JP2006078275A - 光学式変位測定装置 - Google Patents
光学式変位測定装置 Download PDFInfo
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- JP2006078275A JP2006078275A JP2004261356A JP2004261356A JP2006078275A JP 2006078275 A JP2006078275 A JP 2006078275A JP 2004261356 A JP2004261356 A JP 2004261356A JP 2004261356 A JP2004261356 A JP 2004261356A JP 2006078275 A JP2006078275 A JP 2006078275A
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Abstract
【解決手段】光学式変位測定装置は、スケール3とスケールに対して移動可能なセンサヘッドを備える。 スケール3は、ガラス等の透明材料からなる基板7の表面に形成されたベース層37と、ベース層37上に選択的に形成された複数の凸部11とを備える。 凸部11は二層構造を有し、下層3の材料はタングステンであり、上層41はクロムである。角部47は面取りされていて、スケール3を布で拭いても、凸部11の角部47に布がひっかかりにくくなり、スケール3の汚れを拭き洗浄する際、光学格子11の破損を防止できる。
【選択図】図2
Description
Claims (2)
- 凹部と凸部が測定軸方向に沿って交互に並べられた構造を有する光学格子が配置されたスケールと、
前記光学格子に照射する光を発生する光源部と、
前記光学格子を介して前記光源部からの光を受光すると共に前記光源部と一緒に前記測定軸方向に前記スケールに対して相対移動可能である受光部と、を備え、
前記凸部の上面と前記凸部の側面とで規定される角部が面取り形状を有する
ことを特徴とする光学式変位測定装置。 - 前記光源部からの光は、前記スケールの表面に垂直な線に対して斜め方向から、回折格子である前記光学格子に照射される
ことを特徴とする請求項1に記載の光学式変位測定装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004261356A JP4615938B2 (ja) | 2004-09-08 | 2004-09-08 | 光学式変位測定装置 |
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JP2004261356A JP4615938B2 (ja) | 2004-09-08 | 2004-09-08 | 光学式変位測定装置 |
Publications (2)
Publication Number | Publication Date |
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JP2006078275A true JP2006078275A (ja) | 2006-03-23 |
JP4615938B2 JP4615938B2 (ja) | 2011-01-19 |
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Application Number | Title | Priority Date | Filing Date |
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JP2004261356A Expired - Fee Related JP4615938B2 (ja) | 2004-09-08 | 2004-09-08 | 光学式変位測定装置 |
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JP (1) | JP4615938B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012021802A (ja) * | 2010-07-12 | 2012-02-02 | Mori Seiki Co Ltd | 回折格子 |
JP2021192010A (ja) * | 2020-06-05 | 2021-12-16 | 株式会社ミツトヨ | スケールおよびその製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62132501U (ja) * | 1986-02-14 | 1987-08-21 | ||
JPH09159420A (ja) * | 1995-12-04 | 1997-06-20 | Olympus Optical Co Ltd | 非球面形状測定用干渉計 |
JPH10318793A (ja) * | 1996-12-17 | 1998-12-04 | Dr Johannes Heidenhain Gmbh | 光電位置測定装置 |
JPH11223717A (ja) * | 1998-02-05 | 1999-08-17 | Canon Inc | 回折光学素子及びそれを用いた光学系 |
-
2004
- 2004-09-08 JP JP2004261356A patent/JP4615938B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62132501U (ja) * | 1986-02-14 | 1987-08-21 | ||
JPH09159420A (ja) * | 1995-12-04 | 1997-06-20 | Olympus Optical Co Ltd | 非球面形状測定用干渉計 |
JPH10318793A (ja) * | 1996-12-17 | 1998-12-04 | Dr Johannes Heidenhain Gmbh | 光電位置測定装置 |
JPH11223717A (ja) * | 1998-02-05 | 1999-08-17 | Canon Inc | 回折光学素子及びそれを用いた光学系 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012021802A (ja) * | 2010-07-12 | 2012-02-02 | Mori Seiki Co Ltd | 回折格子 |
JP2021192010A (ja) * | 2020-06-05 | 2021-12-16 | 株式会社ミツトヨ | スケールおよびその製造方法 |
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JP4615938B2 (ja) | 2011-01-19 |
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