JP2005347303A - Thermocompression bonding machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To uniformly keep a pressure to be applied to a thermocompression bonding surface even if a heater tool is heated at a high temperature, and to insulate a heat transmitting to the main body from the heater tool. <P>SOLUTION: A heating member 3 provided with a heat generating source 4 is pressed down to a workpiece 5 so as to crimp the workpiece by heat. Such the thermocompression bonding machine is provided with a supporting member 1 to support the heating member on the main body of the thermocompression bonding machine and an insulating member 2 that is arranged between the supporting member and the heating member, and is provided with a first fluid passage 7 allowing a cooling medium to pass through. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a thermocompression bonding apparatus that joins a workpiece such as an electronic component or a substrate by thermocompression bonding.

As a method for joining workpieces such as electronic components and substrates, a method using thermocompression bonding is known. In this method, the work part is heated while pressing the work joint part against the part to be joined with a predetermined load, thereby joining the joint part with solder or a thermosetting adhesive. As shown in FIG. 4, the conventional thermocompression bonding apparatus is configured such that the heater tool 103 heated to a high temperature is pressed against the work 105 for a short time and joined, and this is repeated. In that case, if the heat of the heater tool 103 is transmitted to the main body of the crimping device, the accuracy of the main body of the crimping device is adversely affected. In order to do so, a heat insulating material 102 is provided.
JP 2001-358455 A Japanese Patent Laid-Open No. 10-41340 JP-A-8-274131

  However, in the above conventional example, since a resinous heat insulating material is used as the heat insulating material 102, heat deterioration with time may occur, and the assembly accuracy may change (heat shrinkage / cracking). Also, in terms of durability, in order to repeatedly apply pressure at a high temperature of 370 ° C., the heat insulating material 102 is carbonized, reaching the limit of the durability of the heat insulating material at a rate of about once every 30 days, and cracking occurs. Therefore, the heat insulating material 102 needs to be replaced. For process management, manual electrical inspection by periodic sampling of thermocompression-bonded workpieces and pressure-sensitive paper check of the crimping surface are carried out, but crimping defects due to changes in accuracy such as thermal deterioration and shrinkage of heat insulating material can be detected. In difficult situations, we mainly responded by regularly replacing the insulation.

  Therefore, the present invention has been made in view of the above circumstances, and its purpose is to provide heat transmitted from the heater tool to the apparatus main body while maintaining a uniform pressure applied to the thermocompression bonding surface even when the heater tool is heated to a high temperature. Is to be able to insulate.

  In order to solve the above-described problems and achieve the object, a thermocompression bonding apparatus according to the present invention is a thermocompression bonding apparatus that presses a heating member having a heat generation source against a workpiece and thermocompression-bonds the workpiece. A support member for supporting the main body portion of the thermocompression bonding apparatus; and a heat insulating member that is disposed between the support member and the heating member and includes a first fluid passage for allowing a cooling medium to pass therethrough. It is characterized by that.

In the thermocompression bonding apparatus according to the present invention, the cooling medium that has passed through the first fluid passage is discharged to the outside through a pipe connected to the heat insulating member.
In the thermocompression bonding apparatus according to the present invention, the support member includes a second fluid passage that communicates with the first fluid passage, and the cooling medium is supplied from the second fluid passage to the first fluid. It is supplied to the passage.

  Further, in the thermocompression bonding apparatus according to the present invention, the heat insulating member includes a space in a central portion between the heating member and the support member, the heat insulating member, and the heating member are fixed to each other at their end portions. It is characterized by being.

  In the thermocompression bonding apparatus according to the present invention, the cooling medium is air.

  In the thermocompression bonding apparatus according to the present invention, the heat insulating member is made of a metal material.

  ADVANTAGE OF THE INVENTION According to this invention, even if a heater tool is heated to high temperature, it becomes possible to insulate the heat | fever transmitted from a heater tool to an apparatus main body, maintaining the pressure added to a thermocompression bonding surface uniformly.

  Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings.

  1 is a perspective view of a thermocompression bonding apparatus for electronic parts according to an embodiment of the present invention, FIG. 2 is a front sectional view of a thermocompression bonding head, and FIG. 3 is a side sectional view of a holding portion of the thermocompression bonding head. is there.

  First, the structure of the workpiece thermocompression bonding apparatus will be described with reference to FIG.

  A printed circuit board 5-1 is placed on a cradle 9 for performing a crimping operation, and an anisotropic conductive film 5-3 is placed thereon, and a flexible board 5-2 is placed thereon. The printed circuit board 5-1, the flexible circuit board 5-2, and the anisotropic conductive film 5-3 are collectively referred to as a work 5. A holding portion 1 that holds the thermocompression bonding head 16 is fixed to a cylinder rod 20 that is above the workpiece 5 and moves up and down in the Z-axis direction. The thermocompression bonding head 16 includes a heat insulation block 2 attached to the holding portion 1 and a heater tool (heating member) 3 attached to the lower end portion of the heat insulation block 2. When the cylinder rod 20 is driven in the Z-axis direction, the heater tool 3 is lowered with respect to the workpiece 5. And the flexible substrate 5-2 is thermocompression-bonded to the printed circuit board 5-1, by heating the anisotropic conductive film 5-3, pressing the flexible substrate 5-2 of the workpiece | work 5 with a predetermined load.

  The structure of the thermocompression bonding head will be described with reference to FIGS.

  As shown in FIG. 2, which is a front sectional view of the thermocompression bonding head, and FIG. 3, which is a side sectional view, a ventilation hole 6 is provided inside the holding portion 1, and a passage for flowing air from the outside is provided. Forming. The ventilation hole 6 penetrates the holding part 1 from the front to the bottom and reaches the air reservoir (concave part 2a) of the heat insulating block 2. The heat insulating block 2 includes a concave portion 2 a that becomes an air reservoir in the central portion on the side in contact with the holding portion 1. Further, the vent hole 7 forms a passage that communicates with the concave portion 2 a and the opening 7 a on the side surface of the holding portion 1, and opens the air from the vent hole 6 to the outside through the pipe 8. Yes. An air suction source (not shown) is connected to the rear end of the pipe 8. According to this configuration, even when a metal material is used for the heat insulating block 2 instead of a conventional resin material, the heat from the heater tool 3 is transferred to the heat insulating block 2 by constantly flowing cooling air through the heat insulating block 2. It can be divided by the holding part 1, and the heat of the heater tool 3 is prevented from being transmitted to the thermocompression bonding apparatus main body.

  In addition, if the holding | maintenance part 1, the heat insulation block 2, and the heater tool 3 are fixed at those both ends and it heats to high temperature, the front-end | tip part center of the heater tool 3 will swell by thermal expansion. In order to avoid this, a notched space 2b is provided between the heat insulating block 2 and the heater tool 3, and air is poured from the center of the holding unit 1 to cool it. Thereby, the swelling at the center of the front end portion of the heater tool 3 can be alleviated, and the workpiece 5 can be uniformly thermocompression bonded over the entire front end portion of the heater tool 3.

  Furthermore, in the conventional heat insulation block 102 shown in FIG. 4, since the resin-based heat insulating material is used, the accuracy of the tip position of the heater tool 3 is changed due to heat deterioration over time, or the heat insulation block 2 is In contrast, since the heat insulating block 2 of the present embodiment is made of metal, it can be thermocompression bonded without repeating the accuracy of the tip position even if it is repeatedly operated.

  Moreover, the heater 4 is inserted in the heater tool 3, and the temperature is adjusted by a thermocouple 10 (see FIG. 1) disposed at the tip of the heater tool 3 in order to adjust the temperature at a tip temperature of 200 ° C., for example. While detecting, the heater 4 is heated to 370 ° C., for example. And the workpiece | work 5 is uniformly pressed by the front-end | tip part of the heater tool 3, and it thermocompression-bonds.

  As explained above. In the work thermocompression bonding apparatus according to the present embodiment, the heat insulating block can be cooled by providing a ventilation hole in the holding portion and flowing air, thereby dividing the heat from the apparatus main body.

  Further, even when heated to a higher temperature than conventional heat insulating materials, the workpiece can be uniformly thermocompressed without causing thermal shrinkage / cracking.

  In addition, by providing a cooling function from the central part of the holding part and a space in the central part of the heat insulation block, it is possible to relax the protrusion at the center of the crimping surface of the heater tool and stabilize the positional accuracy of the thermocompression bonding surface. .

  As a result, if the crimping surface is positioned at the time of installation of the present apparatus, no adjustment is necessary thereafter, and the load during adjustment work during production can be reduced, leading to improved productivity.

  Further, since the exhaust pipe (pipe 8) is routed outside the apparatus, it is possible to carry out production while maintaining the cleanliness of the environment without entering dust.

  In the above description, the air holes are provided in both the holding portion and the heat insulating block, but the air holes may be provided only in the heat insulating block.

  In the above description, the case where air is used as the cooling medium has been described. However, other gases and liquids may be used.

It is a perspective view of the workpiece | work thermocompression bonding apparatus of the electronic component concerning one Embodiment of this invention. It is front sectional drawing of a thermocompression-bonding head. It is a sectional side view of the holding | maintenance part part of a thermocompression bonding head. It is a figure explaining a prior art example.

Explanation of symbols

1 Holding part 2 Heat insulation block
3 Heater tool 4 Heater 5 Work 6 Vent hole (supply)
7 Vent (discharge)
8 Piping 9 Receiving base 10 Thermocouple

Claims (6)

In a thermocompression bonding apparatus that presses a heating member provided with a heat source against a work and thermocompression-bonds the work,
A support member for supporting the heating member on the main body of the thermocompression bonding apparatus;
A heat insulating member that is disposed between the support member and the heating member and includes a first fluid passage for passing a cooling medium;
A thermocompression bonding apparatus comprising:   The thermocompression bonding apparatus according to claim 1, wherein the cooling medium that has passed through the first fluid passage is discharged to the outside through a pipe connected to the heat insulating member.   The support member includes a second fluid passage communicating with the first fluid passage, and the cooling medium is supplied from the second fluid passage to the first fluid passage. Item 2. The thermocompression bonding apparatus according to item 1.   The heat insulating member includes a space in a central portion between the heating member and the supporting member, the heat insulating member, and the heating member are fixed to each other at their end portions. The thermocompression bonding apparatus described in 1.   The thermocompression bonding apparatus according to claim 1, wherein the cooling medium is air.   The thermocompression bonding apparatus according to claim 1, wherein the heat insulating member is made of a metal material.

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