JP4615938B2 - 光学式変位測定装置 - Google Patents
光学式変位測定装置 Download PDFInfo
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- JP4615938B2 JP4615938B2 JP2004261356A JP2004261356A JP4615938B2 JP 4615938 B2 JP4615938 B2 JP 4615938B2 JP 2004261356 A JP2004261356 A JP 2004261356A JP 2004261356 A JP2004261356 A JP 2004261356A JP 4615938 B2 JP4615938 B2 JP 4615938B2
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- light
- scale
- layer
- optical grating
- optical
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Description
Claims (2)
- ガラス基板の上にベース層が形成され、前記ベース層の上に、上層と下層とからなる二層構造を有し、前記ベース層と接続される下層が前記ベース層とは異なる材質で形成された凸部が測定軸方向に所定間隔で並べられた構造を有し、且つ前記凸部が外部に露出した光学格子が配置されたスケールと、
前記光学格子に照射する光を発生する光源部と、
前記光学格子を介して前記光源部からの光を受光すると共に前記光源部と一緒に前記測定軸方向に前記スケールに対して相対移動可能である受光部と、を備え、
前記凸部の上面と前記凸部の側面とで規定される角部が面取り形状を有する
ことを特徴とする光学式変位測定装置。 - 前記光源部からの光は、前記スケールの表面に垂直な線に対して斜め方向から、回折格子である前記光学格子に照射される
ことを特徴とする請求項1に記載の光学式変位測定装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004261356A JP4615938B2 (ja) | 2004-09-08 | 2004-09-08 | 光学式変位測定装置 |
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JP2004261356A JP4615938B2 (ja) | 2004-09-08 | 2004-09-08 | 光学式変位測定装置 |
Publications (2)
Publication Number | Publication Date |
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JP2006078275A JP2006078275A (ja) | 2006-03-23 |
JP4615938B2 true JP4615938B2 (ja) | 2011-01-19 |
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JP2004261356A Expired - Fee Related JP4615938B2 (ja) | 2004-09-08 | 2004-09-08 | 光学式変位測定装置 |
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JP (1) | JP4615938B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5562152B2 (ja) * | 2010-07-12 | 2014-07-30 | Dmg森精機株式会社 | 回折格子 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62132501U (ja) * | 1986-02-14 | 1987-08-21 | ||
JPH09159420A (ja) * | 1995-12-04 | 1997-06-20 | Olympus Optical Co Ltd | 非球面形状測定用干渉計 |
JPH10318793A (ja) * | 1996-12-17 | 1998-12-04 | Dr Johannes Heidenhain Gmbh | 光電位置測定装置 |
JPH11223717A (ja) * | 1998-02-05 | 1999-08-17 | Canon Inc | 回折光学素子及びそれを用いた光学系 |
-
2004
- 2004-09-08 JP JP2004261356A patent/JP4615938B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62132501U (ja) * | 1986-02-14 | 1987-08-21 | ||
JPH09159420A (ja) * | 1995-12-04 | 1997-06-20 | Olympus Optical Co Ltd | 非球面形状測定用干渉計 |
JPH10318793A (ja) * | 1996-12-17 | 1998-12-04 | Dr Johannes Heidenhain Gmbh | 光電位置測定装置 |
JPH11223717A (ja) * | 1998-02-05 | 1999-08-17 | Canon Inc | 回折光学素子及びそれを用いた光学系 |
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JP2006078275A (ja) | 2006-03-23 |
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