JP2005351716A - 半導体センサ - Google Patents

半導体センサ Download PDF

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Publication number
JP2005351716A
JP2005351716A JP2004171656A JP2004171656A JP2005351716A JP 2005351716 A JP2005351716 A JP 2005351716A JP 2004171656 A JP2004171656 A JP 2004171656A JP 2004171656 A JP2004171656 A JP 2004171656A JP 2005351716 A JP2005351716 A JP 2005351716A
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JP
Japan
Prior art keywords
weight
stopper
diaphragm
semiconductor sensor
stopper surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004171656A
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English (en)
Japanese (ja)
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JP2005351716A5 (da
Inventor
Shigeru Hirose
茂 広瀬
Masato Ando
正人 安藤
Tsutomu Sawai
努 沢井
Katsuhiko Nagamori
克彦 長森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hokuriku Electric Industry Co Ltd
Original Assignee
Hokuriku Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokuriku Electric Industry Co Ltd filed Critical Hokuriku Electric Industry Co Ltd
Priority to JP2004171656A priority Critical patent/JP2005351716A/ja
Publication of JP2005351716A publication Critical patent/JP2005351716A/ja
Publication of JP2005351716A5 publication Critical patent/JP2005351716A5/ja
Pending legal-status Critical Current

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  • Pressure Sensors (AREA)
JP2004171656A 2004-06-09 2004-06-09 半導体センサ Pending JP2005351716A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004171656A JP2005351716A (ja) 2004-06-09 2004-06-09 半導体センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004171656A JP2005351716A (ja) 2004-06-09 2004-06-09 半導体センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006329991A Division JP2007114208A (ja) 2006-12-06 2006-12-06 半導体センサ

Publications (2)

Publication Number Publication Date
JP2005351716A true JP2005351716A (ja) 2005-12-22
JP2005351716A5 JP2005351716A5 (da) 2006-05-11

Family

ID=35586327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004171656A Pending JP2005351716A (ja) 2004-06-09 2004-06-09 半導体センサ

Country Status (1)

Country Link
JP (1) JP2005351716A (da)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008147441A (ja) * 2006-12-11 2008-06-26 Rohm Co Ltd 半導体装置
US7765870B2 (en) 2006-08-21 2010-08-03 Rohm Co., Ltd. Acceleration sensor and method of manufacturing the same
US7845229B2 (en) 2006-08-11 2010-12-07 Rohm Co., Ltd. Acceleration sensor
US8151642B2 (en) 2007-10-30 2012-04-10 Rohm Co., Ltd. Semiconductor device
US8276449B2 (en) 2008-09-18 2012-10-02 Rohm Co., Ltd. Acceleration sensor and method of manufacturing acceleration sensor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7845229B2 (en) 2006-08-11 2010-12-07 Rohm Co., Ltd. Acceleration sensor
US8776602B2 (en) 2006-08-11 2014-07-15 Rohm Co., Ltd. Acceleration sensor, semiconductor device and method of manufacturing semiconductor device
US7765870B2 (en) 2006-08-21 2010-08-03 Rohm Co., Ltd. Acceleration sensor and method of manufacturing the same
JP2008147441A (ja) * 2006-12-11 2008-06-26 Rohm Co Ltd 半導体装置
US8151642B2 (en) 2007-10-30 2012-04-10 Rohm Co., Ltd. Semiconductor device
US8276449B2 (en) 2008-09-18 2012-10-02 Rohm Co., Ltd. Acceleration sensor and method of manufacturing acceleration sensor

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