JP2005273016A - 多成分堆積方法および装置 - Google Patents
多成分堆積方法および装置 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
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- B23P6/002—Repairing turbine components, e.g. moving or stationary blades, rotors
- B23P6/007—Repairing turbine components, e.g. moving or stationary blades, rotors using only additive methods, e.g. build-up welding
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C—CHEMISTRY; METALLURGY
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- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/005—Repairing methods or devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/30—Manufacture with deposition of material
- F05D2230/31—Layer deposition
- F05D2230/313—Layer deposition by physical vapour deposition
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/80—Repairing, retrofitting or upgrading methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3132—Evaporating
- H01J2237/3137—Plasma-assisted co-operation
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Abstract
【解決手段】イオン強化物理蒸着が、複数成分材料を堆積させるのにスパッタリングにより増大される。方法は、Ti合金タービンエンジン部品上に被覆および修理材料を堆積させるのに使用できる。物理蒸着は、イオン強化電子ビーム物理蒸着とすることができる。 ワークピース上に材料を堆積させるための装置100は、堆積室102と、一つまたは複数の第一の堆積材料成分112からプラズマを形成する手段124と、プラズマからワークピース106にイオンを引き付けるようにワークピースに変調されたバイアス電位を印加する手段128と、一つまたは複数の第二の堆積材料成分220をスパッタする手段232と、を備える。
【選択図】図10
Description
30…前縁
32…後縁
50…基体表面
52…裏当て部材
58…蒸気供給源
60…第一の修理材料
66…第二の付加的な材料
100…イオン強化EBPVD装置
102…真空室
106…ワークピース
112…インゴット
118…溶融たまり
122…電子ビーム
124…電子銃
126…電源
128…パルス変調器
132…電流検出器
150…イオン化陽極電極
156…パルス変調器
170…電磁リング
200…プローブ
220、220’、220”…スパッタリングターゲット
222…内側の面
224…外側の面
226、226’…シールド
230…ライン/導体
232…電源
250…イオン化された化学種
252’、252”…ターゲット化学種
502…照準経路
522…蒸気/イオン流れ経路
Claims (20)
- 部品上に堆積材料を堆積させる方法であって、
部品を堆積室内に配置し、
第一の電位を部品に印加し、
堆積材料を形成するための一つまたは複数の第一の成分を蒸発させ、
第一の電位がイオン化された第一の成分を部品の方へ引き付けるように、蒸発された第一の成分をイオン化し、
スパッタされた第二の成分がイオン化された第一の成分と同時堆積されるように、堆積材料を形成するための一つまたは複数の第二の成分をスパッタする、
ことを含むことを特徴とする方法。 - スパッタリングは、スパッタリング電圧をスパッタリングターゲットに印加することを含むことを特徴とする請求項1記載の方法。
- スパッタリングターゲットは、第一の成分の供給源から部品へのイオン流れ経路を取り囲むことを特徴とする請求項2記載の方法。
- 一つまたは複数の第二の成分は、一つまたは複数の耐熱性元素を含むことを特徴とする請求項1記載の方法。
- 一つまたは複数の第二の成分は、実質的にMoから成ることを特徴とする請求項1記載の方法。
- 堆積材料は、Ti−6Al−2Sn−4Zr−2Mo、Ti−8Al−1V−1Mo、またはTi−6Al−2Sn−4Zr−6Moのうちの少なくとも一つから実質的に成ることを特徴とする請求項1記載の方法。
- 部品は、部位から第一の材料を失っており、
堆積材料は、部品を修復するようにこの部位に堆積される、
ことを特徴とする請求項1記載の方法。 - 堆積材料は、部品の基体との第一の界面を有し、堆積材料と基体の間の結合強度は、50ksiを超過することを特徴とする請求項7記載の方法。
- 部品および堆積材料は、同様の公称組成のTi合金あるいはニッケル基またはコバルト基超合金から成り、
結合強度は、100ksiから200ksiであり、
堆積材料は、少なくとも2.0mmの深さを有し、
基体は、堆積材料の深さを超過する厚みを有し、
基体は、元の未修理材料から成る、
ことを特徴とする請求項8記載の方法。 - 部品は、Ti合金タービンエンジン部品であり、堆積材料は、Ti基であることを特徴とする請求項1記載の方法。
- ワークピース上に材料を堆積させるための装置であって、
堆積室と、
一つまたは複数の第一の堆積材料成分からプラズマを形成する手段と、
プラズマからワークピースにイオンを引き付けるようにワークピースに変調されたバイアス電位を印加する手段と、
一つまたは複数の第二の堆積材料成分をスパッタする手段と、
プラズマ形成手段、バイアス電位印加手段、およびスパッタ手段に接続されており、ワークピースへの第一の堆積材料成分および第二の堆積材料成分の同時堆積のフィードバックループ制御を提供するようにプログラムされた制御システムと、
を備えることを特徴とする装置。 - プラズマの密度およびワークピースへのイオン電流をモニタする手段をさらに備えることを特徴とする請求項11記載の装置。
- スパッタ手段は、
一つまたは複数の第二の堆積材料成分のうちの第一番めを提供する第一のスパッタリングターゲットと、
一つまたは複数の第二の堆積材料成分のうちの第二番めを提供する第二のスパッタリングターゲットと、
を含み、
制御システムは、第一のスパッタリングターゲットと第二のスパッタリングターゲットとに印加される第一のスパッタリングバイアス電圧と第二のスパッタリングバイアス電圧とを別々に制御するようにプログラムされる、
ことを特徴とする請求項11記載の装置。 - ワークピース上に堆積材料を堆積させるための装置であって、
堆積室と、
堆積室内に配置され、第一のゼロ以外のバイアス電圧を掛けられるワークピースと、
第一の成分を蒸発させるように加熱される、堆積材料の一つまたは複数の第一の成分の第一の供給源と、
堆積室内に配置され、堆積材料の一つまたは複数の第二の成分を含み、第二のバイアス電圧を掛けられる、第一のスパッタリングターゲットと、
を備えることを特徴とする装置。 - 一つまたは複数の第一の成分は、Ti、Al、およびVを含み、
一つまたは複数の第二の成分は、実質的にMoから成る、
ことを特徴とする請求項14記載の装置。 - 第一のバイアス電圧は、第二のバイアス電圧とは異なることを特徴とする請求項14記載の装置。
- 第一のバイアス電圧および第二のバイアス電圧は、大きさとデューティーサイクルの一方または両方において異なる、パルス変調された電圧であることを特徴とする請求項14記載の装置。
- 第一のスパッタリングターゲットとは組成が異なり、第二のバイアス電圧とは異なる第三のゼロ以外のバイアス電圧を掛けられる、第二のスパッタリングターゲットをさらに備えることを特徴とする請求項14記載の装置。
- 一つまたは複数の第一の成分と、堆積する一つまたは複数の第二の成分との堆積材料を同時堆積させる方法であって、
一つまたは複数の第一の成分のイオン強化電子ビーム物理蒸着と、
一つまたは複数の第二の成分のスパッタリングと、
を含むことを特徴とする方法。 - 一つまたは複数の第一の成分は、単一のインゴットからのものであり、
一つまたは複数の第二の成分は、異なる組成の少なくとも二つの異なるスパッタリングターゲットからの少なくとも二つの成分である、
ことを特徴とする請求項19記載の方法。
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US10/804,754 US20050205415A1 (en) | 2004-03-19 | 2004-03-19 | Multi-component deposition |
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EP (1) | EP1577417B1 (ja) |
JP (1) | JP2005273016A (ja) |
CN (1) | CN1670253A (ja) |
CA (1) | CA2500933A1 (ja) |
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JP2015501388A (ja) * | 2011-11-01 | 2015-01-15 | ザ・ボーイング・カンパニーTheBoeing Company | 大気圧プラズマを用いる堆積のための方法及び装置 |
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- 2005-03-16 SG SG200501610A patent/SG115767A1/en unknown
- 2005-03-18 EP EP20050251682 patent/EP1577417B1/en not_active Not-in-force
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2009
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Cited By (3)
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JP2014531559A (ja) * | 2011-09-30 | 2014-11-27 | ゼネラル・エレクトリック・カンパニイ | 回転機械構成要素を修理する方法 |
JP2015501388A (ja) * | 2011-11-01 | 2015-01-15 | ザ・ボーイング・カンパニーTheBoeing Company | 大気圧プラズマを用いる堆積のための方法及び装置 |
US9758864B2 (en) | 2011-11-01 | 2017-09-12 | The Boeing Company | Open air plasma deposition method |
Also Published As
Publication number | Publication date |
---|---|
EP1577417A1 (en) | 2005-09-21 |
US20100155224A1 (en) | 2010-06-24 |
CN1670253A (zh) | 2005-09-21 |
SG115767A1 (en) | 2005-10-28 |
US20050205415A1 (en) | 2005-09-22 |
UA82852C2 (en) | 2008-05-26 |
US8864956B2 (en) | 2014-10-21 |
EP1577417B1 (en) | 2012-09-19 |
CA2500933A1 (en) | 2005-09-19 |
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