JP2005526951A - 基準点タルボットエンコーダ - Google Patents

基準点タルボットエンコーダ Download PDF

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Publication number
JP2005526951A
JP2005526951A JP2003525229A JP2003525229A JP2005526951A JP 2005526951 A JP2005526951 A JP 2005526951A JP 2003525229 A JP2003525229 A JP 2003525229A JP 2003525229 A JP2003525229 A JP 2003525229A JP 2005526951 A JP2005526951 A JP 2005526951A
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JP
Japan
Prior art keywords
scale
sensor head
detector array
encoder
disposed
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Pending
Application number
JP2003525229A
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English (en)
Japanese (ja)
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JP2005526951A5 (enrdf_load_stackoverflow
Inventor
ウイリアム， ジー． ソーブルン，
ノーマン， ジェイ． トビー，
メルビン， ジェイ． ジュニア． テアレ，
ダグラス， エー． キングベル，
ラルフ， エー． ケリハー，
Original Assignee
ジーエスアイ・ルモニックス・コーポレーション
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Application filed by ジーエスアイ・ルモニックス・コーポレーション filed Critical ジーエスアイ・ルモニックス・コーポレーション
Publication of JP2005526951A publication Critical patent/JP2005526951A/ja
Publication of JP2005526951A5 publication Critical patent/JP2005526951A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
    • G01D5/2457—Incremental encoders having reference marks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2003525229A 2001-08-30 2002-08-12 基準点タルボットエンコーダ Pending JP2005526951A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US31616001P 2001-08-30 2001-08-30
PCT/US2002/025446 WO2003021194A2 (en) 2001-08-30 2002-08-12 Reference point talbot encoder

Publications (2)

Publication Number Publication Date
JP2005526951A true JP2005526951A (ja) 2005-09-08
JP2005526951A5 JP2005526951A5 (enrdf_load_stackoverflow) 2006-01-05

Family

ID=23227766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003525229A Pending JP2005526951A (ja) 2001-08-30 2002-08-12 基準点タルボットエンコーダ

Country Status (6)

Country Link
EP (1) EP1421343A2 (enrdf_load_stackoverflow)
JP (1) JP2005526951A (enrdf_load_stackoverflow)
CN (1) CN1293367C (enrdf_load_stackoverflow)
AU (1) AU2002329728A1 (enrdf_load_stackoverflow)
CA (1) CA2458954A1 (enrdf_load_stackoverflow)
WO (1) WO2003021194A2 (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008507799A (ja) * 2004-07-21 2008-03-13 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 情報担体、情報担体を読み取るシステム及び装置
JP2008129021A (ja) * 2006-11-20 2008-06-05 Dr Johannes Heidenhain Gmbh エンコーダ
JP2011196780A (ja) * 2010-03-18 2011-10-06 Mitsutoyo Corp 光電式エンコーダ
JP2015212648A (ja) * 2014-05-02 2015-11-26 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
JP2016536576A (ja) * 2013-10-01 2016-11-24 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 基準マーク検出器配列
KR20180052676A (ko) * 2015-09-09 2018-05-18 레니쇼우 피엘씨 인코더 장치

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10353808B4 (de) * 2003-11-14 2015-09-03 Dr. Johannes Heidenhain Gmbh Messteilung für eine Positionsmesseinrichtung und Positionsmesseinrichtung
DE102005006247A1 (de) * 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7385178B2 (en) 2005-10-26 2008-06-10 Avago Technologies Ecbu Ip Pte Ltd Reflective encoders with various emitter-detector configurations
JP4669047B2 (ja) * 2006-02-06 2011-04-13 ノキア コーポレイション 撮像システムにおける位置検知の方法及びデバイス
TWI534408B (zh) * 2007-07-24 2016-05-21 尼康股份有限公司 Position measuring system, exposure apparatus, position measuring method, exposure method and component manufacturing method, and measuring tool and measuring method
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device
EP3825659B1 (en) 2019-11-19 2023-11-08 CSEM Centre Suisse D'electronique Et De Microtechnique SA Position encoder
CN114440945B (zh) * 2022-02-28 2023-06-16 中北大学 一种基于双层圆孔点阵二维光栅的可调谐光学角度编码器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2246431B (en) * 1988-01-22 1992-05-13 Mitutoyo Corp Optical encoder
US5260568A (en) * 1990-07-18 1993-11-09 Okuma Corporation Absolute position detector with diffraction grating windows and spot position detection
DE69325799T2 (de) * 1992-05-05 2000-04-13 Microe, Inc. Apparat zum detektieren einer relativen bewegung
US5486923A (en) * 1992-05-05 1996-01-23 Microe Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
JPH0727543A (ja) * 1993-07-12 1995-01-27 Canon Inc 光学式変位センサー
JP3407477B2 (ja) * 1995-06-08 2003-05-19 松下電器産業株式会社 位相格子とその作製方法並びに光学式エンコーダ
US5981941A (en) * 1996-05-20 1999-11-09 Matsushita Electric Industrial Co., Ltd. Optical encorder for detection having a moving reference point
US5991249A (en) * 1997-07-29 1999-11-23 Hoetron, Inc. Optical track sensing device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008507799A (ja) * 2004-07-21 2008-03-13 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 情報担体、情報担体を読み取るシステム及び装置
JP2008129021A (ja) * 2006-11-20 2008-06-05 Dr Johannes Heidenhain Gmbh エンコーダ
JP2011196780A (ja) * 2010-03-18 2011-10-06 Mitsutoyo Corp 光電式エンコーダ
JP2016536576A (ja) * 2013-10-01 2016-11-24 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 基準マーク検出器配列
JP7153997B2 (ja) 2013-10-01 2022-10-17 レニショウ パブリック リミテッド カンパニー 基準マーク検出器配列
JP2015212648A (ja) * 2014-05-02 2015-11-26 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
KR20180052676A (ko) * 2015-09-09 2018-05-18 레니쇼우 피엘씨 인코더 장치
JP2018530751A (ja) * 2015-09-09 2018-10-18 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ エンコーダ装置
KR102697708B1 (ko) 2015-09-09 2024-08-21 레니쇼우 피엘씨 인코더 장치

Also Published As

Publication number Publication date
WO2003021194A3 (en) 2003-08-14
CN1582387A (zh) 2005-02-16
AU2002329728A1 (en) 2003-03-18
CN1293367C (zh) 2007-01-03
CA2458954A1 (en) 2003-03-13
WO2003021194A2 (en) 2003-03-13
EP1421343A2 (en) 2004-05-26

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