JP2005254038A5 - - Google Patents

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Publication number
JP2005254038A5
JP2005254038A5 JP2004065144A JP2004065144A JP2005254038A5 JP 2005254038 A5 JP2005254038 A5 JP 2005254038A5 JP 2004065144 A JP2004065144 A JP 2004065144A JP 2004065144 A JP2004065144 A JP 2004065144A JP 2005254038 A5 JP2005254038 A5 JP 2005254038A5
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JP
Japan
Prior art keywords
linear motor
disposed
axis linear
axis
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004065144A
Other languages
English (en)
Japanese (ja)
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JP2005254038A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004065144A priority Critical patent/JP2005254038A/ja
Priority claimed from JP2004065144A external-priority patent/JP2005254038A/ja
Publication of JP2005254038A publication Critical patent/JP2005254038A/ja
Publication of JP2005254038A5 publication Critical patent/JP2005254038A5/ja
Pending legal-status Critical Current

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JP2004065144A 2004-03-09 2004-03-09 リニアモータ駆動ステージ及びそれを用いた機能性薄膜用製造装置、並びにｚ軸リニアモータ Pending JP2005254038A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004065144A JP2005254038A (ja) 2004-03-09 2004-03-09 リニアモータ駆動ステージ及びそれを用いた機能性薄膜用製造装置、並びにｚ軸リニアモータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004065144A JP2005254038A (ja) 2004-03-09 2004-03-09 リニアモータ駆動ステージ及びそれを用いた機能性薄膜用製造装置、並びにｚ軸リニアモータ

Publications (2)

Publication Number Publication Date
JP2005254038A JP2005254038A (ja) 2005-09-22
JP2005254038A5 true JP2005254038A5 (https=) 2007-04-12

Family

ID=35080305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004065144A Pending JP2005254038A (ja) 2004-03-09 2004-03-09 リニアモータ駆動ステージ及びそれを用いた機能性薄膜用製造装置、並びにｚ軸リニアモータ

Country Status (1)

Country Link
JP (1) JP2005254038A (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007117959A (ja) * 2005-10-31 2007-05-17 Kubota Matsushitadenko Exterior Works Ltd 建築板の塗装装置
US9048344B2 (en) 2008-06-13 2015-06-02 Kateeva, Inc. Gas enclosure assembly and system
US10434804B2 (en) 2008-06-13 2019-10-08 Kateeva, Inc. Low particle gas enclosure systems and methods
US12018857B2 (en) 2008-06-13 2024-06-25 Kateeva, Inc. Gas enclosure assembly and system
US8383202B2 (en) 2008-06-13 2013-02-26 Kateeva, Inc. Method and apparatus for load-locked printing
US9604245B2 (en) 2008-06-13 2017-03-28 Kateeva, Inc. Gas enclosure systems and methods utilizing an auxiliary enclosure
US8899171B2 (en) 2008-06-13 2014-12-02 Kateeva, Inc. Gas enclosure assembly and system
US12064979B2 (en) 2008-06-13 2024-08-20 Kateeva, Inc. Low-particle gas enclosure systems and methods
US11975546B2 (en) 2008-06-13 2024-05-07 Kateeva, Inc. Gas enclosure assembly and system
KR102342098B1 (ko) * 2013-06-10 2021-12-21 카티바, 인크. 저-입자 가스 인클로저 시스템 및 방법
CN105900258A (zh) 2013-12-26 2016-08-24 科迪华公司 电子装置的热加工
KR102050152B1 (ko) 2014-01-21 2020-01-08 카티바, 인크. 전자 장치 인캡슐레이션을 위한 기기 및 기술
US9343678B2 (en) 2014-01-21 2016-05-17 Kateeva, Inc. Apparatus and techniques for electronic device encapsulation
KR102390045B1 (ko) 2014-04-30 2022-04-22 카티바, 인크. 가스 쿠션 장비 및 기판 코팅 기술
CN107949271A (zh) * 2017-12-20 2018-04-20 中山市美鼎机械制造有限公司 插件装置及插件系统
CN119016251A (zh) * 2024-10-29 2024-11-26 江苏腾沅机械科技有限公司 一种汽轮机叶片防水蚀用喷涂装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0342248A (ja) * 1989-07-07 1991-02-22 Nec Corp インクジェットヘッド
JP2000187115A (ja) * 1998-12-24 2000-07-04 Canon Inc カラーフィルタ製造装置
JP2002228822A (ja) * 2001-01-30 2002-08-14 Canon Inc カラーフィルタ製造装置及び該装置のインクジェットヘッド位置調整方法
JP2002267828A (ja) * 2001-03-09 2002-09-18 Canon Inc カラーフィルタ製造装置
JP2003265997A (ja) * 2002-03-14 2003-09-24 Seiko Epson Corp 薄膜形成装置と薄膜形成方法、回路パターンの製造装置と電子機器の製造方法と電子機器、及びレジストパターンの製造装置とレジストパターンの製造方法
KR100463520B1 (ko) * 2002-04-08 2004-12-29 엘지전자 주식회사 디스플레이 패널 제작을 위한 잉크젯 도포 장치
JP2004031070A (ja) * 2002-06-25 2004-01-29 Toshiba Corp 有機ｅｌ材料塗布装置とその塗布方法および有機ｅｌ表示装置

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