JP2006138808A - Board inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve a board inspection device with simple board holding structure, which carries out easily and handily setting a circuit board in and out whereon an electronic component is mounted, without being concerned about such a state that the circuit board comes into contact with a positioning pin or a probe pin of a board inspection fixture in operations for setting it in and out. <P>SOLUTION: In the board inspection device, the board inspection fixture 7 is attached to one of a fixed side base 3 and a movable side base 2, and a board pressing fixture 5 is attached to the other base, respectively, and the movable side base 2 is moved up and down. The board inspection device is made up such that a board holding unit 12 with drawer structure is disposed between the board inspection fixture 7 and the board pressing fixture 5, and the board holding unit is moved up and down while following the movable side base 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a board inspection apparatus for inspecting the electrical performance of a circuit board on which electronic components or the like are mounted, and more particularly to a board inspection apparatus capable of preventing damage to probe pins and the like during board setting.

  As a conventional substrate inspection apparatus, for example, a lower base on which a substrate inspection jig having a plurality of probe pins and substrate positioning pins (hereinafter simply referred to as positioning pins) is mounted, and a substrate holder having a substrate pressing support And a circuit board on which electronic components are mounted is manually inserted between the board inspection jig and the board holding jig from the outside and set on the positioning pins. In this state, a structure in which either the upper jig or the lower jig is operated in the substrate pressing direction so that the probe pin is brought into contact with the inspected portion of the circuit board is already known ( For example, see Patent Documents 1 and 2).

  Further, as another conventional substrate inspection apparatus, a substrate holding frame disposed between a pair of upper and lower inspection jigs is provided, and the substrate holding frame is attached to and detached from an XY movement mechanism different from the inspection jig. There is also a structure in which the circuit board to be inspected that can be attached and fitted in the board holding frame is moved in the XY direction (for example, see Patent Document 3).

JP-A-8-43489 (2nd page, FIG. 2) JP-A-8-334549 (2nd page, FIG. 1) Japanese Patent Application Laid-Open No. 11-344539 (2nd and 5th pages, FIGS. 1 and 16)

  Since the conventional board inspection apparatus is configured as described above, in Patent Documents 1 and 2, the circuit board to be inspected on which the electronic component is mounted is manually moved to the lower board inspection jig and the upper board inspection jig. When the circuit board is inserted between the board holding jig and set on the positioning pin of the board inspection jig, and when the circuit board after inspection is taken out, the circuit board comes into contact with the probe pin and the probe pin or circuit There was a problem that the substrate was easily damaged. In addition, the above-described circuit board setting work and taking-out work must be performed carefully so that the circuit board does not come into contact with the probe pins, and thus there is a problem that workability is very poor.

  On the other hand, in Patent Document 3, since the substrate holding frame can be moved in the XY direction by the XY moving mechanism, the substrate holding frame is slid outward from between the upper and lower inspection jigs. Although it is considered that the circuit board can be attached to and removed from the holding frame, the XY movement mechanism is composed of an X-direction rail, a Y-direction rail, a slider, and the like that are separate from the board holding frame. For this reason, there are problems that the number of parts is large, the structure is complicated, the entire apparatus becomes large, and the adjustment and maintenance of the apparatus become complicated. In addition, there is a problem that the XY movement mechanism needs to be controlled separately from the system of the inspection jig. In particular, the board holding frame attached to the XY moving mechanism must be replaced with a board holding frame having dimensions corresponding to the size when setting circuit boards of different sizes. There was a problem that it could not be adapted to circuit boards of various sizes with one board holding frame.

  The present invention has been made to solve the above-described problems, and can easily and skillfully set and remove a circuit board on which electronic components are mounted. It is an object of the present invention to provide a substrate inspection apparatus capable of realizing a simple substrate holding structure that does not cause any fear of coming into contact with positioning pins or probe pins of a substrate inspection jig.

  The substrate inspection apparatus according to the present invention includes a fixed base and a movable base for jig mounting, and a substrate inspection jig having a plurality of probe pins and substrate positioning pins on one base, and the other. In a substrate inspection apparatus that attaches and detachably attaches a substrate pressing jig to the base of the substrate and moves the movable side base up and down in a direction relative to the fixed side base, the substrate holding jig is disposed between the fixed side base and the movable side base. A substrate holding unit having a drawer structure in which the circuit board to be inspected is set so as to be removable, and the substrate holding unit is moved up and down between the fixed side base and the movable side base following the movable side base. A unit support for supporting and holding the substrate holding unit at an intermediate position away from the substrate inspection jig and the substrate holding jig at the open position of the movable side base. It is obtained by a means.

  According to this invention, the substrate holding unit has a drawer structure that moves up and down following the movable side base between the substrate inspection jig and the substrate pressing jig mounted on the fixed side base and the movable side base, respectively. In the position where the movable side base is separated from the fixed side base, the substrate holding unit is positioned between the substrate inspection jig and the substrate holding jig at an intermediate single position away from the jig. The circuit board can be attached to and removed from the board holding unit by pulling the board holding unit outward, and the circuit board at the time of mounting and removal can be used as a board. Since there is no risk of contact with the positioning pins and probe pins of the inspection jig, damage to the positioning pins, probe pins, and circuit boards due to the contact is prevented. There is an effect that it is Rukoto. In addition, since the circuit board to be inspected is set and the substrate holding unit held in the storage position between the substrate inspection jig and the substrate holding jig is moved up and down following the movable base as described above. There is an effect that the circuit board can be smoothly and accurately positioned with respect to the positioning pins and the probe pins when the circuit board is inspected.

Embodiment 1 FIG.
1 is a schematic side view showing a substrate inspection apparatus according to Embodiment 1 of the present invention, FIG. 2 is a plan view showing a pull-out type substrate holding unit in FIG. 1, and FIG. 3 is an enlarged view showing a main part of FIG. It is a perspective view.
The substrate inspection apparatus shown in FIG. 1 includes a movable side base 2 and a fixed side base 3 arranged above and below an apparatus main body (base of a substrate inspection press) 1. The movable base 2 is connected to the lower end of a piston rod 4a of a press cylinder 4 installed on the upper part of the apparatus main body 1 and is driven up and down by the expansion and contraction operation of the press cylinder 4. A substrate pressing jig 5 having a plurality of supports 6 for holding the substrate is detachably mounted on the lower surface of the movable side base 2. On the other hand, a substrate inspection jig 7 having a plurality of probe pins 8 and positioning pins 9 is detachably mounted on a fixed base 3 disposed at the lower part of the apparatus main body 1. The probe pin 8 and the positioning pin 9 each have a biasing force in the upward direction and can be expanded and contracted, and the positioning pin 9 has a sharp taper head (hereinafter referred to as a taper head) 9a. have.

  Between the movable side base 2 and the fixed side base 3, there is disposed a substrate holding unit 12 having a drawer structure on which a circuit board 30 to be inspected is set so as to be removable. The substrate holding unit 12 is moved up and down following the movable side base 2 between the substrate pressing jig 5 and the substrate inspection jig 7 by the unit support means 10 integrated with the movable side base 2. These specific configurations will be described below.

  In the first embodiment, the unit supporting means 10 includes front and rear, left and right guide rods 10a that are integrally projected on the lower surface of the movable base 2 and hang down longer than the support 6, and these guide rods 10a. A stopper 10b that is integrally provided at a lower portion of the movable side base 2 and holds the substrate holding unit 12 independently at an intermediate position between the substrate pressing jig 5 and the substrate inspection jig 7 at a position where the movable base 2 is lifted and released. It is made up of. On the other hand, the substrate holding unit 12 is attached to the guide rod 10a via a thrust bearing 11 (see FIG. 1) so that it can be moved up and down, and a pair of left and right drawer rails held in contact with and separated from the stopper 10b. 13 and a drawer-type substrate holding frame 14 in which both side portions are slidably fitted and supported on these drawer rails 13. The substrate holding frame 14 has a handle 15 on the front surface 14a.

  Here, the pull-out rail 13 abuts on the substrate inspection jig 7 of the fixed side base 3 during the press process during the substrate inspection (the lowering operation process of the movable side base 2). The mounting structure allows the guide rod 10a to descend. The substrate holding frame 14 supported on both sides by such a drawer rail 13 is in the ascending / separating position of the substrate holding jig 5 mounted on the movable side base 2 and the support 6 of the substrate holding jig 5. Is held by the stopper 10b at an intermediate position between the substrate pressing jig 5 and the substrate inspection jig 7 so as not to contact the probe pins 8 and the positioning pins 9 of the substrate inspection jig 7.

  The substrate holding frame 14 is equipped with a substrate holding mechanism 16 that can move horizontally in the plane XY direction. The substrate clamping mechanism 16 is capable of clamping circuit boards 30 of different sizes, and includes a substrate position adjusting bar 17 that is slidably mounted in the front-rear direction across the side wall walls 14b of the substrate holding frame 14. A movable stopper 18 is slidably attached to the substrate position adjustment bar 17 in the left-right direction (longitudinal direction).

  More specifically, left and right guide grooves 19 that are parallel to the drawer rails 13 are provided inside the drawer rails 13 on both side wall walls 14b of the substrate holding frame 14, and these guide grooves 19 are provided. Both end portions of the substrate position adjustment bar 17 are fastened and fixed to the substrate holding frame 14 so as to be movable in the front-rear direction by adjusting screws 20 that slidably pass through the substrate. The substrate position adjusting bar 17 is also provided with a guide groove 21 extending in the longitudinal direction (perpendicular to the guide groove 19), and the movable stopper is provided by an adjustment screw 22 that slidably passes through the guide groove 21. 18 is movably attached to the substrate position adjusting bar 17. Here, the inner wall surface of the substrate holding frame 14 on the front surface 14a side and the opposing wall surface of the substrate position adjusting bar 17 have substrate supporting step portions 14c and 17a (see FIG. 2) which are L-shaped in cross section and parallel to each other. The circuit board 30 is fitted and set across the board support steps 14c and 17a.

  The circuit board 30 is mounted with electronic components, and has a positioning hole 31 (see FIG. 1) for fitting the taper head portion 9a of the positioning pin 9 when the board is inspected.

Next, the operation will be described.
In the board inspection apparatus before the circuit board 30 is set, the movable base 2 to which the board holding jig 5 is mounted is held at the lifted open position as shown in FIG. The rail 13 is in contact with the stopper 10b of the guide rod 10a and is independently held at a neutral position between the substrate pressing jig 5 and the substrate inspection jig 7. In this state, the board holding frame 14 is pulled forward, and the circuit board 30 is fitted and set in the board holding frame 14. In the setting, the substrate position adjusting bar 17 and the movable stopper 18 in the substrate holding mechanism 16 on the substrate holding frame 14 are slid and adjusted to positions corresponding to the size of the circuit board 30 with the respective adjusting screws 20 and 22. Keep it fixed. In this state, by placing the circuit board 30 on the board holding frame 14 and the board support step portions 14 c and 17 a of the board position adjusting bar 17, the circuit board 30 is fitted and set in the board holding frame 14.

  After the setting, the substrate holding frame 14 is pushed along the drawer rail 13 into the storage position between the substrate pressing jig 5 and the substrate inspection jig 7. As a result, the positioning hole 31 of the circuit board 30 is positioned at a position corresponding to the positioning pin 9 of the board inspection jig 7. In this state, when the press cylinder 4 is extended and activated, the movable side base 2, the substrate pressing jig 5, the guide rod 10a, and the substrate holding unit 12 are integrally lowered. The tapered head 9 a of the positioning pin 9 is fitted into the positioning hole 31 of the circuit board 30 almost simultaneously with the contact of the drawer rail 13 of the board holding unit 12 with the board inspection jig 7. As a result, the circuit board 30 is held in a state where the inspection target portion is positioned at a position facing the probe pin 8 and is lifted from the board support steps 14 c and 17 a by the positioning pin 9.

  In this way, even when the inspection target portion of the circuit board 30 is positioned and held at the position corresponding to the probe pin 8 and the drawer rail 13 is in contact with the board inspection jig 7, The side base 2 continues to descend. At this time, the guide rod 10a integrated with the movable base 2 continues the lowering operation while leaving the substrate holding unit 12 on the substrate inspection jig 7. Then, when the support 6 of the substrate pressing jig 5 that is lowered integrally with the movable side base 2 presses the circuit board 30, the inspection target portion of the circuit board 30 comes into contact with the probe pin 8 and the circuit board 30. The performance test is conducted electrically. After the inspection is completed, the movable base 2 is driven up by the press cylinder 4, so that the stopper 10b of the guide rod 10a comes into contact with the lower surface of the pull-out rail 13 in the ascending process, and the substrate holding unit 12 and the circuit. As shown in FIG. 1, the substrate holding unit 12 and the circuit board 30 are separated from the probe pins 8 of the substrate inspection jig 7 and the support 6 of the substrate holding jig 5 as shown in FIG. It is independently held at an intermediate position between the holding jig 5 and the substrate inspection jig 7. In this state, the substrate holding frame 14 is pulled out, and the inspected circuit board 30 is taken out from the substrate holding frame 14.

  According to the first embodiment described above, the guide rod 10a is integrally provided on the movable base 2 that is mounted with the substrate pressing jig 5 and is driven up and down by the press cylinder 4, and a pair of left and right guide rods are provided on the guide rod 10a. The drawer rails 13 are attached so as to be movable up and down, and both side portions of the substrate holding frame 14 are slidably supported by the drawer rails 13, and the guide rod 10 a is in the raised and separated position of the movable base 2. The pull-out rail is located at an intermediate position between the substrate holding jig 5 and the substrate inspection jig 7 apart from the support 6 of the substrate holding jig 5 and the probe pins 8 and the positioning pins 9 of the board inspection jig 7. 13 is provided so that the substrate holding unit 12 having a drawer structure is realized by providing the stopper 10b for independently holding the movable base 13. The substrate holding frame 14 held at the intermediate position between the substrate holding jig 5 and the board inspection jig 7 is pulled out outward at the ascending and separating position 2, and the circuit board 30 to be inspected is placed on the board holding frame 14. Since the circuit board 30 at the time of setting does not come into contact with the support 6, the probe pin 8, the positioning pin 9, etc., the circuit board 30, the support 6 and the probe are caused by the contact. There is an effect that it is possible to prevent the pins 8 and the positioning pins 9 from being damaged.

  Further, according to the first embodiment, the substrate holding unit 12 is arranged between the substrate pressing jig 5 of the movable side base 2 and the substrate inspection jig 7 of the fixed side base 3, and the substrate holding unit is arranged. Since the substrate holding mechanism 16 that can move horizontally in the plane X-Y direction is mounted on the circuit board 12, it is possible to suppress an increase in the size of the entire substrate inspection apparatus, and even for circuit boards 30 of different sizes, Can be stably and reliably set on the common substrate holding frame 14, and the substrate clamping mechanism 16 can be easily adjusted and maintained.

Embodiment 2. FIG.
FIG. 5 is a schematic side view showing a substrate inspection apparatus according to Embodiment 2 of the present invention. The same parts as those in FIGS.
In the first embodiment, the upper base 2 to which the substrate pressing jig 5 is attached is used as the movable base that is driven up and down by the press cylinder 4, and the lower base 3 to which the substrate inspection jig 7 is attached is used. In the second embodiment, the upper base 2 is the fixed base, the lower base 3 is the movable base, and the lower movable base is opposite to the first embodiment. 3 is configured to be driven up and down by a press cylinder 4, and other configurations are the same as those of the first embodiment. In the case of the second embodiment configured as described above, the same operational effects as those of the first embodiment can be obtained.

Embodiment 3 FIG.
FIG. 6 is a schematic side view showing a substrate inspection apparatus according to Embodiment 3 of the present invention. The same parts as those in FIGS.
In the third embodiment, the substrate inspection apparatus according to the first and second embodiments is configured to be fully automated by the controller 23. That is, the substrate inspection apparatus according to the third embodiment has a motor 24 attached to the pull-out rail 13 of the substrate holding unit 12 and the rotation output of the motor 24 as a slide drive of the substrate holding frame 14 for automation. A power transmission mechanism (not shown) that converts the force into the substrate holding frame 14, a substrate detection sensor 25 that is provided on the substrate holding frame 14 and detects the presence or absence of the circuit board 30, and the substrate holding frame 14 A substrate holding frame detection sensor 26 for detecting whether or not the substrate holding frame 14 is stored in a predetermined storage position, and an electromagnetic valve 27 provided in the working medium supply system of the press cylinder 4. The controller 23 automatically controls the press cylinder 4 and the motor 24 based on input signals from the substrate detection sensor 25 and the substrate holding frame detection sensor 26. It is obtained by the configuration of controlling.

Next, an operation that also serves as an explanation of the automatic control function of the substrate inspection apparatus by the controller 23 will be described.
In the state of FIG. 6 in which the movable base 2 is held at the lifted open position, the board holding frame 14 on which the circuit board 30 is not set is placed between the board pressing jig 5 and the board inspection jig 7. When pulled out further outward, the substrate holding frame detection sensor 26 is turned OFF, and when the circuit board 30 is set on the substrate holding frame 14 at the drawing position, the substrate detection sensor 25 is turned ON. An OFF signal from the holding frame detection sensor 26 and an ON signal (substrate set signal) from the substrate detection sensor 25 are input. Based on these input signals, the controller 23 outputs an activation signal in a direction to store the substrate holding frame 14 to the motor 24.

  As a result, the motor 24 is activated to drive the substrate holding frame 14 in the storage direction, and when the substrate holding frame 14 reaches the storage position, the substrate holding frame detection sensor 26 sends an ON signal to the controller 23. By outputting, the controller 23 outputs an open signal in a direction in which the press cylinder 4 is extended to the electromagnetic valve 27 after the motor 24 is stopped. As a result, the press cylinder 4 extends to drive the movable base 2 downward, and when the movable base 2 reaches a predetermined lowered position (substrate press position), the press cylinder 4 stops and the press cylinder 4 stops. Similar to the first embodiment, an electrical inspection of the circuit board 30 is performed. Then, after the inspection of the circuit board 30 is completed, the controller 23 inputs the inspection end signal, so that the controller 23 outputs an activation signal in a direction to pull out the substrate holding frame 14 to the motor 24 to hold the substrate. By automatically pulling out the frame 14, the inspected circuit board 30 can be taken out from the board holding frame 14.

  According to the third embodiment described above, the motor 24 that slides the substrate holding frame 14 in the pull-out direction and the storage direction, and the substrate detection sensor that detects whether or not the circuit board 30 is set on the substrate holding frame 14. 25, a substrate holding frame detection sensor 26 for detecting whether or not the substrate holding frame 14 is stored in a predetermined storage position, and detection signals from the substrate detection sensor 25 and the substrate holding frame detection sensor 26, respectively. Since the motor 24 and the controller 23 for controlling the drive of the electromagnetic valves 27 of the four press cylinder systems based on the detection signal are provided as described above, the substrate holding frame 14 is pulled out and stored in the storage direction. And when the board holding frame 14 on which the circuit board 30 to be inspected is set reaches the storage position. Less cylinder 4 can be made to automatically lifting operation, there is an effect that can realize the automation of the entire board inspection apparatus.

Embodiment 4 FIG.
FIG. 7 is a schematic side view showing a substrate inspection apparatus according to Embodiment 4 of the present invention. The same or corresponding parts as those in FIGS.
In the fourth embodiment, instead of the guide rod 10a in the first to third embodiments, a unit support cylinder (rail lifting / lowering drive means) 28 that supports the substrate holding unit 12 so as to be lifted and lowered is applied. The unit support cylinder 28 is configured as unit support means that is automatically controlled by the controller 23 so as to operate in association with the press cylinder 4. That is, the rear end side of the drawer rail 14 of the substrate holding unit 12 disposed between the substrate holding jig 5 of the movable base 2 and the substrate inspection jig 7 of the fixed base 3 is a vertical unit support cylinder. The upper end of 28 piston rods is cantilevered. An electromagnetic valve 29 is provided in the working medium supply system of the unit support cylinder 28, and the electromagnetic valve 29 and the electromagnetic valve 27 of the press cylinder 4 system are related and controlled by the controller 23.

Next, an operation that also serves as a functional description of the controller 23 will be described.
In the state of FIG. 7 in which the movable base 2 is held at the lifted open position, the substrate holding frame 14 is pulled out by the handle 15 and the circuit board is inserted into the substrate holding frame 14 as in the first embodiment. Insert 30 and set. When the substrate holding frame 14 is pushed to a predetermined storage position after the setting, the electromagnetic valve 29 of the unit support cylinder 28 is switched by a valve control signal from the controller 23, and the unit support cylinder 28 is shortened. As a result, the substrate holding unit 12 is lowered, and the positioning hole 31 of the circuit board 30 held by the substrate holding frame 14 is fitted into the taper head 9 a of the positioning pin 9 of the board inspection jig 7. Even in this state, the unit support cylinder 28 continues the shortening operation and the substrate holding unit 12 continues to descend, whereby the circuit board 30 is held in a state of being lifted from the substrate holding frame 14 by the positioning pins 9.

  When the substrate holding unit 12 is lowered to the shortening limit position of the unit support cylinder 28 and stopped, the electromagnetic valve 27 of the press cylinder 4 is controlled by the valve control signal from the controller 23 so that the press cylinder 4 is extended. Operate. As a result, the substrate pressing jig 5 is lowered integrally with the movable side base 2, and the support 6 of the substrate pressing jig 5 presses down the circuit board 30 against the upward biasing force of the positioning pins 9. As a result, the inspection target portion of the circuit board 30 comes into contact with the probe pin 8 and the performance of the circuit board 30 is electrically inspected. After the inspection is completed, the electromagnetic valve 27 of the press cylinder 4 and the electromagnetic valve 29 of the unit support cylinder 28 are switched in this order with a time difference by the valve control signal from the controller 23, and the press cylinder 27 is shortened. When the unit support cylinder 28 is extended, the substrate holding unit 12 rises following the movable base 2, and the circuit board 30 on the positioning pins 9 is held by the substrate holding frame 14 in the ascending process. The

  When the press cylinder 27 and the unit support cylinder 28 are stopped, the substrate holding unit 12 moves away from the support 6 of the substrate holding jig 5 and the probe pins 8 and positioning pins 9 of the substrate inspection jig 7. It is independently held at an intermediate position between the base 2 and the fixed base 3. Therefore, if the substrate holding frame 14 is pulled out, the circuit board 30 can be taken out from the substrate holding frame 14 without contacting the support 6, the probe pins 8, and the positioning pins 9.

  According to the fourth embodiment described above, the substrate holding unit 12 disposed between the substrate holding jig 5 of the movable side base 2 and the substrate inspection jig 7 of the fixed side base 3 is supported by the unit support cylinder 28. Thus, the substrate holding unit 12 can be moved up and down following the movable base 2 in the same manner as in the first embodiment. For this reason, as in the case of the first embodiment, the circuit board 30 may come into contact with the support 6, the probe pin 8, and the positioning pin 9 when the circuit board 30 is set and removed from the board holding frame 14. There is no effect.

  In the fourth embodiment, the entire substrate inspection apparatus can be automated by providing the motor 24, the substrate detection sensor 25, and the substrate holding frame detection sensor 26 in the third embodiment. In each of the above embodiments, the press cylinder 4 and the unit support cylinder 28 are applied as the raising and lowering drive means for the movable base 2 and the substrate holding unit 12. However, the press cylinder 4 and the unit support cylinder 28 are not movable. Any lifting drive means may be used as long as the side base 2 and the substrate holding unit 12 can be driven up and down automatically.

1 is a schematic side view showing a substrate inspection apparatus according to Embodiment 1 of the present invention. FIG. 2 is a plan view showing a drawer-type substrate holding unit in FIG. 1. It is an expansion perspective view which shows the principal part of FIG. It is operation | movement explanatory drawing of FIG. It is a schematic side view which shows the board | substrate inspection apparatus by Embodiment 2 of this invention. It is a schematic side view which shows the board | substrate inspection apparatus by Embodiment 3 of this invention. It is a schematic side view which shows the board | substrate inspection apparatus by Embodiment 4 of this invention.

Explanation of symbols

  1 Main body, 2 Upper base, 3 Lower base, 4 Press cylinder, 4a Piston rod, 5 Substrate holding jig, 6 Support, 7 Substrate inspection jig, 8 Probe pin, 9 Positioning pin, 9a Tapered head, 10 unit support means, 10a guide rod, 10b stopper, 12 substrate holding unit, 13 drawer rail, 14 substrate holding frame, 14a front surface, 14b both side walls, 14c substrate support step, 15 handle, 16 substrate holding mechanism, 17 Substrate position adjustment bar, 17a Substrate support step, 18 Movable stopper, 19 Guide groove, 20 Adjustment screw, 21 Guide groove, 22 Adjustment screw, 23 Controller, 24 Motor, 25 Substrate detection sensor, 26 Substrate holding frame detection sensor, 27 Solenoid valve, 28 Unit support cylinder, 29 Solenoid valve, 30 times Substrate, 31 positioning holes.

Claims (6)

  A fixed base and a movable base for mounting a jig are provided on the top and bottom, a substrate inspection jig having a plurality of probe pins and substrate positioning pins on one base, and a substrate holding jig on the other base. In a substrate inspection apparatus that is detachably mounted and raises and lowers the movable base relative to the fixed base, the circuit board to be inspected can be taken out by being arranged between the fixed base and the movable base. A substrate holding unit having a drawer structure set on the substrate, and supporting the substrate holding unit so as to move up and down following the movable base between the substrate inspection jig and the substrate pressing jig, and the movable A unit support means for holding the substrate holding unit at an intermediate position away from the substrate inspection jig and the substrate holding jig at the open position of the side base, That board inspection apparatus.   The substrate holding unit is supported by the unit support means and is disposed between the fixed base and the movable base so as to be movable up and down. 2. The substrate inspection apparatus according to claim 1, further comprising a substrate holding frame that is slidably supported.   A board holding mechanism that holds the peripheral edge of the circuit board between the board holding frame and the board holding frame is mounted on the board holding frame so as to be movable in the plane XY direction. The board inspection apparatus according to claim 2, wherein the board inspection apparatus is provided.   The unit support means is provided integrally with the movable side base and guides both side portions of the substrate holding frame so as to be movable up and down, and is provided on these guide rods at the open position of the movable side base. 2. The substrate inspection apparatus according to claim 1, further comprising a stopper that abuts and supports the drawer rail to hold the substrate holding frame at an intermediate position between the substrate inspection jig and the substrate pressing jig. .   2. The substrate inspection apparatus according to claim 1, wherein the unit support means includes rail lifting / lowering driving means for supporting the drawer rail and automatically driving the drawer rail to move up and down.   It is characterized by comprising a base lifting / lowering driving means for driving the movable base up / down, a motor for driving the substrate holding frame to the storage position and the drawer position, and a controller for automatically controlling the base lifting / lowering driving means and the motor. The board | substrate inspection apparatus of any one of Claim 1 to 5 to do.

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