JP2010240671A - Method of manufacturing heat transfer plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a heat transfer plate which improves watertightness and airtightness of the heat transfer plate and has high flatness. <P>SOLUTION: The method of manufacturing the heat transfer plate is used for forming the heat transfer plate by fixing a lid member 30 for sealing a second recess 13 to a body 10 having a first recess 12 recessed at a surface and a second recess 13 recessed at the bottom surface 12a of the first recess 12 by friction agitation welding. The method of manufacturing the heat transfer plate includes: a lid member fixing step for carrying out friction agitation welding along a butted portion 40 of the side wall 12b of the first recess 12 of the body 10 and the side surface 30a of the lid member 30; a second recess sealing step for carrying out friction agitation welding to an overlapping part 18 of the bottom surface 12a of the first recess 12 and the rear surface 30b of the lid member 30 by moving a rotating tool along the circumferential edge 14 of the opening of the second recess 13; and a correction step for carrying out friction agitation by moving the rotating tool to the rear surface of the body 10. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a heat transfer plate.

  Friction stir welding (FSW = Friction Stir Welding) is known as a method for joining metal members. Friction stir welding is a technique in which metal members are fixed to each other by causing the metal at the abutting portion to plastically flow by frictional heat between the rotating tool and the metal member by moving the rotating tool along the abutting portion while rotating the rotating tool. Phase joining is performed.

  For example, as shown in Patent Document 1, a heat plate (heat transfer plate) used for cooling in a semiconductor manufacturing apparatus is a lid member that seals a plate-shaped main body and a recess formed on the surface of the main body. Are integrally formed by friction stir welding.

  Specifically, the main body has a first concave portion provided in the surface of the main body and a second concave portion provided in the bottom surface of the first concave portion. The lid member has a shape that is arranged in the first recess without any gap. The heat transfer plate is integrally formed by performing friction stir welding on the abutting portion between the side wall of the first recess and the side surface of the lid member. According to the friction stir welding, a product having high water tightness and air tightness can be manufactured relatively easily.

JP 2002-257490 A

  In the conventional method of manufacturing a heat transfer plate, only the abutting portion between the side wall of the first recess and the side surface of the lid member is friction stir welded. For example, between the bottom surface of the first recess and the back surface of the lid member. A fine gap is formed. Such a gap has been a factor of reducing the water tightness and air tightness of the heat transfer plate. In addition, since frictional stirring is performed from the surface side of the main body, there is a problem that when the plasticized region shrinks due to thermal contraction, the heat transfer plate warps and bends.

  The present invention has been made in view of such problems, and provides a method of manufacturing a heat transfer plate that can improve the water tightness and air tightness of the heat transfer plate and can manufacture a heat transfer plate with high flatness. This is the issue.

  As means for solving the above-mentioned problems, the present invention provides a heat transfer fluid for transporting heat generated by a heat generating body that is provided in a bottom surface of the first recess and is formed in a bottom surface of the first recess to the outside. A heat transfer plate formed by fixing a lid member sealing the second recess by friction stir welding to a main body having a second recess through which the first recess of the main body is formed. A lid member fixing step of moving the rotary tool along the abutting portion between the side wall and the side surface of the lid member to perform friction stir welding on at least a part of the abutting portion, and along the opening periphery of the second recess A second recess sealing step of moving the rotating tool to perform friction stir welding on the overlapping portion of the bottom surface of the first recess and the back surface of the lid member, and rotating with respect to the back surface of the heat transfer plate A correction step of moving the tool and performing frictional stirring. And features.

  According to this manufacturing method, the fine gap between the bottom surface of the first recess and the back surface of the lid member is closed by performing friction stir welding on the overlapping portion of the bottom surface of the first recess and the back surface of the lid member. be able to. Thereby, the watertightness and airtightness of a heat exchanger plate can be improved. Further, in the correction process, by performing frictional stirring from the back surface side of the heat transfer plate, the warp generated by the lid member fixing step and the second recess sealing step can be eliminated, and the flatness of the heat transfer plate can be improved.

  Moreover, it is preferable to set the volume amount of the plasticization area | region formed in the back surface side of the said heat exchanger plate smaller than the volume amount of the plasticization area | region formed in the surface side of the said heat exchanger plate. According to this manufacturing method, the flatness of the manufactured heat transfer plate can be further improved.

  Moreover, in the said correction process, it is preferable to set the planar shape of the plasticization area | region formed in this correction process so that it may become substantially point symmetrical with respect to the center of the said heat exchanger plate. Moreover, in the said correction process, it is preferable to set the planar shape of the plasticization area | region formed in this correction process so that it may become a shape substantially similar to the shape of the outer edge of the said heat exchanger plate. In the straightening step, the planar shape of the plasticized region formed in the straightening step is set to be substantially the same shape as the planar shape of the plasticized region formed on the surface side of the heat transfer plate. Is preferred. Moreover, in the said correction process, it is preferable to set so that the full length of the plasticization area | region formed in this correction process may become substantially equal to the full length of the plasticization area | region formed in the surface side of the said heat exchanger plate.

  According to this manufacturing method, the warpage of the front surface side and the back surface side of the heat transfer plate can be eliminated in a balanced manner, and the flatness of the heat transfer plate can be improved.

  Moreover, in the said correction process, it is preferable to set so that the full length of the movement locus | trajectory of the said rotary tool used in this correction process may become shorter than the full length of the plasticization area | region formed in the surface side of the said heat exchanger plate. Moreover, it is preferable to set the outer diameter of the shoulder part of the rotary tool used at the said correction process smaller than the outer diameter of the shoulder part of the rotary tool used at the said 2nd recessed part sealing process. Moreover, it is preferable to set the length of the stirring pin of the rotary tool used in the correction step to be shorter than the length of the stirring pin of the rotary tool used in the second recess sealing step.

  According to this manufacturing method, since the volume amount of the plasticized region in the straightening process can be set smaller than the volume amount of the plasticized region formed on the surface side of the heat transfer plate, the manufactured heat transfer plate The flatness can be further improved.

  Moreover, it is preferable to set the thickness of the main body to 1.5 times or more the outer diameter of the shoulder portion of the rotary tool used in the second recess sealing step. Moreover, it is preferable to set the thickness of the main body to be three times or more the length of the stirring pin of the rotary tool used in the second recess sealing step.

  According to this manufacturing method, since the main body has a sufficient thickness with respect to the size of each part of the rotary tool, the flatness of the heat transfer plate can be further improved.

  Moreover, when the said main body is a planar view polygon, it is preferable that the said correction process includes the corner friction stirring process of performing friction stirring using the rotation tool with respect to the corner of the said heat exchanger plate. According to this manufacturing method, it is possible to eliminate the warp generated at the corners of the main body and to eliminate the flatness of the heat transfer plate.

  Further, it includes a chamfering process for chamfering the back surface side of the heat transfer plate after the straightening process, and the depth of the chamfering process is larger than the length of the stirring pin of the rotary tool used in the straightening process. preferable. According to this manufacturing method, the back surface of the heat transfer plate can be formed smoothly.

  According to the present invention, a heat transfer plate having high water tightness and air tightness and high flatness can be provided.

It is the disassembled perspective view which showed the heat exchanger plate which concerns on 1st embodiment. (A) is the small rotation tool, (b) is the side view which showed the large rotation tool. It is the figure which showed the cover member fixing process which concerns on 1st embodiment, Comprising: (a) is a top view, (b) is X1-X1 sectional drawing of (a). It is the top view which showed the cover member fixing process which concerns on 1st embodiment. It is the figure which showed the 2nd recessed part sealing process which concerns on 1st embodiment, Comprising: (a) is a top view, (b) is X2-X2 sectional drawing of (a). It is the top view which showed the 2nd recessed part sealing process which concerns on 1st embodiment. In the manufacturing method of the heat exchanger plate which concerns on 1st embodiment, it is the figure which showed after performing a 2nd recessed part sealing process, Comprising: (a) is a perspective view, (b) shows the point c and the point f. It is sectional drawing of the line to connect. In the manufacturing method of the heat exchanger plate which concerns on 1st embodiment, (a) is the perspective view which showed the correction process, (b) is the top view which showed the correction process. It is the figure which showed the heat exchanger plate which concerns on 2nd embodiment, Comprising: (a) is a disassembled perspective view, (b) shows sectional drawing. It is the top view which showed the 2nd recessed part sealing process which concerns on 2nd embodiment in steps. In the manufacturing method of the heat exchanger plate which concerns on 2nd embodiment, it is the figure which showed after performing a 2nd recessed part sealing process, (a) is a perspective view, (b) shows the point c and the point f. It is sectional drawing of the line to connect. It is the top view which showed the correction process of the manufacturing method of the heat exchanger plate which concerns on 2nd embodiment. It is X3-X3 sectional drawing of FIG. It is the disassembled perspective view which showed the heat exchanger plate which concerns on 3rd embodiment. It is the top view which showed the 2nd recessed part sealing process which concerns on 3rd embodiment. It is the top view which showed the correction process in the manufacturing method of the heat exchanger plate which concerns on 3rd embodiment. It is the perspective view which showed the main body which concerns on 4th embodiment. It is the figure which showed the 2nd recessed part sealing process which concerns on 4th embodiment, Comprising: (a) is a top view, (b) is (a) X4-X4 sectional drawing. It is the top view which showed the correction process in the manufacturing method of the heat exchanger plate which concerns on 4th embodiment. It is the figure which showed the temporary joining process, Comprising: (a) is a top view, (b) is X5-X5 sectional drawing of (a). It is the top view which showed the modification of the correction process. It is the figure which showed the main body in an Example, (a) is a perspective view of the surface side, (b) is a top view of the back side.

[First embodiment]
A method for manufacturing a heat transfer plate according to a first embodiment of the present invention will be described in detail with reference to the drawings as appropriate. First, the heat transfer plate 1 formed by the method for manufacturing a heat transfer plate according to the present invention will be described.

  As shown in FIG. 1, the heat transfer plate 1 is formed by fixing a lid member 30 to the main body 10 by friction stir welding. The heat transfer plate 1 is used for cooling the target material in, for example, a sputtering apparatus.

  The main body 10 has a substantially rectangular parallelepiped appearance, and is formed of aluminum or an aluminum alloy in the present embodiment. The main body 10 has a first recess 12 recessed in the surface (upper surface) 10 a of the main body 10, second recesses 13 and 13 recessed in the first recess 12, and a through hole communicating with the second recess 13. And a hole 16. The main body 10 is produced, for example, by die casting, casting, forging, or the like.

  The main body 10 is formed of aluminum or an aluminum alloy in this embodiment, but may be formed of other metal members. Moreover, although the main body 10 is a substantially rectangular parallelepiped in appearance in the present embodiment, it may be a polygonal column, a cylinder, or the like.

  The first recess 12 is a part where the lid member 30 is disposed. The first recess 12 is formed at a position one step lower than the upper surface 10a of the main body 10, and has a bottom surface 12a that has a rectangular shape in plan view and four side walls 12b that stand vertically from the bottom surface 12a. The height of the side wall 12 b is formed substantially equal to the thickness t of the lid member 30.

  The second recesses 13 and 13 are portions through which the heat transport fluid (cooling water in this embodiment) flows. The 2nd recessed parts 13 and 13 exhibit the planar view rectangle, and are each formed in the substantially equivalent shape. The second recesses 13 and 13 are opened upward, and are provided at predetermined intervals inside the first recess 12. Around the second recesses 13, the bottom surface 12 a of the first recess 12 extends. That is, the second recesses 13 and 13 are surrounded by the first recess 12. The shape and number of the second recesses 13 can be appropriately changed according to the use of the heat transfer plate 1.

  As shown in FIG. 1, the through hole 16 is a portion that communicates the outside of the main body 10 with the second recess 13 and circulates a heat transport fluid (cooling water). The through hole 16 is formed so as to penetrate between the opposing side surfaces 10 b and 10 b of the main body 10 while communicating with the second recesses 13 and 13. The shape, number, and formation position of the through holes 16 can be changed as appropriate according to the type and flow rate of the cooling water.

  The lid member 30 is a plate-like member made of the same material as the main body 10 as shown in FIG. The planar shape of the lid member 30 is formed equivalent to the planar shape of the first recess 12 of the main body 10. After the lid member 30 is disposed in the first recess 12, the opening of the second recess 13 is sealed by friction stir welding.

  Next, a small rotating tool (hereinafter referred to as “small rotating tool F”) and a rotating tool larger than the small rotating tool F (hereinafter referred to as “large rotating tool G”) used by friction stir welding described later. This will be described with reference to FIG.

  A small rotary tool F shown in FIG. 2 is made of a metal material harder than the main body 10 such as tool steel, and has a columnar shoulder portion F1 and a stirring pin (probe) protruding from a lower end surface F11 of the shoulder portion F1. ) F2. The size and shape of the small rotary tool F may be set according to the material, thickness, etc. of the main body 10, but at least smaller than the large rotary tool G (see FIG. 2B). In this way, it is possible to perform friction stir welding with a smaller load than when the large rotary tool G is used, so it is possible to reduce the load applied to the friction stirrer, and further to the small rotary tool F. Since the moving speed (feeding speed) can be made higher than the moving speed of the large rotary tool G, the working time and cost required for the friction stir welding can be reduced.

The lower end surface F11 of the shoulder portion F1 is a portion that plays a role of pressing the plastic fluidized metal and preventing scattering to the surroundings, and is formed in a concave shape in this embodiment. There is no particular limitation on the size of the outer diameter X ₁ of the shoulder portion F1, in this embodiment, is smaller than the outer diameter Y ₁ of the shoulder portion G1 of a large rotating tool G.

The stirring pin F2 hangs down from the center of the lower end surface F11 of the shoulder portion F1, and is formed into a tapered truncated cone shape in this embodiment. In addition, a stirring blade engraved in a spiral shape is formed on the peripheral surface of the stirring pin F2. There is no particular limitation on the size of the outer diameter of the stirring pin F2, in the present embodiment, than the maximum outer diameter of the maximum outer diameter of the stirring pin G2 of (upper diameter) X ₂ is large rotating tool G (upper end diameter) Y ₂ It is small, and is smaller than the minimum outer diameter minimum outer diameter (bottom diameter) X ₃ is the stirring pin G2 (lower diameter) Y _3. The length L _A of the stirring pin F2 is formed to be smaller than the thickness t (see FIG. 1) of the lid member 30.

A large-sized rotary tool G shown in FIG. 2B is made of a metal material harder than the main body 10 such as tool steel, and protrudes from a shoulder portion G1 having a columnar shape and a lower end surface G11 of the shoulder portion G1. A stirring pin (probe) G2 is provided. The lower end surface G11 of the shoulder portion G1 is formed in a concave shape like the small rotary tool F. The stirring pin G2 hangs down from the center of the lower end surface G11 of the shoulder portion G1, and is formed into a tapered truncated cone shape in this embodiment. The length L _B of the stirring pin G2 is larger than the thickness of the lid member 30 t (see FIG. 1).

The thickness of the main body 10 is set to be more than 1.5 times the outer diameter Y ₁ of the shoulder portion G1 of a large rotating tool G. The thickness of the main body 10 is set to be more than 3 times the large rotating the stirring pin G2 of the tool G length L _B.

  Next, the manufacturing method of a heat exchanger plate is demonstrated. In the heat transfer plate manufacturing method according to the present embodiment, a lid member fixing step, a second recess sealing step, and a correction step are executed.

  First, as shown to (a) of FIG. 3, the cover member 30 is arrange | positioned in the 1st recessed part 12 (refer FIG. 1) of the main body 10. FIG. The side wall 12b of the first recess 12 and the side surface 30a of the lid member 30 are abutted to form an abutting portion 40. As shown in FIG. 3B, a portion where the bottom surface 12 a of the first recess 12 and the back surface 30 b of the lid member 30 overlap is referred to as an overlapping portion 18.

  In the lid member fixing step, friction stir welding is performed on the abutting portion 40 to bond the lid member 30 to the main body 10. As shown in (a) of FIG. 3, the small rotary tool F is rotated to the right and inserted into the start position s <b> 1 set on the upper surface 10 a of the main body 10, and then moved along the abutting portion 40. What is necessary is just to set suitably the pushing amount, feed rate, etc. of the small rotation tool F. FIG. At this time, it is preferable that a jig (not shown) surrounding the main body 10 from four directions is applied in advance to the outer peripheral surface of the main body 10. According to this, the main body 10 is hardly deformed by the pressing force of the small rotary tool F and the large rotary tool G.

  The movement of the small rotary tool F will be specifically described. The small rotating tool F is moved while rotating from the start position s1 to a position directly above the abutting portion 40 (a position where the center of the small rotating tool F overlaps the abutting portion 40). Then, the small rotating tool F is moved along the abutting portion 40 so that the center (axial center) of the small rotating tool F moves on the abutting portion 40. At this time, the main body 10 and the lid member 30 around the abutting portion 40 are integrally plastically fluidized to form a surface-side plasticized region W1. The “plasticization region” includes both a state in which the small rotating tool F is heated by frictional heat and is actually plasticized, and a state in which the small rotating tool F passes and returns to room temperature. In addition, as shown to (a) of FIG. 3, let the part which plunged first on the abutting part 40 among the surface side plasticization area | regions W1 be the start end W1a.

In the lid member fixing step, as shown in FIG. 3B, the length of the stirring pin F2 is smaller than the thickness t of the lid member 30, and the surface-side plasticized region W1 contacts the bottom surface 12a of the first recess 12. It is set so as not to. When friction stir welding is performed, a relatively thin member such as the lid member 30 is likely to be deformed by heat shrinkage. Therefore, the deformation of the lid member 30 can be prevented by setting the length of the stirring pin F2 and the pushing amount of the small rotary tool F small.
In the lid member fixing step, even if the length of the stirring pin F2 of the small rotary tool F is increased or the small rotary tool F is pressed deeply, the surface side plasticizing region W1 and the bottom surface 12a are brought into contact with each other. Good.

  The shear side where the small rotating tool F rotates in the same direction as the moving direction of the small rotating tool F (see FIG. 3A) (the relative speed of the outer periphery of the small rotating tool F with respect to the joined portion is the small rotating tool F). The small rotating tool F is rotated and moved so that the side of the tangential speed on the outer circumference of the main body 10 is positioned on the main body 10. That is, the rotation direction (spinning direction) of the small rotary tool F in the abutting portion 40 is set to be the same direction as the moving direction (revolution direction). Specifically, in the present embodiment, since the small rotary tool F is moved clockwise with respect to the second recess 13, the small rotary tool F is also rotated clockwise.

  In addition, when moving the small rotation tool F counterclockwise with respect to the 2nd recessed part 13, the small rotation tool F will be rotated counterclockwise. By doing so, the shear side of the small rotary tool F is positioned on the thick main body 10 side. And the thin lid member 30 side is the flow side of the small rotating tool F (the relative speed of the outer periphery of the small rotating tool F with respect to the joined portion is determined from the magnitude of the tangential speed on the outer periphery of the small rotating tool F. The side that becomes the value obtained by subtracting the size). For this reason, on the lid member 30 side, the amount of metal flow is reduced, and cavity defects are less likely to occur. And even if a cavity defect occurs due to frictional stirring, it will occur on the main body 10 side and at a part spaced apart from the abutting portion 40, and the heat transport fluid will not leak easily to the outside. The sealing performance is not degraded.

  The rotation and movement of the small rotating tool F are continued, and the small rotating tool F is caused to make a round along the abutting portion 40 as shown in FIG. When the small rotating tool F passes the start end W1a (see FIG. 3A) of the surface side plasticizing region W1, the small rotating tool F is moved to the upper surface 10a side of the main body 10 and small rotating at the end position e1. Remove Tool F. In addition, let the part formed last on the abutting part 40 among the surface side plasticization area | regions W1 be the termination | terminus W1b.

  Thus, since the start end W1a and the end W1b overlap each other when the small rotating tool F passes the start end W1a (see FIG. 3A) of the surface side plasticization region W1, the surface side plasticization region W1. Are configured to overlap.

  Since the end position e1 is a position deviated to the outside from the abutting portion 40, the drawing trace of the small rotary tool F is not formed in the abutting portion 40, and the joining property between the main body 10 and the lid member 30 is improved. It can be further increased. In addition, you may make it repair a drawing trace.

  In the second recess sealing step, friction stir welding is performed on the overlapping portion 18 where the bottom surface 12a of the first recess 12 and the back surface 30b of the lid member 30 overlap. In the second recessed portion sealing step, as shown in FIG. 5A, after the rotated large rotating tool G is inserted into the start position SM1 set on the upper surface 10a of the main body 10, the opening peripheral edge 14 of the second recessed portion 13 is obtained. And move to the end position EM1.

The movement of the large rotary tool G will be specifically described. The large rotary tool G is inserted into the start position SM1 set on the upper surface 10a of the main body 10 while rotating clockwise, and then moved to the lid member 30 side. When the large-sized rotating tool G crosses the surface side plasticizing region W <b> 1, it is moved along the second recessed portion 13 on the overlapping portion 18. By moving the large rotary tool G, the surface side plasticizing region W2 is formed around the second recess 13. FIG as shown in (b) of 5, the length L _B of the stirring pin G2 of the large rotating tool G is, because larger than the thickness t of the lid member 30 securely friction stir welding the overlapping portion 18 can do.

In the present embodiment, the distance D1 from the opening peripheral edge 14 of the second recess 13 to the sidewall 12b of the first recess 12, which is formed by twice or more large rotating tool outer diameter Y ₁ of the shoulder portion G1 of G The width of the overlapping portion 18 can be sufficiently secured, and the friction stir welding can be performed reliably. Incidentally, (see (a) in FIG. 3) the distance D2 between the second recess 13, 13 adjacent, may Kere larger than the outer diameter Y ₁ of the shoulder portion G1 at least large rotating tool G, but the present embodiment in the form which is about 3 times the outer diameter Y ₁ of the shoulder portion G1.

Further, as shown in (b) of FIG. 5, in the present embodiment, the distance E1 from the center of the large rotating tool G to the opening peripheral edge 14 of the second recess 13, than the radius of the outer diameter Y ₁ of the shoulder portion G1 Is also getting bigger. In this way, it is possible to prevent the plastic fluidized material plasticized by friction stir welding from flowing into the second recess 13.

  Moreover, in this embodiment, it is preferable that the distance E2 from the opening peripheral edge 14 of the 2nd recessed part 13 to the outer peripheral surface of the large sized rotary tool G is larger than 4 mm. If the distance E2 is 4 mm or less, the distance between the large rotary tool G and the second recess 13 is reduced, and the inner wall of the second recess 13 may be deformed during friction stir welding.

  When the large rotary tool G makes a round around the second recess 13, the surface side plasticization region W2 and the surface side plasticization region W1 are traversed as shown by the arrows in FIG. Move to the end position EM1 set on the upper surface 10a. When the large rotary tool G reaches the end position EM1, the large rotary tool G is detached from the main body 10. In addition, you may make it repair a drawing trace.

  In the second recessed portion sealing step, the shear side (the relative speed of the outer periphery of the large rotating tool G with respect to the joined portion is the same as the moving direction of the large rotating tool G is the relative speed of the outer periphery of the large rotating tool G). The large rotary tool G is rotated and moved so that the tangential speed at the outer circumference is added to the magnitude of the moving speed is located at a position away from the second recess 13 on the main body 10. . That is, the rotation direction (spinning direction) of the large rotary tool G is set to be the same direction as the moving direction (revolution direction). Specifically, in the present embodiment, since the large rotary tool G is moved clockwise with respect to the second recess 13, the large rotary tool G is also rotated clockwise.

  When the large rotary tool G is moved counterclockwise with respect to the second recess 13, the large rotary tool G is rotated counterclockwise. According to such a method, the shear side of the large-sized rotary tool G is located at a site separated from the second recess 13 of the main body 10. The portion of the main body 10 near the second recess 13 is located on the flow side of the large rotating tool G (the relative speed of the outer periphery of the large rotating tool G with respect to the joined portion is moved from the magnitude of the tangential velocity on the outer periphery of the large rotating tool G. The side on which the magnitude of the speed is subtracted). For this reason, the part close | similar to the 2nd recessed part 13 of the main body 10 reduces the flow amount of a metal, and becomes difficult to generate | occur | produce a cavity defect. And even if a cavity defect occurs due to frictional stirring, it will occur in a portion away from the second recess 13 and the heat transport fluid will not leak to the outside, so the sealing performance of the joint will not be reduced.

  Next, as shown in FIG. 6, friction stir welding is performed on the overlapping portion 18 formed around the other second concave portion 13. After the large rotary tool G is inserted into the start position SM2 set on the upper surface 10a of the main body 10, it is moved to the lid member 30 side. When the large-sized rotary tool G crosses the surface side plasticizing region W <b> 1, it is moved along the second concave portion 13 on the overlapping portion 18. By moving the large rotary tool G, the surface side plasticizing region W2 is formed around the second recess 13. When the large-sized rotary tool G makes a round around the second recess 13, as shown by the arrow in FIG. 6, the surface side plasticization region W <b> 2 and the surface side plasticization region W <b> 1 are traversed and set on the upper surface 10 a of the main body 10. It is moved to the finished end position EM2. When the large rotary tool G reaches the end position EM2, the large rotary tool G is detached from the main body 10. The heat transfer plate 1 is formed by the above steps.

  In the second recess sealing step, the start positions SM1 and SM2 and the end positions EM1 and EM2 may be other positions as long as they are outside the abutting portion 40.

  As shown in FIG. 7, after performing the lid member fixing step and the second concave portion sealing step, the surface side plasticized regions W1 and W2 are formed in the heat transfer plate 1. Since the surface side plasticizing regions W1 and W2 are contracted by thermal contraction, compressive stress acts from the respective corners of the main body 10 toward the center on the surface Za side of the heat transfer plate 1. Thereby, the heat exchanger plate 1 may bend so that the surface Za side may be concave (so that it may be convex on the back surface Zb side). In particular, among the points a to j shown on the surface Za of the heat transfer plate 1, at the points a, c, f, and h related to the four corners of the heat transfer plate 1, the influence of the warp tends to be noticeable. In addition, the point j shows the center point of the heat exchanger plate 1, and the points b, d, e, and g show the intermediate points of each side of the main body 10. Further, the points on the back surface Zb corresponding to the points a to j indicated on the front surface Za of the heat transfer plate 1 are defined as points a ′ to j ′. Further, the direction from the point a to the point f of the heat transfer plate 1 is the vertical direction, and the direction from the point a to the point c is the horizontal direction.

  In the correction process, friction stirring is performed from the back surface Zb of the main body 10 using the large rotary tool G. The correction process is a process performed to eliminate the warp (distortion) generated in the lid member fixing process and the second recess sealing process. The straightening step includes a tab material arranging step for arranging the tab material and a straightening friction stirring step for performing friction stirring on the back surface Zb of the main body 10.

  In the tab material arranging step, as shown in FIG. 8, a tab material 31 for setting a start position and an end position of a correction friction stirring step described later is arranged. In this embodiment, the tab material 31 has a rectangular parallelepiped shape and has a composition equivalent to that of the main body 10. The tab material 31 is in contact with the side surface 10b so as to cover a part of the side surface 10b of the main body 10. Moreover, the tab material 31 is temporarily joined by welding the both side surfaces of the tab material 31 and the side surface 10b of the main body 10. The surface of the tab material 31 is preferably formed flush with the back surface Zb of the main body 10.

  In the straightening friction stirring step, friction stirring is performed on the back surface Zb of the main body 10 using a large rotary tool G as shown in FIGS. In the straightening friction stirring step, friction stirring is performed with a pushing amount substantially equal to that in the second recess sealing step. In the present embodiment, the route of the straightening friction stirring step is set so as to surround the central point j ′ and the back side plasticized region W3 formed by the straightening friction stirring step is radial with respect to the central point j ′. To do.

  In the straightening friction stirring step, as shown in FIG. 8A, the start position SK1 is set on the surface of the tab material 31, and the stirring pin of the large rotary tool G is pushed (pressed) into the tab material 31. When a part of the shoulder portion of the large rotary tool G comes into contact with the tab material 31, the large rotary tool G is relatively moved toward the main body 10. And it becomes convex in plan view near the point f ′, the point a ′, the point c ′, and the point h ′ on the back surface Zb of the main body 10, and near the point g ′, the point d ′, the point b ′, and the point e ′. Friction stirring is performed by relatively moving the large rotary tool G so as to have a concave shape in plan view. As shown in FIG. 8B, the back surface plasticized region W <b> 3 is formed so as to be line symmetric with respect to the center line (one-dot chain line) of the main body 10. In the present embodiment, a start position SK1 and an end position EK1 are provided on the tab material 31, and friction stirring is performed in the manner of one stroke. Thereby, friction stirring can be performed efficiently. When the straightening friction stirring step is completed, the tab material 31 is cut out.

  In the present embodiment, the locus of the large-sized rotary tool G, that is, the shape of the back side plasticizing region W3 is formed so as to surround the central point j ′ and to be substantially radial with respect to the central point j ′. However, the present invention is not limited to this. The variations of the locus of the large rotating tool G will be described later.

In the present embodiment, the length of the trajectory of the large rotary tool G on the back surface Zb side (the length of the back surface plasticizing region W3) is the length of the trajectory of the small rotary tool F and the large rotary tool G on the front surface Za side ( It is set to be shorter than the sum of the lengths of the surface side plasticization region W1 and the surface side plasticization region W2. That is, the processing degree in the correction process is set to be smaller than the processing degrees in the lid member fixing step and the second recess sealing step. Thereby, the flatness of the heat exchanger plate 1 can be improved. The reason for this will be described in Examples. Here, the workability indicates the volume amount of the plasticized region formed by friction stirring.
In the present embodiment, the tab material is arranged in the correction process. However, depending on the friction stirring route in the correction friction stirring process, the tab material is not provided, and the friction stirring start position and end position are provided on the back surface Zb. Also good.

  According to the manufacturing method of the heat transfer plate described above, in addition to the friction stir welding to the abutting portion 40, the first concave portion is formed by performing the friction stir welding to the overlapping portion 18 around the second concave portion 13. Thus, a minute gap between the bottom surface 12a of the twelve and the back surface 30b of the lid member 30 can be closed. Further, the main body 10 and the lid member 30 can be brought into close contact with each other around the second recess 13. Thereby, the watertightness and airtightness of the heat exchanger plate 1 can be improved.

  Moreover, even if the heat transfer plate 1 is distorted due to the heat shrinkage by the lid member fixing step and the second recess sealing step, it is generated on the surface Za by performing frictional stirring on the back surface Zb of the heat transfer plate 1. Warpage can be eliminated and the flatness of the heat transfer plate 1 can be easily increased. That is, since the back surface side plasticized region W3 formed on the back surface Zb of the heat transfer plate 1 contracts due to heat shrinkage, from each corner side of the main body 10 toward the center side on the back surface Zb side of the heat transfer plate 1. Compressive stress acts. Thereby, the curvature formed by the cover member fixing process and the 2nd recessed part sealing process is eliminated, and the flatness of the heat exchanger plate 1 can be improved.

  Further, in the correction process in the present embodiment, the friction stir is performed so that the planar shape of the back side plasticized region W3 formed in the correction process is substantially point symmetric with respect to the center point j ′ of the heat transfer plate 1. Because it does, it can be corrected in a well-balanced manner.

In addition, since the first recess 12 is formed so as to include the second recesses 13, 13, a plurality of the second recesses 13 are formed or the shape of the second recess 13 is complicated. However, the heat transfer plate 1 can be easily manufactured. Conventionally, for example, when the second recess has a serpentine shape in plan view, the planar shape of the lid member is formed in a serpentine shape in plan view in accordance with the shape. Accordingly, there is a problem that the molding operation of the lid member becomes complicated and it is difficult to accurately arrange the main body and the lid member.
However, according to this embodiment, even when there are a plurality of second recesses 13, the first recess 12 having a rectangular shape in plan view is formed so as to surround the second recesses 13, 13, and the first recess By forming the lid member 30 in a rectangular shape in accordance with the shape of 12, the shape of the lid member 30 can be simplified. Thereby, while being able to shape | mold the cover member 30 easily, the cover member 30 can be accurately arrange | positioned in the 1st recessed part 12, and the heat exchanger plate 1 can be manufactured easily.

  In this embodiment, since the lid member fixing step is performed before the second concave portion sealing step, the second concave portion sealing step can be performed in a state where the lid member 30 is fixed to the main body 10, thereby improving workability. be able to.

  Further, in the second recess sealing step according to the present embodiment, the large rotation tool G is made a round along the opening peripheral edge 14 of the second recess 13, and the surface side plasticizing region W2 is overlapped and overlapped. The air tightness and water tightness of the overlapping portion 18 around the second concave portion 13 can be enhanced.

  Further, when the large rotating tool G is inserted into the metal member, a large load acts on the metal member. Therefore, when the friction stirring start positions SM1 and SM2 are set on the lid member 30, the lid member 30 is deformed. There is a possibility. However, in the second recess sealing step according to the present embodiment, the friction stirring start positions SM1 and SM2 are set outside the abutting portion 40, so that deformation of the lid member 30 when the large rotary tool G is inserted can be prevented. . Further, in the present embodiment, the friction stirring end positions EM1 and EM2 are set on the thick main body 10 side, so that it is possible to easily repair the extraction trace of the large-sized rotating tool G.

The thickness of the main body 10 is set to more than 1.5 times the outer diameter Y ₁ of the shoulder portion G1 of a large rotating tool G, The thickness of the body 10 of the stirring pin G2 of the large rotating tool G It is set to be more than 3 times the length L _B. That is, if the main body 10 is thin with respect to the large-sized rotary tool G, there is a possibility that deformation due to thermal contraction may increase, but in this embodiment, the main body 10 is sufficient for the size of each part of the large-sized rotary tool G. Since the thickness is provided, the flatness of the heat transfer plate 1 can be further improved.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. In 2nd embodiment, the shape of the 2nd recessed part 51 formed in the main body 10 differs from 1st embodiment by the point which exhibits planar view rectangular frame shape. In the description of the second embodiment, the description of the same parts as those in the first embodiment is omitted.

As shown in FIG. 9A, the heat transfer plate 101 according to the second embodiment includes a main body 10 and a lid member 30 that is friction stir welded to the main body 10.
The main body 10 includes a first recess 12 that is recessed in the upper surface 10 a of the main body 10, a second recess 51 that is recessed in the center of the first recess 12, and a through hole 16 that communicates with the second recess 51. .

  The first recess 12 is formed at a position one level lower than the upper surface 10a of the main body 10, and is a part where the lid member 30 is disposed. The first recess 12 has a bottom surface 12a that has a rectangular shape in plan view, and four side walls 12b that stand vertically from the bottom surface 12a. In this embodiment, since the 2nd recessed part 51 was formed in planar view rectangular frame shape, the bottom face 12a is formed in both the inner side and the outer side of the 2nd recessed part 51. FIG.

  The second recess 51 is a portion through which the heat transport fluid (cooling water in the present embodiment) flows. The second recess 51 is formed in a rectangular frame shape in plan view in the first recess 12 and opens upward. Opening rims 53a and 53b are formed in the opening of the second recess 51, respectively.

  As shown in FIG. 9B, when the lid member 30 is disposed in the first recess 12, the abutting portion 40 is formed by the side wall 12 b of the first recess 12 and the side surface 30 a of the lid member 30. Further, the overlapping portion 18 is formed by the bottom surface 12 a of the first recess 12 and the back surface 30 b of the lid member 30. In the present embodiment, the overlapping portion 18 is formed on both the inside and the outside of the second recess 51.

  Next, the manufacturing method of the heat exchanger plate which concerns on 2nd embodiment is demonstrated using FIG. In the heat transfer plate manufacturing method according to the present embodiment, a lid member fixing step, a second recess sealing step, a correction step, and a chamfering step are executed.

  In the lid member fixing step, friction stir welding is performed on the abutting portion 40 to bond the lid member 30 to the main body 10. In the lid member fixing step, as shown in FIG. 10A, the small rotary tool F is inserted to the start position s <b> 2 set on the abutting portion 40 while rotating to the right, and the end position e <b> 2 along the abutting portion 40. Friction stir welding is performed. In the first embodiment, the friction stir welding is performed over the entire circumference of the abutting portion 40, but in the present embodiment, the friction stir welding is performed only on the intermediate portion of each side constituting the abutting portion 40. That is, the start position s2 and the end position e2 are set at one point on each side of the abutting portion 40, and friction stir welding is performed. In the lid member fixing step, it is preferable that after the frictional stir welding is performed on the middle part of one opposite side of the abutting portion 40, the middle part of the other opposite side is friction stir welded. Thereby, the lid member 30 can be fixed with good balance, and the positioning accuracy of the lid member 30 with respect to the main body 10 is improved. By the lid member fixing step, the surface side plasticized region W1 is formed.

  In the second recess sealing step, as shown in FIG. 10A, friction stir welding is performed on the overlapping portion 18 where the bottom surface 12a of the first recess 12 and the back surface 30b of the lid member 30 overlap. In the second recessed portion sealing step, the large rotary tool G is inserted into the start position SM3 set on the upper surface 10a of the main body 10 while rotating counterclockwise, and then moved to the lid member 30 side. When the large rotary tool G crosses the abutting portion 40, the large rotary tool G is moved along the outer periphery of the opening peripheral edge 53 a of the second recess 51 on the overlapping portion 18. By moving the large rotary tool G, a surface side plasticizing region W2 is formed around the second recess 51.

  When the large-sized rotary tool G makes a round around the second recess 51, as shown in FIG. 10 (b), the surface side plasticization region W2 is traversed to the end position EM3 set on the upper surface 10a of the main body 10. Move. When the large rotary tool G reaches the end position EM3, the large rotary tool G is detached from the main body 10.

  Next, in the second recessed portion sealing step according to the present embodiment, friction stir welding is also performed on the overlapping portion 18 (see FIG. 9B) inside the second recessed portion 51. As shown in FIG. 10 (b), the friction stirring start position SM4 is set at the center of the lid member 30, and the large rotating tool G is moved along the inner periphery of the opening periphery 53b of the second recess 51 to thereby generate friction stirring. Join. Inside the second recess 51, a surface-side plasticized region W2 is formed. When the large rotary tool G makes a round around the inside of the second recess 51, the large rotary tool G is moved to the end position EM4 set at the center of the lid member 30 so as to overlap the existing surface side plasticizing region W2.

  As shown in FIG. 11, after performing the lid member fixing step and the second recess sealing step, the surface side plasticized regions W <b> 1 and W <b> 2 are formed on the surface Za of the heat transfer plate 101. Since the surface side plasticized regions W1 and W2 are contracted by heat shrinkage, compressive stress acts from the respective corners of the main body 10 toward the center on the surface Za side of the heat transfer plate 101. As a result, the heat transfer plate 101 may be bent so that the front surface Za side is concave (ie, convex toward the back surface Zb side). In particular, among the points a to j shown on the surface Za of the heat transfer plate 101, at the points a, c, f, and h related to the four corners of the heat transfer plate 101, the influence of the warp tends to be noticeable.

  In the correction process, friction stirring is performed from the back surface Zb of the heat transfer plate 101 using the large rotating tool G. The correction process is a process performed to eliminate the warp (distortion) generated in the lid member fixing process and the second recess sealing process. The correction process according to the present embodiment includes a correction friction stirring process for performing friction stirring on the back surface Zb of the heat transfer plate 101, and a corner friction stirring process for performing friction stirring on the corner of the back surface Zb of the heat transfer plate 101. Including.

  In the correction friction stirring step, as shown in FIG. 12, friction stirring is performed on the back surface Zb of the heat transfer plate 101 using a large rotating tool G. In the straightening friction stirring step, friction stirring is performed with a pushing amount substantially equal to that in the second recess sealing step. In this embodiment, the root of the straightening friction stirrer step surrounds the center point j ′, and the back side plasticized region W3 formed by the straightening friction stirrer step is similar to the planar shape of the heat transfer plate 101. Set to.

  Specifically, in the correction friction stirring step, as shown in FIG. 12, the stirring pin of the large rotary tool G is pushed (pressed) into an arbitrary position on the back surface Zb of the heat transfer plate 101. When a part of the shoulder portion of the large rotating tool G comes into contact with the back surface Zb, the large rotating tool G is relatively moved in a rectangular shape in plan view, and friction stirring is performed. In the present embodiment, the friction stir is performed so that the planar shape of the outer edge of the heat transfer plate 101 and the planar shape of the movement locus of the large rotating tool G are similar to each other.

In the corner friction agitation step, as shown in FIG. 12, friction agitation is intensively performed at each corner of the main body 10 at points a ′, c ′, f ′, and h ′. That is, the friction stirring start position _SM is set on the side 2a that forms the corner of the point a ', and the end position E _M is set on the other side 2b. Then, pushing a large rotating tool G at the start S _M, after the friction stir, disengaging the large rotating tool G at the end position E _M. The same process is performed on each corner of the point c ′, the point f ′, and the point h ′. According to the corner friction agitation step, the friction agitation can be performed mainly on the corners of the heat transfer plate 101 having a large warp, so that the flatness of the heat transfer plate 101 can be further improved.

  In this embodiment, the corner friction stirring step is formed so that the trajectory of the large rotary tool G is perpendicular to the diagonal line at each corner, but is not limited thereto. A route for friction stirring may be set as appropriate in consideration of the degree of warping of the corner. The opposing back side plasticized regions W4 and W4 and back side plasticized regions W4 and W4 formed in the corner friction stirring step are preferably formed so as to be symmetrical with respect to the center point j ′. . Thereby, the curvature of the surface Za side and the back surface Zb side of the heat-transfer plate 101 can be eliminated in a balanced manner, and the flatness of the heat-transfer plate 101 can be improved.

  Further, in the present embodiment, the length of the locus of the large rotary tool G on the back surface Zb side (the sum of the lengths of the back surface plasticizing region W3 and the back surface plasticizing region W4) is the small rotating tool F on the front surface Za side. And the length of the trajectory of the large rotary tool G (the sum of the lengths of the surface side plasticization region W1 and the surface side plasticization region W2) is set to be shorter. That is, the processing degree in the correction process is set to be smaller than the processing degrees in the lid member fixing step and the second recess sealing step. Thereby, the flatness of the heat transfer plate 101 can be improved. The reason for this will be described in Examples. The degree of work indicates the volume of the plasticized region formed by friction stirring.

  In the chamfering process, the back surface Zb of the heat transfer plate 101 is chamfered using a known end mill or the like. As shown in FIG. 13, on the back surface Zb of the heat transfer plate 101, a punched hole (not shown) of each rotary tool, a groove (not shown) generated by pushing each rotary tool, a burr, and the like are generated. Therefore, the back surface Zb of the heat transfer plate 101 can be formed smoothly by performing the chamfering process. In the present embodiment, as shown in FIG. 13, the thickness Ma of the chamfering process is set larger than the thickness Wa of the back surface plasticizing region W3. Thereby, since the back surface side plasticization area | regions W3 and W4 formed in the back surface Zb of the heat exchanger plate 101 are removed, the uniformity of the property of the heat exchanger plate 101 can be aimed at. Moreover, since the back surface side plasticization area | region W3, W4, etc. are not exposed to the back surface Zb, it is suitable also for designability etc.

In the present embodiment, the thickness of the chamfering process is set larger than the thickness of the back side plasticizing region, but is not limited to this. The thickness of the chamfering process may be set to be larger than the length of the stirring pin G2 of the large rotary tool G, for example.
Moreover, in this embodiment, although the correction process was performed using the large sized rotation tool G, you may perform a correction process using the rotation tool which is not equipped with the stirring pin G2. According to such a rotating tool, the depth of the back side plasticizing region can be reduced, so that the thickness to be chamfered can be reduced. Thereby, since there are few chamfering parts, the loss of the main body 10 can be made small and cost can be reduced.

  According to the method for manufacturing a heat transfer plate according to the second embodiment described above, in addition to the friction stir welding to the abutting portion 40, the friction stir welding is performed to the overlapping portion 18 around the second recess 51. Thus, a fine gap between the bottom surface 12a of the first recess 12 and the back surface 30b of the lid member 30 can be closed. Thereby, the watertightness and airtightness of the heat transfer plate 101 can be enhanced. In the present embodiment, since the second recess 51 is formed in a rectangular frame shape in plan view, the friction stir welding is also performed on the overlapping portion 18 formed inside the second recess 51. Thereby, the water-tightness and airtightness of the heat transfer plate 101 can be further enhanced.

  Further, by performing the correction process, even if the heat transfer plate 101 is distorted due to heat shrinkage by the lid member fixing process and the second recess sealing process, the warp generated on the surface Za is eliminated and the heat transfer plate 101 Flatness can be easily increased. Further, in the correction process in the present embodiment, the movement locus of the large rotary tool G is moved so as to be similar to the planar shape of the outer edge of the heat transfer plate 101, and the planar shape substantially equivalent to the surface side plasticizing region W2. Therefore, the friction stir can be performed in a balanced manner.

[Third embodiment]
Next, a third embodiment of the present invention will be described. In 3rd embodiment, the shape of the 2nd recessed part 61 formed in the main body 10 differs from 1st embodiment by the point which exhibits a planar view circular shape. In the description of the third embodiment, the description of the same parts as those in the first embodiment is omitted.

As shown in FIG. 14, the heat transfer plate 102 according to the third embodiment includes a main body 10 and a lid member 30 that is friction stir welded to the main body 10.
The main body 10 has a first recess 12 that is recessed in the upper surface 10 a of the main body 10, a second recess 61 that is recessed in the first recess 12, and a through hole 16 that communicates with the second recess 61.

  The first recess 12 is formed at a position one level lower than the upper surface 10a of the main body 10, and is a part where the lid member 30 is disposed. The first recess 12 has a bottom surface 12a that has a rectangular shape in plan view, and four side walls 12b that stand vertically from the bottom surface 12a.

  The second recess 61 is a portion through which the heat transport fluid (cooling water in the present embodiment) flows. The second recess 61 has a circular shape in a plan view inside the first recess 12 and opens upward. An opening periphery 62 is formed in the opening of the second recess 61.

  Next, the manufacturing method of the heat exchanger plate which concerns on 3rd embodiment is demonstrated using FIG. In the heat transfer plate manufacturing method according to the present embodiment, a lid member fixing step, a second recess sealing step, and a correction step are executed.

  In the lid member fixing step, friction stir welding is performed on the abutting portion 40 to bond the lid member 30 to the main body 10. In the lid member fixing step, friction stir welding is intermittently performed at the four corners of the abutting portion 40 as shown in FIG. That is, friction stir welding is performed by rotating the small rotary tool F to the right from the start position s3 set at each of the four corners of the abutting portion 40 to the end position e3. In the lid member fixing step, it is preferable to first frictionally stir one diagonal of the abutting portion 40 and then stir the other diagonal. Thereby, the lid member 30 can be fixed with good balance, and the positioning accuracy of the lid member 30 with respect to the main body 10 is improved.

  In the second recess sealing step, friction stir welding is performed on the overlapping portion 18 where the bottom surface 12a (see FIG. 14) of the first recess 12 and the back surface 30b of the lid member 30 overlap. In the second recess sealing step, the large rotary tool G is inserted in the start position SM5 set on the upper surface 10a of the main body 10 while rotating clockwise, and then moved to the lid member 30 side. When the large rotary tool G crosses the abutting portion 40, the large rotary tool G is moved along the outer periphery of the second recess 61 on the overlapping portion 18. By moving the large rotary tool G, the surface side plasticizing region W2 is formed.

  When the large-sized rotary tool G makes a round around the second recess 61, the surface side plasticizing region W2 is traversed and moved to the end position EM5 set on the upper surface 10a of the main body 10 according to the arrow in FIG. When the large rotary tool G reaches the end position EM5, the large rotary tool G is detached from the main body 10.

  In the straightening process, as shown in FIG. 16, friction stirring is performed on the back surface Zb of the heat transfer plate 102 using a medium-sized rotating tool H. The correction process is a process performed to eliminate the warp (distortion) generated in the lid member fixing process and the second recess sealing process. The correction process according to the present embodiment includes a correction friction stirring process for performing friction stirring on the back surface Zb of the heat transfer plate 102 and a corner friction stirring process for performing friction stirring on the corner of the back surface Zb of the heat transfer plate 102. Including.

  In the correction process according to the present embodiment, a medium-sized rotating tool (hereinafter referred to as “medium-sized rotating tool H”) is used. Although not specifically illustrated, the medium-sized rotary tool H has a similar shape to the large rotary tool G, and is smaller than the large rotary tool G and larger than the small rotary tool F. That is, the length of the stirring pin of the medium-sized rotating tool H is formed smaller than the stirring pin G2 of the large-sized rotating tool G. Further, the outer diameter of the shoulder portion of the medium-sized rotating tool H is formed smaller than the shoulder portion G1 of the large-sized rotating tool G.

  In the straightening friction stirring step, the medium-sized rotary tool H is inserted while rotating counterclockwise at the start position SK2 set near the point c ′ on the back surface Zb of the heat transfer plate 102, and then right along the outer periphery of the second recess 61. The medium size rotating tool H is moved around. By moving the medium-sized rotary tool H, the back surface side plasticized region W3 is formed. The back surface side plasticized region W3 formed on the back surface Zb of the heat transfer plate 102 has a planar shape equivalent to the surface side plasticized region W2 formed on the surface Za, and the front surface side plasticized region W2 and the back surface side plasticized. The region W3 is formed with the same length.

  In the corner friction stirring step, as shown in FIG. 16, friction stirring is intensively performed at each corner portion of the main body 10 at the points a ′, c ′, f ′, and h ′. In other words, the friction stirring start position SK3 is set on the side 2a side that forms the corner of the point a ', and the end position EK3 is set on the other side 2b side. Then, the small rotary tool F is pushed in at the start position SK3, and after frictional stirring is performed, the small rotary tool F is detached at the end position EK3. The back side plasticized regions W4, W4, W4, and W4 have substantially the same shape as the front side plasticized regions W1, W1, W1, and W1 formed on the surface Za of the heat transfer plate 102. Moreover, each back surface side plasticization area | region W4 is formed so that it may be located in the back of each front surface side plasticization area | region W1.

  According to the manufacturing method of the heat transfer plate according to the third embodiment described above, the friction stir welding is performed on the overlapping portion 18 around the second recess 61 in addition to the friction stir welding on the abutting portion 40. Thus, the gap between the bottom surface 12a of the first recess 12 and the back surface 30b of the lid member 30 can be closed. Thereby, the watertightness and airtightness of the heat transfer plate 102 can be enhanced.

  Further, in the correction process, even if the heat transfer plate 102 is distorted due to heat shrinkage by the lid member fixing process and the second recess sealing process, the warp generated on the surface Za is eliminated and the flatness of the heat transfer plate 102 is improved. Can be easily increased. In the correction process in the present embodiment, the front side plasticized regions W1 and W2 formed on the front surface Za of the heat transfer plate 102 and the plasticized regions W3 and W4 formed on the rear surface Zb have an equivalent planar shape. Formed. That is, although the sum of the lengths of the front surface side plasticized regions W1 and W2 and the sum of the lengths of the back surface side plasticized regions W3 and W4 are formed to be substantially the same length, the back surface Zb of the heat transfer plate 102 is formed. Since the medium-sized rotary tool H smaller than the large-sized rotary tool G is used, the degree of work of friction stirring (volume amount of the plasticized region) is smaller on the back surface Zb. Thereby, the flatness of the heat transfer plate 102 can be further improved. In this way, the degree of processing may be changed by changing the size of the rotary tool that performs friction stirring on the front and back of the heat transfer plate 102.

  In the present embodiment, the second recess 61 is formed in a circular shape in plan view, but the first recess 12 having a rectangular shape in plan view is formed so as to surround the second recess 61, and the first recess 12 is formed. It is sealed with a lid member 30 having a planar shape equivalent to the above. That is, even if the shape of the second recess 61 is circular in plan view, the shape of the lid member 30 can be rectangular in plan view. Thereby, since the shape of the lid member 30 can be a simple shape having a rectangular shape in plan view, the lid member 30 can be easily formed, and the lid member 30 can be accurately placed in the first recess 12. Can be arranged.

  Further, in the lid member fixing step according to the present embodiment, since the friction stir welding is performed only on the four corners of the abutting portion 40, work labor can be omitted.

[Fourth embodiment]
Next, a fourth embodiment of the present invention will be described. In 4th embodiment, the shape of the 2nd recessed part 71 formed in the main body 70 differs from 1st embodiment by the point which exhibits planar view U shape. In the description of the fourth embodiment, the description of the same parts as those in the first embodiment is omitted.

As shown in FIGS. 17 and 18, the heat transfer plate 103 according to the fourth embodiment is integrally formed by friction stir welding of a main body 70 and a lid member 80 disposed on the main body 70.
The main body 70 has a rectangular parallelepiped shape and a rectangular shape in plan view. The main body 70 includes a first recess 12 that is recessed in the upper surface 70 a of the main body 70, a second recess 71 that is recessed in the first recess 12, and a through hole 16 that communicates with the second recess 71. As shown in FIG. 18, the lid member 80 is a plate-like member that has a planar shape substantially equivalent to that of the first recess 12.

  The first recess 12 is formed at a position lower than the upper surface 70a of the main body 70, and is a part where the lid member 80 is disposed. The first recess 12 has a bottom surface 12a that has a rectangular shape in plan view, and four side walls 12b that are erected vertically from the bottom surface 12a.

  The second recess 71 is a portion through which the heat transport fluid (cooling water in the present embodiment) flows. The second recess 71 has a U shape in plan view and opens upward. An opening peripheral edge 72 is formed in the opening of the second recess 71.

  Next, the manufacturing method of the heat exchanger plate which concerns on 4th embodiment is demonstrated using FIG. In the heat transfer plate manufacturing method according to the present embodiment, a lid member fixing step, a second recess sealing step, and a correction step are executed.

  In the lid member fixing step, friction stir welding is performed on the abutting portion 40, and the lid member 80 is bonded to the main body 70. In the lid member fixing step, as shown in FIG. 18A, the friction stir welding is intermittently performed at the four corners of the abutting portion 40 using the small rotary tool F, and the middle of each side constituting the abutting portion 40 is performed. Friction stir welding is performed on the part. The surface side plasticizing region W1 is formed by the lid member fixing step.

  In the second recess sealing step, as shown in FIGS. 18A and 18B, friction stir welding is performed on the overlapping portion 18 where the bottom surface 12a of the first recess 12 and the back surface 80b of the lid member 80 overlap. I do. In the second recess sealing step, the large rotary tool G is inserted while being rotated to the right at the start position SM6 set on the upper surface 70a of the main body 70, and then moved to the lid member 80 side. When the large rotating tool G crosses the abutting portion 40, the large rotating tool G is moved along the outer periphery of the opening peripheral edge 72 of the second recess 71 on the overlapping portion 18. By moving the large rotary tool G, the surface side plasticizing region W2 is formed.

  When the large rotary tool G makes a round along the second recess 71, the surface side plasticizing region W2 is traversed and moved to the end position EM6 set on the upper surface 70a of the main body 70 in accordance with the arrow in FIG. Let When the large rotary tool G reaches the end position EM6, the large rotary tool G is detached from the main body 70.

  In the correction process, as shown in FIG. 19, friction stirring is performed on the back surface Zb of the heat transfer plate 103 using a large rotary tool G. In the correction process, the large rotating tool G is moved so as to exhibit a rectangular shape in plan view. On the rear surface Zb of the heat transfer plate 103, a rear surface side plasticized region W3 is formed. The length of the back side plasticizing region W3 is shorter than the sum of the front side plasticizing regions W1 and W2.

  According to the manufacturing method of the heat transfer plate according to the fourth embodiment described above, the friction stir welding is performed on the overlapping portion 18 around the second recess 71 in addition to the friction stir welding on the abutting portion 40. Thus, a fine gap between the bottom surface 12a of the first recess 12 and the back surface 80b of the lid member 80 can be closed. Thereby, the water-tightness and airtightness of the heat transfer plate 103 can be enhanced.

  Further, by performing the correction process, even if the heat transfer plate 103 is distorted by the heat shrinkage due to the lid member fixing process and the second recess sealing process, the warp generated on the surface Za is eliminated and the heat transfer plate 103 Flatness can be easily increased.

  In the present embodiment, the second recess 71 is formed in a U shape in plan view. However, the first recess 12 having a rectangular shape in plan view is formed so as to surround the second recess 71, and the first recess 12 is sealed with a lid member 80 having a planar shape equivalent to 12. That is, even if the shape of the second recess 71 is a complicated shape such as a U shape in plan view, the lid member 80 can be rectangular in plan view. As a result, since the lid member 80 can be a simple shape having a rectangular shape in plan view, the lid member 80 can be easily formed, and the lid member 80 is accurately placed in the first recess 12. Can be arranged.

  Although the embodiments of the present invention have been described above, design changes can be made as appropriate without departing from the spirit of the present invention. For example, when the lid member 80 is relatively large as in the fourth embodiment, the temporary joining step may be performed before the lid member fixing step.

  In the temporary joining step, as shown in FIGS. 20A and 20B, the middle-sized rotary tool rotated from above the lid member 80 inside the abutting portion 40 and outside the second recess 71. H is pushed in, and friction stir welding is performed on the overlapping portion 18 where the bottom surface 12a of the first recess 12 and the back surface 80b of the lid member 80 are overlapped. The back side plasticized region W5 is formed by the friction stir welding.

  The main body 70 and the lid member 80 are temporarily bonded by the temporary bonding step. When the lid member 80 is large, when the lid member fixing step is performed, the lid member warps due to the heat shrinkage of the friction stir welding, and the central portion of the lid member 80 and the main body 70 are separated from each other. Can be cumbersome. However, since the warp of the lid member 80 can be suppressed by performing the temporary joining step of the present embodiment, the second recess sealing step can be suitably performed.

  The temporary joining step may be performed continuously by friction stir welding in the overlapping portion 18 or may be performed intermittently as in the present embodiment. Moreover, what is necessary is just to set suitably the magnitude | size of the rotary tool to be used according to the magnitude | size of the cover member 30 in a temporary joining process.

  In the above-described embodiment, the lid member fixing step is performed before the second recess sealing step. However, the lid member fixing step may be performed after the second recess sealing step.

  Moreover, in order to reduce the frictional resistance at the time of insertion in the position which inserts the large sized rotation tool G, you may form a pilot hole previously.

  In the present embodiment, the planar shape of the first concave portion and the lid member is rectangular, but is not limited thereto, and may be circular, elliptical, or rectangular in plan view. The shapes of the first recess and the lid member are preferably shapes that are easy to mold and can be placed with high precision.

  Further, the route of friction stirring related to the correction process is not limited to the above-described form, and the following form may be used. FIG. 21 is a plan view of the back side of the heat transfer plate, where (a) is a first modification, (b) is a second modification, (c) is a third modification, and (d) is a fourth modification. For example, (e) shows a fifth modification, and (f) shows a sixth modification.

  The trajectories (back surface plasticizing region W3) of the correction rotary tool of the first and second modifications shown in FIGS. 21A and 21B all surround the center point j ′ of the main body 10. It is characterized by being formed. The first modification is formed so as to be similar to the outer shape of the main body 10. Moreover, you may form in a grid | lattice form like the 2nd modification shown in FIG.21 (b).

  Each of the trajectories (back surface plasticizing region W3) of the correction rotating tool of the third modification and the fourth modification shown in FIGS. 21C and 21D passes through the center point j ′ of the main body 10. It is characterized by being formed radially. The third modification shown in FIG. 21C includes a plurality of loops having a center point j ′ as a start point and an end point, and is formed so as to be point-symmetric with respect to the center point j ′. Moreover, since the 3rd modification can be formed in the way of one-stroke writing, work efficiency can be improved. The fourth modified example shown in FIG. 21D is formed so as to pass through the central point j ′ and to be parallel to the diagonal line of the main body 10.

  The trajectories (back surface plasticizing region W3) of the correction rotary tool of the fifth and sixth modified examples shown in FIGS. 21 (e) and (f) are divided into four by a straight line passing through the central point j ′. In addition, four trajectories having the same shape are formed independently, and trajectories diagonally opposed across the center point j ′ are formed to be point-symmetric. The four trajectories may have any shape as long as they have the same shape.

  As described above, the correcting step may be performed by appropriately setting the route of friction stirring according to the locus of friction stirring in the joining step performed on the main body 10.

  Next, examples of the present invention will be described. In the embodiment according to the present invention, as shown in FIGS. 22 (a) and 22 (b), friction stirring is performed so as to draw three circles on the front surface Za and the rear surface Zb of the square body 10 in plan view, and the surface Za The deformation amount of the warp generated on the side and the deformation amount of the warp generated on the back surface Zb side were measured. That is, the closer the value of the warp deformation amount generated on the front surface Za side and the value of the warp deformation amount generated on the back surface Zb side, the higher the flatness of the main body 10.

  The main body 10 was a rectangular parallelepiped having a plan view of 500 mm × 500 mm, and the measurement was performed using two types having a thickness of 30 mm and 60 mm. The material of the main body 10 is a JIS standard 5052 aluminum alloy.

  The three circles that are the locus of frictional stirring are centered on the point j or the point j ′ set at the center of the main body 10, and both the surface Za and the back surface Zb have a radius r1 = 100 mm (hereinafter also referred to as a small circle), r2 = 150 mm. (Hereinafter also referred to as a middle circle), r3 = 200 mm (hereinafter also referred to as a great circle). Friction stirring was performed in the order of small circle, middle circle, and great circle.

  As the rotation tool, a rotation tool having the same size was used on both the front surface Za side and the back surface Zb side. The size of the rotating tool is such that the outer diameter of the shoulder portion is 20 mm, the length of the stirring pin is 10 mm, the base size (maximum diameter) of the stirring pin is 9 mm, and the tip size (minimum diameter) of the stirring pin is 6 mm. A thing was used. The rotational speed of the rotary tool was set to 600 rpm, and the feed rate was set to 300 mm / min. Further, the pressing amount of the rotary tool was set constant on both the front surface Za side and the back surface Zb side. As shown in FIG. 22, the plasticized regions formed on the surface Za side are designated as a plasticized region W21 to a plasticized region W23 from a small circle to a large circle, respectively. Further, the plasticized regions formed on the back surface Zb side are designated as plasticized regions W31 to W33 from the small circle to the great circle. Each measurement result in the said Example is shown in the following Tables 1-4.

  Table 1 is a table showing the measured values when the plate thickness of the main body is 30 mm and frictional stirring is performed from the surface side. “Before FSW” indicates the height difference between the central point j (reference j) and each point (point a to point h) before the friction stir. “After FSW” indicates a difference in height between the reference j and each point after performing frictional stirring of three circles with the reference j being zero. The “surface side deformation amount” indicates a value of (after FSW−before FSW) at each point. The lowermost column of “surface side deformation amount” indicates an average value of the points a to h. Negative values of “before FSW” and “after FSW” mean that they are located below the reference j.

Table 2 is a table showing measured values when the plate thickness of the main body is 30 mm and frictional stirring is performed from the back side (correction process). “Before FSW” indicates the height difference between the central point j ′ (reference j ′) and each point (a ′ to h ′) before the friction stir.
As shown in FIG. 22, “FSW1” indicates a difference in height between the reference j ′ and each point after the frictional stirring of the small circle (radius r1) is performed with the reference j ′ set to zero. “Back side deformation amount 1” indicates a value (before FSW1−FSW) at each point. The bottom column of “back side deformation amount 1” indicates an average value of the points a to h.
“FSW2” indicates a difference in height between the reference j ′ and each point after performing frictional stirring of the middle circle (radius r2) in addition to the small circle (radius r1) with the reference j ′ set to zero. ing. “Back side deformation amount 2” indicates a value (before FSW2−FSW) at each point. The bottom column of “back side deformation amount 2” indicates an average value of the points a to h.
“FSW3” is based on the reference j ′ after the frictional stirring of the great circle (radius r3) in addition to the small circle (radius r1) and the middle circle (radius r2) with the reference j ′ set to zero. The height difference from the point is shown. "Back side deformation amount 3" indicates the value of (before FSW3-FSW) at each point. The bottom column of “back side deformation amount 3” indicates an average value of the points a to h.

  Table 3 shows the measured values when the plate thickness of the main body is 60 mm and frictional stirring is performed from the surface side. Each item in Table 3 has substantially the same meaning as each item in Table 1.

  Table 4 is a table showing the measured values when the plate thickness of the main body is 60 mm and friction stirring is performed from the back side. Each item in Table 4 has substantially the same meaning as each item in Table 2.

  Comparing the average value (1.61) of “front side deformation” in Table 1 and the average value (2.04) of “back side deformation 1” in Table 2, the value of “back side deformation 1” is more large. Similarly, the average value (2.95) of “back side deformation 2” and the average value (3.53) of “back side deformation 3” are larger than the average value (1.61) of “front side deformation”. ing. That is, when the plate thickness of the main body is 30 mm, the warping of the main body returns too much only by performing a small circle of friction stirring from the back side. Therefore, in the case of the main body of 30 mm, the flatness of the main body 10 can be improved with a processing degree lower than that on the surface side.

  When the average value (0.98) of “front side deformation amount” in Table 3 is compared with the average value (0.91) of “back side deformation amount 2” in Table 4, the deformation amounts of both are approximated. Therefore, when the plate thickness of the main body 10 was 60 mm, it was confirmed that the flatness of the main body 10 was high when the frictional stirring of the small circle and the middle circle was performed from the back side. That is, when the plate thickness is 60 mm, the flatness of the main body 10 can be improved by setting the processing degree on the back surface side to be lower than that on the front surface side.

DESCRIPTION OF SYMBOLS 1 Heat-transfer plate 10 Main body 10a Upper surface 12 1st recessed part 12a Bottom surface 12b Side wall 13 2nd recessed part 14 Opening periphery 16 Through-hole 18 Overlapping part 30 Lid member 30a Side surface 30b Back surface 40 Abutting part F Small rotating tool F1 Shoulder part F2 Stirring pin G Large rotating tool G1 Shoulder part G2 Stirring pin s1 Start position e1 End position SM1 Start position EM1 End position W1-W5 Plasticization region

Claims (13)

The main body having a first recess recessed in the surface and a second recess through which a heat transport fluid that transports heat generated by the heat generating body that is recessed in the bottom surface of the first recess flows. A method of manufacturing a heat transfer plate formed by fixing a lid member for sealing a recess by friction stir welding,
A lid member fixing step of performing friction stir welding on at least a part of the abutting portion by moving a rotary tool along the abutting portion between the side wall of the first recess of the main body and the side surface of the lid member;
A second recess sealing step in which a rotary tool is moved along the opening periphery of the second recess, and friction stir welding is performed on the overlapping portion of the bottom surface of the first recess and the back surface of the lid member;
A correction step of moving the rotating tool relative to the back surface of the heat transfer plate to perform frictional stirring, and a method of manufacturing the heat transfer plate.   The volume amount of the plasticizing region formed on the back surface side of the heat transfer plate is set to be smaller than the volume amount of the plasticizing region formed on the surface side of the heat transfer plate. The manufacturing method of the heat-transfer board of description.   3. The correction step, wherein the planar shape of the plasticized region formed in the correction step is set so as to be substantially point-symmetric with respect to the center of the heat transfer plate. The manufacturing method of the heat exchanger plate as described in 2.   In the straightening step, the planar shape of the plasticized region formed in the straightening step is set so as to be substantially similar to the shape of the outer edge of the heat transfer plate. The manufacturing method of the heat exchanger plate as described in any one of these.   In the straightening step, the planar shape of the plasticized region formed in the straightening step is set to be substantially the same shape as the planar shape of the plasticized region formed on the surface side of the heat transfer plate. The manufacturing method of the heat exchanger plate as described in any one of Claim 1 thru | or 4.   In the straightening step, the total length of the plasticized region formed in the straightening step is set to be substantially equal to the full length of the plasticized region formed on the surface side of the heat transfer plate. The manufacturing method of the heat exchanger plate as described in any one of Claims 1 thru | or 5.   In the straightening step, the total length of the trajectory of the rotary tool used in the straightening step is set to be shorter than the full length of the plasticized region formed on the surface side of the heat transfer plate. The manufacturing method of the heat exchanger plate as described in any one of Claims 1 thru | or 4.   The outer diameter of the shoulder part of the rotary tool used in the straightening process is set smaller than the outer diameter of the shoulder part of the rotary tool used in the second recess sealing process. A method for producing a heat transfer plate according to claim 1.   The length of the stirring pin of the rotary tool used in the straightening step is set shorter than the length of the stirring pin of the rotary tool used in the second recess sealing step. A method for producing a heat transfer plate according to claim 1.   10. The thickness of the main body is set to 1.5 times or more of an outer diameter of a shoulder portion of a rotary tool used in the second recess sealing step. 10. Manufacturing method of heat transfer plate.   The thickness of the said main body is set to 3 times or more of the length of the stirring pin of the rotary tool used at the said 2nd recessed part sealing process, The transmission as described in any one of Claim 1 thru | or 10 characterized by the above-mentioned. Manufacturing method of hot plate.   2. The corner friction stirring step of performing friction stir using a rotary tool on the corner of the heat transfer plate in the correction step when the main body is a polygon in plan view. The manufacturing method of the heat exchanger plate as described in any one of thru | or thru | or 11. After the straightening step, a chamfering step of chamfering the back side of the heat transfer plate is included, and the depth of the chamfering is larger than the length of the stirring pin of the rotary tool used in the straightening step. The manufacturing method of the heat exchanger plate as described in any one of Claim 1 thru | or 12.

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