JP2005344610A - 真空排気装置 - Google Patents

真空排気装置 Download PDF

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Publication number
JP2005344610A
JP2005344610A JP2004165221A JP2004165221A JP2005344610A JP 2005344610 A JP2005344610 A JP 2005344610A JP 2004165221 A JP2004165221 A JP 2004165221A JP 2004165221 A JP2004165221 A JP 2004165221A JP 2005344610 A JP2005344610 A JP 2005344610A
Authority
JP
Japan
Prior art keywords
vacuum chamber
vacuum
main
sub
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004165221A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005344610A5 (enExample
Inventor
Manabu Nonaka
学 野中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Japan Ltd filed Critical BOC Edwards Japan Ltd
Priority to JP2004165221A priority Critical patent/JP2005344610A/ja
Priority to EP05745938A priority patent/EP1811176A4/en
Priority to PCT/JP2005/010044 priority patent/WO2005119060A1/ja
Publication of JP2005344610A publication Critical patent/JP2005344610A/ja
Publication of JP2005344610A5 publication Critical patent/JP2005344610A5/ja
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Gasket Seals (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
JP2004165221A 2004-06-03 2004-06-03 真空排気装置 Withdrawn JP2005344610A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004165221A JP2005344610A (ja) 2004-06-03 2004-06-03 真空排気装置
EP05745938A EP1811176A4 (en) 2004-06-03 2005-06-01 VAKUUMABFÜHRVORRICHTUNG
PCT/JP2005/010044 WO2005119060A1 (ja) 2004-06-03 2005-06-01 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004165221A JP2005344610A (ja) 2004-06-03 2004-06-03 真空排気装置

Publications (2)

Publication Number Publication Date
JP2005344610A true JP2005344610A (ja) 2005-12-15
JP2005344610A5 JP2005344610A5 (enExample) 2007-07-12

Family

ID=35462974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004165221A Withdrawn JP2005344610A (ja) 2004-06-03 2004-06-03 真空排気装置

Country Status (3)

Country Link
EP (1) EP1811176A4 (enExample)
JP (1) JP2005344610A (enExample)
WO (1) WO2005119060A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008121787A (ja) * 2006-11-13 2008-05-29 Jtekt Corp 転がり軸受及び転がり軸受装置
WO2008104314A1 (de) * 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder vakuumapparatur mit vakuumpumpe
US8403566B2 (en) 2006-11-13 2013-03-26 Jtekt Corporation Rolling bearing and rolling bearing apparatus
WO2017013922A1 (ja) * 2015-07-17 2017-01-26 株式会社荏原製作所 非接触環状シール及びこれを備える回転機械

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
JPH0455276Y2 (enExample) * 1986-05-16 1992-12-25
FR2611819B1 (fr) * 1987-02-25 1989-05-05 Cit Alcatel Pompe a vide, rotative
JPH04107809A (ja) * 1990-08-27 1992-04-09 Fujitsu Ltd 半導体製造装置
JP2973141B2 (ja) * 1991-05-28 1999-11-08 東京エレクトロン株式会社 真空装置及びその制御方法
DE19915983A1 (de) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
JP2002150957A (ja) * 2000-11-07 2002-05-24 Japan Atom Energy Res Inst 負イオン源電源供給機構
JP4657463B2 (ja) * 2001-02-01 2011-03-23 エドワーズ株式会社 真空ポンプ
JP2002295581A (ja) * 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd ダンパ、及び真空ポンプ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008121787A (ja) * 2006-11-13 2008-05-29 Jtekt Corp 転がり軸受及び転がり軸受装置
US8403566B2 (en) 2006-11-13 2013-03-26 Jtekt Corporation Rolling bearing and rolling bearing apparatus
WO2008104314A1 (de) * 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder vakuumapparatur mit vakuumpumpe
GB2459233A (en) * 2007-02-28 2009-10-21 Thermo Fisher Scient Vacuum pump or vacuum apparatus having a vacuum pump
GB2459233B (en) * 2007-02-28 2011-09-28 Thermo Fisher Scient Vacuum pump or vacuum apparatus having a vacuum pump
WO2017013922A1 (ja) * 2015-07-17 2017-01-26 株式会社荏原製作所 非接触環状シール及びこれを備える回転機械
JPWO2017013922A1 (ja) * 2015-07-17 2018-04-26 株式会社荏原製作所 非接触環状シール及びこれを備える回転機械

Also Published As

Publication number Publication date
EP1811176A4 (en) 2008-11-19
WO2005119060A1 (ja) 2005-12-15
EP1811176A1 (en) 2007-07-25

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