JP2006138808A - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP2006138808A
JP2006138808A JP2004330783A JP2004330783A JP2006138808A JP 2006138808 A JP2006138808 A JP 2006138808A JP 2004330783 A JP2004330783 A JP 2004330783A JP 2004330783 A JP2004330783 A JP 2004330783A JP 2006138808 A JP2006138808 A JP 2006138808A
Authority
JP
Japan
Prior art keywords
substrate
board
base
jig
substrate holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004330783A
Other languages
English (en)
Japanese (ja)
Inventor
Katsuhide Kubo
勝英 久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2004330783A priority Critical patent/JP2006138808A/ja
Priority to CNA2005800264954A priority patent/CN1993624A/zh
Priority to PCT/JP2005/016032 priority patent/WO2006051643A1/fr
Publication of JP2006138808A publication Critical patent/JP2006138808A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2004330783A 2004-11-15 2004-11-15 基板検査装置 Pending JP2006138808A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004330783A JP2006138808A (ja) 2004-11-15 2004-11-15 基板検査装置
CNA2005800264954A CN1993624A (zh) 2004-11-15 2005-09-01 基板检查装置
PCT/JP2005/016032 WO2006051643A1 (fr) 2004-11-15 2005-09-01 Appareil d’inspection de substrats

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004330783A JP2006138808A (ja) 2004-11-15 2004-11-15 基板検査装置

Publications (1)

Publication Number Publication Date
JP2006138808A true JP2006138808A (ja) 2006-06-01

Family

ID=36336326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004330783A Pending JP2006138808A (ja) 2004-11-15 2004-11-15 基板検査装置

Country Status (3)

Country Link
JP (1) JP2006138808A (fr)
CN (1) CN1993624A (fr)
WO (1) WO2006051643A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8836362B2 (en) 2010-05-31 2014-09-16 Ricoh Company, Ltd. Switch probe and device and system for substrate inspection
JP2021038926A (ja) * 2019-08-30 2021-03-11 ヤマハファインテック株式会社 高周波特性検査装置、及び高周波特性検査方法
KR20210099157A (ko) * 2019-01-24 2021-08-11 주식회사 고영테크놀러지 검사 장치용 지그, 검사 장치, 검사 세트 및 이를 이용하는 대상물 검사 방법

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008202283A (ja) * 2007-02-19 2008-09-04 Shimizu Corp 擬似窓
CN103412251A (zh) * 2013-07-24 2013-11-27 昆山迈致治具科技有限公司 一种具有行程控制机构的pcb板性能检测治具
JP5720845B1 (ja) * 2014-10-14 2015-05-20 富士ゼロックス株式会社 検査装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0161676U (fr) * 1987-10-15 1989-04-19
JPH01102778U (fr) * 1987-12-25 1989-07-11
JPH0212674U (fr) * 1988-07-06 1990-01-26
JPH03245600A (ja) * 1990-02-23 1991-11-01 Nec Corp プリント基板の検査方法および検査装置
JP2001201528A (ja) * 2000-01-18 2001-07-27 Hiroshi Fujimoto 配線基板等の導通試験装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0161676U (fr) * 1987-10-15 1989-04-19
JPH01102778U (fr) * 1987-12-25 1989-07-11
JPH0212674U (fr) * 1988-07-06 1990-01-26
JPH03245600A (ja) * 1990-02-23 1991-11-01 Nec Corp プリント基板の検査方法および検査装置
JP2001201528A (ja) * 2000-01-18 2001-07-27 Hiroshi Fujimoto 配線基板等の導通試験装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8836362B2 (en) 2010-05-31 2014-09-16 Ricoh Company, Ltd. Switch probe and device and system for substrate inspection
KR20210099157A (ko) * 2019-01-24 2021-08-11 주식회사 고영테크놀러지 검사 장치용 지그, 검사 장치, 검사 세트 및 이를 이용하는 대상물 검사 방법
US11867747B2 (en) 2019-01-24 2024-01-09 Koh Young Technology Inc. Transfer apparatus for inspection apparatus, inspection apparatus, and object inspection method using same
US11921151B2 (en) 2019-01-24 2024-03-05 Koh Young Technology Inc. Jig for inspection apparatus, inspection apparatus, and inspection set
KR102649083B1 (ko) * 2019-01-24 2024-03-20 주식회사 고영테크놀러지 검사 장치용 지그, 검사 장치, 검사 세트 및 이를 이용하는 대상물 검사 방법
JP2021038926A (ja) * 2019-08-30 2021-03-11 ヤマハファインテック株式会社 高周波特性検査装置、及び高周波特性検査方法
JP7303543B2 (ja) 2019-08-30 2023-07-05 ヤマハファインテック株式会社 高周波特性検査装置、及び高周波特性検査方法

Also Published As

Publication number Publication date
WO2006051643A1 (fr) 2006-05-18
CN1993624A (zh) 2007-07-04

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