CA2458954A1 - Reference point talbot encoder - Google Patents
Reference point talbot encoder Download PDFInfo
- Publication number
- CA2458954A1 CA2458954A1 CA002458954A CA2458954A CA2458954A1 CA 2458954 A1 CA2458954 A1 CA 2458954A1 CA 002458954 A CA002458954 A CA 002458954A CA 2458954 A CA2458954 A CA 2458954A CA 2458954 A1 CA2458954 A1 CA 2458954A1
- Authority
- CA
- Canada
- Prior art keywords
- scale
- sensor head
- light
- detector array
- grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- LFEUVBZXUFMACD-UHFFFAOYSA-H lead(2+);trioxido(oxo)-$l^{5}-arsane Chemical compound [Pb+2].[Pb+2].[Pb+2].[O-][As]([O-])([O-])=O.[O-][As]([O-])([O-])=O LFEUVBZXUFMACD-UHFFFAOYSA-H 0.000 title claims abstract description 27
- 230000003287 optical effect Effects 0.000 claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 238000003384 imaging method Methods 0.000 claims description 12
- 238000012545 processing Methods 0.000 claims description 10
- 125000006850 spacer group Chemical group 0.000 claims description 9
- 238000000034 method Methods 0.000 description 11
- 238000013459 approach Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 238000003491 array Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 230000003094 perturbing effect Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 102000016751 Fringe-like Human genes 0.000 description 1
- 108050006300 Fringe-like Proteins 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
- G01D5/2457—Incremental encoders having reference marks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/366—Particular pulse shapes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31616001P | 2001-08-30 | 2001-08-30 | |
| US60/316,160 | 2001-08-30 | ||
| PCT/US2002/025446 WO2003021194A2 (en) | 2001-08-30 | 2002-08-12 | Reference point talbot encoder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2458954A1 true CA2458954A1 (en) | 2003-03-13 |
Family
ID=23227766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002458954A Abandoned CA2458954A1 (en) | 2001-08-30 | 2002-08-12 | Reference point talbot encoder |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1421343A2 (enrdf_load_stackoverflow) |
| JP (1) | JP2005526951A (enrdf_load_stackoverflow) |
| CN (1) | CN1293367C (enrdf_load_stackoverflow) |
| AU (1) | AU2002329728A1 (enrdf_load_stackoverflow) |
| CA (1) | CA2458954A1 (enrdf_load_stackoverflow) |
| WO (1) | WO2003021194A2 (enrdf_load_stackoverflow) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10353808B4 (de) * | 2003-11-14 | 2015-09-03 | Dr. Johannes Heidenhain Gmbh | Messteilung für eine Positionsmesseinrichtung und Positionsmesseinrichtung |
| US20080100892A1 (en) * | 2004-07-21 | 2008-05-01 | Koninklijke Philips Electronics, N.V. | Information Carrier, System and Apparatus for Reading Such an Information Carrier |
| DE102005006247A1 (de) * | 2005-02-11 | 2006-08-17 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| US7385178B2 (en) | 2005-10-26 | 2008-06-10 | Avago Technologies Ecbu Ip Pte Ltd | Reflective encoders with various emitter-detector configurations |
| JP4669047B2 (ja) * | 2006-02-06 | 2011-04-13 | ノキア コーポレイション | 撮像システムにおける位置検知の方法及びデバイス |
| DE102007035345A1 (de) * | 2006-11-20 | 2008-05-21 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| TWI534408B (zh) * | 2007-07-24 | 2016-05-21 | 尼康股份有限公司 | Position measuring system, exposure apparatus, position measuring method, exposure method and component manufacturing method, and measuring tool and measuring method |
| JP5391115B2 (ja) * | 2010-03-18 | 2014-01-15 | 株式会社ミツトヨ | 光電式エンコーダ |
| WO2015049173A1 (en) * | 2013-10-01 | 2015-04-09 | Renishaw Plc | Reference mark detector arrangement |
| JP6272129B2 (ja) * | 2014-05-02 | 2018-01-31 | キヤノン株式会社 | 光学式エンコーダおよびこれを備えた装置 |
| US10670431B2 (en) * | 2015-09-09 | 2020-06-02 | Renishaw Plc | Encoder apparatus that includes a scale and a readhead that are movable relative to each other configured to reduce the adverse effect of undesirable frequencies in the scale signal to reduce the encoder sub-divisional error |
| EP3623769A1 (en) * | 2018-09-12 | 2020-03-18 | Renishaw PLC | Measurement device |
| EP3825659B1 (en) | 2019-11-19 | 2023-11-08 | CSEM Centre Suisse D'electronique Et De Microtechnique SA | Position encoder |
| CN114440945B (zh) * | 2022-02-28 | 2023-06-16 | 中北大学 | 一种基于双层圆孔点阵二维光栅的可调谐光学角度编码器 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2246431B (en) * | 1988-01-22 | 1992-05-13 | Mitutoyo Corp | Optical encoder |
| US5260568A (en) * | 1990-07-18 | 1993-11-09 | Okuma Corporation | Absolute position detector with diffraction grating windows and spot position detection |
| DE69325799T2 (de) * | 1992-05-05 | 2000-04-13 | Microe, Inc. | Apparat zum detektieren einer relativen bewegung |
| US5486923A (en) * | 1992-05-05 | 1996-01-23 | Microe | Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference |
| JPH0727543A (ja) * | 1993-07-12 | 1995-01-27 | Canon Inc | 光学式変位センサー |
| JP3407477B2 (ja) * | 1995-06-08 | 2003-05-19 | 松下電器産業株式会社 | 位相格子とその作製方法並びに光学式エンコーダ |
| US5981941A (en) * | 1996-05-20 | 1999-11-09 | Matsushita Electric Industrial Co., Ltd. | Optical encorder for detection having a moving reference point |
| US5991249A (en) * | 1997-07-29 | 1999-11-23 | Hoetron, Inc. | Optical track sensing device |
-
2002
- 2002-08-12 AU AU2002329728A patent/AU2002329728A1/en not_active Abandoned
- 2002-08-12 JP JP2003525229A patent/JP2005526951A/ja active Pending
- 2002-08-12 EP EP02765972A patent/EP1421343A2/en not_active Withdrawn
- 2002-08-12 WO PCT/US2002/025446 patent/WO2003021194A2/en active Application Filing
- 2002-08-12 CN CNB028219309A patent/CN1293367C/zh not_active Expired - Fee Related
- 2002-08-12 CA CA002458954A patent/CA2458954A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| WO2003021194A3 (en) | 2003-08-14 |
| CN1582387A (zh) | 2005-02-16 |
| AU2002329728A1 (en) | 2003-03-18 |
| CN1293367C (zh) | 2007-01-03 |
| WO2003021194A2 (en) | 2003-03-13 |
| EP1421343A2 (en) | 2004-05-26 |
| JP2005526951A (ja) | 2005-09-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |