JP2005207822A5 - - Google Patents

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Publication number
JP2005207822A5
JP2005207822A5 JP2004013316A JP2004013316A JP2005207822A5 JP 2005207822 A5 JP2005207822 A5 JP 2005207822A5 JP 2004013316 A JP2004013316 A JP 2004013316A JP 2004013316 A JP2004013316 A JP 2004013316A JP 2005207822 A5 JP2005207822 A5 JP 2005207822A5
Authority
JP
Japan
Prior art keywords
photodetector
group
detector
optical
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004013316A
Other languages
English (en)
Japanese (ja)
Other versions
JP4291168B2 (ja
JP2005207822A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004013316A priority Critical patent/JP4291168B2/ja
Priority claimed from JP2004013316A external-priority patent/JP4291168B2/ja
Publication of JP2005207822A publication Critical patent/JP2005207822A/ja
Publication of JP2005207822A5 publication Critical patent/JP2005207822A5/ja
Application granted granted Critical
Publication of JP4291168B2 publication Critical patent/JP4291168B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004013316A 2004-01-21 2004-01-21 光学式エンコーダ用光検出器 Expired - Fee Related JP4291168B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004013316A JP4291168B2 (ja) 2004-01-21 2004-01-21 光学式エンコーダ用光検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004013316A JP4291168B2 (ja) 2004-01-21 2004-01-21 光学式エンコーダ用光検出器

Publications (3)

Publication Number Publication Date
JP2005207822A JP2005207822A (ja) 2005-08-04
JP2005207822A5 true JP2005207822A5 (https=) 2006-04-20
JP4291168B2 JP4291168B2 (ja) 2009-07-08

Family

ID=34899416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004013316A Expired - Fee Related JP4291168B2 (ja) 2004-01-21 2004-01-21 光学式エンコーダ用光検出器

Country Status (1)

Country Link
JP (1) JP4291168B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5562077B2 (ja) 2010-03-10 2014-07-30 キヤノン株式会社 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法
CN108362314A (zh) * 2018-03-17 2018-08-03 欣灵电气股份有限公司 高精度伺服编码器

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