JP2005268774A - 半導体装置の製造方法、icカード、icタグ、rfid、トランスポンダ、紙幣、有価証券、パスポート、電子機器、バッグ及び衣類 - Google Patents
半導体装置の製造方法、icカード、icタグ、rfid、トランスポンダ、紙幣、有価証券、パスポート、電子機器、バッグ及び衣類 Download PDFInfo
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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Abstract
【解決手段】本発明は、絶縁基板上に変調回路と、復調回路と、論理回路と、メモリ回路と、アンテナ回路とを有する半導体装置の製造方法であり、前記メモリ回路は不揮発性メモリ回路であり、不揮発性メモリ回路のデータは製造時に書き込まれ、データ部の素子形成は電子ビーム露光またはレーザ露光を用いて行い、他の部分の露光はミラープロジェクション露光、ステップ・アンド・リピート露光、またはステップ・アンド・スキャン露光を使用することを特徴とする。
【選択図】図1
Description
このようにして、メモリに記憶されたデータを出力端子716に読み出すことができる。
また、記憶データの内容に関係しないもの、図8ではコンタクトホール801、804以外の露光データのようなものは、ミラープロジェクション露光、ステップ・アンド・リピート露光、ステップ・アンド・スキャン露光などで形成が可能である。
IDチップ2403を実装したラベル2402と、当該ラベル2402が貼られた肉のパック2401を示す。IDチップ2403はラベル2402の表面に実装していてもよいし、ラベル2402内部に実装してもよい。また野菜等の生鮮食品の場合、生鮮食品を覆うラップにIDチップを実装してもよい。
IDチップを実装する結果、事前に生産ラインに投入される自動車の順序や同色を有する数を調整する必要がない。強いては、自動車の順序や数に合わせるように塗装装置を制御するプログラムを設定しなくてすむ。すなわち製造装置は、自動車に実装されたIDチップの情報に基づき、個別に動作することができる。
なお、本実施例に示した例はごく一例であり、これらの用途に限定するものではないことを付記する。
2 電源
21 接続配線
51 配線
53 層間膜
54 保護膜
55 保護膜
56 ゲート電極
57 島状半導体膜
58 ゲート絶縁膜
60 基板
61 剥離層
62 レジスト
63 レジスト
64 不純物元素
65 低濃度不純物領域
66 レジスト
67 不純物元素
68 高濃度不純物領域
69 n型TFT
70 p型TFT
73 CPU
74 メモリ
75 絶縁膜
76 サイドウォール(側壁)
77 レジスト
78 不純物元素
79 高濃度不純物領域
80 端子部
Claims (13)
- 絶縁基板上に第一の露光手段を用いて、変調回路と、復調回路と、論理回路とを有する複数の半導体装置を形成し、
同一基板上に第二の露光手段を用いて、それぞれが異なる複数のメモリ回路を形成することを特徴とした半導体装置の製造方法。 - 絶縁基板上にフォトレジストを塗布し、
前記フォトレジストに第一の露光手段を用いて露光をおこない、変調回路と、復調回路と、論理回路を有する複数の半導体装置のパターンを形成し、
前記フォトレジストに第二の露光手段を用いて露光をおこない、それぞれが異なる複数のメモリ回路のパターンを形成し、
前記第一及び第二の露光手段を用いて露光された前記フォトレジストを現像し、
エッチングをすることを特徴とした半導体装置の製造方法。 - 請求項1又は請求項2において、メモリ回路はマスクROMであることを特徴とした半導体装置の製造方法。
- 請求項1乃至請求項3に記載のいずれか一項において、前記複数のメモリ回路の差異は記憶されるデータの差異であることを特徴とした半導体装置の製造方法。
- 請求項1乃至請求項4に記載のいずれか一項において、前記第二の露光手段はプログラムによって、露光内容を変えられることを特徴とした半導体装置の製造方法。
- 請求項1乃至請求項5に記載のいずれか一項において、前記第一の露光手段はミラープロジェクション露光装置を用いた露光手段であることを特徴とする半導体装置の製造方法。
- 請求項1乃至請求項5に記載のいずれか一項において、前記第一の露光手段はステップ・アンド・リピート露光装置を用いた露光手段であることを特徴とした半導体装置の製造方法。
- 請求項1乃至請求項5に記載のいずれか一項において、前記第一の露光手段はステップ・アンド・スキャン露光装置を用いた露光手段であることを特徴とした半導体装置の製造方法。
- 請求項1乃至請求項8に記載のいずれか一項において、前記第二の露光手段は電子ビーム露光装置を用いた露光手段であることを特徴とした半導体装置の製造方法。
- 請求項1乃至請求項8に記載のいずれか一項において、前記第二の露光手段はレーザ露光装置を用いた露光手段であることを特徴とした半導体装置の製造方法。
- 請求項1乃至請求項10に記載のいずれか一項において、前記第二の露光手段で露光をおこなう部位はコンタクトホールであることを特徴とする半導体装置の製造方法。
- 請求項1乃至請求項11に記載のいずれか一項において、前記絶縁基板はガラス、プラスチック、フィルム状の絶縁体のいずれかを用いることを特徴とする半導体装置の製造方法。
- 請求項1乃至請求項12のいずれか一項に記載された半導体装置の製造方法で製造された半導体装置を有するICカード、ICタグ、RFID、トランスポンダ、紙幣、有価証券、パスポート、電子機器、バッグ、衣類。
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JP4776941B2 (ja) | 2011-09-21 |
KR101258671B1 (ko) | 2013-04-26 |
KR20070007308A (ko) | 2007-01-15 |
US20070184670A1 (en) | 2007-08-09 |
EP1719169A4 (en) | 2015-01-07 |
CN1922727A (zh) | 2007-02-28 |
CN1922727B (zh) | 2011-12-21 |
EP1719169A1 (en) | 2006-11-08 |
WO2005081307A1 (en) | 2005-09-01 |
US7666722B2 (en) | 2010-02-23 |
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