AU2002329728A1 - Reference point talbot encoder - Google Patents

Reference point talbot encoder

Info

Publication number
AU2002329728A1
AU2002329728A1 AU2002329728A AU2002329728A AU2002329728A1 AU 2002329728 A1 AU2002329728 A1 AU 2002329728A1 AU 2002329728 A AU2002329728 A AU 2002329728A AU 2002329728 A AU2002329728 A AU 2002329728A AU 2002329728 A1 AU2002329728 A1 AU 2002329728A1
Authority
AU
Australia
Prior art keywords
reference point
talbot
encoder
talbot encoder
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002329728A
Other languages
English (en)
Inventor
Ralph A. Kelliher
Douglas A. Klingbeil
Melvin J. J. Teare
William G. Thorburn
Norman J. Tobey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MicroE Systems Corp
Original Assignee
MicroE Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MicroE Systems Corp filed Critical MicroE Systems Corp
Publication of AU2002329728A1 publication Critical patent/AU2002329728A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
    • G01D5/2457—Incremental encoders having reference marks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
AU2002329728A 2001-08-30 2002-08-12 Reference point talbot encoder Abandoned AU2002329728A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US31616001P 2001-08-30 2001-08-30
US60/316,160 2001-08-30
PCT/US2002/025446 WO2003021194A2 (en) 2001-08-30 2002-08-12 Reference point talbot encoder

Publications (1)

Publication Number Publication Date
AU2002329728A1 true AU2002329728A1 (en) 2003-03-18

Family

ID=23227766

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002329728A Abandoned AU2002329728A1 (en) 2001-08-30 2002-08-12 Reference point talbot encoder

Country Status (6)

Country Link
EP (1) EP1421343A2 (enrdf_load_stackoverflow)
JP (1) JP2005526951A (enrdf_load_stackoverflow)
CN (1) CN1293367C (enrdf_load_stackoverflow)
AU (1) AU2002329728A1 (enrdf_load_stackoverflow)
CA (1) CA2458954A1 (enrdf_load_stackoverflow)
WO (1) WO2003021194A2 (enrdf_load_stackoverflow)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10353808B4 (de) * 2003-11-14 2015-09-03 Dr. Johannes Heidenhain Gmbh Messteilung für eine Positionsmesseinrichtung und Positionsmesseinrichtung
US20080100892A1 (en) * 2004-07-21 2008-05-01 Koninklijke Philips Electronics, N.V. Information Carrier, System and Apparatus for Reading Such an Information Carrier
DE102005006247A1 (de) * 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7385178B2 (en) 2005-10-26 2008-06-10 Avago Technologies Ecbu Ip Pte Ltd Reflective encoders with various emitter-detector configurations
JP4669047B2 (ja) * 2006-02-06 2011-04-13 ノキア コーポレイション 撮像システムにおける位置検知の方法及びデバイス
DE102007035345A1 (de) * 2006-11-20 2008-05-21 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
TWI534408B (zh) * 2007-07-24 2016-05-21 尼康股份有限公司 Position measuring system, exposure apparatus, position measuring method, exposure method and component manufacturing method, and measuring tool and measuring method
JP5391115B2 (ja) * 2010-03-18 2014-01-15 株式会社ミツトヨ 光電式エンコーダ
WO2015049173A1 (en) * 2013-10-01 2015-04-09 Renishaw Plc Reference mark detector arrangement
JP6272129B2 (ja) * 2014-05-02 2018-01-31 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
US10670431B2 (en) * 2015-09-09 2020-06-02 Renishaw Plc Encoder apparatus that includes a scale and a readhead that are movable relative to each other configured to reduce the adverse effect of undesirable frequencies in the scale signal to reduce the encoder sub-divisional error
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device
EP3825659B1 (en) 2019-11-19 2023-11-08 CSEM Centre Suisse D'electronique Et De Microtechnique SA Position encoder
CN114440945B (zh) * 2022-02-28 2023-06-16 中北大学 一种基于双层圆孔点阵二维光栅的可调谐光学角度编码器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2246431B (en) * 1988-01-22 1992-05-13 Mitutoyo Corp Optical encoder
US5260568A (en) * 1990-07-18 1993-11-09 Okuma Corporation Absolute position detector with diffraction grating windows and spot position detection
DE69325799T2 (de) * 1992-05-05 2000-04-13 Microe, Inc. Apparat zum detektieren einer relativen bewegung
US5486923A (en) * 1992-05-05 1996-01-23 Microe Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
JPH0727543A (ja) * 1993-07-12 1995-01-27 Canon Inc 光学式変位センサー
JP3407477B2 (ja) * 1995-06-08 2003-05-19 松下電器産業株式会社 位相格子とその作製方法並びに光学式エンコーダ
US5981941A (en) * 1996-05-20 1999-11-09 Matsushita Electric Industrial Co., Ltd. Optical encorder for detection having a moving reference point
US5991249A (en) * 1997-07-29 1999-11-23 Hoetron, Inc. Optical track sensing device

Also Published As

Publication number Publication date
WO2003021194A3 (en) 2003-08-14
CN1582387A (zh) 2005-02-16
CN1293367C (zh) 2007-01-03
CA2458954A1 (en) 2003-03-13
WO2003021194A2 (en) 2003-03-13
EP1421343A2 (en) 2004-05-26
JP2005526951A (ja) 2005-09-08

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase