JP2006058293A5 - - Google Patents

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Publication number
JP2006058293A5
JP2006058293A5 JP2005221372A JP2005221372A JP2006058293A5 JP 2006058293 A5 JP2006058293 A5 JP 2006058293A5 JP 2005221372 A JP2005221372 A JP 2005221372A JP 2005221372 A JP2005221372 A JP 2005221372A JP 2006058293 A5 JP2006058293 A5 JP 2006058293A5
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JP
Japan
Prior art keywords
reflectance spectrum
sample
reflectance
inspection
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005221372A
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English (en)
Japanese (ja)
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JP2006058293A (ja
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Publication date
Priority claimed from US10/902,177 external-priority patent/US7068753B2/en
Application filed filed Critical
Publication of JP2006058293A publication Critical patent/JP2006058293A/ja
Publication of JP2006058293A5 publication Critical patent/JP2006058293A5/ja
Pending legal-status Critical Current

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JP2005221372A 2004-07-30 2005-07-29 サンプルの検査方法と検査装置、及びマイクロ電子デバイスの製造装置 Pending JP2006058293A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/902,177 US7068753B2 (en) 2004-07-30 2004-07-30 Enhancement of X-ray reflectometry by measurement of diffuse reflections

Publications (2)

Publication Number Publication Date
JP2006058293A JP2006058293A (ja) 2006-03-02
JP2006058293A5 true JP2006058293A5 (OSRAM) 2008-08-14

Family

ID=35732192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005221372A Pending JP2006058293A (ja) 2004-07-30 2005-07-29 サンプルの検査方法と検査装置、及びマイクロ電子デバイスの製造装置

Country Status (4)

Country Link
US (2) US7068753B2 (OSRAM)
JP (1) JP2006058293A (OSRAM)
KR (1) KR101242520B1 (OSRAM)
TW (1) TWI411775B (OSRAM)

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