JP2005249785A5 - - Google Patents

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Publication number
JP2005249785A5
JP2005249785A5 JP2005054010A JP2005054010A JP2005249785A5 JP 2005249785 A5 JP2005249785 A5 JP 2005249785A5 JP 2005054010 A JP2005054010 A JP 2005054010A JP 2005054010 A JP2005054010 A JP 2005054010A JP 2005249785 A5 JP2005249785 A5 JP 2005249785A5
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JP
Japan
Prior art keywords
piezoelectric cantilever
pressure sensor
electrode
piezoelectric
substrate
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Application number
JP2005054010A
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English (en)
Japanese (ja)
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JP4832772B2 (ja
JP2005249785A (ja
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Priority claimed from US10/792,777 external-priority patent/US7104134B2/en
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Publication of JP2005249785A publication Critical patent/JP2005249785A/ja
Publication of JP2005249785A5 publication Critical patent/JP2005249785A5/ja
Application granted granted Critical
Publication of JP4832772B2 publication Critical patent/JP4832772B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005054010A 2004-03-05 2005-02-28 圧電カンチレバー圧力センサ Expired - Fee Related JP4832772B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/792,777 US7104134B2 (en) 2004-03-05 2004-03-05 Piezoelectric cantilever pressure sensor
US10/792777 2004-03-05

Publications (3)

Publication Number Publication Date
JP2005249785A JP2005249785A (ja) 2005-09-15
JP2005249785A5 true JP2005249785A5 (https=) 2008-03-27
JP4832772B2 JP4832772B2 (ja) 2011-12-07

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Family Applications (1)

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JP2005054010A Expired - Fee Related JP4832772B2 (ja) 2004-03-05 2005-02-28 圧電カンチレバー圧力センサ

Country Status (4)

Country Link
US (1) US7104134B2 (https=)
EP (1) EP1571435B1 (https=)
JP (1) JP4832772B2 (https=)
DE (1) DE602004021168D1 (https=)

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TWI574028B (zh) * 2015-06-22 2017-03-11 李美燕 集成式振波發射感測元、使用其之感測陣列及電子設備及其製造方法
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