CN113340852B - 一种用于纤维增强陶瓷基复合材料加工损伤的激光散射检测装置 - Google Patents
一种用于纤维增强陶瓷基复合材料加工损伤的激光散射检测装置 Download PDFInfo
- Publication number
- CN113340852B CN113340852B CN202110631345.7A CN202110631345A CN113340852B CN 113340852 B CN113340852 B CN 113340852B CN 202110631345 A CN202110631345 A CN 202110631345A CN 113340852 B CN113340852 B CN 113340852B
- Authority
- CN
- China
- Prior art keywords
- laser
- fiber reinforced
- ceramic matrix
- matrix composite
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4735—Solid samples, e.g. paper, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/065—Integrating spheres
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110631345.7A CN113340852B (zh) | 2021-06-07 | 2021-06-07 | 一种用于纤维增强陶瓷基复合材料加工损伤的激光散射检测装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110631345.7A CN113340852B (zh) | 2021-06-07 | 2021-06-07 | 一种用于纤维增强陶瓷基复合材料加工损伤的激光散射检测装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN113340852A CN113340852A (zh) | 2021-09-03 |
CN113340852B true CN113340852B (zh) | 2022-06-07 |
Family
ID=77474520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202110631345.7A Active CN113340852B (zh) | 2021-06-07 | 2021-06-07 | 一种用于纤维增强陶瓷基复合材料加工损伤的激光散射检测装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN113340852B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114062388B (zh) * | 2021-11-18 | 2023-07-04 | 西安交通大学 | 一种绝缘轴承陶瓷涂层缺陷检测装置及检测方法 |
CN116625993B (zh) * | 2023-07-25 | 2023-10-24 | 北京理工大学 | 一种热力耦合作用下的复合材料激光反射率测量方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106153626A (zh) * | 2015-04-13 | 2016-11-23 | 无锡迈福光学科技有限公司 | 一种表面瑕疵光学检测装置及其检测方法 |
CN109781665A (zh) * | 2018-11-27 | 2019-05-21 | 大连理工大学 | 一种采用偏振激光散射检测半导体材料亚表面损伤的装置 |
CN109781666A (zh) * | 2018-11-27 | 2019-05-21 | 大连理工大学 | 一种偏振激光散射检测单晶硅片亚表面损伤的方法 |
CN110779927A (zh) * | 2019-11-12 | 2020-02-11 | 浙江大学 | 一种基于超声调制的亚表面缺陷检测装置及方法 |
-
2021
- 2021-06-07 CN CN202110631345.7A patent/CN113340852B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106153626A (zh) * | 2015-04-13 | 2016-11-23 | 无锡迈福光学科技有限公司 | 一种表面瑕疵光学检测装置及其检测方法 |
CN109781665A (zh) * | 2018-11-27 | 2019-05-21 | 大连理工大学 | 一种采用偏振激光散射检测半导体材料亚表面损伤的装置 |
CN109781666A (zh) * | 2018-11-27 | 2019-05-21 | 大连理工大学 | 一种偏振激光散射检测单晶硅片亚表面损伤的方法 |
CN110779927A (zh) * | 2019-11-12 | 2020-02-11 | 浙江大学 | 一种基于超声调制的亚表面缺陷检测装置及方法 |
Non-Patent Citations (3)
Title |
---|
《Two-dimensional detection of subsurface damage in silicon wafers with polarized laser scattering》;Jingfei Yin et al;《Journal of Materials Processing Tech.》;20200516;第1-9页 * |
《光学材料亚表面损伤的表征与检测技术的研究进展》;王华东 等;《激光与光电子学进展》;20171231;第1-12页 * |
《抛光表面的亚表层损伤检测方法研究》;田爱玲 等;《光子学报》;20130228;第214-215页 * |
Also Published As
Publication number | Publication date |
---|---|
CN113340852A (zh) | 2021-09-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI774708B (zh) | 用於半導體結構之檢驗之方法及系統 | |
KR102235580B1 (ko) | 반도체 웨이퍼 검사를 위한 결함 마킹 | |
CN113340852B (zh) | 一种用于纤维增强陶瓷基复合材料加工损伤的激光散射检测装置 | |
US7554656B2 (en) | Methods and systems for inspection of a wafer | |
US6810139B2 (en) | Pixel based machine for patterned wafers | |
EP1877758B1 (en) | Wafer edge inspection | |
JP4755054B2 (ja) | 表面検査方法、及び表面検査装置 | |
US7656519B2 (en) | Wafer edge inspection | |
CN109781665B (zh) | 一种采用偏振激光散射检测半导体材料亚表面损伤的装置 | |
EP2288868B1 (en) | Vision system and method for mapping of ultrasonic data into cad space | |
TW201009292A (en) | Vision system for scan planning of ultrasonic inspection | |
JP2006058293A5 (zh) | ||
CN113340910B (zh) | 一种采用偏振激光散射检测纤维增强陶瓷基复合材料亚表面损伤的方法 | |
TWI663392B (zh) | 用於具有跟蹤邊緣輪廓之軌跡之晶圓邊緣檢查之系統及方法 | |
JPH11351850A (ja) | 端部傷検査方法およびその装置 | |
US20240068958A1 (en) | Method and system for evaluating work-affected layer | |
WO1992001923A1 (en) | Optical scatter imaging | |
CN115356264A (zh) | 一种硅片中位裂纹与侧位裂纹分离化检测方法 | |
Guillermier et al. | HTR Fuel Integrity With Electromagnetic, Vision and Radiographic Nondestructive Evaluation Methods |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Yin Jingfei Inventor after: Zhao Biao Inventor after: Qian Ning Inventor after: Xu Jiuhua Inventor after: Su Honghua Inventor after: Ding Wenfeng Inventor after: Fu Yucan Inventor after: Chen Yan Inventor after: Yang Changyong Inventor after: Zhang Quanli Inventor after: Zhao Zhengcai Inventor before: Yin Jingfei Inventor before: Zhao Biao Inventor before: Qian Ning Inventor before: Xu Jiuhua Inventor before: Su Honghua Inventor before: Ding Wenfeng Inventor before: Fu Yucan Inventor before: Chen Yan Inventor before: Yang Changyong Inventor before: Zhang Quanli Inventor before: Zhao Zhengcai |