JP2005353141A - 遮光膜を備えた光学素子の製造方法 - Google Patents
遮光膜を備えた光学素子の製造方法 Download PDFInfo
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- JP2005353141A JP2005353141A JP2004171025A JP2004171025A JP2005353141A JP 2005353141 A JP2005353141 A JP 2005353141A JP 2004171025 A JP2004171025 A JP 2004171025A JP 2004171025 A JP2004171025 A JP 2004171025A JP 2005353141 A JP2005353141 A JP 2005353141A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 31
- 230000008569 process Effects 0.000 claims description 13
- 239000011347 resin Substances 0.000 claims description 11
- 229920005989 resin Polymers 0.000 claims description 11
- 239000011358 absorbing material Substances 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000011161 development Methods 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 14
- 239000011521 glass Substances 0.000 abstract description 11
- 238000005530 etching Methods 0.000 abstract description 3
- 238000004528 spin coating Methods 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract 1
- 238000002834 transmittance Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 239000002904 solvent Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 239000011572 manganese Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
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- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Head (AREA)
- Optical Elements Other Than Lenses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004171025A JP2005353141A (ja) | 2004-06-09 | 2004-06-09 | 遮光膜を備えた光学素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004171025A JP2005353141A (ja) | 2004-06-09 | 2004-06-09 | 遮光膜を備えた光学素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005353141A true JP2005353141A (ja) | 2005-12-22 |
| JP2005353141A5 JP2005353141A5 (https=) | 2007-07-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004171025A Withdrawn JP2005353141A (ja) | 2004-06-09 | 2004-06-09 | 遮光膜を備えた光学素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005353141A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007223869A (ja) * | 2006-02-27 | 2007-09-06 | Epson Toyocom Corp | ダイシングラインの膜構造、光学基板のウェハ、光学部品、及び光学部品の製造方法 |
-
2004
- 2004-06-09 JP JP2004171025A patent/JP2005353141A/ja not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007223869A (ja) * | 2006-02-27 | 2007-09-06 | Epson Toyocom Corp | ダイシングラインの膜構造、光学基板のウェハ、光学部品、及び光学部品の製造方法 |
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