JP2005234571A5 - - Google Patents

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Publication number
JP2005234571A5
JP2005234571A5 JP2005039330A JP2005039330A JP2005234571A5 JP 2005234571 A5 JP2005234571 A5 JP 2005234571A5 JP 2005039330 A JP2005039330 A JP 2005039330A JP 2005039330 A JP2005039330 A JP 2005039330A JP 2005234571 A5 JP2005234571 A5 JP 2005234571A5
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Japan
Prior art keywords
generalized
response function
determining
bilinear kernel
light source
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JP2005039330A
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English (en)
Japanese (ja)
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JP4738012B2 (ja
JP2005234571A (ja
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Priority claimed from US10/783,938 external-priority patent/US7079223B2/en
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Publication of JP2005234571A5 publication Critical patent/JP2005234571A5/ja
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Publication of JP4738012B2 publication Critical patent/JP4738012B2/ja
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Expired - Fee Related legal-status Critical Current

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JP2005039330A 2004-02-20 2005-02-16 高速なモデルに基づく光学的近接効果補正 Expired - Fee Related JP4738012B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/783,938 US7079223B2 (en) 2004-02-20 2004-02-20 Fast model-based optical proximity correction
US10/783938 2004-02-20

Publications (3)

Publication Number Publication Date
JP2005234571A JP2005234571A (ja) 2005-09-02
JP2005234571A5 true JP2005234571A5 (https=) 2007-04-12
JP4738012B2 JP4738012B2 (ja) 2011-08-03

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JP2005039330A Expired - Fee Related JP4738012B2 (ja) 2004-02-20 2005-02-16 高速なモデルに基づく光学的近接効果補正

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US (1) US7079223B2 (https=)
JP (1) JP4738012B2 (https=)

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