JP2005519332A5 - - Google Patents

Claims (24)

A refractive projection objective lens for microlithography having a numerical aperture larger than 0.7, comprising a first convex portion, a second convex portion, and a waist disposed between both convex portions, first convex portion has a maximum diameter D _1, the second convex portion has a maximum diameter D _{2,
0.8 <D 1 / D 2 <} 1.1
A refractive projection objective lens, characterized in that The ratio of maximum diameter _{0.9 <D 1 / D 2 <} 1.0
The refractive projection objective according to claim 1, wherein:   In the light propagation direction, a first lens group having a negative refractive power, a second lens group having a positive refractive power, and a third lens having a negative refractive power provided with a narrow portion of the light beam. A refraction-type projection objective lens comprising: a lens group; a fourth lens group having a positive refractive power; and a system aperture provided with a fifth lens group having a positive refractive power. A refractive projection objective lens, characterized in that a meniscus lens curved toward the object is disposed before the diaphragm and after the diaphragm. When L is the total length from the reticle to the wafer, NA is the numerical aperture on the image side, D _MAX is the maximum diameter of the system, that is, D ₁ or D _2, and 2yb is the diameter of the image field,
L ^* _Dmax / (NA ^* 2yb) <12850
The refractive projection objective according to claim 2 or 3, wherein 5. The refractive projection objective according to claim 1, wherein the first lens group has at least two or three negative lenses.   A refractive projection objective lens including a first convex portion, a second convex portion, and a waist portion that is disposed between both convex portions and includes the narrowest narrow portion, the rear of the narrowest narrow portion 2. A refractive projection objective lens, wherein two meniscus lenses having convex surfaces facing each other are arranged before the system aperture. A refraction-type projection objective lens including a first convex portion, a next waist portion, and a second convex portion next to the first convex portion, in which a system diaphragm is disposed on the second convex portion, and the object plane O range L _F up to the last stop side lens surface, the range between the range to the image plane from the first lens surface is followed by the throttle L _R, L _F and L _R and L _AP from the objective lens When the sum of the center thicknesses of all the lenses arranged inside is L _geo and the distance from the image plane O ′ to the object plane O is L, the length ratio LV

LV ≧ 0.1
The refractive projection objective lens.   Refractive projection objective according to claim 7, characterized in that the numerical aperture is greater than 0.7, preferably greater than 0.8. 9. The projection objective according to claim 1, wherein the optical conductance of the projection objective is greater than 2% of the total length, wherein the optical conductance is defined as the product of the image field diameter and the numerical aperture on the image side . A refractive projection objective described in 1. 9. The refractive projection objective according to claim 1 , wherein only a lens made of one material is used. The refractive projection objective according to any one of claims 1 to 10, wherein the ratio of the total length (OO ') to the focal length of the fifth lens group is greater than 8. Includes a first lens group LG1 has at least one aspheric surface, advantageously refractive projection objective for any crab of claims 1 to 11, characterized in that the two non-spherical is provided. Refractive projection objective according to 請 Motomeko 12 characterized in that the aspherical surface of the first lens group LG1 is preferably in the surface of the reticle side. Refractive projection objective according to 請 Motomeko 13 characterized in that the aspherical surface of the first lens group LG1 is preferably in the condensing surface of the reticle side. When using an aspherical surface in the third lens group LG3, refractive projection objective any crab of claims 1 to 14, characterized by the use of non-spherical always surface of the wafer side. Refractive projection objective according to either of claims 1, 2, 4, 5 and 7 of 1 4, characterized in that the aspherical surface in the third lens group is not provided.   17. The refractive projection objective according to claim 15, wherein at least one meniscus lens having a negative refractive power and convex on the object surface side is disposed in the first lens group LG1. .   17. The refractive projection objective according to claim 15, wherein the fifth lens group LG5 includes at least two aspheric surfaces.   17. The refractive projection objective according to claim 15, wherein the fifth lens group LG5 includes at least two biconvex lenses and two condensing meniscuses concave on the image side.   17. The refractive projection objective according to claim 15, wherein the fifth lens group LG5 has a maximum of five condensing lenses.   In the lens groups LG1 and LG2, the height of the main beam with respect to the outermost field point is larger than the height of the edge beam for imaging the axial point, and the ratio is reversed in the lens group LG3. The refractive projection objective according to claim 15 or 16.   The refractive projection objective lens according to claim 15 or 16, wherein the maximum height of the edge beam for imaging the axial point is at least three times the height of the narrowest narrow part of the lens group LG3. .   The refractive projection objective according to claim 15 or 16, wherein the maximum diameter of the lens group LG2 is twice as large as the object field diameter. Refractive projection objective according to claim 15 or 16, characterized in that the minimum free diameter in the lens group LG3 is smaller than 1.2 times the object field diameter, in an advantageous embodiment smaller than 1.1 times. .