JP2005344610A5 - - Google Patents

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Publication number
JP2005344610A5
JP2005344610A5 JP2004165221A JP2004165221A JP2005344610A5 JP 2005344610 A5 JP2005344610 A5 JP 2005344610A5 JP 2004165221 A JP2004165221 A JP 2004165221A JP 2004165221 A JP2004165221 A JP 2004165221A JP 2005344610 A5 JP2005344610 A5 JP 2005344610A5
Authority
JP
Japan
Prior art keywords
vacuum chamber
vacuum
main
sub
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004165221A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005344610A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004165221A priority Critical patent/JP2005344610A/ja
Priority claimed from JP2004165221A external-priority patent/JP2005344610A/ja
Priority to EP05745938A priority patent/EP1811176A4/en
Priority to PCT/JP2005/010044 priority patent/WO2005119060A1/ja
Publication of JP2005344610A publication Critical patent/JP2005344610A/ja
Publication of JP2005344610A5 publication Critical patent/JP2005344610A5/ja
Withdrawn legal-status Critical Current

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JP2004165221A 2004-06-03 2004-06-03 真空排気装置 Withdrawn JP2005344610A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004165221A JP2005344610A (ja) 2004-06-03 2004-06-03 真空排気装置
EP05745938A EP1811176A4 (en) 2004-06-03 2005-06-01 VAKUUMABFÜHRVORRICHTUNG
PCT/JP2005/010044 WO2005119060A1 (ja) 2004-06-03 2005-06-01 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004165221A JP2005344610A (ja) 2004-06-03 2004-06-03 真空排気装置

Publications (2)

Publication Number Publication Date
JP2005344610A JP2005344610A (ja) 2005-12-15
JP2005344610A5 true JP2005344610A5 (enExample) 2007-07-12

Family

ID=35462974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004165221A Withdrawn JP2005344610A (ja) 2004-06-03 2004-06-03 真空排気装置

Country Status (3)

Country Link
EP (1) EP1811176A4 (enExample)
JP (1) JP2005344610A (enExample)
WO (1) WO2005119060A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008121787A (ja) * 2006-11-13 2008-05-29 Jtekt Corp 転がり軸受及び転がり軸受装置
US8403566B2 (en) 2006-11-13 2013-03-26 Jtekt Corporation Rolling bearing and rolling bearing apparatus
DE102007010068B4 (de) * 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN107850221B (zh) * 2015-07-17 2020-01-24 株式会社荏原制作所 非接触环状密封件及具备该非接触环状密封件的旋转机械

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
JPH0455276Y2 (enExample) * 1986-05-16 1992-12-25
FR2611819B1 (fr) * 1987-02-25 1989-05-05 Cit Alcatel Pompe a vide, rotative
JPH04107809A (ja) * 1990-08-27 1992-04-09 Fujitsu Ltd 半導体製造装置
JP2973141B2 (ja) * 1991-05-28 1999-11-08 東京エレクトロン株式会社 真空装置及びその制御方法
DE19915983A1 (de) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
JP2002150957A (ja) * 2000-11-07 2002-05-24 Japan Atom Energy Res Inst 負イオン源電源供給機構
JP4657463B2 (ja) * 2001-02-01 2011-03-23 エドワーズ株式会社 真空ポンプ
JP2002295581A (ja) * 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd ダンパ、及び真空ポンプ

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