JP2005518945A - レーザ加工方法 - Google Patents
レーザ加工方法 Download PDFInfo
- Publication number
- JP2005518945A JP2005518945A JP2003572720A JP2003572720A JP2005518945A JP 2005518945 A JP2005518945 A JP 2005518945A JP 2003572720 A JP2003572720 A JP 2003572720A JP 2003572720 A JP2003572720 A JP 2003572720A JP 2005518945 A JP2005518945 A JP 2005518945A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- pulse
- substrate
- processing method
- laser processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
図2には、使用されるLCP基板の厚さに依存した、開けられた孔の実現可能な最大スループットがグラフで示されている。
Claims (9)
- 誘電基板を迅速に穿孔するためのレーザ加工方法であって、
・レーザ光源としてQスイッチ式CO2レーザを使用し、当該Qスイッチング式CO2レーザは、
50kHzより大きいパルス繰返し周波数と、
200nsより短いパルス長と、
少なくとも10−4ジュールのレーザパルスあたりのエネルギーとを
有するパルス状のレーザビーム(4)を生成し、
・当該レーザビーム(4)を偏向ユニット(2)によって、加工されるべき基板(6)へ偏向する、
ことを特徴とするレーザ加工方法。 - 9. 2±0. 2μmの範囲の波長を有するレーザビーム(4)を使用する、請求項1記載のレーザ加工方法。
- 0. 7mジュールのエネルギーを有するレーザパルスを使用する、請求項1から2までのいずれか1項記載のレーザ加工方法。
- 前記レーザビーム(4)を、加工されるべき基板(6)上に、50μm〜200μmの直径で焦点合わせする、請求項1から3までのいずれか1項記載のレーザ加工方法。
- 加工されるべき基板(6)に袋穴を穿孔する、請求項1から4までのいずれか1項記載のレーザ加工方法。
- 孔(5)を唯一のレーザパルスまたは、加工されるべき基板(6)に連続して配向される複数のレーザパルスによって開ける、請求項1から5までのいずれか1項記載のレーザ加工方法。
- LCP基板を加工し、ここで150nsより短いパルス長を使用する、請求項1から6までのいずれか1項記載のレーザ加工方法。
- ガラス繊維材料によって機械的に強くされた誘電基板を加工し、ここで少なくとも50kHz、殊に60kHz〜100kHzのパルス繰返し周波数を使用する、請求項1から6までのいずれか1項記載のレーザ加工方法。
- エポキシ材料を加工し、ここで少なくとも80kHz、殊に近似的に100kHzのパルス繰返し周波数を使用する、請求項1から6までのいずれか1項記載のレーザ加工方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10209617A DE10209617C1 (de) | 2002-03-05 | 2002-03-05 | Laserbeschriftungsverfahren |
PCT/DE2003/000579 WO2003074224A1 (de) | 2002-03-05 | 2003-02-24 | Laserbearbeitungsverfahren |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005518945A true JP2005518945A (ja) | 2005-06-30 |
Family
ID=7714021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003572720A Pending JP2005518945A (ja) | 2002-03-05 | 2003-02-24 | レーザ加工方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6833528B2 (ja) |
EP (1) | EP1480780A1 (ja) |
JP (1) | JP2005518945A (ja) |
KR (1) | KR20040083546A (ja) |
CN (1) | CN1328001C (ja) |
DE (1) | DE10209617C1 (ja) |
WO (1) | WO2003074224A1 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6781090B2 (en) * | 2001-03-12 | 2004-08-24 | Electro Scientific Industries, Inc. | Quasi-CW diode-pumped, solid-state harmonic laser system and method employing same |
US6806440B2 (en) * | 2001-03-12 | 2004-10-19 | Electro Scientific Industries, Inc. | Quasi-CW diode pumped, solid-state UV laser system and method employing same |
US7985942B2 (en) * | 2004-05-28 | 2011-07-26 | Electro Scientific Industries, Inc. | Method of providing consistent quality of target material removal by lasers having different output performance characteristics |
US7352784B2 (en) * | 2004-07-20 | 2008-04-01 | Jds Uniphase Corporation | Laser burst boosting method and apparatus |
KR100710854B1 (ko) * | 2005-10-19 | 2007-04-23 | (주)하드램 | 유리 천공장치 및 유리 천공방법 |
ES2302418B1 (es) * | 2005-12-21 | 2009-05-08 | Universidad De Cadiz | Metodo de mecanizado laser de materiales compuestos de resina epoxi reforzada con fibras de carbono. |
CN100441360C (zh) * | 2005-12-21 | 2008-12-10 | 北京工业大学 | 一种激光打孔方法及其打孔装置 |
US8237080B2 (en) | 2008-03-27 | 2012-08-07 | Electro Scientific Industries, Inc | Method and apparatus for laser drilling holes with Gaussian pulses |
CN101829850A (zh) * | 2010-04-01 | 2010-09-15 | 深圳市大族激光科技股份有限公司 | 盲孔加工方法 |
WO2012092478A1 (en) | 2010-12-30 | 2012-07-05 | 3M Innovative Properties Company | Laser cutting method and articles produced therewith |
US10286489B2 (en) | 2010-12-30 | 2019-05-14 | 3M Innovative Properties Company | Apparatus and method for laser cutting using a support member having a gold facing layer |
CN103252587A (zh) * | 2013-04-27 | 2013-08-21 | 北京工业大学 | 玻璃表面盲孔加工方法 |
CN103240531B (zh) * | 2013-05-10 | 2015-02-11 | 中国电子科技集团公司第五十四研究所 | 一种分段激光打孔方法 |
CN105081564B (zh) * | 2015-08-31 | 2017-03-29 | 大族激光科技产业集团股份有限公司 | 一种强化玻璃内形孔的加工方法 |
CN105263266A (zh) * | 2015-10-30 | 2016-01-20 | 江苏博敏电子有限公司 | 一种镭射盲钻加工方法 |
CN108422108A (zh) * | 2018-02-28 | 2018-08-21 | 重庆市健隆家具有限公司 | 一种型材钻孔工艺 |
CN109648192A (zh) * | 2018-12-10 | 2019-04-19 | 成都莱普科技有限公司 | 激光钻孔机能量控制方法 |
CN113369719B (zh) * | 2021-05-14 | 2023-01-31 | 惠州中京电子科技有限公司 | 用于led载板的激光打孔方法 |
CN113732527A (zh) * | 2021-09-08 | 2021-12-03 | 常州英诺激光科技有限公司 | 一种用于切割lcp材料的紫外皮秒激光切割方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4027137A (en) * | 1975-09-17 | 1977-05-31 | International Business Machines Corporation | Laser drilling nozzle |
US4044222A (en) * | 1976-01-16 | 1977-08-23 | Western Electric Company, Inc. | Method of forming tapered apertures in thin films with an energy beam |
JP3066659B2 (ja) * | 1991-05-31 | 2000-07-17 | 日立ビアメカニクス株式会社 | レーザ加工機の加工ポイント補正方法及びその装置 |
CN1029513C (zh) * | 1992-11-27 | 1995-08-16 | 中国科学院力学研究所 | 高重频调制多脉冲yag激光刻花系统及加工方法 |
GB2286787A (en) * | 1994-02-26 | 1995-08-30 | Oxford Lasers Ltd | Selective machining by dual wavelength laser |
US5493096A (en) * | 1994-05-10 | 1996-02-20 | Grumman Aerospace Corporation | Thin substrate micro-via interconnect |
US5593606A (en) * | 1994-07-18 | 1997-01-14 | Electro Scientific Industries, Inc. | Ultraviolet laser system and method for forming vias in multi-layered targets |
US6150630A (en) * | 1996-01-11 | 2000-11-21 | The Regents Of The University Of California | Laser machining of explosives |
DE69737991T2 (de) * | 1996-11-20 | 2008-04-30 | Ibiden Co., Ltd., Ogaki | Laserbearbeitungsvorrichtung, verfahren und vorrichtung zur herstellung einer mehrschichtigen, gedruckten leiterplatte |
JP3691221B2 (ja) * | 1997-09-24 | 2005-09-07 | 三菱電機株式会社 | レーザ加工方法 |
GB9811328D0 (en) * | 1998-05-27 | 1998-07-22 | Exitech Ltd | The use of mid-infrared lasers for drilling microvia holes in printed circuit (wiring) boards and other electrical circuit interconnection packages |
JP3346374B2 (ja) * | 1999-06-23 | 2002-11-18 | 住友電気工業株式会社 | レーザ穴開け加工装置 |
DE10020559A1 (de) * | 2000-04-27 | 2001-10-31 | Hannover Laser Zentrum | Laser-Bearbeitung von Materialien |
WO2002090037A1 (en) * | 2001-05-09 | 2002-11-14 | Electro Scientific Industries, Inc. | Micromachining with high-energy, intra-cavity q-switched co2 laser pulses |
DE10145184B4 (de) * | 2001-09-13 | 2005-03-10 | Siemens Ag | Verfahren zum Laserbohren, insbesondere unter Verwendung einer Lochmaske |
-
2002
- 2002-03-05 DE DE10209617A patent/DE10209617C1/de not_active Expired - Fee Related
-
2003
- 2003-02-24 KR KR10-2004-7013897A patent/KR20040083546A/ko not_active Application Discontinuation
- 2003-02-24 JP JP2003572720A patent/JP2005518945A/ja active Pending
- 2003-02-24 CN CNB038052245A patent/CN1328001C/zh not_active Expired - Fee Related
- 2003-02-24 EP EP03709643A patent/EP1480780A1/de not_active Withdrawn
- 2003-02-24 WO PCT/DE2003/000579 patent/WO2003074224A1/de not_active Application Discontinuation
- 2003-03-05 US US10/378,884 patent/US6833528B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE10209617C1 (de) | 2003-08-07 |
CN1328001C (zh) | 2007-07-25 |
US20030168435A1 (en) | 2003-09-11 |
EP1480780A1 (de) | 2004-12-01 |
CN1638913A (zh) | 2005-07-13 |
KR20040083546A (ko) | 2004-10-02 |
WO2003074224A1 (de) | 2003-09-12 |
US6833528B2 (en) | 2004-12-21 |
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