JP2005516368A5 - - Google Patents
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- Publication number
- JP2005516368A5 JP2005516368A5 JP2003564919A JP2003564919A JP2005516368A5 JP 2005516368 A5 JP2005516368 A5 JP 2005516368A5 JP 2003564919 A JP2003564919 A JP 2003564919A JP 2003564919 A JP2003564919 A JP 2003564919A JP 2005516368 A5 JP2005516368 A5 JP 2005516368A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- forming
- protective layer
- etching
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010410 layer Substances 0.000 claims 27
- 239000011241 protective layer Substances 0.000 claims 23
- 238000005530 etching Methods 0.000 claims 19
- 238000000034 method Methods 0.000 claims 14
- 125000006850 spacer group Chemical group 0.000 claims 8
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims 6
- XEMZLVDIUVCKGL-UHFFFAOYSA-N hydrogen peroxide;sulfuric acid Chemical compound OO.OS(O)(=O)=O XEMZLVDIUVCKGL-UHFFFAOYSA-N 0.000 claims 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/066,149 US6703252B2 (en) | 2002-01-31 | 2002-01-31 | Method of manufacturing an emitter |
| PCT/US2003/002955 WO2003065425A2 (en) | 2002-01-31 | 2003-01-30 | Emitter and method of making |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005516368A JP2005516368A (ja) | 2005-06-02 |
| JP2005516368A5 true JP2005516368A5 (https=) | 2006-03-16 |
Family
ID=27610439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003564919A Withdrawn JP2005516368A (ja) | 2002-01-31 | 2003-01-30 | 放出器およびその製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US6703252B2 (https=) |
| EP (1) | EP1470566A2 (https=) |
| JP (1) | JP2005516368A (https=) |
| AU (1) | AU2003208921A1 (https=) |
| NO (1) | NO20043538L (https=) |
| TW (1) | TWI277116B (https=) |
| WO (1) | WO2003065425A2 (https=) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6911768B2 (en) * | 2001-04-30 | 2005-06-28 | Hewlett-Packard Development Company, L.P. | Tunneling emitter with nanohole openings |
| US7049034B2 (en) * | 2003-09-09 | 2006-05-23 | Photronics, Inc. | Photomask having an internal substantially transparent etch stop layer |
| KR100513727B1 (ko) * | 2003-02-12 | 2005-09-08 | 삼성에스디아이 주식회사 | 전계방출소자의 제조방법 |
| US20070003472A1 (en) * | 2003-03-24 | 2007-01-04 | Tolt Zhidan L | Electron emitting composite based on regulated nano-structures and a cold electron source using the composite |
| EP1475113A1 (en) * | 2003-05-08 | 2004-11-10 | Novo Nordisk A/S | External needle inserter |
| EP1624913B1 (en) * | 2003-05-08 | 2010-07-21 | Novo Nordisk A/S | Skin mountable injection device with a detachable needle insertion actuation portion |
| DE602004013140T2 (de) * | 2003-05-08 | 2009-07-02 | Novo Nordisk A/S | Interne nadeleinführvorrichtung |
| US6987688B2 (en) * | 2003-06-11 | 2006-01-17 | Ovonyx, Inc. | Die customization using programmable resistance memory elements |
| JP4545397B2 (ja) * | 2003-06-19 | 2010-09-15 | 株式会社 日立ディスプレイズ | 画像表示装置 |
| EP1502613A1 (en) * | 2003-08-01 | 2005-02-02 | Novo Nordisk A/S | Needle device with retraction means |
| US20050051764A1 (en) * | 2003-09-04 | 2005-03-10 | Huei-Pei Kuo | Anodizing process for improving electron emission in electronic devices |
| KR20060099520A (ko) * | 2003-10-21 | 2006-09-19 | 노보 노르디스크 에이/에스 | 의료용 피부 장착 장치 |
| US7459839B2 (en) * | 2003-12-05 | 2008-12-02 | Zhidan Li Tolt | Low voltage electron source with self aligned gate apertures, and luminous display using the electron source |
| WO2005094920A1 (en) * | 2004-03-30 | 2005-10-13 | Novo Nordisk A/S | Actuator system comprising lever mechanism |
| US20060051681A1 (en) * | 2004-09-08 | 2006-03-09 | Phototronics, Inc. 15 Secor Road P.O. Box 5226 Brookfield, Conecticut | Method of repairing a photomask having an internal etch stop layer |
| JP2006080046A (ja) * | 2004-09-13 | 2006-03-23 | Ngk Insulators Ltd | 電子放出装置 |
| WO2006032692A1 (en) * | 2004-09-22 | 2006-03-30 | Novo Nordisk A/S | Medical device with cannula inserter |
| EP1804856A1 (en) * | 2004-09-22 | 2007-07-11 | Novo Nordisk A/S | Medical device with transcutaneous cannula device |
| DE602005016298D1 (de) * | 2004-12-06 | 2009-10-08 | Novo Nordisk As | Belüftete an der haut befestigbare vorrichtung |
| JP2008528087A (ja) | 2005-01-24 | 2008-07-31 | ノボ・ノルデイスク・エー/エス | 皮膚穿刺装置アセンブリ |
| CN101175516B (zh) * | 2005-05-13 | 2011-02-16 | 诺和诺德公司 | 适于检测经皮装置脱离的医疗装置 |
| US7786662B2 (en) * | 2005-05-19 | 2010-08-31 | Texas Instruments Incorporated | Display using a movable electron field emitter and method of manufacture thereof |
| US20070096621A1 (en) * | 2005-10-31 | 2007-05-03 | Sang-Ho Jeon | Electron emission display |
| WO2007104755A1 (en) * | 2006-03-13 | 2007-09-20 | Novo Nordisk A/S | Secure pairing of electronic devices using dual means of communication |
| EP1997234A1 (en) * | 2006-03-13 | 2008-12-03 | Novo Nordisk A/S | Medical system comprising dual purpose communication means |
| US20090163874A1 (en) * | 2006-04-26 | 2009-06-25 | Novo Nordisk A/S | Skin-Mountable Device in Packaging Comprising Coated Seal Member |
| US9399094B2 (en) * | 2006-06-06 | 2016-07-26 | Novo Nordisk A/S | Assembly comprising skin-mountable device and packaging therefore |
| CN101192494B (zh) | 2006-11-24 | 2010-09-29 | 清华大学 | 电子发射元件的制备方法 |
| CN101192490B (zh) | 2006-11-24 | 2010-09-29 | 清华大学 | 表面传导电子发射元件以及应用表面传导电子发射元件的电子源 |
| WO2008107467A1 (en) * | 2007-03-06 | 2008-09-12 | Novo Nordisk A/S | Pump assembly comprising actuator system |
| US8557179B2 (en) * | 2007-10-31 | 2013-10-15 | Novo Nordisk A/S | Non-porous material as sterilization barrier |
| US8000129B2 (en) * | 2007-12-19 | 2011-08-16 | Contour Semiconductor, Inc. | Field-emitter-based memory array with phase-change storage devices |
| KR101615634B1 (ko) * | 2010-02-09 | 2016-04-26 | 삼성전자주식회사 | 테라헤르츠 발진기 및 전자방출원의 제조방법 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5142A (en) * | 1847-06-05 | Rotary steam-engine | ||
| DE3752249T2 (de) | 1986-07-04 | 1999-07-08 | Canon K.K., Tokio/Tokyo | Elektronen emittierende Vorrichtung |
| US4760567A (en) * | 1986-08-11 | 1988-07-26 | Electron Beam Memories | Electron beam memory system with ultra-compact, high current density electron gun |
| US4923421A (en) | 1988-07-06 | 1990-05-08 | Innovative Display Development Partners | Method for providing polyimide spacers in a field emission panel display |
| JPH02306520A (ja) * | 1989-05-19 | 1990-12-19 | Matsushita Electric Ind Co Ltd | 電子放出素子 |
| US5142184B1 (en) | 1990-02-09 | 1995-11-21 | Motorola Inc | Cold cathode field emission device with integral emitter ballasting |
| US5086017A (en) * | 1991-03-21 | 1992-02-04 | Industrial Technology Research Institute | Self aligned silicide process for gate/runner without extra masking |
| EP0532019B1 (en) | 1991-09-13 | 1997-12-29 | Canon Kabushiki Kaisha | Semiconductor electron emission device |
| US5374844A (en) | 1993-03-25 | 1994-12-20 | Micrel, Inc. | Bipolar transistor structure using ballast resistor |
| US5528103A (en) | 1994-01-31 | 1996-06-18 | Silicon Video Corporation | Field emitter with focusing ridges situated to sides of gate |
| US5473218A (en) * | 1994-05-31 | 1995-12-05 | Motorola, Inc. | Diamond cold cathode using patterned metal for electron emission control |
| US5541466A (en) | 1994-11-18 | 1996-07-30 | Texas Instruments Incorporated | Cluster arrangement of field emission microtips on ballast layer |
| US5557596A (en) | 1995-03-20 | 1996-09-17 | Gibson; Gary | Ultra-high density storage device |
| US5578900A (en) * | 1995-11-01 | 1996-11-26 | Industrial Technology Research Institute | Built in ion pump for field emission display |
| JPH10308166A (ja) | 1997-03-04 | 1998-11-17 | Pioneer Electron Corp | 電子放出素子及びこれを用いた表示装置 |
| US6033924A (en) | 1997-07-25 | 2000-03-07 | Motorola, Inc. | Method for fabricating a field emission device |
| TW391022B (en) * | 1997-10-29 | 2000-05-21 | Mitsubishi Rayon Co | Field emission electron source, method of producing the same, and use of the same |
| US6010918A (en) * | 1998-02-10 | 2000-01-04 | Fed Corporation | Gate electrode structure for field emission devices and method of making |
| US6303504B1 (en) * | 1998-02-26 | 2001-10-16 | Vlsi Technology, Inc. | Method of improving process robustness of nickel salicide in semiconductors |
| US6011356A (en) | 1998-04-30 | 2000-01-04 | St. Clair Intellectual Property Consultants, Inc. | Flat surface emitter for use in field emission display devices |
| JP2000182511A (ja) | 1998-12-14 | 2000-06-30 | Yamaha Corp | 電界放射型素子の製造方法 |
| JP2000331595A (ja) * | 1999-05-18 | 2000-11-30 | Nikon Corp | 薄膜冷陰極及びその製造方法 |
| US6360821B1 (en) * | 1999-05-20 | 2002-03-26 | Tiw Corporation | Combination whipstock and anchor assembly |
| BR0001211C1 (pt) | 2000-04-13 | 2002-03-05 | Inst Nac De Tecnologia Da Info | Estrutura de placa emissora para fed |
| EP1332653A1 (en) * | 2000-10-26 | 2003-08-06 | Oak-Mitsui, Inc. | Use of metallic treatment on copper foil to produce fine lines and replace oxide process in printed circuit board production |
| US6781146B2 (en) * | 2001-04-30 | 2004-08-24 | Hewlett-Packard Development Company, L.P. | Annealed tunneling emitter |
| US6558968B1 (en) * | 2001-10-31 | 2003-05-06 | Hewlett-Packard Development Company | Method of making an emitter with variable density photoresist layer |
| US6835947B2 (en) * | 2002-01-31 | 2004-12-28 | Hewlett-Packard Development Company, L.P. | Emitter and method of making |
-
2002
- 2002-01-31 US US10/066,149 patent/US6703252B2/en not_active Expired - Lifetime
- 2002-11-29 TW TW091134879A patent/TWI277116B/zh not_active IP Right Cessation
-
2003
- 2003-01-30 EP EP03707644A patent/EP1470566A2/en not_active Withdrawn
- 2003-01-30 JP JP2003564919A patent/JP2005516368A/ja not_active Withdrawn
- 2003-01-30 WO PCT/US2003/002955 patent/WO2003065425A2/en not_active Ceased
- 2003-01-30 AU AU2003208921A patent/AU2003208921A1/en not_active Abandoned
- 2003-10-15 US US10/686,965 patent/US6933517B2/en not_active Expired - Lifetime
- 2003-10-15 US US10/688,731 patent/US7049158B2/en not_active Expired - Lifetime
-
2004
- 2004-08-25 NO NO20043538A patent/NO20043538L/no not_active Application Discontinuation
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