 is inserted into the joining material while rotating. Thereafter, the rotary tool 6 is moved along the joining line and joined. In the present embodiment, the diameter of the shoulder portion 7 is 15 mm, the maximum diameter of the pin portion 8 is 8 mm, and the rotation direction of the rotary tool 6 is the left direction. In addition, the rotational speed of the rotating tool 6 is 1300 rpm or 1500 rpm, the joining speed is 270 mm / min or 300 mm / min when the tilting is performed at an angle of 3 degrees in the direction opposite to the joining progress direction. The center line was shifted by 3.0 mm or 1.5 mm in the direction opposite to the water channel 4 from the joint groove, and the former or the latter was carried out (offset: 3.0 mm or 1.5 mm).

  That is, as shown in FIG. 3, the rotary tool 6 was joined along the joining line so that the water channel was always located on the left side. In the case of friction stir welding, since a hole 10 is formed at the final end of the joint, a dummy 9 is provided as a terminal portion. The dummy 9 was cut after joining all the lids to the main body. What is important here is the relationship between the rotating direction of the rotating tool 6, the water channel, and the traveling direction of the rotating tool 6, and there is no problem even if all are reversed.

  FIG. 4 shows a photomicrograph of the cross section of the bonded bead. Although there is no defect in the joining bead, since the rotary tool 6 is inserted slightly into the material to be joined, the joining portion is slightly lower than the other parts. However, as described above, the surface of the backing plate needs to be smooth, and in any case, the surface is mechanically ground. In addition, since the joining bead is recessed, it becomes a burr and the meat in that portion is discharged to the outside, but there is no problem for the same reason. However, the amount of mechanical grinding at that time was an amount that was possible in less than half of the time compared to the conventional welding method. This is due to the fact that the thermal strain of the joint by the friction stir welding method is as small as about 1/10 of that in the case of electron beam welding, and the process of correcting the warp after joining and the cutting process for smoothing the surface are greatly increased. This is because it was shortened. Further, as shown in FIG. 4, the joining bead is formed outside the lower left water channel 4, and it is clear that the joining bead at the time of joining does not flow out into the water channel 4 and a sound joining can be obtained. The joint portion is formed so as to be recessed by pressing the shoulder 7. Moreover, both the beginning and the end of the rotating tool were performed at positions deviated from the joint.

Table 1 shows the result of the He leak test of the water channel 4 by this method. The leak test was a leak test at 1 × 10 ⁻⁷ Pa, and an existing method, that is, an electron beam welding material was used as a comparative material. In the friction stir welding material, the defect rate was 0% and passed in all cases when the rotary tool 6 was tilted 2 degrees and not tilted, but the defect rate was high at 5% with the electron beam welding material. In this case, the leakage portion must be repaired again, and the friction stir welding has a very high cost merit in consideration of the repair cost.

  The sputtering target may be brazed, friction stir welding, or electron beam bonding, and may be on the bonding side of the lid 2 or on the opposite side, but is preferably provided on the bonding side.

  In this embodiment, regarding the joining of the same type of backing plate as in FIG. The rotating tool rotation speed, the joining speed, and the rotating tool shape are the same as those in the first embodiment. As shown in FIG. 5, the rotary tool 6 is first inserted into the position a and then joined along the path a → b → c → d under the above-described conditions. Next, after the rotary tool 6 was inserted again at the position a, it was joined by a route of a → e → f → d, and the end portion 10 was the same. What is important at this time is that the rotation tool 6 always turns right in the R section 3. On the contrary, when the rotation direction of the rotation tool is right rotation, the rotation tool may be joined so as to always turn left. In either case, no defect occurs in the joint, but in rare cases, when the rotation direction of the rotary tool and the bending direction of the rotary tool are opposite to those described above, a fine defect as shown in FIG. May occur. However, such a large defect does not adversely affect the leak resistance and does not cause a problem. Also in this embodiment, other structures and bonding methods are the same as described above.

  In the present embodiment, the R portion 3 is provided in this embodiment, but it can be formed by a straight line. Also, as shown in FIG. 6, the joining bead is formed outside the lower left water channel 4, so that the joining bead at the time of joining does not flow out into the water channel 4, and the back wave is in the main body and is sound. It is clear that a good joint can be obtained.

  In the present embodiment, the distance (offset) separated from the joint groove at the center line of the inlay width 5 and the rotary tool 6 shown in FIG. The shape of the rotary tool used is the same as in Examples 1 and 2. The bonding conditions are also the same.

  As shown in Table 2, in order to obtain a sound joint, it is preferable that w + x ≧ r. That is, the formed joining bead is required to be outside the water channel. Moreover, in the sample in which joining was not successful, it is because the lid buckled due to the load received from the rotary tool.

  In the present example, the temporary attachment of the lid was examined. FIG. 7 shows a micrograph of a cross section of the tacking portion. Tacking was performed at 12 locations on one lid at a rotating tool rotation number of 1500 rpm using a rotating tool having a shoulder diameter of 13 mm and no pin portion. As shown in FIG. 7, the tacking portion is joined to a depth of about 2 mm. Next, this joining was performed under the same conditions as in Example 1. As a result, the lid was firmly fixed by temporary attachment, and the main joining was performed with high accuracy. As described above, it was found that in the friction stir welding, it is important to firmly fix the bonding material, and it can be surely and easily tacked without using other methods.

  In the present embodiment, the vicinity of the joint between the main body and the lid has a locally thick protrusion. FIG. 8 shows an enlarged cross-sectional view in the vicinity of the joint portion of the embodiment. The thickness of the main body 1 and the lid 2 is locally thick, and other dimensions are the same as those described in the first embodiment. Here, it is desirable that the locally thick protrusions 11 and 12 have a width substantially equal to or slightly wider than the diameter of the shoulder 7 of the rotary tool 6. Further, the locally thick protrusions 11 and 12 are desirably 0.3 to 2 mm higher than other portions. After joining, the height of the joined part is not lowered as in the case of Example 1, and the subsequent surface cutting process can be simplified. Also in this embodiment, other structures and bonding methods are the same as described above.

  FIG. 9 is a plan view of a backing plate having an I-type water channel structure. FIG. 10 is a cross-sectional view of the vicinity of the water channel. The main body 1 and the lid 2 are oxygen-free copper. The main body 1 has a length of 1200 mm, a width of 900 mm, and a thickness of 15 mm. There are five water channels 4, a width of 40 mm, and a height of 5 mm. The R portion 3 has R = 3 mm, and the inlay width 5 is 5 mm. The joining conditions, that is, the shape of the rotating tool, the number of revolutions, and the joining speed were the same as in Example 1, and the offset was zero. Further, the rotating tool 6 was inclined by 2 ° opposite to the traveling direction. Also in this embodiment, other structures and bonding methods are the same as described above.

  In the present embodiment, in order to make the water channel 4 airtight, the lid 2 is joined using two rotary tools 6. First, the lid 2 is temporarily attached to the main body 1 with a rotating tool composed of only a shoulder. Next, the two rotary tools 6 are used to join at the same time along the joining lines a-a ′ and b-b ′. The distance between the joining lines a-a 'and b-b' is as narrow as about 50 mm, and the two rotary tools 6 maintain a distance (L) so as not to interfere with each other. At this time, L is about 200 mm. Next, c-c 'and d-d', e-e 'and f-f' are sequentially joined. Next, the joining lines aj and a'-j 'are joined simultaneously. At this time, R of the R portion is 3 mm, the diameter of the pin is 8 mm, and the R portion 3 is joined by two joining lines orthogonal to each other. Therefore, the joining can be performed by joining only a straight line, the configuration of the joining apparatus is simplified, and the cost of the apparatus can be reduced. Also in the case of this example, the dummy 9 was used for both the starting point and the ending point of the joining, and the joining was cut after the joining was completed.

  By the way, in this embodiment, since two rotary tools are used for simultaneous bonding, the frictional heat generated between the rotary tool and the joint is large. For this reason, joining was also attempted while flowing cooling water in the vicinity of the joint and the entire backing plate and water channel. The joining conditions were almost the same as those without cooling water, but the rotational speed of the rotary tool was 2000 rpm. As a result, the surface temperature of the main body 1 at a portion about 4 mm away from the joined portion was 100 ° C. or less, and the thermal strain after joining was about ½ that when not cooled with water. Therefore, it is not necessary to correct the distortion after joining. Note that the temperature of the joint portion is about 700 ° C., and water is boiling in that portion, there is no entry of moisture into the joint portion, and there is no occurrence of defects or deterioration of mechanical properties.

  FIG. 11 is a plan view of a backing plate having an inverted S-shaped water channel 4. The main body 1 and the lid 2 are oxygen-free copper. The planar shape of the water channel 4 and the lid 2 is the same, but the sizes are slightly different. The lid 2 is integral. The main body 1 has a length of 1200 mm, a width of 900 mm, and a thickness of 15 mm, two or four water channels 4, a width of 40 mm, and a height of 5 mm. The R portion 3 has R = 15 mm and the inlay width 5 is 5 mm. The joining conditions, that is, the shape of the rotating tool, the number of revolutions, and the joining speed were the same as in Example 1, and the offset was zero. Further, the rotating tool 6 was inclined by 2 ° opposite to the traveling direction. In this example, the R part joining by TIG welding was used for temporary attachment. First, the lid 2 was fitted into the main body 1, and the portion (TIG welded portion) indicated by the thick line in FIG. 11 was TIG welded. Next, the unjoined part was friction stir welded using the rotary tool 6. At this time, the trajectory of the rotating tool is only in the vertical direction of the paper surface, and the joining device is a simplified device that only controls the vertical direction of the paper surface, and the cost of the equipment can be reduced.

  FIG. 12 is a schematic view of the backing plate. The main body 1 and the lid 2 are oxygen-free copper. FIG. 13 is a cross-sectional view of the vicinity of the joint in FIG. The shape and joining conditions of the main body 1 are the same as those in the seventh embodiment. Further, the lid 2 is provided with an air hole at an end portion, and is integrally formed in a U shape. In this embodiment, the life extension of the rotary tool 6 was studied. The main body 1 is fixed on a heat sink 14 having a water passage through which a refrigerant circulates. A cooling device 15 for cooling the rotary tool 6 is provided in the vicinity of the rotary tool 6, and a cooling gas 16 is blown onto the rotary tool 6. It has been found that the surface temperature of the rotary tool 6 rises to about 400 ° C. during bonding. The motor or spindle that rotates the rotary tool 6 will fail when exposed to such high temperatures. When a motor with an output of 5 kW was used, the temperature of the spindle rose due to heat transfer from the rotary tool 6, and in the absence of the cooling device 15, a safety device worked and the motor stopped frequently.

  The cooling gas 16 may be an inert gas in addition to air, and the flow rate is 10 L / min. By using the cooling device 15, the surface temperature of the rotary tool 6 becomes about 150 ° C., and damage to the rotary tool 6 can be prevented. In addition, if moisture etc. remain in the water channel 4 after manufacturing the backing plate, the moisture may adhere to the surface used as a product during subsequent transport, etc., and surface contamination may occur. Friction stir welding in water May not be available. In this case, another heat sink 14 was used as a technique for reducing distortion. A refrigerant at 20 ° C. was always circulated in the heat sink 14, and it was possible to reduce the thermal strain caused by friction stir welding as in the case where it was performed in water. Further, in this embodiment, all joining was performed by NC control. Joining was performed using one rotating tool per channel.

  The procedure for joining the left lid in FIG. 12 is as follows. First, the rotating tool 6 was inserted into the dummy 9, and then the rotating tool was moved in the order of d → f → e → a → b → c → d under the joining conditions, and the end portion 10 was placed on the dummy 9. The trajectories of these rotary tools 6 were performed using an NC controller (not shown). Next, the rotary tool is replaced with the spare rotary tool 6 in the tool magazine 17. Then, the next lid is joined. By performing the joining by replacing the rotating tool for each lid, the rotating tool is cooled in the rotating tool magazine 17 and the load on the rotating tool is reduced. When all the lids have been joined, the tool is replaced with a cutting tool 18 in the tool magazine 17, and the processed surface of the backing plate is smoothed. Such a series of processes are all automated in a sequence.

  In the conventional manufacturing method, (1) cleaning of the backing plate (because the subsequent electron beam welding is performed in a vacuum, so dirt must be removed), (2) the backing plate to the jig for electron beam welding is removed. The process was fixed, (3) evacuation, (4) electron beam welding, (5) vacuum leakage and removal from the jig, (6) heat treatment for removing joint distortion, and (7) smoothing by cutting. According to the method of the present invention, these series of processes can be performed by replacing the tool with only one apparatus, and no joint distortion removing heat treatment is required. Therefore, as a machining process in which welding is an extension of machining, Understandable, high productivity, and significantly reduced manufacturing costs.

  FIG. 14 is a sectional view in which the lid has the same shape as the backing plate. The main body 1 and the lid 2 are oxygen-free copper. The thickness of the main body 1 is 10 mm, and the water channel 4 is 30 mm wide, 5 mm high, and 15 mm apart. The lid 2 covers all of the plurality of water channels 4, and the joining is a lap joining of the lid 2 and the main body 1. As for the shape of the water channel 4, a closed channel is used as in the above-described embodiment. Therefore, one air hole is provided at the end of the water channel 4 for each water channel 4. The diameter of the rotating tool was 14 mm, the maximum diameter of the pin portion 8 was 8 mm, the length was 7 mm, the rotational speed and the joining speed were the same as in Example 1, and the intermediate portions of adjacent water channels were joined. Further, the rotating tool 6 was inclined by 2 ° opposite to the traveling direction.

  In this embodiment, the joining mode is not a conventional butt joint but a lap joint, but no defect occurs at any joint location, and the thermal deformation at the time of joining can be made small. That is, the backing plate can be manufactured by this process regardless of the joint shape. The joining in this example was performed on the entire circumference of the backing plate and the entire space between the water channels in accordance with the planar shape of the water channel 4. Bonding with a dummy can be performed in the same manner. Press molding, grinding, and polishing after joining can be performed in the same manner as described above.

  FIG. 15 is a plan view in which the water channel 4 is formed in a vertically long M-shape on a long backing plate. The main body 1 and the lid 2 are oxygen-free copper. The main body 1 has a length of 2000 mm, a width of 300 mm, and a thickness of 15 mm, and the water channel 4 has a width of 30 mm, a height of 5 mm, and an interval of 15 mm. Further, the lid 2 has the same planar shape as the water channel, is formed slightly larger in length and width than the water channel 4, and the cross section is the same as that of the first embodiment. The joining is a butt joining of the lid 2 and the main body 1. As for the shape of the water channel, a closed channel is used as in the above-described embodiment. For the water channel, one air hole is provided at the end of the water channel. The diameter of the rotating tool was 14 mm, the maximum diameter of the pin portion 8 was 8 mm, the length was 7 mm, the rotational speed and the joining speed were the same as in Example 1, and the intermediate portions of adjacent water channels were joined. Further, the rotating tool 6 was inclined by 2 ° opposite to the traveling direction.

  In this example, the joining form was the same as that of the conventional butt joining, and the joining did not cause defects, and the thermal deformation during joining could be made small. The terminal part of the joining bead was provided in addition to the joining part. Further, the bonding with the dummy can be performed in the same manner as described above. Press molding, grinding, and polishing after joining can be performed in the same manner as described above.

It is a top view of the backing plate which concerns on this invention. It is a fragmentary sectional view of FIG. 1 of this invention. It is a top view which shows the movement of the rotation tool of FIG. 1 of this invention. It is a figure by the microscope picture of the cross section after the friction stir welding of this invention. It is a top view which shows the movement of the rotation tool of this invention. It is a figure by the microscope picture of the cross section after the friction stir welding of this invention. It is a figure by the microscope picture of the cross section after the friction stir welding of this invention. It is sectional drawing which provides a protrusion in the junction part of the main body of this invention, and a lid | cover, and joins. It is a top view of the backing plate which concerns on this invention. FIG. 10 is a partial cross-sectional view of FIG. 9 of the present invention. It is a top view of the backing plate which concerns on this invention. It is a top view of the backing plate which concerns on this invention. It is a fragmentary sectional view of FIG. 12 of this invention. It is a fragmentary sectional view of the backing plate concerning the present invention. It is a top view of the backing plate which concerns on this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Main body, 2 ... Cover, 3 ... R part, 4 ... Waterway, 5 ... Inner width, 6 ... Rotation tool, 7 ... Shoulder, 8 ... Pin, 9 ... Dummy, 10 ... Terminal part, 11, 12 ... Projection, DESCRIPTION OF SYMBOLS 13 ... TIG welding part, 14 ... Heat sink, 15 ... Cooling device, 16 ... Cooling gas, 17 ... Tool magazine, 18 ... Tool for grinding.

Claims (25)

  A groove serving as a refrigerant passage is formed inside the main body, the groove is covered with a lid having a width larger than the groove, and the lid is joined to the main body by friction stir welding, and is formed by the joining. A cooling plate, wherein a joining bead is outside the passage.   The body has a plurality of independent passage grooves serving as independent refrigerant passages, the grooves are covered with a lid, and the lid is joined to the body by friction stir welding. A cooling plate, wherein the formed joining bead is outside the passage.   A groove serving as a coolant passage is provided inside the main body, the groove is covered with a lid, the lid is joined to the main body by friction stir welding, and at least a terminal end of the joining bead formed by the joining is A cooling plate, wherein the cooling plate is formed in the main body other than the joint.   A groove serving as a refrigerant passage is provided inside the main body, the groove is covered with a lid having a width wider than the groove, and the lid is joined to the main body by friction stir welding and fusion welding. The cooling plate according to claim 1, wherein the joining bead is formed outside the passage.   A groove serving as a refrigerant passage is formed inside the main body, and the groove has one or more fins. The groove is covered with a lid having a width wider than the groove, and the lid is frictionally stirred on the main body. A cooling plate, which is joined by joining, and a joining bead formed by the joining is outside the passage.   There is a groove serving as a refrigerant passage inside the main body, the groove is covered with a lid, the lid is joined to the main body by friction stir welding, and the passage is a closed path in the main body. A cooling plate characterized by   A groove serving as a refrigerant passage is provided inside the main body, the groove is covered with a lid, the lid is joined to the main body by friction stir welding, and an air hole is provided in a portion forming the passage. A cooling plate characterized by   A groove serving as a refrigerant passage is formed inside the main body, the groove is covered with a lid, and the lid is joined to the main body by friction stir welding by inserting a rotary tool having a shoulder and a pin. A cooling plate, wherein at least a terminal end of the joining bead is other than the joining portion.   There are two or more U-shaped grooves per 1 m in width inside the body that serve as refrigerant passages, the grooves are covered with a lid, the lid is joined to the body by friction stir welding, and the passage is A cooling plate having a closed path in the main body.   The main body of the long flat plate has a vertically long M-shaped groove serving as a refrigerant passage, the groove is covered with a lid, and the lid is joined to the main body by friction stir welding. A cooling plate having a closed path in the main body.   The sputtering target material is joined on the cooling plate in any one of Claims 1-10, The sputtering target characterized by the above-mentioned.   The main body has a first groove serving as a refrigerant passage, and a second groove having a width larger than the groove and a lid placed on the first groove, and the lid is placed on the second groove. A method of manufacturing a cooling plate for joining to the main body, wherein the lid and the main body are joined by friction stir welding by inserting a rotary tool having a shoulder and a pin, and a joining bead formed by the joining is joined. The method of manufacturing a cooling plate, wherein the joining is performed so as to be out of the passage.   In a manufacturing method of a cooling plate having a groove serving as a refrigerant passage inside the main body and joining a lid to the groove, the lid and the main body are joined by friction stir welding by inserting a rotary tool having a shoulder and a pin. The joining is performed on the left side of the groove with respect to the traveling direction of the joint when the rotating tool is rotated counterclockwise, and on the right side of the groove with respect to the traveling direction of the joining when the rotating tool is rotated clockwise. A method for manufacturing a cooling plate, comprising:   In a manufacturing method of a cooling plate having a groove serving as a refrigerant passage inside the main body and joining a lid to the groove, the lid and the main body are joined by friction stir welding by inserting a rotary tool having a shoulder and a pin. A method of manufacturing a cooling plate, wherein the center of the rotating tool is set at a position separated from the end of the groove by a radius of the pin or more.   In the manufacturing method of a cooling plate having a groove serving as a refrigerant passage inside the main body and joining the lid to the groove, the lid and the main body are joined by friction stir welding by inserting a rotary tool having a shoulder and a pin. The method of manufacturing a cooling plate according to claim 1, wherein when the joining direction of the rotating tool passes through the curved portion, the joining direction of the rotating tool is opposite to the rotating direction of the rotating tool.   In the manufacturing method of a cooling plate having a groove serving as a refrigerant passage inside the main body and bonding a lid to the groove, the lid and the main body are bonded by friction stir welding, and the bonding that is the return of the bonding is 2 A method for manufacturing a cooling plate, characterized in that the joining is performed in two straight lines.   In the method for manufacturing a cooling plate having a groove serving as a refrigerant passage inside the main body and joining a lid to the groove, the joint portion between the main body and the lid has a thicker projection than the other parts, and the projection A method of manufacturing a cooling plate, comprising joining by friction stir welding by inserting a rotary tool having a shoulder and a pin.   In the manufacturing method of a cooling plate having a groove serving as a refrigerant passage inside the main body and covering the groove with a lid, the lid and the main body are joined by friction stir welding, and an air hole is formed in a portion forming the passage. A method of manufacturing a cooling plate, characterized in that it is provided.   In the manufacturing method of a cooling plate having a groove serving as a refrigerant passage inside the main body and covering the groove with a lid, the lid and the main body are joined by friction stir welding by inserting a rotary tool having a shoulder and a pin, A method of manufacturing a cooling plate, wherein at least an end portion of the joining is formed other than the joining portion.   20. The method according to claim 12, wherein the main body and the lid are preliminarily joined together by friction stir welding by inserting a rotary tool having only a shoulder, and then the whole joint is rotated with the shoulder and the pin. A method for manufacturing a cooling plate, characterized by joining by friction stir welding by insertion of a tool.   20. The method according to claim 12, wherein the main body and the lid are preliminarily partially joined together by fusion welding or the friction stir welding, and then the whole joint is joined by the friction stir welding. Manufacturing method of cooling plate.   In any one of Claims 12-21, it joins, cooling in the coolant in any one of water, oil, and an inert gas, or forcibly cooling a junction part and the inside of the said rotary tool with the said coolant. Manufacturing method of cooling plate.   The method for manufacturing a cooling plate according to any one of claims 12 to 16, and 18 to 22, further comprising a protrusion on the insertion side of the pin of the joint portion between the main body and the lid.   The method for manufacturing a cooling plate according to any one of claims 12 to 23, wherein a surface of the joint bead portion of the joint portion is recessed by pressing of the shoulder. In the manufacturing method of the sputtering target which joins the sputtering target material on a cooling plate, the said cooling plate is manufactured with the manufacturing method in any one of Claims 12-24, The manufacturing method of the sputtering target characterized by the above-mentioned.

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