JP2005348070A - 弾性表面波素子の製造方法 - Google Patents
弾性表面波素子の製造方法 Download PDFInfo
- Publication number
- JP2005348070A JP2005348070A JP2004164927A JP2004164927A JP2005348070A JP 2005348070 A JP2005348070 A JP 2005348070A JP 2004164927 A JP2004164927 A JP 2004164927A JP 2004164927 A JP2004164927 A JP 2004164927A JP 2005348070 A JP2005348070 A JP 2005348070A
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- resonance frequency
- wave element
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 89
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 79
- 230000003647 oxidation Effects 0.000 claims abstract description 68
- 235000012431 wafers Nutrition 0.000 claims abstract description 57
- 238000007743 anodising Methods 0.000 claims description 22
- 238000005259 measurement Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 31
- 238000002048 anodisation reaction Methods 0.000 description 21
- 238000001514 detection method Methods 0.000 description 18
- 239000010407 anodic oxide Substances 0.000 description 14
- 239000008151 electrolyte solution Substances 0.000 description 6
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000004254 Ammonium phosphate Substances 0.000 description 3
- 229910000148 ammonium phosphate Inorganic materials 0.000 description 3
- 235000019289 ammonium phosphates Nutrition 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
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- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004164927A JP2005348070A (ja) | 2004-06-02 | 2004-06-02 | 弾性表面波素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004164927A JP2005348070A (ja) | 2004-06-02 | 2004-06-02 | 弾性表面波素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005348070A true JP2005348070A (ja) | 2005-12-15 |
| JP2005348070A5 JP2005348070A5 (enExample) | 2006-02-02 |
Family
ID=35500034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004164927A Withdrawn JP2005348070A (ja) | 2004-06-02 | 2004-06-02 | 弾性表面波素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005348070A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007300174A (ja) * | 2006-04-27 | 2007-11-15 | Epson Toyocom Corp | 弾性表面波素子片の周波数温度特性調整方法、及び弾性表面波素子片、並びに弾性表面波デバイス |
| US8253302B2 (en) | 2009-02-10 | 2012-08-28 | Denso Corporation | Surface acoustic wave element, method of producing the same, and method of changing resonation frequency of the same |
| US8368474B2 (en) | 2010-05-21 | 2013-02-05 | Denso Corporation | Surface acoustic wave oscillator |
-
2004
- 2004-06-02 JP JP2004164927A patent/JP2005348070A/ja not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007300174A (ja) * | 2006-04-27 | 2007-11-15 | Epson Toyocom Corp | 弾性表面波素子片の周波数温度特性調整方法、及び弾性表面波素子片、並びに弾性表面波デバイス |
| US8253302B2 (en) | 2009-02-10 | 2012-08-28 | Denso Corporation | Surface acoustic wave element, method of producing the same, and method of changing resonation frequency of the same |
| US8368474B2 (en) | 2010-05-21 | 2013-02-05 | Denso Corporation | Surface acoustic wave oscillator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20051128 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20051128 |
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| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20061205 |