JP2005351716A - 半導体センサ - Google Patents
半導体センサ Download PDFInfo
- Publication number
- JP2005351716A JP2005351716A JP2004171656A JP2004171656A JP2005351716A JP 2005351716 A JP2005351716 A JP 2005351716A JP 2004171656 A JP2004171656 A JP 2004171656A JP 2004171656 A JP2004171656 A JP 2004171656A JP 2005351716 A JP2005351716 A JP 2005351716A
- Authority
- JP
- Japan
- Prior art keywords
- weight
- stopper
- diaphragm
- semiconductor sensor
- stopper surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004171656A JP2005351716A (ja) | 2004-06-09 | 2004-06-09 | 半導体センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004171656A JP2005351716A (ja) | 2004-06-09 | 2004-06-09 | 半導体センサ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006329991A Division JP2007114208A (ja) | 2006-12-06 | 2006-12-06 | 半導体センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005351716A true JP2005351716A (ja) | 2005-12-22 |
JP2005351716A5 JP2005351716A5 (da) | 2006-05-11 |
Family
ID=35586327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004171656A Pending JP2005351716A (ja) | 2004-06-09 | 2004-06-09 | 半導体センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2005351716A (da) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008147441A (ja) * | 2006-12-11 | 2008-06-26 | Rohm Co Ltd | 半導体装置 |
US7765870B2 (en) | 2006-08-21 | 2010-08-03 | Rohm Co., Ltd. | Acceleration sensor and method of manufacturing the same |
US7845229B2 (en) | 2006-08-11 | 2010-12-07 | Rohm Co., Ltd. | Acceleration sensor |
US8151642B2 (en) | 2007-10-30 | 2012-04-10 | Rohm Co., Ltd. | Semiconductor device |
US8276449B2 (en) | 2008-09-18 | 2012-10-02 | Rohm Co., Ltd. | Acceleration sensor and method of manufacturing acceleration sensor |
-
2004
- 2004-06-09 JP JP2004171656A patent/JP2005351716A/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7845229B2 (en) | 2006-08-11 | 2010-12-07 | Rohm Co., Ltd. | Acceleration sensor |
US8776602B2 (en) | 2006-08-11 | 2014-07-15 | Rohm Co., Ltd. | Acceleration sensor, semiconductor device and method of manufacturing semiconductor device |
US7765870B2 (en) | 2006-08-21 | 2010-08-03 | Rohm Co., Ltd. | Acceleration sensor and method of manufacturing the same |
JP2008147441A (ja) * | 2006-12-11 | 2008-06-26 | Rohm Co Ltd | 半導体装置 |
US8151642B2 (en) | 2007-10-30 | 2012-04-10 | Rohm Co., Ltd. | Semiconductor device |
US8276449B2 (en) | 2008-09-18 | 2012-10-02 | Rohm Co., Ltd. | Acceleration sensor and method of manufacturing acceleration sensor |
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