JP2005244197A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005244197A5 JP2005244197A5 JP2005015070A JP2005015070A JP2005244197A5 JP 2005244197 A5 JP2005244197 A5 JP 2005244197A5 JP 2005015070 A JP2005015070 A JP 2005015070A JP 2005015070 A JP2005015070 A JP 2005015070A JP 2005244197 A5 JP2005244197 A5 JP 2005244197A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode layer
- forming
- layer
- region
- photosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 26
- 239000004065 semiconductor Substances 0.000 claims 26
- 239000004020 conductor Substances 0.000 claims 20
- 238000004519 manufacturing process Methods 0.000 claims 20
- 238000007599 discharging Methods 0.000 claims 18
- 239000012212 insulator Substances 0.000 claims 16
- 239000005871 repellent Substances 0.000 claims 16
- 230000001678 irradiating Effects 0.000 claims 12
- 239000007788 liquid Substances 0.000 claims 6
- 230000002940 repellent Effects 0.000 claims 6
- 239000007789 gas Substances 0.000 claims 3
- 229910052736 halogen Inorganic materials 0.000 claims 3
- 150000002367 halogens Chemical class 0.000 claims 3
- 229910052739 hydrogen Inorganic materials 0.000 claims 3
- 239000001257 hydrogen Substances 0.000 claims 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 3
- 239000006087 Silane Coupling Agent Substances 0.000 claims 1
- HOFIJBMBYYEBNM-UHFFFAOYSA-N copper;oxotin Chemical compound [Cu].[Sn]=O HOFIJBMBYYEBNM-UHFFFAOYSA-N 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005015070A JP4969041B2 (ja) | 2004-01-26 | 2005-01-24 | 表示装置の作製方法 |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004017382 | 2004-01-26 | ||
JP2004017448 | 2004-01-26 | ||
JP2004017382 | 2004-01-26 | ||
JP2004017448 | 2004-01-26 | ||
JP2005015070A JP4969041B2 (ja) | 2004-01-26 | 2005-01-24 | 表示装置の作製方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005244197A JP2005244197A (ja) | 2005-09-08 |
JP2005244197A5 true JP2005244197A5 (zh) | 2008-03-13 |
JP4969041B2 JP4969041B2 (ja) | 2012-07-04 |
Family
ID=35025556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005015070A Expired - Fee Related JP4969041B2 (ja) | 2004-01-26 | 2005-01-24 | 表示装置の作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4969041B2 (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4678574B2 (ja) * | 2004-08-23 | 2011-04-27 | 株式会社リコー | 積層構造体、積層構造体を用いた電子素子、電子素子アレイ及び表示装置 |
EP1998373A3 (en) | 2005-09-29 | 2012-10-31 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device having oxide semiconductor layer and manufacturing method thereof |
KR101197053B1 (ko) * | 2005-09-30 | 2012-11-06 | 삼성디스플레이 주식회사 | 유기 박막 트랜지스터 표시판 및 그 제조 방법 |
WO2007044429A2 (en) * | 2005-10-05 | 2007-04-19 | Nanogram Corporation | Linear and cross-linked high molecular weight polysilanes, polygermanes, and copolymers thereof, compositions containing the same, and methods of making and using such compounds and compositions |
KR100766318B1 (ko) | 2005-11-29 | 2007-10-11 | 엘지.필립스 엘시디 주식회사 | 유기 반도체 물질을 이용한 박막트랜지스터와 이를 구비한액정표시장치용 어레이 기판 및 그 제조방법 |
JP5167707B2 (ja) * | 2006-08-04 | 2013-03-21 | 株式会社リコー | 積層構造体、多層配線基板、アクティブマトリックス基板、並びに電子表示装置 |
JP5142831B2 (ja) | 2007-06-14 | 2013-02-13 | 株式会社半導体エネルギー研究所 | 半導体装置及びその作製方法 |
JP5155059B2 (ja) * | 2008-08-06 | 2013-02-27 | 株式会社アルバック | 表面修飾基板の製造方法 |
KR102275487B1 (ko) * | 2008-09-19 | 2021-07-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 |
US8461582B2 (en) | 2009-03-05 | 2013-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
KR101646783B1 (ko) * | 2009-12-08 | 2016-08-08 | 엘지디스플레이 주식회사 | 휴대용 컴퓨터 |
EP2398086A1 (en) * | 2010-06-17 | 2011-12-21 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Opto-electric device and method of manufacturing thereof |
JP5811560B2 (ja) * | 2011-03-25 | 2015-11-11 | セイコーエプソン株式会社 | 回路基板の製造方法 |
JP5711585B2 (ja) * | 2011-03-30 | 2015-05-07 | 株式会社アドテックエンジニアリング | 薄膜トランジスタの製造装置およびその製造方法、ならびにプログラム |
US20180053911A1 (en) * | 2015-03-13 | 2018-02-22 | Konica Minolta, Inc. | Transparent electrode, method for manufacturing transparent electrode, and organic electroluminescence element |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2791422B2 (ja) * | 1990-12-25 | 1998-08-27 | 株式会社 半導体エネルギー研究所 | 電気光学装置およびその作製方法 |
GB9726511D0 (en) * | 1997-12-13 | 1998-02-11 | Philips Electronics Nv | Thin film transistors and electronic devices comprising such |
JP2002009287A (ja) * | 2000-06-19 | 2002-01-11 | Matsushita Electric Ind Co Ltd | 半導体装置と半導体装置の製造方法 |
JP3967259B2 (ja) * | 2001-12-11 | 2007-08-29 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2003241177A (ja) * | 2002-02-14 | 2003-08-27 | Dainippon Printing Co Ltd | カラー液晶表示装置における電極基板の製造方法 |
JP4572501B2 (ja) * | 2002-02-27 | 2010-11-04 | コニカミノルタホールディングス株式会社 | 有機薄膜トランジスタの製造方法 |
JP2003318193A (ja) * | 2002-04-22 | 2003-11-07 | Seiko Epson Corp | デバイス、その製造方法及び電子装置 |
JP2003318401A (ja) * | 2002-04-22 | 2003-11-07 | Seiko Epson Corp | デバイスの製造方法、デバイス、表示装置、および電子機器 |
-
2005
- 2005-01-24 JP JP2005015070A patent/JP4969041B2/ja not_active Expired - Fee Related
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2005244197A5 (zh) | ||
JP5268132B2 (ja) | 酸化物半導体素子とその製造方法、薄膜センサおよび電気光学装置 | |
TWI624050B (zh) | 有機發光顯示裝置及其製造方法 | |
TWI549289B (zh) | 有機發光顯示面板及其製作方法 | |
US20070108889A1 (en) | Organic light emitting display device with trap for foreign substance and method of fabricating the same | |
JP2005328088A5 (zh) | ||
JP2011044575A (ja) | 半導体装置およびその製造方法 | |
JP2005244204A5 (zh) | ||
US9224868B2 (en) | Pixel structure | |
JP2003273361A (ja) | 半導体装置およびその製造方法 | |
JP2007184601A (ja) | 有機薄膜トランジスタ及びその製造方法 | |
US11114630B2 (en) | Display panel, manufacturing method thereof, display device | |
CN107039460A (zh) | 薄膜晶体管基板 | |
JP2004241770A5 (zh) | ||
JP2005286320A5 (zh) | ||
TWI495110B (zh) | 顯示面板及其製作方法 | |
JP2006013481A5 (zh) | ||
US20110193089A1 (en) | Pixel structure, method of fabricating the same, and method of fabricating electronic device | |
JP2005159327A5 (zh) | ||
JP2005277323A5 (zh) | ||
US20160079326A1 (en) | Pixel structure of electroluminescent display panel and method of fabricating the same | |
JP2005303283A5 (zh) | ||
JP2004522283A5 (zh) | ||
KR20120043404A (ko) | 표시장치 및 이의 제조방법 | |
US8604579B2 (en) | Semiconductor device, and method for manufacturing same |