JP4455092B2 - 加工装置及び加工方法 - Google Patents
加工装置及び加工方法 Download PDFInfo
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- JP4455092B2 JP4455092B2 JP2004044726A JP2004044726A JP4455092B2 JP 4455092 B2 JP4455092 B2 JP 4455092B2 JP 2004044726 A JP2004044726 A JP 2004044726A JP 2004044726 A JP2004044726 A JP 2004044726A JP 4455092 B2 JP4455092 B2 JP 4455092B2
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- 238000012545 processing Methods 0.000 title claims description 40
- 238000003672 processing method Methods 0.000 title claims description 4
- 238000003825 pressing Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 8
- 239000011347 resin Substances 0.000 description 10
- 229920005989 resin Polymers 0.000 description 10
- 238000009826 distribution Methods 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/22—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of indefinite length
- B29C43/222—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of indefinite length characterised by the shape of the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/003—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor characterised by the choice of material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/22—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of indefinite length
- B29C43/28—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of indefinite length incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
- B29C2043/023—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
- B29C2043/025—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/44—Compression means for making articles of indefinite length
- B29C43/46—Rollers
- B29C2043/461—Rollers the rollers having specific surface features
- B29C2043/463—Rollers the rollers having specific surface features corrugated, patterned or embossed surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Theoretical Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mathematical Physics (AREA)
- Manufacturing & Machinery (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Micromachines (AREA)
Description
被加工物をモールドにより加工するための加工装置であって、
前記モールドを支持し、加圧するための第1の支持部と、
前記第1の支持部と対向して配置された前記被加工物を前記第1の支持部との間に支持し、加圧するための第2の支持部と、
前記第1と第2の支持部とを近接させ、前記モールドの加工面と前記被加工物の被加工面とを接触させ、前記被加工物を加工するために、前記モールドと前記被加工物とを前記近接方向に押圧するための押圧手段とを備え、
前記第1の支持部の前記モールドとの接触面の外縁は、前記モールドの前記第1の支持部側の面内に配置され、前記第2の支持部の前記被加工物との接触面の外縁は、前記被加工物の前記第2の支持部側の面内に配置され、
前記第1の支持部の前記モールドとの接触面と前記第2の支持部の前記被加工物との接触面とが、同軸上に対向して配置され、面対称の関係にあることを特徴とする加工装置を提供するものである。
102 加圧機構
103 加圧部支持部
104 モールド加圧部(第1の支持部)
105 モールド保持部
106 モールド
107 ワーク
108 ワーク保持部
109 ワーク加圧部(第2の支持部)
110 排気
Claims (6)
- 被加工物をモールドにより加工するための加工装置であって、
前記モールドを支持し、加圧するための第1の支持部と、
前記第1の支持部と対向して配置された前記被加工物を前記第1の支持部との間に支持し、加圧するための第2の支持部と、
前記第1と第2の支持部とを近接させ、前記モールドの加工面と前記被加工物の被加工面とを接触させ、前記被加工物を加工するために、前記モールドと前記被加工物とを前記近接方向に押圧するための押圧手段とを備え、
前記第1の支持部の前記モールドとの接触面の外縁は、前記モールドの前記第1の支持部側の面内に配置され、前記第2の支持部の前記被加工物との接触面の外縁は、前記被加工物の前記第2の支持部側の面内に配置され、
前記第1の支持部の前記モールドとの接触面と前記第2の支持部の前記被加工物との接触面とが、同軸上に対向して配置され、面対称の関係にあることを特徴とする加工装置。 - 前記第1の支持部の前記モールドとの接触面の外縁、及び、前記第2の支持部の前記被加工物との接触面の外縁のいずれもが、前記モールドの前記第1の支持部側の面と前記被加工物の前記第2の支持部側の面のいずれの面よりも内側に配置されることを特徴とする請求項1に記載の加圧装置。
- 少なくとも前記第1の支持部又は前記第2の支持部の少なくとも一方が、柱状の形である請求項1又は2に記載の加工装置。
- 前記柱状の第1又は第2の支持部の外側に保持部を備える請求項3に記載の加工装置。
- 被加工物をモールドにより加工するための加工方法であって、
前記モールドを支持し、加圧する第1の支持部に前記モールドを設置し、前記被加工物を支持し、加圧する第2の支持部に前記被加工物を設置する工程と
前記第1と第2の支持部とを近接させ、前記モールドの加工面と前記被加工物の被加工面とを接触させ、前記モールドと前記被加工物とを前記近接方向に押圧し、前記被加工物を加工する工程を備え
前記第1の支持部の前記モールドとの接触面の外縁は、前記モールドの前記第1の支持部側の面内に配置され、前記第2の支持部の前記被加工物との接触面の外縁は、前記被加工物の前記第2の支持部側の面内に配置され、
前記第1の支持部の前記モールドとの接触面と前記第2の支持部の前記被加工物との接触面とが、同軸上に対向して配置され、面対称の関係にあることを特徴とする加工方法。 - 前記第1の支持部の前記モールドとの接触面の外縁、及び、前記第2の支持部の前記被加工物との接触面の外縁のいずれもが、前記モールドの前記第1の支持部側の面と前記被加工物の前記第2の支持部側の面のいずれの面よりも内側に配置されることを特徴とする請求項5に記載の加圧方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004044726A JP4455092B2 (ja) | 2004-02-20 | 2004-02-20 | 加工装置及び加工方法 |
US11/059,330 US7442028B2 (en) | 2004-02-20 | 2005-02-17 | Molding apparatus and molding method |
US12/201,143 US7726964B2 (en) | 2004-02-20 | 2008-08-29 | Molding apparatus and molding method |
US12/238,617 US8685306B2 (en) | 2004-02-20 | 2008-09-26 | Molding apparatus and molding method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004044726A JP4455092B2 (ja) | 2004-02-20 | 2004-02-20 | 加工装置及び加工方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005236114A JP2005236114A (ja) | 2005-09-02 |
JP2005236114A5 JP2005236114A5 (ja) | 2009-02-26 |
JP4455092B2 true JP4455092B2 (ja) | 2010-04-21 |
Family
ID=34858073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004044726A Expired - Fee Related JP4455092B2 (ja) | 2004-02-20 | 2004-02-20 | 加工装置及び加工方法 |
Country Status (2)
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US (3) | US7442028B2 (ja) |
JP (1) | JP4455092B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4455093B2 (ja) * | 2004-02-20 | 2010-04-21 | キヤノン株式会社 | モールド、モールドを用いた加工装置及びモールドを用いた加工方法 |
JP4574240B2 (ja) * | 2004-06-11 | 2010-11-04 | キヤノン株式会社 | 加工装置、加工方法、デバイス製造方法 |
US7922474B2 (en) * | 2005-02-17 | 2011-04-12 | Asml Netherlands B.V. | Imprint lithography |
JP3958344B2 (ja) * | 2005-06-07 | 2007-08-15 | キヤノン株式会社 | インプリント装置、インプリント方法及びチップの製造方法 |
CN101288512B (zh) * | 2007-04-19 | 2010-06-02 | 欧利速精密工业股份有限公司 | 具射频干扰保护的压花系统 |
JP5173311B2 (ja) * | 2007-08-09 | 2013-04-03 | キヤノン株式会社 | インプリント方法、インプリント装置および半導体製造方法 |
US10413349B2 (en) * | 2011-03-04 | 2019-09-17 | Covidien Lp | System and methods for identifying tissue and vessels |
US11463441B2 (en) | 2018-05-24 | 2022-10-04 | People.ai, Inc. | Systems and methods for managing the generation or deletion of record objects based on electronic activities and communication policies |
US10565229B2 (en) | 2018-05-24 | 2020-02-18 | People.ai, Inc. | Systems and methods for matching electronic activities directly to record objects of systems of record |
US11924297B2 (en) | 2018-05-24 | 2024-03-05 | People.ai, Inc. | Systems and methods for generating a filtered data set |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1133800A (ja) | 1997-07-14 | 1999-02-09 | Amada Co Ltd | タレットパンチプレスのライン運転保安システム |
US7635262B2 (en) * | 2000-07-18 | 2009-12-22 | Princeton University | Lithographic apparatus for fluid pressure imprint lithography |
CA2380114C (en) * | 2002-04-04 | 2010-01-19 | Obducat Aktiebolag | Imprint method and device |
JP4061220B2 (ja) * | 2003-03-20 | 2008-03-12 | 株式会社日立製作所 | ナノプリント装置、及び微細構造転写方法 |
JP4317375B2 (ja) * | 2003-03-20 | 2009-08-19 | 株式会社日立製作所 | ナノプリント装置、及び微細構造転写方法 |
JP2005101201A (ja) * | 2003-09-24 | 2005-04-14 | Canon Inc | ナノインプリント装置 |
JP4455093B2 (ja) | 2004-02-20 | 2010-04-21 | キヤノン株式会社 | モールド、モールドを用いた加工装置及びモールドを用いた加工方法 |
-
2004
- 2004-02-20 JP JP2004044726A patent/JP4455092B2/ja not_active Expired - Fee Related
-
2005
- 2005-02-17 US US11/059,330 patent/US7442028B2/en not_active Expired - Fee Related
-
2008
- 2008-08-29 US US12/201,143 patent/US7726964B2/en not_active Expired - Fee Related
- 2008-09-26 US US12/238,617 patent/US8685306B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20090032998A1 (en) | 2009-02-05 |
US7726964B2 (en) | 2010-06-01 |
US20050186304A1 (en) | 2005-08-25 |
US20090004321A1 (en) | 2009-01-01 |
US8685306B2 (en) | 2014-04-01 |
JP2005236114A (ja) | 2005-09-02 |
US7442028B2 (en) | 2008-10-28 |
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