JP2005236114A5 - - Google Patents

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Publication number
JP2005236114A5
JP2005236114A5 JP2004044726A JP2004044726A JP2005236114A5 JP 2005236114 A5 JP2005236114 A5 JP 2005236114A5 JP 2004044726 A JP2004044726 A JP 2004044726A JP 2004044726 A JP2004044726 A JP 2004044726A JP 2005236114 A5 JP2005236114 A5 JP 2005236114A5
Authority
JP
Japan
Prior art keywords
support portion
workpiece
mold
contact surface
outer edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004044726A
Other languages
English (en)
Japanese (ja)
Other versions
JP4455092B2 (ja
JP2005236114A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004044726A priority Critical patent/JP4455092B2/ja
Priority claimed from JP2004044726A external-priority patent/JP4455092B2/ja
Priority to US11/059,330 priority patent/US7442028B2/en
Publication of JP2005236114A publication Critical patent/JP2005236114A/ja
Priority to US12/201,143 priority patent/US7726964B2/en
Priority to US12/238,617 priority patent/US8685306B2/en
Publication of JP2005236114A5 publication Critical patent/JP2005236114A5/ja
Application granted granted Critical
Publication of JP4455092B2 publication Critical patent/JP4455092B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004044726A 2004-02-20 2004-02-20 加工装置及び加工方法 Expired - Fee Related JP4455092B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004044726A JP4455092B2 (ja) 2004-02-20 2004-02-20 加工装置及び加工方法
US11/059,330 US7442028B2 (en) 2004-02-20 2005-02-17 Molding apparatus and molding method
US12/201,143 US7726964B2 (en) 2004-02-20 2008-08-29 Molding apparatus and molding method
US12/238,617 US8685306B2 (en) 2004-02-20 2008-09-26 Molding apparatus and molding method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004044726A JP4455092B2 (ja) 2004-02-20 2004-02-20 加工装置及び加工方法

Publications (3)

Publication Number Publication Date
JP2005236114A JP2005236114A (ja) 2005-09-02
JP2005236114A5 true JP2005236114A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2009-02-26
JP4455092B2 JP4455092B2 (ja) 2010-04-21

Family

ID=34858073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004044726A Expired - Fee Related JP4455092B2 (ja) 2004-02-20 2004-02-20 加工装置及び加工方法

Country Status (2)

Country Link
US (3) US7442028B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP4455092B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4455093B2 (ja) * 2004-02-20 2010-04-21 キヤノン株式会社 モールド、モールドを用いた加工装置及びモールドを用いた加工方法
JP4574240B2 (ja) * 2004-06-11 2010-11-04 キヤノン株式会社 加工装置、加工方法、デバイス製造方法
US7922474B2 (en) * 2005-02-17 2011-04-12 Asml Netherlands B.V. Imprint lithography
JP3958344B2 (ja) * 2005-06-07 2007-08-15 キヤノン株式会社 インプリント装置、インプリント方法及びチップの製造方法
CN101288512B (zh) * 2007-04-19 2010-06-02 欧利速精密工业股份有限公司 具射频干扰保护的压花系统
JP5173311B2 (ja) * 2007-08-09 2013-04-03 キヤノン株式会社 インプリント方法、インプリント装置および半導体製造方法
US10565229B2 (en) 2018-05-24 2020-02-18 People.ai, Inc. Systems and methods for matching electronic activities directly to record objects of systems of record
US10413349B2 (en) * 2011-03-04 2019-09-17 Covidien Lp System and methods for identifying tissue and vessels
US11924297B2 (en) 2018-05-24 2024-03-05 People.ai, Inc. Systems and methods for generating a filtered data set
US11463441B2 (en) 2018-05-24 2022-10-04 People.ai, Inc. Systems and methods for managing the generation or deletion of record objects based on electronic activities and communication policies

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1133800A (ja) 1997-07-14 1999-02-09 Amada Co Ltd タレットパンチプレスのライン運転保安システム
US7635262B2 (en) * 2000-07-18 2009-12-22 Princeton University Lithographic apparatus for fluid pressure imprint lithography
CA2380114C (en) * 2002-04-04 2010-01-19 Obducat Aktiebolag Imprint method and device
JP4061220B2 (ja) 2003-03-20 2008-03-12 株式会社日立製作所 ナノプリント装置、及び微細構造転写方法
JP4317375B2 (ja) 2003-03-20 2009-08-19 株式会社日立製作所 ナノプリント装置、及び微細構造転写方法
JP2005101201A (ja) * 2003-09-24 2005-04-14 Canon Inc ナノインプリント装置
JP4455093B2 (ja) 2004-02-20 2010-04-21 キヤノン株式会社 モールド、モールドを用いた加工装置及びモールドを用いた加工方法

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