JP2005345129A - プローブ - Google Patents
プローブ Download PDFInfo
- Publication number
- JP2005345129A JP2005345129A JP2004161844A JP2004161844A JP2005345129A JP 2005345129 A JP2005345129 A JP 2005345129A JP 2004161844 A JP2004161844 A JP 2004161844A JP 2004161844 A JP2004161844 A JP 2004161844A JP 2005345129 A JP2005345129 A JP 2005345129A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- contact
- contact portion
- electrode
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
【構成】 プローブは、プローブ100は測定対象の電極10に対して略垂直に接触可能な円柱状の接触部110と、この接触部110と連なる部材である図示しない基端部とを具備しており、接触部110は、基部111と、この基部111の幅方向の端部の長さ方向に沿って延びる一部に接合された矩形状の膨張部111aとを有し、この膨張部111aが基部111よりも熱膨張率が大きい材料で構成されている。
【選択図】 図1
Description
110 接触部
111 基部( 他の部分)
111a 膨張部
200 プローブ
210 接触部
211 基部
211a 変形部
Claims (2)
- 測定対象の電極に対して略垂直に接触可能な略直線状の接触部を有しており、この接触部の長さ方向に沿って延びる一部が当該接触部の他の部分と異なる熱膨張率を有する材料で構成されていることを特徴とするプローブ。
- 測定対象の電極に対して略垂直に接触可能な略直線状の接触部を有しており、この接触部の幅方向の端部の一部が当該接触部の長手方向に膨張変形又は収縮変形可能な形状記憶合金で構成されていることを特徴とするプローブ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004161844A JP4201739B2 (ja) | 2004-05-31 | 2004-05-31 | プローブ |
US10/565,156 US7692438B2 (en) | 2004-05-31 | 2005-05-19 | Bimetallic probe with tip end |
KR1020057024714A KR101134394B1 (ko) | 2004-05-31 | 2005-05-19 | 프로브 |
PCT/JP2005/009177 WO2005116667A1 (ja) | 2004-05-31 | 2005-05-19 | プローブ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004161844A JP4201739B2 (ja) | 2004-05-31 | 2004-05-31 | プローブ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005345129A true JP2005345129A (ja) | 2005-12-15 |
JP2005345129A5 JP2005345129A5 (ja) | 2006-02-02 |
JP4201739B2 JP4201739B2 (ja) | 2008-12-24 |
Family
ID=35451001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004161844A Expired - Fee Related JP4201739B2 (ja) | 2004-05-31 | 2004-05-31 | プローブ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7692438B2 (ja) |
JP (1) | JP4201739B2 (ja) |
KR (1) | KR101134394B1 (ja) |
WO (1) | WO2005116667A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140148387A (ko) * | 2012-03-23 | 2014-12-31 | 주식회사 아도반테스토 | 반도체 테스팅을 위한 측방향 구동식 프로브 |
US9678108B1 (en) | 2014-02-06 | 2017-06-13 | Advantest America, Inc. | Methods to manufacture semiconductor probe tips |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3870978A (en) * | 1973-09-13 | 1975-03-11 | Omni Spectra Inc | Abutting electrical contact means using resilient conductive material |
JPH0254814A (ja) * | 1988-08-17 | 1990-02-23 | Sharp Corp | コンタクトピン |
US5225777A (en) * | 1992-02-04 | 1993-07-06 | International Business Machines Corporation | High density probe |
KR100471341B1 (ko) * | 1996-05-23 | 2005-07-21 | 제네시스 테크놀로지 가부시키가이샤 | 콘택트프로브및그것을구비한프로브장치 |
US6724203B1 (en) * | 1997-10-30 | 2004-04-20 | International Business Machines Corporation | Full wafer test configuration using memory metals |
JP3486841B2 (ja) | 2000-08-09 | 2004-01-13 | 日本電子材料株式会社 | 垂直型プローブカード |
JP2002231399A (ja) | 2001-02-02 | 2002-08-16 | Fujitsu Ltd | 半導体装置試験用コンタクタ及びその製造方法 |
US6507207B2 (en) * | 2001-02-20 | 2003-01-14 | Vinh T. Nguyen | Contact probe pin for wafer probing apparatus |
US6577147B2 (en) * | 2001-09-06 | 2003-06-10 | Intel Corporation | Method and apparatus for resisting probe burn using shape memory alloy probe during testing of an electronic device |
JP2005140677A (ja) * | 2003-11-07 | 2005-06-02 | Japan Electronic Materials Corp | プローブシート及びこれを用いたプローブシートユニット |
US7176703B2 (en) * | 2004-08-31 | 2007-02-13 | Hitachi Global Storage Technologies Netherlands B.V. | Test probe with thermally activated grip and release |
-
2004
- 2004-05-31 JP JP2004161844A patent/JP4201739B2/ja not_active Expired - Fee Related
-
2005
- 2005-05-19 KR KR1020057024714A patent/KR101134394B1/ko not_active IP Right Cessation
- 2005-05-19 WO PCT/JP2005/009177 patent/WO2005116667A1/ja active Application Filing
- 2005-05-19 US US10/565,156 patent/US7692438B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20070029036A (ko) | 2007-03-13 |
KR101134394B1 (ko) | 2012-04-09 |
US20080054916A1 (en) | 2008-03-06 |
US7692438B2 (en) | 2010-04-06 |
WO2005116667A1 (ja) | 2005-12-08 |
JP4201739B2 (ja) | 2008-12-24 |
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