JP2006135308A5 - - Google Patents
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- Publication number
- JP2006135308A5 JP2006135308A5 JP2005289970A JP2005289970A JP2006135308A5 JP 2006135308 A5 JP2006135308 A5 JP 2006135308A5 JP 2005289970 A JP2005289970 A JP 2005289970A JP 2005289970 A JP2005289970 A JP 2005289970A JP 2006135308 A5 JP2006135308 A5 JP 2006135308A5
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- deflector
- laser
- optical axis
- light pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical Effects 0.000 claims 23
- 239000004065 semiconductor Substances 0.000 claims 18
- 238000004519 manufacturing process Methods 0.000 claims 12
- 239000000758 substrate Substances 0.000 claims 4
- 230000001678 irradiating Effects 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 1
- 108060008071 tama Proteins 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005289970A JP4939787B2 (ja) | 2004-10-04 | 2005-10-03 | ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004290968 | 2004-10-04 | ||
JP2004290968 | 2004-10-04 | ||
JP2005289970A JP4939787B2 (ja) | 2004-10-04 | 2005-10-03 | ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006135308A JP2006135308A (ja) | 2006-05-25 |
JP2006135308A5 true JP2006135308A5 (ko) | 2008-11-06 |
JP4939787B2 JP4939787B2 (ja) | 2012-05-30 |
Family
ID=36728532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005289970A Expired - Fee Related JP4939787B2 (ja) | 2004-10-04 | 2005-10-03 | ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4939787B2 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8237085B2 (en) * | 2006-11-17 | 2012-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Beam homogenizer, laser irradiation apparatus, and laser irradiation method |
EP3239652B1 (en) * | 2012-03-26 | 2019-10-30 | Mantisvision Ltd. | Three dimensional camera and projector for same |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63163405A (ja) * | 1986-12-26 | 1988-07-06 | Matsushita Electric Ind Co Ltd | 光フアイバーケーブル |
JPH02166782A (ja) * | 1988-12-21 | 1990-06-27 | Hitachi Cable Ltd | 中空導波路の入力結合部構造 |
JP2002141302A (ja) * | 2000-11-02 | 2002-05-17 | Mitsubishi Electric Corp | レーザアニーリング用レーザ光学系とこれを用いたレーザアニーリング装置 |
JP2002139697A (ja) * | 2000-11-02 | 2002-05-17 | Mitsubishi Electric Corp | 複数レーザビームを用いたレーザ光学系とレーザアニーリング装置 |
JP4090374B2 (ja) * | 2003-03-20 | 2008-05-28 | 株式会社日立製作所 | ナノプリント装置、及び微細構造転写方法 |
-
2005
- 2005-10-03 JP JP2005289970A patent/JP4939787B2/ja not_active Expired - Fee Related
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