JP2005347303A - 熱圧着装置 - Google Patents

熱圧着装置 Download PDF

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Publication number
JP2005347303A
JP2005347303A JP2004161570A JP2004161570A JP2005347303A JP 2005347303 A JP2005347303 A JP 2005347303A JP 2004161570 A JP2004161570 A JP 2004161570A JP 2004161570 A JP2004161570 A JP 2004161570A JP 2005347303 A JP2005347303 A JP 2005347303A
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JP
Japan
Prior art keywords
thermocompression bonding
bonding apparatus
heat insulating
fluid passage
heating member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004161570A
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English (en)
Japanese (ja)
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JP2005347303A5 (enExample
Inventor
Takashi Yamashita
敬 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004161570A priority Critical patent/JP2005347303A/ja
Publication of JP2005347303A publication Critical patent/JP2005347303A/ja
Publication of JP2005347303A5 publication Critical patent/JP2005347303A5/ja
Pending legal-status Critical Current

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JP2004161570A 2004-05-31 2004-05-31 熱圧着装置 Pending JP2005347303A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004161570A JP2005347303A (ja) 2004-05-31 2004-05-31 熱圧着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004161570A JP2005347303A (ja) 2004-05-31 2004-05-31 熱圧着装置

Publications (2)

Publication Number Publication Date
JP2005347303A true JP2005347303A (ja) 2005-12-15
JP2005347303A5 JP2005347303A5 (enExample) 2007-07-12

Family

ID=35499434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004161570A Pending JP2005347303A (ja) 2004-05-31 2004-05-31 熱圧着装置

Country Status (1)

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JP (1) JP2005347303A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012204604A (ja) * 2011-03-25 2012-10-22 Fujikoshi Mach Corp ワーク貼着方法およびワーク貼着装置
JP2014140032A (ja) * 2013-01-21 2014-07-31 Vesi Switzerland Ag 加熱及び冷却可能な吸引部材を有するボンディングヘッド
CN104282586A (zh) * 2013-07-02 2015-01-14 库利克和索夫工业公司 用于热压接合器的接合头、热压接合器及其操作方法
JP2015233138A (ja) * 2014-06-10 2015-12-24 セメス株式会社Ｓｅｍｅｓ Ｃｏ．， Ｌｔｄ． ボンディングヘッド及びこれを含むダイボンディング装置
CN111390465A (zh) * 2020-01-20 2020-07-10 武汉高芯科技有限公司 一种用于倒装焊的液压装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1041355A (ja) * 1996-07-24 1998-02-13 Toray Eng Co Ltd 熱圧着ツール
JP2001060757A (ja) * 1999-06-14 2001-03-06 Sharp Corp 外部回路実装方法および熱圧着装置
JP2004031885A (ja) * 2002-04-30 2004-01-29 Toray Eng Co Ltd ボンディング方法およびその装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1041355A (ja) * 1996-07-24 1998-02-13 Toray Eng Co Ltd 熱圧着ツール
JP2001060757A (ja) * 1999-06-14 2001-03-06 Sharp Corp 外部回路実装方法および熱圧着装置
JP2004031885A (ja) * 2002-04-30 2004-01-29 Toray Eng Co Ltd ボンディング方法およびその装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012204604A (ja) * 2011-03-25 2012-10-22 Fujikoshi Mach Corp ワーク貼着方法およびワーク貼着装置
JP2014140032A (ja) * 2013-01-21 2014-07-31 Vesi Switzerland Ag 加熱及び冷却可能な吸引部材を有するボンディングヘッド
CN104282586A (zh) * 2013-07-02 2015-01-14 库利克和索夫工业公司 用于热压接合器的接合头、热压接合器及其操作方法
JP2015233138A (ja) * 2014-06-10 2015-12-24 セメス株式会社Ｓｅｍｅｓ Ｃｏ．， Ｌｔｄ． ボンディングヘッド及びこれを含むダイボンディング装置
CN111390465A (zh) * 2020-01-20 2020-07-10 武汉高芯科技有限公司 一种用于倒装焊的液压装置
CN111390465B (zh) * 2020-01-20 2022-03-22 武汉高芯科技有限公司 一种用于倒装焊的液压装置

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