JP2005512319A5 - - Google Patents

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Publication number
JP2005512319A5
JP2005512319A5 JP2003550262A JP2003550262A JP2005512319A5 JP 2005512319 A5 JP2005512319 A5 JP 2005512319A5 JP 2003550262 A JP2003550262 A JP 2003550262A JP 2003550262 A JP2003550262 A JP 2003550262A JP 2005512319 A5 JP2005512319 A5 JP 2005512319A5
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JP
Japan
Prior art keywords
composite material
conductive polymer
reinforced composite
carbon fiber
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003550262A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005512319A (ja
JP4383173B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2002/041653 external-priority patent/WO2003049157A1/en
Publication of JP2005512319A publication Critical patent/JP2005512319A/ja
Publication of JP2005512319A5 publication Critical patent/JP2005512319A5/ja
Application granted granted Critical
Publication of JP4383173B2 publication Critical patent/JP4383173B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003550262A 2001-12-03 2002-12-02 電気導電率を有する搬送部材およびその製造方法 Expired - Fee Related JP4383173B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US33458701P 2001-12-03 2001-12-03
PCT/US2002/041653 WO2003049157A1 (en) 2001-12-03 2002-12-02 Transfer member with electric conductivity and its manufacturing method

Publications (3)

Publication Number Publication Date
JP2005512319A JP2005512319A (ja) 2005-04-28
JP2005512319A5 true JP2005512319A5 (enExample) 2006-01-05
JP4383173B2 JP4383173B2 (ja) 2009-12-16

Family

ID=23307891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003550262A Expired - Fee Related JP4383173B2 (ja) 2001-12-03 2002-12-02 電気導電率を有する搬送部材およびその製造方法

Country Status (11)

Country Link
EP (1) EP1451854B1 (enExample)
JP (1) JP4383173B2 (enExample)
KR (1) KR100887126B1 (enExample)
CN (1) CN1332419C (enExample)
AT (1) ATE308799T1 (enExample)
AU (1) AU2002360823A1 (enExample)
CA (1) CA2469475C (enExample)
DE (1) DE60207105T2 (enExample)
ES (1) ES2251626T3 (enExample)
TW (1) TWI276194B (enExample)
WO (1) WO2003049157A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6794662B1 (en) * 2003-10-07 2004-09-21 Ibis Technology Corporation Thermosetting resin wafer-holding pin
DE10357698A1 (de) 2003-12-09 2005-07-14 Schunk Kohlenstofftechnik Gmbh Träger für zu behandelnde Gegenstände sowie Verfahren zur Herstellung eines solchen
JP2006049384A (ja) * 2004-07-30 2006-02-16 Laserfront Technologies Inc ガントリー型ｘｙステージ
JP2007005582A (ja) * 2005-06-24 2007-01-11 Asm Japan Kk 基板搬送装置及びそれを搭載した半導体基板製造装置
JP2007201066A (ja) * 2006-01-25 2007-08-09 Murata Mach Ltd 枚葉搬送用トレイ及び枚葉搬送用トレイの保管又は搬送装置
JP4895635B2 (ja) * 2006-02-20 2012-03-14 セイコーインスツル株式会社 搬送装置
US20070221335A1 (en) * 2006-03-23 2007-09-27 Recif Technologies Device for contact by adhesion to a glass or semiconductor plate (wafer) surface or the like and system for gripping such a plate comprising such a device
JP2008034723A (ja) * 2006-07-31 2008-02-14 Shin Etsu Polymer Co Ltd 半導体ウェーハ用接触部品
JPWO2017188377A1 (ja) * 2016-04-27 2019-02-21 京セラ株式会社 試料搬送部材
JP7093655B2 (ja) * 2018-03-20 2022-06-30 三菱重工業株式会社 複合材料構造体及び複合材料構造体の製造方法
CN108646395A (zh) * 2018-05-04 2018-10-12 江苏羿骏自动化科技有限公司 一种多工位移动型显微镜检测设备
JP7471743B2 (ja) * 2019-11-20 2024-04-22 株式会社ディスコ 搬送路
JP2022102893A (ja) * 2020-12-25 2022-07-07 京セラ株式会社 試料搬送部材

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58207651A (ja) * 1982-05-28 1983-12-03 Hitachi Ltd 静電防止型収容治具
JPS63133644A (ja) * 1986-11-26 1988-06-06 Hitachi Electronics Eng Co Ltd ウエハ搬送フオ−ク
JPH03296243A (ja) * 1990-04-13 1991-12-26 Toshiba Ceramics Co Ltd 半導体ウエハの取扱い用治具
JP2979194B2 (ja) * 1990-05-31 1999-11-15 京セラ株式会社 真空吸着装置
US5280979A (en) * 1991-06-20 1994-01-25 Recif, S.A. Tip for a vacuum pipette with improved electrostatic discharge properties
JPH08288190A (ja) * 1995-04-19 1996-11-01 Hitachi Ltd 物品取扱部材およびその製造方法および収納容器ならびに物品取扱装置
KR100760168B1 (ko) * 1999-06-09 2007-09-20 신닛뽄세키유 가부시키가이샤 반송용 부재
JP2000343476A (ja) * 1999-06-09 2000-12-12 Nippon Mitsubishi Oil Corp 搬送用部材
JP3565765B2 (ja) * 2000-05-17 2004-09-15 新日本石油株式会社 紫外線耐性を有する繊維強化複合材料製搬送用部材及びその製造方法

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