JP2005519332A5 - - Google Patents

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Publication number
JP2005519332A5
JP2005519332A5 JP2003573496A JP2003573496A JP2005519332A5 JP 2005519332 A5 JP2005519332 A5 JP 2005519332A5 JP 2003573496 A JP2003573496 A JP 2003573496A JP 2003573496 A JP2003573496 A JP 2003573496A JP 2005519332 A5 JP2005519332 A5 JP 2005519332A5
Authority
JP
Japan
Prior art keywords
projection objective
lens
lens group
refractive projection
refractive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003573496A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005519332A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2003/001147 external-priority patent/WO2003075096A2/de
Publication of JP2005519332A publication Critical patent/JP2005519332A/ja
Publication of JP2005519332A5 publication Critical patent/JP2005519332A5/ja
Pending legal-status Critical Current

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JP2003573496A 2002-03-01 2003-02-06 屈折型投影対物レンズ Pending JP2005519332A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36084502P 2002-03-01 2002-03-01
PCT/EP2003/001147 WO2003075096A2 (de) 2002-03-01 2003-02-06 Refraktives projektionsobjektiv

Publications (2)

Publication Number Publication Date
JP2005519332A JP2005519332A (ja) 2005-06-30
JP2005519332A5 true JP2005519332A5 (enrdf_load_stackoverflow) 2006-03-23

Family

ID=27789034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003573496A Pending JP2005519332A (ja) 2002-03-01 2003-02-06 屈折型投影対物レンズ

Country Status (5)

Country Link
EP (1) EP1483626A2 (enrdf_load_stackoverflow)
JP (1) JP2005519332A (enrdf_load_stackoverflow)
KR (1) KR20040089688A (enrdf_load_stackoverflow)
AU (2) AU2003210214A1 (enrdf_load_stackoverflow)
WO (2) WO2003075096A2 (enrdf_load_stackoverflow)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10229249A1 (de) 2002-03-01 2003-09-04 Zeiss Carl Semiconductor Mfg Refraktives Projektionsobjektiv mit einer Taille
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
KR101028938B1 (ko) * 2003-10-22 2011-04-12 칼 짜이스 에스엠티 게엠베하 액침 리소그래피용 굴절 투영 대물렌즈
KR101109844B1 (ko) 2003-12-02 2012-04-06 칼 짜이스 에스엠티 게엠베하 프로젝션 광학 시스템
US20080151364A1 (en) 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
WO2005111689A2 (en) 2004-05-17 2005-11-24 Carl Zeiss Smt Ag Catadioptric projection objective with intermediate images
US7301707B2 (en) 2004-09-03 2007-11-27 Carl Zeiss Smt Ag Projection optical system and method
US7508488B2 (en) 2004-10-13 2009-03-24 Carl Zeiss Smt Ag Projection exposure system and method of manufacturing a miniaturized device
DE102005045862A1 (de) 2004-10-19 2006-04-20 Carl Zeiss Smt Ag Optisches System für Ultraviolettlicht
US7508489B2 (en) 2004-12-13 2009-03-24 Carl Zeiss Smt Ag Method of manufacturing a miniaturized device
US7957069B2 (en) 2004-12-30 2011-06-07 Carl Zeiss Smt Gmbh Projection optical system
JP2007114750A (ja) 2005-09-09 2007-05-10 Asml Netherlands Bv 投影システム設計方法、リソグラフィー装置およびデバイス製造方法
JP5156740B2 (ja) 2006-07-03 2013-03-06 カール・ツァイス・エスエムティー・ゲーエムベーハー リソグラフィ投影対物器械を修正／修理する方法
DE102006045075A1 (de) 2006-09-21 2008-04-03 Carl Zeiss Smt Ag Steuerbares optisches Element
KR101507622B1 (ko) 2006-12-01 2015-03-31 칼 짜이스 에스엠티 게엠베하 이미지 수차들을 감소시키기 위한, 교환가능하고 조작가능한 보정 배열을 구비하는 광학 시스템
DE102008000790A1 (de) 2007-03-20 2008-09-25 Carl Zeiss Smt Ag Verfahren zum Verbessern von Abbildungseigenschaften eines optischen Systems sowie derartiges optisches System
JP5462791B2 (ja) 2007-08-03 2014-04-02 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィのための投影対物系、投影露光装置、及び投影露光方法
DE102008041144A1 (de) 2007-08-21 2009-03-05 Carl Zeiss Smt Ag Optische Anordnung und optisches Abbildungssystem damit, Verfahren zu deren Optimierung und Verfahren zum Herstellen eines optischen Elements
KR101527242B1 (ko) 2007-08-24 2015-06-08 칼 짜이스 에스엠테 게엠베하 광학 소자 내의 온도 분포에 영향을 주기 위한 방법, 광학 보정 장치 및 이러한 광학 보정 장치를 갖는 투영 노광 장치
EP2048540A1 (en) 2007-10-09 2009-04-15 Carl Zeiss SMT AG Microlithographic projection exposure apparatus
DE102007055567A1 (de) 2007-11-20 2009-05-28 Carl Zeiss Smt Ag Optisches System
JP5533656B2 (ja) * 2008-09-18 2014-06-25 株式会社ニコン 結像光学系、露光装置及び電子デバイスの製造方法
DE102008042356A1 (de) 2008-09-25 2010-04-08 Carl Zeiss Smt Ag Projektionsbelichtungsanlage mit optimierter Justagemöglichkeit
JP5478773B2 (ja) 2010-03-26 2014-04-23 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学系、露光装置、及び波面補正方法
KR102047584B1 (ko) 2013-09-09 2019-11-21 칼 짜이스 에스엠티 게엠베하 마이크로리소그래피 투영 노광 장치 및 이러한 장치의 광학적 파면 변형의 교정 방법
US9316808B1 (en) 2014-03-16 2016-04-19 Hyperion Development, LLC Optical assembly for a wide field of view point action camera with a low sag aspheric lens element
US10139595B1 (en) 2014-03-16 2018-11-27 Navitar Industries, Llc Optical assembly for a compact wide field of view digital camera with low first lens diameter to image diagonal ratio
US9726859B1 (en) 2014-03-16 2017-08-08 Navitar Industries, Llc Optical assembly for a wide field of view camera with low TV distortion
US9316820B1 (en) 2014-03-16 2016-04-19 Hyperion Development, LLC Optical assembly for a wide field of view point action camera with low astigmatism
US9091843B1 (en) 2014-03-16 2015-07-28 Hyperion Development, LLC Optical assembly for a wide field of view point action camera with low track length to focal length ratio
US9995910B1 (en) 2014-03-16 2018-06-12 Navitar Industries, Llc Optical assembly for a compact wide field of view digital camera with high MTF
US10545314B1 (en) 2014-03-16 2020-01-28 Navitar Industries, Llc Optical assembly for a compact wide field of view digital camera with low lateral chromatic aberration
US10386604B1 (en) 2014-03-16 2019-08-20 Navitar Industries, Llc Compact wide field of view digital camera with stray light impact suppression
US9494772B1 (en) 2014-03-16 2016-11-15 Hyperion Development, LLC Optical assembly for a wide field of view point action camera with low field curvature
DE102024111454A1 (de) 2024-04-24 2025-10-30 Carl Zeiss Smt Gmbh Projektionsbelichtungsverfahren, Projektionsobjektiv und Projektionsbelichtungsanlage für die Mikrolithographie

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3624973B2 (ja) * 1995-10-12 2005-03-02 株式会社ニコン 投影光学系
DE19855108A1 (de) * 1998-11-30 2000-05-31 Zeiss Carl Fa Mikrolithographisches Reduktionsobjektiv, Projektionsbelichtungsanlage und -Verfahren
DE19855157A1 (de) * 1998-11-30 2000-05-31 Zeiss Carl Fa Projektionsobjektiv
JP2003535356A (ja) * 1999-12-29 2003-11-25 カール・ツアイス・スティフツング・トレーディング・アズ・カール・ツアイス 非球面レンズ表面が隣接して配置されている投影対物レンズ

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