JP2005353141A5 - - Google Patents
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- Publication number
- JP2005353141A5 JP2005353141A5 JP2004171025A JP2004171025A JP2005353141A5 JP 2005353141 A5 JP2005353141 A5 JP 2005353141A5 JP 2004171025 A JP2004171025 A JP 2004171025A JP 2004171025 A JP2004171025 A JP 2004171025A JP 2005353141 A5 JP2005353141 A5 JP 2005353141A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- opening
- light shielding
- antireflection film
- grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 8
- 238000004519 manufacturing process Methods 0.000 claims 5
- 239000011347 resin Substances 0.000 claims 5
- 229920005989 resin Polymers 0.000 claims 5
- 239000011358 absorbing material Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004171025A JP2005353141A (ja) | 2004-06-09 | 2004-06-09 | 遮光膜を備えた光学素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004171025A JP2005353141A (ja) | 2004-06-09 | 2004-06-09 | 遮光膜を備えた光学素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005353141A JP2005353141A (ja) | 2005-12-22 |
| JP2005353141A5 true JP2005353141A5 (https=) | 2007-07-05 |
Family
ID=35587502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004171025A Withdrawn JP2005353141A (ja) | 2004-06-09 | 2004-06-09 | 遮光膜を備えた光学素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005353141A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4582017B2 (ja) * | 2006-02-27 | 2010-11-17 | エプソントヨコム株式会社 | 光学基板ウェハ、及び光学部品の製造方法 |
-
2004
- 2004-06-09 JP JP2004171025A patent/JP2005353141A/ja not_active Withdrawn
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