JP2006128211A5 - - Google Patents

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Publication number
JP2006128211A5
JP2006128211A5 JP2004311317A JP2004311317A JP2006128211A5 JP 2006128211 A5 JP2006128211 A5 JP 2006128211A5 JP 2004311317 A JP2004311317 A JP 2004311317A JP 2004311317 A JP2004311317 A JP 2004311317A JP 2006128211 A5 JP2006128211 A5 JP 2006128211A5
Authority
JP
Japan
Prior art keywords
wafer
suction holding
holding member
dividing
tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004311317A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006128211A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004311317A priority Critical patent/JP2006128211A/ja
Priority claimed from JP2004311317A external-priority patent/JP2006128211A/ja
Priority to US11/254,779 priority patent/US7350446B2/en
Publication of JP2006128211A publication Critical patent/JP2006128211A/ja
Publication of JP2006128211A5 publication Critical patent/JP2006128211A5/ja
Pending legal-status Critical Current

Links

JP2004311317A 2004-10-26 2004-10-26 ウエーハの分割装置 Pending JP2006128211A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004311317A JP2006128211A (ja) 2004-10-26 2004-10-26 ウエーハの分割装置
US11/254,779 US7350446B2 (en) 2004-10-26 2005-10-21 Wafer dividing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004311317A JP2006128211A (ja) 2004-10-26 2004-10-26 ウエーハの分割装置

Publications (2)

Publication Number Publication Date
JP2006128211A JP2006128211A (ja) 2006-05-18
JP2006128211A5 true JP2006128211A5 (https=) 2008-04-17

Family

ID=36205450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004311317A Pending JP2006128211A (ja) 2004-10-26 2004-10-26 ウエーハの分割装置

Country Status (2)

Country Link
US (1) US7350446B2 (https=)
JP (1) JP2006128211A (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007317747A (ja) * 2006-05-23 2007-12-06 Seiko Epson Corp 基板分割方法及び液体噴射ヘッドの製造方法
JP5192213B2 (ja) * 2007-11-02 2013-05-08 株式会社ディスコ レーザー加工装置
JP5117954B2 (ja) * 2008-07-31 2013-01-16 株式会社ディスコ レーザ加工装置及びレーザ加工方法
WO2010026865A1 (en) * 2008-09-05 2010-03-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor memory device and semiconductor device
JP2011035245A (ja) * 2009-08-04 2011-02-17 Disco Abrasive Syst Ltd 板状ワークの分割方法
JP5389580B2 (ja) * 2009-09-17 2014-01-15 株式会社ディスコ 切削装置
US8426241B2 (en) * 2010-09-09 2013-04-23 International Business Machines Corporation Structure and method of fabricating a CZTS photovoltaic device by electrodeposition
JP5680931B2 (ja) * 2010-10-07 2015-03-04 株式会社ディスコ ワークの分割方法
JP5715370B2 (ja) * 2010-10-08 2015-05-07 株式会社ディスコ 検出方法
JP6047392B2 (ja) * 2012-12-13 2016-12-21 株式会社ディスコ 分割装置および分割方法
CN108817702B (zh) * 2018-07-19 2021-06-29 深圳市吉祥云科技有限公司 一种在绒面玻璃上的激光打孔方法及系统

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4653680A (en) * 1985-04-25 1987-03-31 Regan Barrie F Apparatus for breaking semiconductor wafers and the like
US5310104A (en) * 1991-12-16 1994-05-10 General Electric Company Method and apparatus for cleaving a semiconductor wafer into individual die and providing for low stress die removal
US6685073B1 (en) * 1996-11-26 2004-02-03 Texas Instruments Incorporated Method and apparatus for stretching and processing saw film tape after breaking a partially sawn wafer
JP3408805B2 (ja) 2000-09-13 2003-05-19 浜松ホトニクス株式会社 切断起点領域形成方法及び加工対象物切断方法
AUPR174800A0 (en) * 2000-11-29 2000-12-21 Australian National University, The Semiconductor processing
JP4494728B2 (ja) * 2003-05-26 2010-06-30 株式会社ディスコ 非金属基板の分割方法
JP4256214B2 (ja) * 2003-06-27 2009-04-22 株式会社ディスコ 板状物の分割装置
JP2005129607A (ja) * 2003-10-22 2005-05-19 Disco Abrasive Syst Ltd ウエーハの分割方法
JP4447392B2 (ja) * 2004-07-23 2010-04-07 株式会社ディスコ ウエーハの分割方法および分割装置
JP2006108273A (ja) * 2004-10-04 2006-04-20 Disco Abrasive Syst Ltd ウエーハの分割方法および分割装置
JP4511903B2 (ja) * 2004-10-20 2010-07-28 株式会社ディスコ ウエーハの分割装置
JP4630692B2 (ja) * 2005-03-07 2011-02-09 株式会社ディスコ レーザー加工方法
US7608523B2 (en) * 2005-08-26 2009-10-27 Disco Corporation Wafer processing method and adhesive tape used in the wafer processing method

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