JP2006048855A - 貼合装置及び貼合方法並びに貼合装置制御用プログラム - Google Patents
貼合装置及び貼合方法並びに貼合装置制御用プログラム Download PDFInfo
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- B29C65/1429—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the way of heating the interface
- B29C65/1435—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the way of heating the interface at least passing through one of the parts to be joined, i.e. transmission welding
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- B29C65/7802—Positioning the parts to be joined, e.g. aligning, indexing or centring
- B29C65/7805—Positioning the parts to be joined, e.g. aligning, indexing or centring the parts to be joined comprising positioning features
- B29C65/7808—Positioning the parts to be joined, e.g. aligning, indexing or centring the parts to be joined comprising positioning features in the form of holes or slots
- B29C65/7811—Positioning the parts to be joined, e.g. aligning, indexing or centring the parts to be joined comprising positioning features in the form of holes or slots for centring purposes
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- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/05—Particular design of joint configurations
- B29C66/10—Particular design of joint configurations particular design of the joint cross-sections
- B29C66/11—Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
- B29C66/112—Single lapped joints
- B29C66/1122—Single lap to lap joints, i.e. overlap joints
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- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/342—Preventing air-inclusions
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- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/40—General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
- B29C66/41—Joining substantially flat articles ; Making flat seams in tubular or hollow articles
- B29C66/45—Joining of substantially the whole surface of the articles
- B29C66/452—Joining of substantially the whole surface of the articles the article having a disc form, e.g. making CDs or DVDs
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- B29C66/80—General aspects of machine operations or constructions and parts thereof
- B29C66/82—Pressure application arrangements, e.g. transmission or actuating mechanisms for joining tools or clamps
- B29C66/826—Pressure application arrangements, e.g. transmission or actuating mechanisms for joining tools or clamps without using a separate pressure application tool, e.g. the own weight of the parts to be joined
- B29C66/8266—Pressure application arrangements, e.g. transmission or actuating mechanisms for joining tools or clamps without using a separate pressure application tool, e.g. the own weight of the parts to be joined using fluid pressure directly acting on the parts to be joined
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- B29C66/80—General aspects of machine operations or constructions and parts thereof
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- B29C66/8322—Joining or pressing tools reciprocating along one axis
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- B29C66/71—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the composition of the plastics material of the parts to be joined
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- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
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Abstract
【解決手段】 接着剤が塗布された一対の基板P1,P2を貼り合せる貼合装置であって、一方の基板P1を載置する載置台3と、他方の基板P2を一方の基板P1と所定の間隔Dで保持する保持部4と、基板P1,P2を収容する収容部5とを備える。収容部5の給排口6に、貼り合せ前の接着層R2の気泡を膨張及び破裂させる排気装置と、貼り合わせ前の接着層R2の気泡が圧縮されるように、収容部5へ気体を供給することにより、基板P1,P2の周辺圧力を上昇させる給気装置とを接続する。
【選択図】 図8
Description
(a) 基板への接着剤塗布時に、基板と接着剤との境界に気体が閉じ込められる。
(b) 貼り合せ時に、基板や接着層同士の間に気体が閉じ込められる。
(c) 接着剤内部に気体が残留している。
このうち、(a)や(b)を排除する方法としては、特許文献1に記載された従来技術が存在する。これは、貼り合せ時に生じ易い袋小路を、気体の吹き出しによって解消する技術である。しかし、かかる従来技術では、(c)のように、接着剤内部に存在する気泡については除去できない。
(A)真空放置を長時間化する方法
(1) 貼り合せ毎に、真空引きのための排気時間を長くして、接着剤中の気泡が脱泡され る時間を確保する。
(2) 接着剤塗布後の生産工程全体を真空にし、複数枚を同時に真空にすることにより、 各基板の真空中での待機時間を長くして、接着剤中の気泡が脱泡される時間を確保す る。
(B)大気放置を長時間化する方法
(1) 真空貼り合せ後、接着剤硬化までの工程を長くし、大気に放置される時間を長くす ることにより、大気と内圧との差圧で残留気泡を圧縮する。
(2) 必要な大気放置時間分、タクトタイムを長くすることにより、大気と内圧との差圧 で残留気泡を圧縮する。
[装置の構成]
まず、本実施形態に使用する接着剤塗布装置、貼合装置及び紫外線照射装置の構成を、図1〜7を参照して説明する。なお、これらの装置は、ディスクの製造装置の一部を構成するものであり、これらの装置の上流工程に配設される基板の成型装置、金属膜の形成装置、さらに各装置間で基板を受け渡す機構等については、公知のあらゆる技術を適用可能であり、説明を省略する。
[接着層の形成]
まず、ディスク用の2枚の基板P1,P2を貼り合わせる場合の動作について説明する。すなわち、図1に示すように、前工程で記録膜が形成された基板P1が、その記録膜を上にしてターンテーブル1上に載置され、装着される(ステップ801)。そして、ターンテーブル1を低速回転させながら、接着剤塗布部2が接着剤R1を吐き出すことにより、基板P1の内周部に、基板P1と同心円状に接着剤R1が塗布される(ステップ802)。次に、図2に示すように、ターンテーブル1を高速回転させることにより、接着剤R1が外周方向へ展延されて、余分な接着剤R1が振り切られると、図3に示すように、記録膜を覆う接着層R2が形成される(ステップ803)。基板P2についても、同様に接着層R2が形成される。
以上のような本実施形態によれば、一対の基板P1,P2の貼り合せ前に、接着層R2を形成した基板P1,P2の周辺を減圧することにより、接着層R2における気泡を差圧で膨張及び破裂させ、残留気泡を低減させた後、さらに、基板P1,P2の周辺の圧力を上昇させることにより、残留した気泡を圧縮して縮小させることができる。この気泡の膨張破裂、残留気泡の縮小及び大気解放までを、従来技術の減圧から大気解放までの時間とほぼ同様の時間で実現できるので、排気時間や大気放置時間を長く確保しなくとも、歩留まりに影響を与えるような大きさの気泡を除去することができ、生産性が向上する。さらに、基板P1,P2の貼り合せ前に、気体の排気と給気とを連続して行うことによって、気泡を効率的に除去及び縮小できるので、装置構成が単純となり、余分なコストはかからない。
本発明は、上記のような実施形態に限定されるものではない。例えば、昇圧時に供給される気体は、収容部内の圧力を高めることができるものであれば、どのような気体であってもよい。大気であってもよいが、接着剤に溶ける性質の気体であれば、残存気泡をさらに低減することができる。接着剤に溶ける気体としては、水蒸気、炭化水素、有機溶剤等が考えられるが、接着剤の材質に応じて、適宜選択できる。基板周囲の圧力の制御は、排気時間や給気時間によって制御しても、排気量や給気量によって制御しても、センサ等による圧力測定値に応じて制御してもよい。基板周囲の圧力は、相対的には、図9の3a(初期圧力:例えば大気圧)から3b、3c、3d及びそれ以降(例えば、大気圧に解放)へと変動させるが、その具体的な値は、接着剤の種類、粘度、層厚、面積、収容部の容積等に応じて、適宜変更可能である。
2…接着剤塗布部
2a,3a…大気圧
2b,3b…ベース圧力
3,7…載置台
4,T…保持部
5…収容部
6…給排口
8…紫外線照射部
D…間隔
K…塗布装置
P,P1,P2…基板
R,R2…接着層
R1…接着剤
S…減圧室
U…光源
Claims (3)
- 一方若しくは双方に接着剤が塗布された一対の基板を貼り合せる貼合装置において、
前記一対の基板を収容する収容部と、
前記基板の周辺圧力を低下させることにより、貼り合せ前の接着剤の気泡が膨張及び破裂するように、前記収容部から排気する排気装置と、
前記基板の周辺圧力を上昇させることにより、貼り合わせ前の接着剤の気泡が圧縮されるように、前記収容部へ気体を供給する給気装置と、
を有することを特徴とする貼合装置。 - 一対の基板の一方若しくは双方に接着剤を塗布し、
前記一対の基板の周辺の圧力を低下させることにより、貼り合せ前の接着剤の気泡を膨張及び破裂させ、
前記一対の基板の周辺の圧力を上昇させることにより、貼り合せ前の接着剤の気泡を圧縮し、
前記一対の基板を貼り合せることを特徴とする貼合方法。 - 一方若しくは双方に接着剤が塗布された一対の基板を貼り合せる貼合装置を、コンピュータに制御させる貼合装置制御用プログラムにおいて、
収容部に前記一対の基板を収容させ、
前記基板の周辺圧力を低下させることにより、貼り合せ前の接着剤の気泡が膨張及び破裂するように、排気装置によって前記収容部から排気させ、
前記基板の周辺圧力を上昇させることにより、貼り合わせ前の接着剤の気泡が圧縮されるように、給気装置によって前記収容部へ気体を供給させることを特徴とする貼合装置制御用プログラム。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007081236A (ja) * | 2005-09-15 | 2007-03-29 | Tdk Corp | 多層基板の製造方法 |
WO2008038414A1 (en) * | 2006-09-28 | 2008-04-03 | Shibaura Mechatronics Corporation | Bonding method and bonding apparatus |
WO2008038413A1 (en) * | 2006-09-28 | 2008-04-03 | Shibaura Mechatronics Corporation | Bonding method and bonding apparatus |
WO2008038412A1 (en) * | 2006-09-28 | 2008-04-03 | Shibaura Mechatronics Corporation | Bonding method and bonding apparatus |
-
2004
- 2004-08-06 JP JP2004230692A patent/JP4440726B2/ja not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007081236A (ja) * | 2005-09-15 | 2007-03-29 | Tdk Corp | 多層基板の製造方法 |
WO2008038414A1 (en) * | 2006-09-28 | 2008-04-03 | Shibaura Mechatronics Corporation | Bonding method and bonding apparatus |
WO2008038413A1 (en) * | 2006-09-28 | 2008-04-03 | Shibaura Mechatronics Corporation | Bonding method and bonding apparatus |
WO2008038412A1 (en) * | 2006-09-28 | 2008-04-03 | Shibaura Mechatronics Corporation | Bonding method and bonding apparatus |
KR101052373B1 (ko) * | 2006-09-28 | 2011-07-28 | 시바우라 메카트로닉스 가부시끼가이샤 | 접합 방법 및 접합 장치 |
JP4789282B2 (ja) * | 2006-09-28 | 2011-10-12 | 芝浦メカトロニクス株式会社 | 貼合方法及び貼合装置 |
JP4831796B2 (ja) * | 2006-09-28 | 2011-12-07 | 芝浦メカトロニクス株式会社 | 貼合方法及び貼合装置 |
CN101522401B (zh) * | 2006-09-28 | 2011-12-28 | 芝浦机械电子装置股份有限公司 | 贴合方法 |
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