JP2006049293A5 - - Google Patents
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- Publication number
- JP2006049293A5 JP2006049293A5 JP2005189138A JP2005189138A JP2006049293A5 JP 2006049293 A5 JP2006049293 A5 JP 2006049293A5 JP 2005189138 A JP2005189138 A JP 2005189138A JP 2005189138 A JP2005189138 A JP 2005189138A JP 2006049293 A5 JP2006049293 A5 JP 2006049293A5
- Authority
- JP
- Japan
- Prior art keywords
- fibrous carbon
- carbon material
- electron gun
- gun according
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003575 carbonaceous material Substances 0.000 claims 15
- 239000000463 material Substances 0.000 claims 4
- 230000001133 acceleration Effects 0.000 claims 3
- 238000000605 extraction Methods 0.000 claims 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000000609 electron-beam lithography Methods 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000002344 surface layer Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005189138A JP2006049293A (ja) | 2004-06-30 | 2005-06-29 | 電界放出型電子銃およびそれを用いた電子ビーム応用装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004192454 | 2004-06-30 | ||
| JP2005189138A JP2006049293A (ja) | 2004-06-30 | 2005-06-29 | 電界放出型電子銃およびそれを用いた電子ビーム応用装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006049293A JP2006049293A (ja) | 2006-02-16 |
| JP2006049293A5 true JP2006049293A5 (enExample) | 2006-03-30 |
Family
ID=36027562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005189138A Pending JP2006049293A (ja) | 2004-06-30 | 2005-06-29 | 電界放出型電子銃およびそれを用いた電子ビーム応用装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006049293A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008041289A (ja) | 2006-08-02 | 2008-02-21 | Hitachi High-Technologies Corp | 電界放出型電子銃およびそれを用いた電子線応用装置 |
| JP2008047309A (ja) * | 2006-08-11 | 2008-02-28 | Hitachi High-Technologies Corp | 電界放出型電子銃、およびその運転方法 |
| JP4909813B2 (ja) * | 2007-06-04 | 2012-04-04 | 株式会社日立ハイテクノロジーズ | 電子放出素子，電子銃およびそれを用いた電子ビーム応用装置 |
| KR102581290B1 (ko) * | 2021-01-15 | 2023-09-21 | 씨비테크 주식회사 | 덩굴 모양 탄소 구조물이 형성된 전자총 및 이를 포함하는 전자 현미경 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001048509A (ja) * | 1999-07-29 | 2001-02-20 | Ricoh Co Ltd | Ｃｎｔとｃｎｔ集合体、電界放出型冷陰極電子放出素子とその製造方法、および該電子放出素子を用いた表示装置 |
| JP2001357771A (ja) * | 2000-06-12 | 2001-12-26 | Matsushita Electric Ind Co Ltd | 電子放出素子およびその製造方法および面発光装置および画像表示装置および固体真空デバイス |
| JP3810656B2 (ja) * | 2001-07-23 | 2006-08-16 | 株式会社神戸製鋼所 | 微小ｘ線源 |
| JP3832402B2 (ja) * | 2002-08-12 | 2006-10-11 | 株式会社日立製作所 | カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置 |
| JP2004119263A (ja) * | 2002-09-27 | 2004-04-15 | Matsushita Electric Ind Co Ltd | 電子放出材料およびその製造方法とそれを用いた電界放出素子および画像描画素子 |
| JP3929877B2 (ja) * | 2002-11-14 | 2007-06-13 | 株式会社リコー | 電子線描画装置およびその要部の製造方法 |
| EP1569733A2 (en) * | 2002-12-09 | 2005-09-07 | The University of North Carolina at Chapel Hill | Methods for assembly and sorting of nanostructure-containing materials and related articles |
-
2005
- 2005-06-29 JP JP2005189138A patent/JP2006049293A/ja active Pending
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