JP2005228656A - 高耐熱性アルミニウム合金配線材料及びターゲット材 - Google Patents
高耐熱性アルミニウム合金配線材料及びターゲット材 Download PDFInfo
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- JP2005228656A JP2005228656A JP2004037570A JP2004037570A JP2005228656A JP 2005228656 A JP2005228656 A JP 2005228656A JP 2004037570 A JP2004037570 A JP 2004037570A JP 2004037570 A JP2004037570 A JP 2004037570A JP 2005228656 A JP2005228656 A JP 2005228656A
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- aluminum alloy
- cobalt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
- H01B1/023—Alloys based on aluminium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53214—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being aluminium
- H01L23/53219—Aluminium alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
- Thin Film Transistor (AREA)
- Conductive Materials (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Liquid Crystal (AREA)
Abstract
【解決手段】 ニッケル、コバルト、炭素を含有したアルミニウム合金配線材料及びターゲットにおいて、ニッケル含有量の原子百分率Xat%、コバルト含有量の原子百分率Yat%、炭素含有量の原子百分率Zat%として、0.5at%≦X≦3.0at%、4.0at%≦X+Y≦7.0at%、0.1at%≦Z≦0.5at%の関係を満足し、残部がアルミニウムからなることを特徴とする。
【選択図】 なし
Description
耐熱性評価は、各温度における1時間熱処理後の膜表面を走査型電子顕微鏡(SEM1万倍)にて観察し、ヒロックの発生状態を調べることにより行った。図4〜図13には、ヒロック観察を行った代表的なSEM写真を示している。図4〜図8は、Al−3.0at%Ni−0.1at%C組成(表2比較例6)の場合で、図9〜図13は、Al−2.1at%Ni−2.9at%Co−0.21at%C(表2実施例8)の場合を示している。
Claims (3)
- ニッケル、コバルト、炭素を含有したアルミニウム合金配線材料において、
ニッケル含有量の原子百分率Xat%、コバルト含有量の原子百分率Yat%、炭素含有量の原子百分率Zat%として、
0.5at%≦X≦3.0at%
4.0at%≦X+Y≦7.0at%
0.1at%≦Z≦0.5at%
の関係を満足し、残部がアルミニウムからなることを特徴とする高耐熱性アルミニウム合金配線材料。 - 低温プロセスのpoly−Si形薄膜トランジスターに用いられる請求項1に記載の高耐熱性アルミニウム合金配線材料。
- ニッケル、コバルト、炭素を含有したアルミニウム合金配線材料形成用のターゲット材において、
ニッケル含有量の原子百分率Xat%、コバルト含有量の原子百分率Yat%、炭素含有量の原子百分率Zat%として、
0.5at%≦X≦3.0at%
4.0at%≦X+Y≦7.0at%
0.1at%≦Z≦0.5at%
の関係を満足し、残部がアルミニウムからなることを特徴とする高耐熱性アルミニウム合金配線材料形成用のターゲット材。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004037570A JP4390260B2 (ja) | 2004-02-16 | 2004-02-16 | 高耐熱性アルミニウム合金配線材料及びターゲット材 |
PCT/JP2005/002204 WO2005078739A1 (ja) | 2004-02-16 | 2005-02-15 | 高耐熱性アルミニウム合金配線材料及びターゲット材 |
KR1020057019424A KR100666906B1 (ko) | 2004-02-16 | 2005-02-15 | 고내열성 알루미늄 합금 배선 재료 및 타겟재 |
TW094104297A TWI312011B (en) | 2004-02-16 | 2005-02-15 | High-heat-resistant aluminum alloy wiring material and target material |
CNB2005800003386A CN100428367C (zh) | 2004-02-16 | 2005-02-15 | 高耐热性铝合金配线材料 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004037570A JP4390260B2 (ja) | 2004-02-16 | 2004-02-16 | 高耐熱性アルミニウム合金配線材料及びターゲット材 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005228656A true JP2005228656A (ja) | 2005-08-25 |
JP4390260B2 JP4390260B2 (ja) | 2009-12-24 |
Family
ID=34857777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004037570A Expired - Fee Related JP4390260B2 (ja) | 2004-02-16 | 2004-02-16 | 高耐熱性アルミニウム合金配線材料及びターゲット材 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4390260B2 (ja) |
KR (1) | KR100666906B1 (ja) |
CN (1) | CN100428367C (ja) |
TW (1) | TWI312011B (ja) |
WO (1) | WO2005078739A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2244264A2 (en) | 2004-09-15 | 2010-10-27 | Sony Corporation | Image processing apparatus and method |
JP2012243878A (ja) * | 2011-05-17 | 2012-12-10 | Kobe Steel Ltd | 半導体電極構造 |
JP2012243877A (ja) * | 2011-05-17 | 2012-12-10 | Kobe Steel Ltd | 半導体電極構造 |
WO2015046144A1 (ja) * | 2013-09-30 | 2015-04-02 | 日本軽金属株式会社 | 半導体素子、スパッタリングターゲット材及び半導体装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ZA723663B (en) * | 1971-06-07 | 1973-03-28 | Southwire Co | Aluminum nickel alloy electrical conductor |
JPS62240739A (ja) * | 1986-04-11 | 1987-10-21 | Nippon Mining Co Ltd | 半導体配線材料用b、c、n含有アルミニウム合金 |
JP4783525B2 (ja) * | 2001-08-31 | 2011-09-28 | 株式会社アルバック | 薄膜アルミニウム合金及び薄膜アルミニウム合金形成用スパッタリングターゲット |
JP2003089864A (ja) * | 2001-09-18 | 2003-03-28 | Mitsui Mining & Smelting Co Ltd | アルミニウム合金薄膜及びその薄膜を有する配線回路並びにその薄膜を形成するターゲット材 |
-
2004
- 2004-02-16 JP JP2004037570A patent/JP4390260B2/ja not_active Expired - Fee Related
-
2005
- 2005-02-15 KR KR1020057019424A patent/KR100666906B1/ko not_active IP Right Cessation
- 2005-02-15 TW TW094104297A patent/TWI312011B/zh not_active IP Right Cessation
- 2005-02-15 CN CNB2005800003386A patent/CN100428367C/zh not_active Expired - Fee Related
- 2005-02-15 WO PCT/JP2005/002204 patent/WO2005078739A1/ja active Application Filing
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2244264A2 (en) | 2004-09-15 | 2010-10-27 | Sony Corporation | Image processing apparatus and method |
JP2012243878A (ja) * | 2011-05-17 | 2012-12-10 | Kobe Steel Ltd | 半導体電極構造 |
JP2012243877A (ja) * | 2011-05-17 | 2012-12-10 | Kobe Steel Ltd | 半導体電極構造 |
WO2015046144A1 (ja) * | 2013-09-30 | 2015-04-02 | 日本軽金属株式会社 | 半導体素子、スパッタリングターゲット材及び半導体装置 |
JPWO2015046144A1 (ja) * | 2013-09-30 | 2017-03-09 | 日本軽金属株式会社 | 半導体素子、スパッタリングターゲット材及び半導体装置 |
JP2017157842A (ja) * | 2013-09-30 | 2017-09-07 | 日本軽金属株式会社 | 半導体素子、スパッタリングターゲット材及び半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI312011B (en) | 2009-07-11 |
WO2005078739A1 (ja) | 2005-08-25 |
KR100666906B1 (ko) | 2007-01-11 |
TW200530407A (en) | 2005-09-16 |
JP4390260B2 (ja) | 2009-12-24 |
CN100428367C (zh) | 2008-10-22 |
KR20060002987A (ko) | 2006-01-09 |
CN1788322A (zh) | 2006-06-14 |
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