JP2005229087A5 - - Google Patents

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Publication number
JP2005229087A5
JP2005229087A5 JP2004203778A JP2004203778A JP2005229087A5 JP 2005229087 A5 JP2005229087 A5 JP 2005229087A5 JP 2004203778 A JP2004203778 A JP 2004203778A JP 2004203778 A JP2004203778 A JP 2004203778A JP 2005229087 A5 JP2005229087 A5 JP 2005229087A5
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JP
Japan
Prior art keywords
arm
drive
end portion
rotatably supported
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004203778A
Other languages
English (en)
Japanese (ja)
Other versions
JP4513435B2 (ja
JP2005229087A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004203778A priority Critical patent/JP4513435B2/ja
Priority claimed from JP2004203778A external-priority patent/JP4513435B2/ja
Publication of JP2005229087A publication Critical patent/JP2005229087A/ja
Publication of JP2005229087A5 publication Critical patent/JP2005229087A5/ja
Application granted granted Critical
Publication of JP4513435B2 publication Critical patent/JP4513435B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004203778A 2003-07-16 2004-07-09 搬送装置 Expired - Lifetime JP4513435B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004203778A JP4513435B2 (ja) 2003-07-16 2004-07-09 搬送装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003197689 2003-07-16
JP2004009506 2004-01-16
JP2004203778A JP4513435B2 (ja) 2003-07-16 2004-07-09 搬送装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010075041A Division JP5024411B2 (ja) 2003-07-16 2010-03-29 搬送装置

Publications (3)

Publication Number Publication Date
JP2005229087A JP2005229087A (ja) 2005-08-25
JP2005229087A5 true JP2005229087A5 (OSRAM) 2007-01-18
JP4513435B2 JP4513435B2 (ja) 2010-07-28

Family

ID=35003511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004203778A Expired - Lifetime JP4513435B2 (ja) 2003-07-16 2004-07-09 搬送装置

Country Status (1)

Country Link
JP (1) JP4513435B2 (OSRAM)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7946800B2 (en) * 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
KR101629734B1 (ko) * 2007-05-08 2016-06-13 브룩스 오토메이션 인코퍼레이티드 기계적 스위치 메카니즘을 이용한 복수의 가동 암들을 갖는 기판 이송 장치
US8752449B2 (en) 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
KR102223624B1 (ko) * 2010-11-10 2021-03-05 브룩스 오토메이션 인코퍼레이티드 기판 처리 장치
KR102047033B1 (ko) 2011-03-11 2019-11-20 브룩스 오토메이션 인코퍼레이티드 기판 처리 툴
US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
KR20220153121A (ko) * 2013-01-18 2022-11-17 퍼시몬 테크놀로지스 코포레이션 이송 장치
US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
JP6386704B2 (ja) * 2013-08-27 2018-09-05 川崎重工業株式会社 ワーク搬送装置
US11691268B2 (en) 2015-03-12 2023-07-04 Persimmon Technologies Corporation Robot having a variable transmission ratio
JP6838278B2 (ja) * 2016-03-28 2021-03-03 セイコーエプソン株式会社 ロボット
JP6809245B2 (ja) * 2017-01-20 2021-01-06 セイコーエプソン株式会社 ロボット
JP7312815B2 (ja) * 2019-04-05 2023-07-21 川崎重工業株式会社 液化ガスタンクおよび液化ガス運搬船
WO2021059341A1 (ja) * 2019-09-24 2021-04-01 株式会社Ｆｕｊｉ 角度伝達誤差測定装置
CN117265515A (zh) * 2023-10-27 2023-12-22 盛吉盛半导体科技(无锡)有限公司 一种晶圆驱动定位装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10156770A (ja) * 1996-12-04 1998-06-16 Komatsu Ltd ハンドリング用ロボット
JP3863671B2 (ja) * 1998-07-25 2006-12-27 株式会社ダイヘン 搬送用ロボット装置
JP4628602B2 (ja) * 2001-04-05 2011-02-09 ナブテスコ株式会社 ロボットアーム

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