JP2005260064A5 - - Google Patents
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- JP2005260064A5 JP2005260064A5 JP2004070927A JP2004070927A JP2005260064A5 JP 2005260064 A5 JP2005260064 A5 JP 2005260064A5 JP 2004070927 A JP2004070927 A JP 2004070927A JP 2004070927 A JP2004070927 A JP 2004070927A JP 2005260064 A5 JP2005260064 A5 JP 2005260064A5
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Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004070927A JP4557134B2 (ja) | 2004-03-12 | 2004-03-12 | 磁気センサの製造方法、同磁気センサの製造方法に使用されるマグネットアレイ及び同マグネットアレイの製造方法 |
| EP05004046A EP1574870A3 (en) | 2004-03-12 | 2005-02-24 | Method for manufacturing magnetic sensor, magnet array used in the method, and method for manufacturing the magnet array |
| US11/076,069 US7023310B2 (en) | 2004-03-12 | 2005-03-10 | Method for manufacturing magnetic sensor, magnet array used in the method, and method for manufacturing the magnet array |
| TW094107366A TWI293372B (en) | 2004-03-12 | 2005-03-10 | Method for manufacturing magnetic sensor, magnet array used in the method, and method for manufacturing the magnet array |
| CNU2005200118832U CN2791885Y (zh) | 2004-03-12 | 2005-03-11 | 磁体阵列 |
| CNB2005100788665A CN100536188C (zh) | 2004-03-12 | 2005-03-11 | 磁传感器制造方法、磁体阵列及其制造方法 |
| KR1020050020492A KR100627212B1 (ko) | 2004-03-12 | 2005-03-11 | 자기 센서를 제조하기 위한 방법, 그 방법에 이용되는 자석어레이, 및 자석 어레이를 제조하기 위한 방법 |
| HK06100220.6A HK1080605B (zh) | 2004-03-12 | 2006-01-05 | 磁传感器制造方法、磁体阵列及其制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004070927A JP4557134B2 (ja) | 2004-03-12 | 2004-03-12 | 磁気センサの製造方法、同磁気センサの製造方法に使用されるマグネットアレイ及び同マグネットアレイの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005260064A JP2005260064A (ja) | 2005-09-22 |
| JP2005260064A5 true JP2005260064A5 (enExample) | 2006-09-07 |
| JP4557134B2 JP4557134B2 (ja) | 2010-10-06 |
Family
ID=34824631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004070927A Expired - Fee Related JP4557134B2 (ja) | 2004-03-12 | 2004-03-12 | 磁気センサの製造方法、同磁気センサの製造方法に使用されるマグネットアレイ及び同マグネットアレイの製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7023310B2 (enExample) |
| EP (1) | EP1574870A3 (enExample) |
| JP (1) | JP4557134B2 (enExample) |
| KR (1) | KR100627212B1 (enExample) |
| CN (2) | CN2791885Y (enExample) |
| HK (1) | HK1080605B (enExample) |
| TW (1) | TWI293372B (enExample) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI278650B (en) * | 2004-09-28 | 2007-04-11 | Yamaha Corp | Magnetic sensor using giant magnetoresistive elements and method for manufacturing the same |
| JP2006276983A (ja) * | 2005-03-28 | 2006-10-12 | Yamaha Corp | ポインティングデバイス用の磁気センサ |
| DE102005060713B4 (de) * | 2005-12-19 | 2019-01-24 | Austriamicrosystems Ag | Magnetfeldsensoranordnung und Verfahren zur berührungslosen Messung eines Magnetfeldes |
| DE602007010852D1 (de) | 2006-03-03 | 2011-01-13 | Ricoh Co Ltd | Element mit magnetoresistivem Effekt und Herstellungsverfahren dafür |
| WO2008012959A1 (en) * | 2006-07-26 | 2008-01-31 | Alps Electric Co., Ltd. | Magnetic sensor |
| KR101021257B1 (ko) * | 2006-08-31 | 2011-03-11 | 알프스 덴키 가부시키가이샤 | 쌍극 대응형 자기검출장치 |
| WO2008114615A1 (ja) * | 2007-03-20 | 2008-09-25 | Alps Electric Co., Ltd. | 磁気抵抗効果素子を用いた位置検知装置 |
| JP2008270471A (ja) | 2007-04-19 | 2008-11-06 | Yamaha Corp | 磁気センサ及びその製造方法 |
| JP5152495B2 (ja) | 2008-03-18 | 2013-02-27 | 株式会社リコー | 磁気センサーおよび携帯情報端末装置 |
| KR101446334B1 (ko) * | 2008-05-07 | 2014-10-01 | 삼성전자주식회사 | 자기 저항 소자 |
| US7965077B2 (en) * | 2008-05-08 | 2011-06-21 | Everspin Technologies, Inc. | Two-axis magnetic field sensor with multiple pinning directions |
| KR101766899B1 (ko) | 2010-04-21 | 2017-08-10 | 삼성전자주식회사 | 자기 메모리 소자 |
| US8907436B2 (en) * | 2010-08-24 | 2014-12-09 | Samsung Electronics Co., Ltd. | Magnetic devices having perpendicular magnetic tunnel junction |
| CN102297652B (zh) * | 2011-03-03 | 2012-12-05 | 江苏多维科技有限公司 | 一种独立封装的磁电阻角度传感器 |
| CN102298124B (zh) * | 2011-03-03 | 2013-10-02 | 江苏多维科技有限公司 | 一种独立封装的桥式磁场角度传感器 |
| CN102226835A (zh) * | 2011-04-06 | 2011-10-26 | 江苏多维科技有限公司 | 单一芯片双轴磁场传感器及其制备方法 |
| CN102331564B (zh) * | 2011-04-06 | 2013-02-13 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器及其制备方法 |
| CN102435963B (zh) * | 2011-04-06 | 2014-06-04 | 江苏多维科技有限公司 | 单片双轴桥式磁场传感器 |
| CN202013413U (zh) * | 2011-04-06 | 2011-10-19 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器 |
| CN102790613B (zh) * | 2011-05-16 | 2015-04-29 | 江苏多维科技有限公司 | 一种开关传感器 |
| JP5535139B2 (ja) * | 2011-06-30 | 2014-07-02 | 株式会社ヴァレオジャパン | 近接センサ |
| JP5866956B2 (ja) * | 2011-10-17 | 2016-02-24 | 株式会社デンソー | 磁気センサ |
| RU2014135402A (ru) | 2012-01-30 | 2016-03-27 | Мицубиси Электрик Корпорейшн | Магнитная цепь |
| US9880232B2 (en) * | 2012-03-14 | 2018-01-30 | Seagate Technology Llc | Magnetic sensor manufacturing |
| WO2015010105A1 (en) * | 2013-07-19 | 2015-01-22 | Invensense, Inc. | Application specific integrated circuit with integrated magnetic sensor |
| US9513347B2 (en) * | 2013-10-31 | 2016-12-06 | Invensense, Inc. | Device with magnetic sensors with permanent magnets |
| TWI633321B (zh) * | 2015-03-30 | 2018-08-21 | 財團法人工業技術研究院 | 用於磁場感測之穿隧磁阻裝置 |
| EP3104187A1 (en) * | 2015-06-09 | 2016-12-14 | International Iberian Nanotechnology Laboratory | Magnetoresistive sensor |
| JP6554553B2 (ja) * | 2015-12-03 | 2019-07-31 | アルプスアルパイン株式会社 | 磁気検知装置 |
| US11237227B2 (en) * | 2017-04-25 | 2022-02-01 | Konica Minolta, Inc. | Magnetic sensor |
| JP6605570B2 (ja) * | 2017-12-27 | 2019-11-13 | Ｔｄｋ株式会社 | 磁気センサ |
| JP6978517B2 (ja) * | 2018-01-17 | 2021-12-08 | アルプスアルパイン株式会社 | 磁気検出装置およびその製造方法 |
| US10666251B2 (en) * | 2018-02-14 | 2020-05-26 | General Equipment And Manufacturing Company, Inc. | Target magnet mechanism for proximity switch |
| US11215681B2 (en) * | 2019-07-10 | 2022-01-04 | Allegro Microsystems, Llc | Magnetic field sensor with stray field immunity and large air gap performance |
| CN110568385B (zh) * | 2019-08-02 | 2021-03-30 | 潍坊歌尔微电子有限公司 | 一种磁传感器的制造方法及磁传感器 |
| JP7285745B2 (ja) * | 2019-09-18 | 2023-06-02 | 東京エレクトロン株式会社 | 成膜システム、磁化特性測定装置、および成膜方法 |
| JP7532774B2 (ja) * | 2019-12-26 | 2024-08-14 | 株式会社レゾナック | 磁気センサ |
| CN113391116B (zh) * | 2021-03-17 | 2022-11-25 | 清华大学 | 一种用于测量母线电流的传感器阵列 |
| CN114089232B (zh) * | 2021-11-25 | 2022-08-09 | 西安电子科技大学 | 一种磁场传感器及磁场测量方法 |
| CN114636954B (zh) * | 2022-01-26 | 2025-04-25 | 宁波兴隆磁性技术有限公司 | 一种磁性材料取向方向测试方法 |
| CN115267623B (zh) * | 2022-09-23 | 2023-10-20 | 微传智能科技（常州）有限公司 | 一种磁阻磁开关传感器 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3088478B2 (ja) | 1990-05-21 | 2000-09-18 | 財団法人生産開発科学研究所 | 磁気抵抗効果素子 |
| JP3047567B2 (ja) | 1991-11-05 | 2000-05-29 | 松下電器産業株式会社 | 方位センサ |
| JPH05218982A (ja) | 1992-02-05 | 1993-08-27 | Nec Shizuoka Ltd | アナログ音声回線通話方法 |
| DE4243358A1 (de) * | 1992-12-21 | 1994-06-23 | Siemens Ag | Magnetowiderstands-Sensor mit künstlichem Antiferromagneten und Verfahren zu seiner Herstellung |
| US5465185A (en) | 1993-10-15 | 1995-11-07 | International Business Machines Corporation | Magnetoresistive spin valve sensor with improved pinned ferromagnetic layer and magnetic recording system using the sensor |
| US5561368A (en) * | 1994-11-04 | 1996-10-01 | International Business Machines Corporation | Bridge circuit magnetic field sensor having spin valve magnetoresistive elements formed on common substrate |
| DE19619806A1 (de) | 1996-05-15 | 1997-11-20 | Siemens Ag | Magnetfeldempfindliche Sensoreinrichtung mit mehreren GMR-Sensorelementen |
| DE19649265C2 (de) | 1996-11-28 | 2001-03-15 | Inst Physikalische Hochtech Ev | GMR-Sensor mit einer Wheatstonebrücke |
| DE59812241D1 (de) | 1997-09-24 | 2004-12-16 | Infineon Technologies Ag | Sensoreinrichtung zur Richtungserfassung eines äu eren Magnetfeldes mittels eines magnetoresistiven Sensorelementes |
| DE19742366C1 (de) | 1997-09-25 | 1999-05-27 | Siemens Ag | Einrichtung mit magnetoresistivem Sensorelement und zugeordneter Magnetisierungsvorrichtung |
| JP3623366B2 (ja) | 1998-07-17 | 2005-02-23 | アルプス電気株式会社 | 巨大磁気抵抗効果素子を備えた磁界センサおよびその製造方法と製造装置 |
| DE69925573T2 (de) | 1999-05-12 | 2006-04-27 | Asulab S.A. | Magnetischer F?hler hergestellt auf einem halbleitenden Substrat |
| JP4338060B2 (ja) | 1999-05-27 | 2009-09-30 | Ｆｄｋ株式会社 | 磁気センサの製造方法 |
| US6465053B1 (en) * | 1999-06-18 | 2002-10-15 | Koninkl Philips Electronics Nv | Method for manufacturing a magnetic device |
| EP1892538A3 (en) * | 1999-06-18 | 2008-08-13 | Koninklijke Philips Electronics N.V. | Magnetic systems with irreversible characteristics and a method of manufacturing and repairing and operating such systems. |
| JP2001099903A (ja) | 1999-09-30 | 2001-04-13 | Citizen Watch Co Ltd | 磁気センサ |
| JP2001189505A (ja) * | 1999-12-28 | 2001-07-10 | Sony Corp | 磁気抵抗効果薄膜の製造方法 |
| US6633462B2 (en) * | 2000-07-13 | 2003-10-14 | Koninklijke Philips Electronics N.V. | Magnetoresistive angle sensor having several sensing elements |
| JP3498737B2 (ja) * | 2001-01-24 | 2004-02-16 | ヤマハ株式会社 | 磁気センサの製造方法 |
| JP4016857B2 (ja) * | 2002-10-18 | 2007-12-05 | ヤマハ株式会社 | 磁気センサ及びその製造方法 |
| JP3835447B2 (ja) * | 2002-10-23 | 2006-10-18 | ヤマハ株式会社 | 磁気センサ、同磁気センサの製造方法及び同製造方法に適したマグネットアレイ |
-
2004
- 2004-03-12 JP JP2004070927A patent/JP4557134B2/ja not_active Expired - Fee Related
-
2005
- 2005-02-24 EP EP05004046A patent/EP1574870A3/en not_active Withdrawn
- 2005-03-10 US US11/076,069 patent/US7023310B2/en not_active Expired - Fee Related
- 2005-03-10 TW TW094107366A patent/TWI293372B/zh not_active IP Right Cessation
- 2005-03-11 CN CNU2005200118832U patent/CN2791885Y/zh not_active Expired - Lifetime
- 2005-03-11 CN CNB2005100788665A patent/CN100536188C/zh not_active Expired - Fee Related
- 2005-03-11 KR KR1020050020492A patent/KR100627212B1/ko not_active Expired - Fee Related
-
2006
- 2006-01-05 HK HK06100220.6A patent/HK1080605B/zh not_active IP Right Cessation