JP2005522400A - リチウムを用いた直接結合法 - Google Patents
リチウムを用いた直接結合法 Download PDFInfo
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- JP2005522400A JP2005522400A JP2003583966A JP2003583966A JP2005522400A JP 2005522400 A JP2005522400 A JP 2005522400A JP 2003583966 A JP2003583966 A JP 2003583966A JP 2003583966 A JP2003583966 A JP 2003583966A JP 2005522400 A JP2005522400 A JP 2005522400A
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- lithium
- glass
- bonding
- bonded
- bond
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- 229910052744 lithium Inorganic materials 0.000 title claims abstract description 97
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 title claims abstract description 92
- 238000000034 method Methods 0.000 title claims abstract description 51
- 239000000203 mixture Substances 0.000 claims abstract description 31
- 238000005342 ion exchange Methods 0.000 claims abstract description 11
- 239000000853 adhesive Substances 0.000 claims abstract description 10
- 230000001070 adhesive effect Effects 0.000 claims abstract description 10
- 238000000151 deposition Methods 0.000 claims abstract description 4
- 239000011521 glass Substances 0.000 claims description 56
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 claims description 15
- 229910001416 lithium ion Inorganic materials 0.000 claims description 15
- IIPYXGDZVMZOAP-UHFFFAOYSA-N lithium nitrate Chemical compound [Li+].[O-][N+]([O-])=O IIPYXGDZVMZOAP-UHFFFAOYSA-N 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000003513 alkali Substances 0.000 claims description 9
- INHCSSUBVCNVSK-UHFFFAOYSA-L lithium sulfate Inorganic materials [Li+].[Li+].[O-]S([O-])(=O)=O INHCSSUBVCNVSK-UHFFFAOYSA-L 0.000 claims description 7
- RBTVSNLYYIMMKS-UHFFFAOYSA-N tert-butyl 3-aminoazetidine-1-carboxylate;hydrochloride Chemical compound Cl.CC(C)(C)OC(=O)N1CC(N)C1 RBTVSNLYYIMMKS-UHFFFAOYSA-N 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 5
- 229910003002 lithium salt Inorganic materials 0.000 claims description 4
- 159000000002 lithium salts Chemical class 0.000 claims description 4
- 229910008051 Si-OH Inorganic materials 0.000 claims description 3
- 229910006358 Si—OH Inorganic materials 0.000 claims description 3
- 238000005304 joining Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 16
- 238000000576 coating method Methods 0.000 abstract description 12
- 239000011248 coating agent Substances 0.000 abstract description 10
- 238000005468 ion implantation Methods 0.000 abstract description 5
- 239000013307 optical fiber Substances 0.000 abstract description 5
- 230000004927 fusion Effects 0.000 abstract description 4
- 230000008021 deposition Effects 0.000 abstract description 3
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 37
- 238000007789 sealing Methods 0.000 description 27
- 239000000463 material Substances 0.000 description 21
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 17
- 239000005297 pyrex Substances 0.000 description 17
- 239000010410 layer Substances 0.000 description 15
- 239000000377 silicon dioxide Substances 0.000 description 15
- 230000008569 process Effects 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 239000000126 substance Substances 0.000 description 10
- 238000000137 annealing Methods 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 7
- 239000002241 glass-ceramic Substances 0.000 description 7
- 239000000835 fiber Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000032798 delamination Effects 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 239000005350 fused silica glass Substances 0.000 description 5
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- 239000000908 ammonium hydroxide Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 239000013590 bulk material Substances 0.000 description 4
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 4
- 229910001947 lithium oxide Inorganic materials 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000012459 cleaning agent Substances 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000011022 opal Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000002419 bulk glass Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000005368 silicate glass Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000006121 base glass Substances 0.000 description 1
- 239000003637 basic solution Substances 0.000 description 1
- 229910001423 beryllium ion Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 230000005660 hydrophilic surface Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000013383 initial experiment Methods 0.000 description 1
- 229910021450 lithium metal oxide Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010421 standard material Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000000825 ultraviolet detection Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/04—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with articles made from glass
- C04B37/042—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with articles made from glass in a direct manner
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Structural Engineering (AREA)
- Joining Of Glass To Other Materials (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Surface Treatment Of Glass (AREA)
- Glass Compositions (AREA)
Abstract
Description
A.Sayah, D.Solignac, T.Cueni, "Development of novel low temperature bonding technologies for microchip chemical analysis applications," Sensors and Actuators, 84 (2000) pp.103-108、 P.Rangsten, O.Vallin, K.Hermansson, Y.Backlund, "Quartz-to-Quartz Direct bonding," J.Electrochemical Society, V.146, N. 3,pp.1104-1105, 1999 H.Nakanishi, T.Nishimoto, M.Kani, T.Saitoh, R.Nakamura, T.Yoshida, S.Shoji, "Condition Optimization, reliability Evaluation of SiO2-SiO2 HF Bonding and Its Application for UV Detection Micro Flow Cell," Sensors and Actuators, V.83, pp.136-141, 2000
試料の調製
以下の表Iに列記した試料の各々について、表面を200℃の温度で結合させた。表面のシーリング前に、表面を約0.5マイクロメートル未満の平面度まで研磨し、「Direct Bonding of Articles Containing Silicon」と題し、本特許出願の譲受人に共に譲渡され、発明者としてロバート・サビアの名前を挙げた同時係属出願における方法にしたがって試料を洗浄した。具体的には、Microclean CA05などの洗浄剤を用いて試料を洗浄し、水で濯いだ後、試料を1時間に亘り10体積%の硝酸中に浸漬した。酸に浸漬した試料を再び水で濯ぎ、次いで、試料を60分間に亘り15体積%の水酸化アンモニウム溶液中に浸漬した。試料を再び濯ぎ、結合表面を湿潤条件に維持し、上述した温度で約1psi(約6.9kPa)より大きい圧力下で結合した。その結果が以下の表Iに示されている。
この表は、張力下で試験した化学結合表面の破壊挙動を列記しており、全てのシールは200±5℃で生成し、その後のアニーリング周期は行わなかった。ガラスの破壊により破損した結合について得られた強度値は、結合強度の上限を表すものではないが、その代わりに、バルク材料中の構造欠陥のために表記の荷重でシール界面から離れたところで破損が生じたことを示している。
Claims (14)
- 少なくとも二つの表面を結合させる方法であって、
前記表面の一方の少なくとも一部にリチウムを含ませ、
接着剤を含まない状態で、前記表面の軟化点未満の温度で該表面を直接接触するように配置する、
各工程を有してなることを特徴とする方法。 - 前記表面の少なくとも一方がケイ素を含むことを特徴とする請求項1記載の方法。
- 結合されている前記表面が二つのガラス製品の表面であることを特徴とする請求項1または2記載の方法。
- 前記接触工程中の温度が400℃未満、好ましくは、200℃未満であることを特徴とする請求項1から3いずれか1項記載の方法。
- 前記表面間の結合強度が90psi(約620kPa)を超えることを特徴とする請求項1から4いずれか1項記載の方法。
- 前記表面の少なくとも一方がガラスであり、リチウムが該ガラスの組成中に含まれていることを特徴とする請求項1から5いずれか1項記載の方法。
- 前記表面の一方の少なくとも一部に、該表面の一部を、リチウム塩、硝酸リチウムおよび硫酸リチウムからなる群より選択される混合物と接触させることにより、リチウムを含ませることを特徴とする請求項1から5いずれか1項記載の方法。
- 前記表面の一方の少なくとも一部に、該表面の一部にリチウムイオンを注入することにより、リチウムを含ませることを特徴とする請求項1から5いずれか1項記載の方法。
- 前記表面の一方の少なくとも一部に、該表面の一部にリチウム金属の層を堆積させることにより、リチウムを含ませることを特徴とする請求項1から5いずれか1項記載の方法。
- 前記表面の一方の少なくとも一部に、前記表面を接触した状態に配置する工程の前に、該表面の一部にリチウムイオンを含有する液体混合物を吸着させることにより、リチウムを含ませることを特徴とする請求項1から5いずれか1項記載の方法。
- 前記表面の一方の少なくとも一部に、該表面の一部にリチウムイオンを含有するゾルゲルをコーティングすることにより、リチウムを含ませることを特徴とする請求項1から5いずれか1項記載の方法。
- 前記結合される表面の一方の少なくとも一部がアルカリ元素を含み、該表面の一部に、前記アルカリ元素をリチウムイオンとイオン交換することにより、リチウムを含ませることを特徴とする請求項1から5いずれか1項記載の方法。
- 前記表面の少なくとも一方に、−OH、≡Si−OH、=Si−(OH)2、−Si−(OH)3および−O−Si−(OH)3、並びにそれらの組合せからなる群より選択される末端基を提供する工程をさらに含むことを特徴とする請求項1から12いずれか1項記載の方法。
- 少なくとも一方の表面を酸と接触させる工程をさらに含むことを特徴とする請求項13記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/118,780 US20030188553A1 (en) | 2002-04-08 | 2002-04-08 | Direct bonding methods using lithium |
PCT/US2003/009149 WO2003087006A1 (en) | 2002-04-08 | 2003-03-24 | Direct bonding methods using lithium |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005522400A true JP2005522400A (ja) | 2005-07-28 |
JP2005522400A5 JP2005522400A5 (ja) | 2009-10-22 |
Family
ID=28674498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003583966A Pending JP2005522400A (ja) | 2002-04-08 | 2003-03-24 | リチウムを用いた直接結合法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US20030188553A1 (ja) |
EP (1) | EP1492738A1 (ja) |
JP (1) | JP2005522400A (ja) |
KR (1) | KR20040108705A (ja) |
CN (1) | CN100344567C (ja) |
AU (1) | AU2003222071A1 (ja) |
CA (1) | CA2481571A1 (ja) |
TW (1) | TWI302525B (ja) |
WO (1) | WO2003087006A1 (ja) |
Cited By (2)
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WO2014002693A1 (ja) * | 2012-06-29 | 2014-01-03 | コニカミノルタ株式会社 | 情報記録媒体用ガラス基板および情報記録媒体用ガラス基板の製造方法 |
CN111542503A (zh) * | 2017-12-21 | 2020-08-14 | 肖特玻璃科技(苏州)有限公司 | 可键合的玻璃和低自发荧光制品及其制造方法 |
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WO2004062140A2 (en) * | 2002-12-30 | 2004-07-22 | Corning Incorporated | Fast-switching scalable optical interconnection design with fast contention resolution |
US8161862B1 (en) * | 2007-01-08 | 2012-04-24 | Corning Incorporated | Hybrid laminated transparent armor |
CN101679131A (zh) * | 2007-05-21 | 2010-03-24 | 康宁股份有限公司 | 热接合的玻璃-陶瓷/玻璃层叠体,它们在装甲应用中的用途及其制造方法 |
KR100841376B1 (ko) * | 2007-06-12 | 2008-06-26 | 삼성에스디아이 주식회사 | 접합방법 및 그를 이용한 유기전계발광표시장치의 제조방법 |
KR100889625B1 (ko) * | 2007-07-19 | 2009-03-20 | 삼성모바일디스플레이주식회사 | 접합방법 및 그를 이용한 유기전계발광표시장치의 제조방법 |
US20100285277A1 (en) * | 2009-05-11 | 2010-11-11 | Victoria Ann Edwards | Method for protecting a glass edge using a machinable metal armor |
CN111204985B (zh) * | 2018-11-22 | 2021-04-20 | 比亚迪股份有限公司 | 半成品玻璃结构及其制备方法、玻璃壳体及其制备方法和移动电子设备 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63107832A (ja) * | 1986-10-24 | 1988-05-12 | Nippon Electric Glass Co Ltd | 結晶化ガラスの接着方法 |
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WO2014002693A1 (ja) * | 2012-06-29 | 2014-01-03 | コニカミノルタ株式会社 | 情報記録媒体用ガラス基板および情報記録媒体用ガラス基板の製造方法 |
CN111542503A (zh) * | 2017-12-21 | 2020-08-14 | 肖特玻璃科技(苏州)有限公司 | 可键合的玻璃和低自发荧光制品及其制造方法 |
KR20200101371A (ko) * | 2017-12-21 | 2020-08-27 | 쇼오트 글라스 테크놀로지스 (쑤저우) 코퍼레이션 리미티드. | 접합 가능한 유리 및 자가형광성이 낮은 물품 및 이의 제조 방법 |
JP2021511273A (ja) * | 2017-12-21 | 2021-05-06 | ショット グラス テクノロジーズ (スゾウ) カンパニー リミテッドSchott Glass Technologies (Suzhou) Co., Ltd. | 接合可能なガラス、および低自家蛍光物品、およびその製造方法 |
JP7216102B2 (ja) | 2017-12-21 | 2023-01-31 | ショット グラス テクノロジーズ (スゾウ) カンパニー リミテッド | 接合可能なガラス、および低自家蛍光物品、およびその製造方法 |
KR102552470B1 (ko) | 2017-12-21 | 2023-07-05 | 쇼오트 글라스 테크놀로지스 (쑤저우) 코퍼레이션 리미티드. | 접합 가능한 유리 및 자가형광성이 낮은 물품 및 이의 제조 방법 |
US11827562B2 (en) | 2017-12-21 | 2023-11-28 | Schott Glass Technologies (Suzhou) Co. Ltd | Bondable glass and low auto-fluorescence article and method of making it |
Also Published As
Publication number | Publication date |
---|---|
KR20040108705A (ko) | 2004-12-24 |
TWI302525B (en) | 2008-11-01 |
EP1492738A1 (en) | 2005-01-05 |
AU2003222071A1 (en) | 2003-10-27 |
US20030188553A1 (en) | 2003-10-09 |
TW200406363A (en) | 2004-05-01 |
WO2003087006A1 (en) | 2003-10-23 |
CN100344567C (zh) | 2007-10-24 |
CA2481571A1 (en) | 2003-10-23 |
CN1653014A (zh) | 2005-08-10 |
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